EP1838995A1 - Method for heating an industrial furnace, and apparatus suitable for carrying out the method - Google Patents
Method for heating an industrial furnace, and apparatus suitable for carrying out the methodInfo
- Publication number
- EP1838995A1 EP1838995A1 EP06701188A EP06701188A EP1838995A1 EP 1838995 A1 EP1838995 A1 EP 1838995A1 EP 06701188 A EP06701188 A EP 06701188A EP 06701188 A EP06701188 A EP 06701188A EP 1838995 A1 EP1838995 A1 EP 1838995A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- membrane
- reactant
- volumetric flow
- burner
- course
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 43
- 238000010438 heat treatment Methods 0.000 title claims abstract description 11
- 239000012528 membrane Substances 0.000 claims abstract description 116
- 239000000376 reactant Substances 0.000 claims abstract description 68
- 238000002485 combustion reaction Methods 0.000 claims abstract description 18
- 239000000446 fuel Substances 0.000 claims abstract description 17
- 239000007800 oxidant agent Substances 0.000 claims abstract description 13
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 10
- 239000007788 liquid Substances 0.000 claims abstract description 5
- 230000005294 ferromagnetic effect Effects 0.000 claims description 3
- 238000013461 design Methods 0.000 abstract description 6
- 238000012423 maintenance Methods 0.000 abstract description 5
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 37
- 239000003345 natural gas Substances 0.000 description 18
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 16
- 239000001301 oxygen Substances 0.000 description 16
- 229910052760 oxygen Inorganic materials 0.000 description 16
- 239000007789 gas Substances 0.000 description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 238000002844 melting Methods 0.000 description 6
- 230000008018 melting Effects 0.000 description 6
- 239000011521 glass Substances 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 238000010276 construction Methods 0.000 description 3
- 230000005520 electrodynamics Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000002737 fuel gas Substances 0.000 description 2
- 230000010349 pulsation Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 206010016754 Flashback Diseases 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000000156 glass melt Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000005291 magnetic effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229960003903 oxygen Drugs 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000009420 retrofitting Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23C—METHODS OR APPARATUS FOR COMBUSTION USING FLUID FUEL OR SOLID FUEL SUSPENDED IN A CARRIER GAS OR AIR
- F23C7/00—Combustion apparatus characterised by arrangements for air supply
- F23C7/008—Flow control devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23K—FEEDING FUEL TO COMBUSTION APPARATUS
- F23K2900/00—Special features of, or arrangements for fuel supplies
- F23K2900/05003—Non-continuous fluid fuel supply
Definitions
- the present invention relates to a method for heating an industrial furnace by pulsating combustion, in which gaseous or liquid reactants, comprising an oxidizing agent and fuel, are fed to a burner, the volumetric flow of at least one of the reactants which emerges from the burner mouth being changed over the course of time.
- the invention relates to an apparatus for heating an industrial furnace by pulsating combustion, having a burner, which includes feed lines for streams of gaseous or liquid reactants leading to a burner mouth, and having a device for varying the volumetric flow of at least one of the reactants over the course of time.
- the overall quantity of NOx can be reduced considerably by the use of pure oxygen and fuel without any nitrogen.
- both the oxygen and the fuel may contain small quantities of nitrogen. These small quanti- ties of nitrogen, in combination with the combustion using oxygen being hotter than combustion using air, at around 900°C, lead to an increased level of NOx in the off-gas.
- DE 692 16317 T2 which has disclosed a method and an apparatus of the generic type described in the introduction, to cyclically vary either the quantitative flows of the fuel or those of the oxidizing agent using a solenoid valve which is arranged in the respective feed line, at a frequency of below 3 Hz.
- a solenoid valve which is arranged in the respective feed line, at a frequency of below 3 Hz.
- SU 857 642 proposes that the gas stream be periodically interrupted with the aid of a rotor.
