EP1827716B1 - Method for treating a polymer material, device for implementing said method and use of said device for treating hollow bodies - Google Patents
Method for treating a polymer material, device for implementing said method and use of said device for treating hollow bodies Download PDFInfo
- Publication number
- EP1827716B1 EP1827716B1 EP05850613.0A EP05850613A EP1827716B1 EP 1827716 B1 EP1827716 B1 EP 1827716B1 EP 05850613 A EP05850613 A EP 05850613A EP 1827716 B1 EP1827716 B1 EP 1827716B1
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- European Patent Office
- Prior art keywords
- mbar
- treatment
- polymer material
- plasma
- gas
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- 238000000034 method Methods 0.000 title claims description 40
- 239000002861 polymer material Substances 0.000 title claims description 20
- 239000007789 gas Substances 0.000 claims description 70
- 229920000642 polymer Polymers 0.000 claims description 33
- 230000004888 barrier function Effects 0.000 claims description 30
- 239000000203 mixture Substances 0.000 claims description 25
- 239000002243 precursor Substances 0.000 claims description 15
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 14
- 238000002360 preparation method Methods 0.000 claims description 12
- 229920001903 high density polyethylene Polymers 0.000 claims description 11
- 239000004700 high-density polyethylene Substances 0.000 claims description 11
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 10
- 239000001301 oxygen Substances 0.000 claims description 10
- 229910052760 oxygen Inorganic materials 0.000 claims description 10
- -1 polyethylene Polymers 0.000 claims description 9
- 239000001257 hydrogen Substances 0.000 claims description 8
- 229910052739 hydrogen Inorganic materials 0.000 claims description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 7
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims description 7
- 229910052786 argon Inorganic materials 0.000 claims description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 6
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims description 6
- 239000004698 Polyethylene Substances 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 claims description 4
- GTLACDSXYULKMZ-UHFFFAOYSA-N pentafluoroethane Chemical compound FC(F)C(F)(F)F GTLACDSXYULKMZ-UHFFFAOYSA-N 0.000 claims description 4
- 239000004743 Polypropylene Substances 0.000 claims description 3
- 239000001569 carbon dioxide Substances 0.000 claims description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 3
- 229920000573 polyethylene Polymers 0.000 claims description 2
- 229920001155 polypropylene Polymers 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 239000004952 Polyamide Substances 0.000 claims 1
- 239000001307 helium Substances 0.000 claims 1
- 229910052734 helium Inorganic materials 0.000 claims 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims 1
- 150000002431 hydrogen Chemical class 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 229920002647 polyamide Polymers 0.000 claims 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 claims 1
- 229920002554 vinyl polymer Polymers 0.000 claims 1
- 210000002381 plasma Anatomy 0.000 description 41
- 238000009792 diffusion process Methods 0.000 description 20
- 239000010410 layer Substances 0.000 description 19
- 238000000151 deposition Methods 0.000 description 18
- 239000000463 material Substances 0.000 description 18
- 239000000047 product Substances 0.000 description 15
- 230000008021 deposition Effects 0.000 description 14
- 229930195733 hydrocarbon Natural products 0.000 description 13
- 150000002430 hydrocarbons Chemical class 0.000 description 13
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 12
- 239000004215 Carbon black (E152) Substances 0.000 description 9
- 239000000126 substance Substances 0.000 description 8
- 230000008569 process Effects 0.000 description 6
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 5
- 229910003481 amorphous carbon Inorganic materials 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 5
- 238000003682 fluorination reaction Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000004806 packaging method and process Methods 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 239000003502 gasoline Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- LVGUZGTVOIAKKC-UHFFFAOYSA-N 1,1,1,2-tetrafluoroethane Chemical compound FCC(F)(F)F LVGUZGTVOIAKKC-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 230000003750 conditioning effect Effects 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 230000035699 permeability Effects 0.000 description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000009472 formulation Methods 0.000 description 2
- 239000008246 gaseous mixture Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- UQEAIHBTYFGYIE-UHFFFAOYSA-N hexamethyldisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)C UQEAIHBTYFGYIE-UHFFFAOYSA-N 0.000 description 2