- the invention is based on the object of providing a method which allows a simple and flexible change to the flow during pulsating combustion.
- the invention is based on the object of providing a low-maintenance apparatus of simple design which is suitable for carrying out the method.
- this object is achieved, based on the method described in the introduction, by virtue of the fact that the change in the volumetric flow of the reactant over the course of time is generated by electrical actuation imparting deflections to at least one membrane in a membrane space which is connected upstream of the burner mouth and is accessible to the reactant, which deflections cause changes to the volume of the membrane space.
- the volumetric flow of at least one of the reactants involved in the combustion reaction - i.e. the fuel gas or the oxidizing agent - is varied over the course of time by causing at least one membrane to deflect.
- the membrane is arranged in a membrane space which is fluid-connected to the feed of the respective reacta ⁇ t to the burner and is therefore accessible to the reactant.
- the membrane space allows the membrane arranged in it to be deflected as far as possible without obstacle.
- the membrane space and the membrane arranged in it are also referred to below as a "membrane module".
- the membrane In the membrane space, the membrane is deflected by electrical actuation in the presence of the reactant in question, and in this way the electrical power is converted into changes in volume - associated with changes in pressure - in the membrane space, as is generally known for loudspeakers.
- the changes in volume of the membrane space are determined by frequency, amplitude and profile of the change in the volumetric flow of the reactant at the burner mouth over the course of time. Therefore, the method according to the in- vention, by virtue of the electrically excited deflection of the membrane, allows the flow of the reactant to be changed without this requiring any moving or rotating components, apart from the membrane.
- the membrane itself is subject to very little wear, and consequently a long service life and long maintenance intervals can be achieved.
- the change in the volumetric flow of the reactant(s), in addition to the on and off states may also encompass any desired intermediate values for the maximum amplitude or a predetermined volumetric flow profile over the course of time, such as for example a square-wave, sawtooth, sinusoidal or trapezoidal pro- file.
- Equipping the supply lines for both the fuel and the oxidizing agent with membrane modules of this type also makes it readily possible to vary the volumetric flow of both reactants, for example independently of one another over the course of time or as a function of one another over the course of time, for example in-phase, in opposite phase or in phase-shifted fashion.
- the method according to the invention allows a preset time profile, for example a square-wave profile, to be accurately maintained without significant dead times or slippages.
- the change in the volume of the gas stream of the relevant reactant or reactants over the course of time can be set and controlled in a particularly simple way by means of the control unit. Predetermined deflection cycles can be passed through under programme control and are easy to adapt if necessary.
- the restricting device prevents or reduces a back-flow of the reactant. This measure ensures that the changes in volume produced in the membrane space act in the direction of the burner mouth and not, or to a lesser extent, "towards the rear" in the direction of the source of the reactant in question. This effect of the restricting device becomes more effective the closer to the membrane space it occurs.
- Valves, flaps, throttles or diaphragms can be used as the restricting device.
- moving mechanical components should as far as possible be avoided, and consequently it is preferable for the restricting device to be designed as a throttle or diaphragm.
- the throttle or diaphragm is in this case installed in the feed line, as close as possible to the entry to the membrane space. This results in a pressure drop in the direc- tion of the membrane space, which prevents a back-flow of the reactant and promotes an effective change in the volume in the direction of the burner mouth. This measure converts the change in the volume of the membrane space into a change in the flow or velocity of the reactant at the burner mouth without attenuation and in a simple, rapid and particularly effective way without the need for moving parts.
- the method according to the invention allows a constant volumetric flow of the reactant upstream of the restricting device.
- the invention is not the volumetric flow of the reactant upstream of the restricting device which is varied over the course of time, but rather a change in volume is imposed on the flow, which has been constant up to that point, purely by the movement of the membrane, resulting in a change in the velocity at which the reactant flows out at the burner mouth over the course of time.
- a constant volumetric flow as far as the restricting device is simple to implement; it is there- fore possible to dispense with mechanical components or change in the volumetric flow, such as valves or the like.