- 230000002427 irreversible effect Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 230000016571 aggressive behavior Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- UBAZGMLMVVQSCD-UHFFFAOYSA-N carbon dioxide;molecular oxygen Chemical compound O=O.O=C=O UBAZGMLMVVQSCD-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000003851 corona treatment Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 239000002828 fuel tank Substances 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 238000002803 maceration Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- QLOAVXSYZAJECW-UHFFFAOYSA-N methane;molecular fluorine Chemical compound C.FF QLOAVXSYZAJECW-UHFFFAOYSA-N 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 238000004525 petroleum distillation Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
- 230000004584 weight gain Effects 0.000 description 1
- 235000019786 weight gain Nutrition 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/62—Plasma-deposition of organic layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/14—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by electrical means
- B05D3/141—Plasma treatment
- B05D3/142—Pretreatment
- B05D3/144—Pretreatment of polymeric substrates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/50—Multilayers
- B05D7/52—Two layers
Definitions
- the present invention relates to the technical field of surface treatment processes of polymeric material objects, these objects being intended for the packaging of gaseous products, liquid or solid, or the packaging of mixtures of such products.
- the invention more particularly relates to techniques for deposition on the surface of polymeric materials using a precursor gas vapor chemically activated by an electric discharge under a reduced atmosphere, in order to modify the physicochemical properties of the surface.
- said object made of polymeric material.
- the method according to the invention finds an application and an important industrial interest in that it makes it possible to reduce the diffusion of gases and liquids through the wall of the polymer object.
- the method according to the invention makes it possible in particular to improve the barrier properties of HDPE containers vis-à-vis gasoline, White Spirit (refined petroleum distillation cup, containing less than 0.05% of benzene) , water, n-butyl acetate, oxygen.
- White Spirit refined petroleum distillation cup, containing less than 0.05% of benzene
- the process of the invention finds, in particular, a major industrial interest in that it makes it possible to increase the hydrocarbon diffusion barrier properties obtained by low-pressure plasma deposition on a given polymer material, by electric discharge under a reduced atmosphere.
- a fluorinated gas or a gaseous composition comprising at least one fluorinated gas.
- Polymeric materials are indeed light, flexible, resistant, less expensive and easier to implement compared to metals or glasses.
- PE polyethylene
- PP polypropylene
- PET polyethylene terephthalate
- the resistance of these polymers is too low for their use to be possible in the packaging of certain solvents and low molecular weight volatile compounds, certain acids such as acetic acid, or surfactant solutions.
- Such products packaged in a container of polymeric material may degrade both the surface of the container in contact with said product and, on the other hand, various properties of the polymeric material thus leading in time to irreversible mechanical embrittlement of said container.
- the variation in weight can be several percent and, with time, the container wall of polymer material swells, its chemical composition changes.
- This operation of depositing a thin-film material on such substrates made of polymeric material may be carried out for example by high vacuum vapor deposition (commonly referred to as PVD, Physical Vapor Deposition) or plasma phase deposition under primary vacuum ( commonly referred to as PCVD, Plasma Chemical Vapor Deposition or PECVD, Plasma Enhanced Chemical Vapor Deposition).
- PVD Physical Vapor Deposition
- PCVD Plasma Chemical Vapor Deposition
- PECVD Plasma Enhanced Chemical Vapor Deposition
- the techniques for depositing a thin film material by plasmas consist in using a gas or a gaseous mixture from which the atomic elements forming the molecular structure of said layered material are present.
- This gas (s) is (are) introduced into a reaction chamber in the low-pressure vapor state and then decomposed (s) by an electric discharge thus forming the plasma.
- the plasma vapor thus created releases atoms and molecules that are more or less unstable but very which recombine and condense in a thin layer on the surface of the polymer to be coated.