- a minimum level for the volumetric flow of the reactant which the volumetric flow does not drop below at any time even when the volumetric flow is changing, is predetermined.
- a base load is predetermined as a partial quantity of the total volumetric flow of the corresponding reactant, and the volumetric flow does not drop below this partial quantity at any time even during a change in the volumetric flow. In the simplest case, this is achieved by a bypass parallel to the membrane space.
- the membrane spaces of the two burners share one membrane, the volumetric flows of the reactant can be changed in opposite phase without the need for a separate control device.
- the membrane divides the membrane spaces on both sides, so that even in the event of a defect in the membrane, there is no leakage into the environment, but rather it is only the pulsating combustion which is disrupted. This improves the operational reliability of the apparatus.
- the volumetric flow of the oxidizing agent it is preferable for the volumetric flow of the oxidizing agent to be kept constant.
- the object referred to above is achieved, according to the invention, starting from an apparatus of the generic type described in the introduction, by virtue of the fact that the device for varying the volumetric flow over the course of time comprises at least one membrane, which is arranged in a membrane space that is connected upstream of the burner and is accessible to the reac- tant, and on which deflections can be imposed by means of an electrical actuation, which deflections cause a change in the volume of the membrane space.
- the apparatus according to the invention comprises a membrane, which can be deflected and is mounted such that it can oscillate, and an electrical actuation, which can be used to mechanically deflect the membrane.
- the change in the volumetric flow of at least one of the reactants involved in the combustion reaction - i.e. the fuel gas and/or the oxidizing agent - is brought about by means of the membrane deflection.
- the membrane and the excitation means are correspondingly made to match the designs which are standard in loudspeaker construction. In this respect, reference is made to the explanations given above in connection with the method according to the invention.
- the apparatus according to the invention by electrically exciting the membrane, allows virtually any desired, predetermined change in the volumetric flow of the reactant over the course of time without requiring any moving parts, apart from the membrane.
- the membrane itself is subject to very little wear, and consequently a long service life and long apparatus maintenance intervals can be achieved.
- the change in the volumetric flow of the reactant(s) may also include any desired intermediate values between zero and the maximum amplitude or a predetermined volumetric flow profile over the course of time, such as for example a square-wave, sawtooth, sinusoidal or trapezoidal volumetric flow profile. It is also possible for the volumetric flows of fuel and oxidizing agent to be varied independently of one another by equipping the supply lines for both fuel and oxidizing agent with membrane modules of this type; by way of example, these volumetric flows can be varied in-phase, in opposite phase or in phase-shifted fashion.
- Figure 1 shows a glass melting tank with a plurality of burners mounted in the side wall for pulsating combustion, in the form of a diagram- matically depicted plan view
- Figure 2 shows various changes in volumetric flows of a reactant over the course of time for pulsating combustion
- Figure 4 shows various changes in the volumetric flows of fuel and oxidizing agent over the course of time
- Figure 5 shows a phase-shifted change in volumetric flows between fuel and oxidizing agent
- Figure 6 shows a further embodiment of a membrane module for operating with opposite-phase change in the volumetric flow of a reactant to two burners.
- FIG. 1 diagrammatically depicts a glass melting tank 1 with a plurality of structurally identical natural gas/oxygen burners 3, 3a, 3b, 3 c, which are mounted in pairs offset with respect to one another, pointing into the furnace space 18, on the opposite side walls 2 of the tank 1.
- the burners 3, 3a, 3b, 3c are simple tube-in-tube burners with an inner tube 4 for supplying fuel, which is coaxially surrounded by an outer tube 6, forming an annular gap 5 for oxygen to pass through.
- the reactants which emerge from the burner mouth 7 react with one another to form a burner flame 8.
- the feed connection pieces for natural gas and oxygen are denoted by reference numerals 9 and 10.