- the document US 3,485,666 discloses a method for producing a barrier layer based on silicon nitride.
- the document US 3442686 (of 1969) discloses a method for producing a barrier layer based on silicon oxide.
- the documents US 4756964 (of 1986) ) and WO99 / 49991 describe carbon deposits.
- the document US 4830873 (of 1985 ) describes the realization of a protective layer against chemical and physical aggression, the precursor gas used being a mixture of HMDSO (hexamethyldisiloxane) and oxygen.
- WO 03/035154 A discloses a method for coating an article of polymeric material comprising creating a discharge plasma in a 1,1,1,2-tetrafluoroethane gas. There is no mention of a preparation of the surface using an acetylene plasma.
- Fluorinated thin film material deposits on polymer surfaces improve the hydrocarbon diffusion barrier effect of said polymer surface (see document US 4869,922 )
- the use of the plasma deposition technique can be very advantageous and constitute an extremely interesting alternative to the conventional fluorination method.
- said conventional fluorination method conventionally consists in exposing the polymer material surface to a fluorinated gas under precise pressure and temperature conditions, for a very long time, up to several hours.
- Plasma deposition makes it possible to obtain hydrocarbon diffusion barrier performances comparable to those obtained by conventional fluorination, while using however very small amounts of precursor gas and generally very long completion times. shorter.
- the document DE 3027531 discloses a method of treating such high density PE polymer fuel tanks (HDPE or HDPE) by a PECVD plasma technique in which the precursor is a fluorinated gas vapor or a mixture of fluorinated gases introduced at low pressure.
- the document DE3908418 describes the use of the mixture of a fluorinated precursor CHF 3 and C 4 H 6 .
- the document EP 0739655 describes the production of multilayer from the precursors C 2 H 4 CF 3 H.
- gases or gas mixtures used in this case must change the energy state and sometimes even the chemical state of the polymer surface without, if possible, causing the growth of a thin layer of an amorphous material.
- the polymeric material coating is obtained at low pressure from a gaseous plasma of 1,1,1,2-tetrafluoroethane (C 2 H 2 F 4 , or H 2 FC-CF 3 ), conventionally referred to as HFC R134a.
- a gaseous plasma of 1,1,1,2-tetrafluoroethane C 2 H 2 F 4 , or H 2 FC-CF 3
- HFC R134a 1,1,1,2-tetrafluoroethane
- the coating on polymeric material is obtained at low pressure from a gaseous plasma of pentafluoroethane (C 2 HF 5 or HF 2 C-CF 3 ), a product conventionally referred to as the name HFC R125.
- the invention makes it possible, inter alia, to obtain a coating having barrier properties to several compounds simultaneously under very advantageous technical-economic conditions.
- the inventors have surprisingly discovered that the improvement of the hydrocarbon diffusion barrier properties obtained by low pressure plasma deposition on a given polymer material can vary in a very wide range of gain, ranging from one to several tens, depending on the fluorinated gas or the gaseous composition comprising at least one fluorinated gas brought to the plasma state employed, and this for otherwise identical operating conditions ( gas flow, pressure, temperature, electric discharge power for plasma generation, plasma generation technique, plasma application time).
- gas comprising at least one fluorinated gas.
- the inventors have also discovered that, surprisingly, it can be extremely advantageous to make a first deposition layer and then proceed with the deposition of the fluorinated layer, without being able to explain it clearly.
- the authors propose carrying out a first hydrogenated amorphous carbon deposition with a low-pressure acetylene gas brought to the plasma state, and then producing a second fluorinated carbon deposit using a plasma of R134 (C 2 H 2 F 4 , or H 2 FC-CF 3 or 1,1,1,2 Tetrafluoroethane)
- R134 C 2 H 2 F 4 , or H 2 FC-CF 3 or 1,1,1,2 Tetrafluoroethane
- reaction fluids used are inert, not dangerous and inexpensive, which makes the invention very advantageous from one point of time. from an economic point of view.