- membrane modules 11 and 12 are arranged between the burner and the feed lines 9 for natural gas and 10 for oxygen, respectively.
- These membrane modules in each case comprise a membrane space 13, in which two electrodynamic loudspeakers each having a membrane 14 are mounted oppo- site one another.
- the membranes 14 each comprise a gastight, stretchable material and deflections are imparted to them in phase by means of an electromagnet 15. That side of the membrane 14 which is remote from the membrane space 13 is located in the open atmosphere.
- the parameters for the change in volume inside the membrane space 13, such as frequency, amplitude or phase shift between the two reactants of the same burner 3 or another of the burners 3 a, 3b, 3 c are predetermined by one control module 16 for both membrane modules 11 and 12.
- a diaphragm 17 is fitted in the feed line 9, 10 immediately upstream of the respective membrane space 13.
- Each of the burners 3, 3 a, 3b, 3c is designed for heating power of 200 kW.
- 20 m 3 /h of natural gas (CH 4 ) and 40 m 3 /h of oxygen are fed in.
- the change in the volumetric flow of the natural gas emerging at the burner mouth 7 by means of the membrane module 11 is effected by deflections being imposed on the membrane 14 by means of the control module 16, which deflections cause a volumetric flow which changes over the course of time with a frequency of, for example, 1 Hz.
- the time profile of the volumetric change produced in this way has a precise square-wave profile.
- the changes in volume cause changes in through-flow, which continue via the membrane space 13 into the inner tube 4 as far as the burner mouth 7 and as a result cause a variable flow velocity of the natural gas at the burner mouth 7.
- the size and displacement of the membrane 14 and the volume of the membrane space 13 are designed in such a way that the natural-gas volumetric flow of 40 m /h can be completely switched on and off at a frequency of 1 Hz, so that a mean volumetric flow of 20 m 3 /h (s.t.p.) results.
- the diaphragm 17 prevents the natural gas from flowing back into the natural-gas feed line 9 and in this way en- sures that the change in volume generated by the membrane 14 acts entirely as a change in the volumetric flow of natural gas at the burner mouth 7.
- the profile of the deliberately altered volumetric flow of natural gas over the course of time ideally has a square- wave profile, as is diagrammatically depicted in Figure 2a).
- the membrane modules 11 of a pair of burners in each case operate in opposite phase.
- the pressure profile at the burner 3 (and at the burner 3a) is in opposite phase to the pressure profile at the burner 3c (and at the burner 3b).
- pulsating combustion of this type reduces the NOx emission level by 30%, without any adverse effect on the radiation properties of the flame.
- Figures 2 to 5 diagrammatically depict further suitable procedures for pulsating combustion in accordance with the invention.
- Figure 2 shows a square- wave (a), sawtooth (b), sinusoidal (c), trapezoidal (d) and a freely selectable or random (e) change in volumetric flow. All the through-flows illustrated are ' in the positive range, i.e. the volumetric flow which results is at all times higher than a predetermined mrnimum base load.
- FIG. 4a) shows a suitable volumetric flow profile over the course of time for the situation in which both the natural-gas flow and the oxygen flow are varied.
- the change 41 in the volumetric flow of the oxygen has double the frequency and amplitude of the change 42 in volumetric flow of the natural gas.
- Figure 4b) diagrammatically depicts a method variant in which the oxygen flow is kept constant over the course of time.
- the control unit 16 can also easily be used to generate changes in volumetric flow which do not have a fixed, recurring period.
- the embodiment of a membrane module 60 which is illustrated in Figure 6 is suitable in particular for operation with opposite-phase supply of a reactant to two separate burners (not shown in the drawing).
- the two burners in this case divide the membrane module 60.
- the membrane 61 divides the two membrane spaces 62 and 63, which are of equal size.
- the electromagnet 64 is provided in the membrane space 62.