- the inventors have also been able to verify that the production of the second fluorinated layer from the gas R134 is particularly interesting because the hydrogen and / or the hydrogenated molecules released by this precursor, by their incorporation in said second fluorinated layer, very substantially improve the stability of the layer.
- the polymer surface for which it is desired to improve the hydrocarbon diffusion barrier properties is introduced into a vacuum-tight treatment chamber.
- the emptying of the air initially contained in said treatment chamber is carried out by conventional pumping means up to a vacuum level of between 0.001 mbar and 1 mbar; preferentially below 0.1 mbar.
- the gas or gas mixture is released near the polymer surface which has been introduced into the treatment chamber which will be called the treatment zone.
- electrical or electromagnetic energy is applied using specific means for generating and transporting said energy, which generally has the effect of bringing the gas or gas mixture to the plasma state if certain pressure conditions and energy power density are met.
- the energies used for the creation of said plasma can come from a DC voltage, a high frequency RF, a radio frequency (13.46 MHz and its harmonics for example) or even microwaves ( 915 MHz, 2,450 MHz).
- the volume densities of power involved are between 0.01 W / cm 3 and 10 W / cm 3 , but preferably between 0.1 W / cm 3 and 3 W / cm 3 .
- the frequencies preferentially used are those, industrial, of 40 kHz, 13.56 MHz and 2450 MHz.
- the plasma state then has the effect of bringing into a partial ionization state of said gas or gas mixture.
- the particles resulting from these excitation and decomposition mechanisms can then be recombined with one another to result in more or less unstable particles which can then condense on the surface of the polymer which is immersed in this plasma mixture, or condense on the surface of the polymer.
- a sufficient plasma phase time which can be between a second and a few minutes but preferably at least one second and at most thirty seconds, the application of energy is stopped which stops any generation of plasma.
- the flow of gas or gas mixture is also stopped, then the chamber is returned to atmospheric pressure.
- a second deposition cycle is performed by reproducing according to the cycle described above from a new gas or gas mixture.
- the first cycle may be a step of preparing the surface of the polymer which consists in "chemically cleaning" said surface of the polymer.
- the polymer surface is prepared by preferably using an argon plasma or an argon + hydrogen mixture.
- the inventors have also found that it could be advantageous to use a carbon dioxide plasma to increase the number of oxidized sites on the surface of the favorable polymer, in particular to obtain better performance of the oxygen barrier deposits by example.
- the pressure conditions are then between 0.01 mbar and 5 mbar, but preferably between 0.05 mbar and 1 mbar.
- the power conditions are those described above and the plasma preparation times are generally between 1 second and 30 seconds depending on the nature of the polymer surface to be prepared.
- the barrier layer or the various sub-layers constituting the barrier layer are deposited.
- this barrier layer may consist of a single layer or the superposition of two or more layers of different chemical nature.
- the inventors produce two types of sublayers: a first sublayer of hydrogenated amorphous carbon and a second sublayer of fluorinated amorphous carbon.
- the first sublayer of hydrogenated amorphous carbon is produced from acetylene gas, the beneficial feature of which is a more or less significant collapse of the pressure when this gas is put into a plasma state, thus favoring the obtaining of a more stable deposit. homogeneous.
- the second fluorinated amorphous carbon sublayer is made from the precursor gas R134 of chemical formulation C 2 F 4 H 2 or from the precursor gas R125 of chemical formulation C 2 F 5 H according to the application.
- R125 is used in some cases, because it allows a better stability and chemical resistance in particular to products having a significant surfactant effect.
- HDPE High Density Polyethylene
- Rigid means a container whose wall is of a thickness of at least one mm as is the case in this example.
- Such a container is placed in a cylindrical metal processing chamber connected to a microwave emitting device emitting at 2450 MHz with conventional standard size waveguide means.
- the device makes it possible to produce a differential pressure between the internal volume of the container and the external volume so that the external pressure is greater than the internal pressure.
- the treatment of the container is in several stages.
- the pumping circuit is in communication with the treatment chamber and the internal volume of the polymer container.
- Vacuum is achieved using a conventional vacuum prime pump.
- the pressure inside the container is reduced to a pressure of less than 0.05 mbar while the outside pressure is maintained at about 30 mbar.
- a mixing flow of argon gas and hydrogen is introduced into the container in proportions 90/10 although this is not a requirement so that the internal pressure is found at a value between 0.05 and 1 mbar.
- a microwave energy is then applied with a power of about 200 W, which allows the creation a surface preparation plasma maintained for a period of 6 seconds. After this time, the microwave energy and the gas mixture flow rate are cut off.
- a flow of acetylene gas is introduced into the container so that the internal pressure is found at a value between 0.05 and 0.3 mbar.
- Microwave energy is then applied with a power of about 300 W, which allows the creation of a deposition plasma maintained for a period of one second.
- a flow of gas R134 is introduced into the container so that the internal pressure is found at a value between 0.05 and 0.3 mbar.
- Microwave energy is then applied with a power of about 300 W, which allows the creation of a deposition plasma maintained for a period of six seconds.
- the pumping circuit is isolated from the treatment chamber and the internal volume of the polymer container.
- the treatment chamber and the polymer container are returned to atmospheric pressure.
- the containers are filled with a liquid load of about 100 grams, then their openings are closed with a heat-sealable aluminum film.
- the containers are placed in study at 40 ° C for a while.
- the permeability is measured by weighing at regular intervals of at least 1 day over a period that may extend over several months.
- Loss of product by diffusion through the wall of the container is then expressed in mg / day.
- Oxygen permeability is measured with an OXTRAN (MOCON) device for a period of at least 24 hours. The permeability is expressed in this case in cm 3 / day.
- the containers thus treated have shown a very good barrier to several compounds such as gasoline, white spirit, water, n-butyl acetate, oxygen.
- HDPE high density polyethylene
- Flexible means a container whose wall is of a thickness less than 1 mm as is the case in this example for which the thickness is 0.5 mm.
- Such a container is placed in a cylindrical metal processing chamber connected to a microwave emitting device emitting at 2450 MHz with conventional standard size waveguide means.
- the power is adjusted in each phase in relation to the surface to be treated.
- the containers thus treated have shown a very good barrier to several compounds such as gasoline, White Spirit, water, n-Butyl acetate, oxygen and conventional hydrocarbons.
- such untreated containers have a hydrocarbon diffusion barrier of 3000 mg / day, while these same treated containers have a hydrocarbon diffusion barrier of 25 mg / day at 40 ° C.
- HDPE high density polyethylene
- Such a container is placed in a cylindrical metal processing chamber connected to a microwave emitting device emitting at 2450 MHz with conventional standard size waveguide means.
- the power is adjusted in each phase in relation to the surface to be treated.
- the containers thus treated have shown a very good barrier to several compounds such as gasoline, White Spirite, water, n-butyl acetate, oxygen and conventional hydrocarbons.
- such untreated containers have a 1400 mg / day white spirit diffusion barrier, whereas these same treated containers have a barrier to diffusion of 15 mg / day at 40 ° C and after 2 months of maceration.
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Chemical Vapour Deposition (AREA)
Description
La présente invention se rapporte au domaine technique des procédés de traitement de surface d'objets en matériau polymère, ces objets étant destinés au conditionnement de produits gazeux, liquides ou solides, ou au conditionnement de mélanges de tels produits.The present invention relates to the technical field of surface treatment processes of polymeric material objects, these objects being intended for the packaging of gaseous products, liquid or solid, or the packaging of mixtures of such products.