- the gas inlet and gas outlet of the membrane space 62 for one burner are indicated by connection pieces 65, and the gas inlet and gas outlet of the membrane space 63 for the other burner are denoted by connection pieces 66.
- the two maximum deflections of the membrane 61 into the respective membrane spaces 62 and 63 are represented by dashed lines 67.
- the reduction in volume caused by the deflection into one membrane space 62 produces an increase in volume of the same magnitude and at the same time in the other membrane space 63. This therefore ensures that the volumetric flows for the natural gas to the two burners alter precisely in opposite phase.
- the deflection in the membrane is associated with an increase and reduction in the volume of the membrane space.
- the changes in volume effect mass transfer without producing a soundwave.
- the method according to the invention is not restricted to this particular application. It is also possible, using a moving membrane, to generate pressure waves - without mass transfer - which allow pulsating combustion. In this case, the deflection di- rection of the membrane corresponds to the main direction of propagation of the burner flame.
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Feeding And Controlling Fuel (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Fluidized-Bed Combustion And Resonant Combustion (AREA)
- Vending Machines For Individual Products (AREA)
- Heat Treatment Of Articles (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102005001807A DE102005001807A1 (en) | 2005-01-13 | 2005-01-13 | Process for heating an industrial furnace and apparatus therefor |
| PCT/EP2006/000072 WO2006074877A1 (en) | 2005-01-13 | 2006-01-06 | Method for heating an industrial furnace, and apparatus suitable for carrying out the method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP1838995A1 true EP1838995A1 (en) | 2007-10-03 |
| EP1838995B1 EP1838995B1 (en) | 2008-11-19 |
Family
ID=35840522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP06701188A Expired - Lifetime EP1838995B1 (en) | 2005-01-13 | 2006-01-06 | Method for heating an industrial furnace, and apparatus suitable for carrying out the method |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20080292999A1 (en) |
| EP (1) | EP1838995B1 (en) |
| JP (1) | JP2008527303A (en) |
| AT (1) | ATE414872T1 (en) |
| DE (2) | DE102005001807A1 (en) |
| WO (1) | WO2006074877A1 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101939607B (en) * | 2008-01-18 | 2014-12-17 | 埃内斯托·阿道弗·哈特舒特绍布 | Improved roasting system |
| JP5451455B2 (en) * | 2010-03-01 | 2014-03-26 | 大陽日酸株式会社 | Burner burning method |
| JP5357108B2 (en) | 2010-06-29 | 2013-12-04 | 大陽日酸株式会社 | Burner burning method |
| JP5485193B2 (en) | 2011-01-26 | 2014-05-07 | 大陽日酸株式会社 | Burner burning method |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1157422A (en) * | 1914-01-17 | 1915-10-19 | Lux Ab | Intermittently-operated gas-valve. |
| DE696467C (en) * | 1936-08-02 | 1940-09-21 | Robert Mueller Komm Ges | Gas burner |
| US2621718A (en) * | 1950-12-07 | 1952-12-16 | Willy F Krautter | Pulse jet heater with automatic starting and control system therefor |
| US2707515A (en) * | 1952-04-05 | 1955-05-03 | Swingfire Bahamas Ltd | Muffled resonant pulse jet combustion heating device |
| DE1451433A1 (en) * | 1963-03-21 | 1969-01-30 | Schmitz & Apelt Industrieofenb | Device for feeding liquid or gaseous fuel |
| DE2545282C3 (en) * | 1975-10-09 | 1980-05-22 | G. Kromschroeder Ag, 4500 Osnabrueck | Control device for a gas burner with pulse operation |