L'invention concerne plus particulièrement les techniques de dépôt sur la surface de matériaux polymères à l'aide d'une vapeur de gaz précurseur chimiquement activée par une décharge électrique sous atmosphère réduite, dans le but de modifier les propriétés physico-chimiques de la surface dudit objet en matériau polymère.The invention more particularly relates to techniques for deposition on the surface of polymeric materials using a precursor gas vapor chemically activated by an electric discharge under a reduced atmosphere, in order to modify the physicochemical properties of the surface. said object made of polymeric material.
Le procédé selon l'invention trouve une application et un intérêt industriel important en ce qu'il permet de diminuer la diffusion des gaz et des liquides à travers la paroi de l'objet en polymère.The method according to the invention finds an application and an important industrial interest in that it makes it possible to reduce the diffusion of gases and liquids through the wall of the polymer object.
Le procédé selon l'invention permet notamment d'améliorer les propriétés barrières de récipients en PEHD vis-à-vis de l'essence, du White Spirit (coupe de distillation du pétrole, raffinée, contenant moins de 0,05 % de benzène), de l'eau, du n-Butyle acétate, de l'oxygène.The method according to the invention makes it possible in particular to improve the barrier properties of HDPE containers vis-à-vis gasoline, White Spirit (refined petroleum distillation cup, containing less than 0.05% of benzene) , water, n-butyl acetate, oxygen.
Le procédé de l'invention trouve en particulier un intérêt industriel majeur en ce qu'il permet d'augmenter les propriétés de barrière à la diffusion aux hydrocarbures obtenues par dépôt plasma basse pression sur un matériau polymère donné, par décharge électrique sous atmosphère réduite d'un gaz fluoré ou d'une composition gazeuse comprenant au moins un gaz fluoré.The process of the invention finds, in particular, a major industrial interest in that it makes it possible to increase the hydrocarbon diffusion barrier properties obtained by low-pressure plasma deposition on a given polymer material, by electric discharge under a reduced atmosphere. a fluorinated gas or a gaseous composition comprising at least one fluorinated gas.
L'utilisation des polymères dans le domaine du conditionnement et de la conservation de produits divers, notamment produits alimentaires, produits chimiques, présente de nombreux avantages.The use of polymers in the field of packaging and preservation of various products, including food products, chemicals, has many advantages.
Les matériaux polymères sont en effet légers, souples, résistants, moins coûteux et de mise en oeuvre plus facile comparativement aux métaux ou aux verres.Polymeric materials are indeed light, flexible, resistant, less expensive and easier to implement compared to metals or glasses.
Malheureusement, leurs propriétés de barrière par rapport à la diffusion de certains produits liquides ou gazeux, comme l'oxygène ou le dioxyde de carbone, sont généralement mauvaises comparées à celles des métaux et du verre.Unfortunately, their barrier properties relative to the diffusion of certain liquid or gaseous products, such as oxygen or carbon dioxide, are generally poor compared to those of metals and glass.
Ceci est en particulier vrai pour les polymères les plus employés dans l'industrie du conditionnement comme le PE (polyéthylène), le PP (polypropylène) ou encore le PET (polyéthylène téréphtalate).This is particularly true for the polymers most used in the packaging industry such as PE (polyethylene), PP (polypropylene) or PET (polyethylene terephthalate).
Par ailleurs, la résistance de ces polymères est trop faible pour que leur emploi soit possible dans le conditionnement de certains solvants et composés volatiles à faible poids moléculaire, certains acides comme l'acide acétique, ou encore des solutions de tensioactifs.Moreover, the resistance of these polymers is too low for their use to be possible in the packaging of certain solvents and low molecular weight volatile compounds, certain acids such as acetic acid, or surfactant solutions.
Des tels produits conditionnés dans un récipient en matériau polymère peuvent dégrader d'une part la surface du récipient en contact avec ledit produit et d'autre part diverses propriétés du matériau polymère conduisant ainsi dans le temps à une fragilisation mécanique irréversible dudit récipient.Such products packaged in a container of polymeric material may degrade both the surface of the container in contact with said product and, on the other hand, various properties of the polymeric material thus leading in time to irreversible mechanical embrittlement of said container.