| SU857642A1 (en) * | 1979-05-28 | 1981-08-23 | Алтайский государственный университет | Apparatus for burning fuel |
| US4685510A (en) * | 1986-04-24 | 1987-08-11 | American Gas Association | Pulse combustion engine and heat transfer system |
| FR2645247B2 (en) * | 1988-06-22 | 1991-06-07 | Centre Nat Rech Scient | METHOD AND DEVICE FOR ACTIVE CONTROL OF COMBUSTION INSTABILITIES |
| US4941452A (en) * | 1989-03-08 | 1990-07-17 | Gas Research Institute | Pulse combustion space heater |
| FR2679626B1 (en) * | 1991-07-23 | 1993-10-15 | Air Liquide | PULSED COMBUSTION PROCESS AND INSTALLATION. |
| JP3016972B2 (en) * | 1992-09-03 | 2000-03-06 | パロマ工業株式会社 | Pulse combustor |
| FR2711769B1 (en) * | 1993-10-29 | 1995-12-08 | Air Liquide | Combustion process in an industrial oven. |
| US6077068A (en) * | 1995-08-31 | 2000-06-20 | Ngk Insulators, Ltd. | Pulsated combustion apparatus and a method for controlling such a pulsated combustion apparatus |
| US5989011A (en) * | 1997-07-18 | 1999-11-23 | Caruso; Pat | Burner control system |
| US6464489B1 (en) * | 1997-11-24 | 2002-10-15 | Alstom | Method and apparatus for controlling thermoacoustic vibrations in a combustion system |
| US6343614B1 (en) * | 1998-07-01 | 2002-02-05 | Deka Products Limited Partnership | System for measuring change in fluid flow rate within a line |
| DE19861018C2 (en) * | 1998-12-15 | 2001-06-13 | Fraunhofer Ges Forschung | Controlled acoustic waveguide for sound absorption |
| DE19928226A1 (en) * | 1999-05-07 | 2001-02-01 | Abb Alstom Power Ch Ag | Process for suppressing or controlling thermoacoustic vibrations in a combustion system and combustion system for carrying out the process |
| US7291250B1 (en) * | 1999-10-20 | 2007-11-06 | Bionorica Ag | Vacuum distillation system and use thereof for concentrating organic-aqueous solvent mixtures |
| NL1014119C2 (en) * | 2000-01-19 | 2001-07-20 | Gastec Nv | Fuel ignition device. |
| US7238164B2 (en) * | 2002-07-19 | 2007-07-03 | Baxter International Inc. | Systems, methods and apparatuses for pumping cassette-based therapies |
| DE10238600A1 (en) * | 2002-08-22 | 2004-03-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Peristaltic micropump |
| EP1403519A1 (en) * | 2002-09-27 | 2004-03-31 | Novo Nordisk A/S | Membrane pump with stretchable pump membrane |
| US6994319B2 (en) * | 2003-01-29 | 2006-02-07 | Applied Materials, Inc. | Membrane gas valve for pulsing a gas |
-
2005
- 2005-01-13 DE DE102005001807A patent/DE102005001807A1/en not_active Ceased
-
2006
- 2006-01-06 EP EP06701188A patent/EP1838995B1/en not_active Expired - Lifetime
- 2006-01-06 AT AT06701188T patent/ATE414872T1/en not_active IP Right Cessation
- 2006-01-06 US US11/813,759 patent/US20080292999A1/en not_active Abandoned
- 2006-01-06 DE DE602006003725T patent/DE602006003725D1/en not_active Expired - Fee Related
- 2006-01-06 WO PCT/EP2006/000072 patent/WO2006074877A1/en not_active Ceased
- 2006-01-06 JP JP2007550734A patent/JP2008527303A/en not_active Withdrawn
Non-Patent Citations (1)
| Title |
|---|
| See references of WO2006074877A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| US20080292999A1 (en) | 2008-11-27 |
| EP1838995B1 (en) | 2008-11-19 |
| DE602006003725D1 (en) | 2009-01-02 |
| WO2006074877A1 (en) | 2006-07-20 |
| ATE414872T1 (en) | 2008-12-15 |
| DE102005001807A1 (en) | 2006-07-20 |
| JP2008527303A (en) | 2008-07-24 |
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Legal Events
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