De plus, à cause des phénomènes de diffusion, ces mêmes produits peuvent migrer lentement et de façon continue de l'intérieur du récipient en matériau polymère vers l'extérieur en traversant la paroi dudit récipient en matériau polymère et se propager ainsi dans l'environnement.Moreover, because of the diffusion phenomena, these same products can migrate slowly and continuously from the inside of the container of polymer material outwards through the wall of said container made of polymeric material and thus propagate in the environment. .
Durant cette migration, une part plus ou moins importante de ces produits est piégée, augmentant ainsi le poids initial du récipient en matériau polymère.During this migration, more or less important of these products is trapped, thus increasing the initial weight of the container of polymeric material.
La variation de poids peut être de plusieurs pourcents et, avec le temps, la paroi du récipient en matériau polymère gonfle, sa composition chimique se modifie.The variation in weight can be several percent and, with time, the container wall of polymer material swells, its chemical composition changes.
Ses propriétés mécaniques évoluent parfois de manière dramatique et une fragilisation mécanique irréversible dudit récipient peut être constatée.Its mechanical properties sometimes evolve dramatically and an irreversible mechanical embrittlement of said container can be seen.
Le dépôt d'un matériau en couche mince, reconnu pour ses propriétés de barrière ou ses propriétés de protection, sur la surface interne et/ou externe d'un récipient en matériau polymère est largement connu et employé depuis de nombreuses années à titre de solution aux différents problèmes posés ci-dessus.The deposition of a thin-layer material, recognized for its barrier properties or its protective properties, on the inner and / or outer surface of a container of polymer material is widely known and has been used for many years as a solution. to the different problems posed above.
Cette opération de dépôt d'un matériau en couche mince sur de tels substrats en matériau polymères peut être réalisée par exemple par dépôt en phase vapeur sous vide poussé (communément désigné par PVD, Physical Vapor Déposition) ou dépôt en phase plasma sous vide primaire (communément désigné par PCVD, Plasma Chemical Vapor Deposition ou encore PECVD, Plasma Enhanced Chemical Vapor Deposition).This operation of depositing a thin-film material on such substrates made of polymeric material may be carried out for example by high vacuum vapor deposition (commonly referred to as PVD, Physical Vapor Deposition) or plasma phase deposition under primary vacuum ( commonly referred to as PCVD, Plasma Chemical Vapor Deposition or PECVD, Plasma Enhanced Chemical Vapor Deposition).
D'une façon plus précise, les techniques de dépôt d'un matériau en couche mince par plasmas consistent à utiliser un gaz ou un mélange gazeux à partir duquel les éléments atomiques formant la structure moléculaire dudit matériau en couche sont présents.More specifically, the techniques for depositing a thin film material by plasmas consist in using a gas or a gaseous mixture from which the atomic elements forming the molecular structure of said layered material are present.
De tels gaz ou mélanges gazeux sont dits précurseurs. Ce(s) gaz est (sont) introduits dans une chambre de réaction à l'état de vapeur à basse pression puis décomposé(s) par une décharge électrique formant ainsi le plasma.Such gases or gas mixtures are called precursors. This gas (s) is (are) introduced into a reaction chamber in the low-pressure vapor state and then decomposed (s) by an electric discharge thus forming the plasma.
La vapeur de plasma ainsi créée libère des atomes et des molécules plus ou moins instables mais très réactionnelles qui se recombinent et se condensent en une couche mince sur la surface du polymère à revêtir.The plasma vapor thus created releases atoms and molecules that are more or less unstable but very which recombine and condense in a thin layer on the surface of the polymer to be coated.
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Les dépôts de matériaux en couches minces fluorées sur des surfaces en polymère permettent l'amélioration de l'effet de barrière à la diffusion des hydrocarbures de ladite surface en polymère (voir le document
Pour la réalisation d'une barrière à la diffusion des hydrocarbures de surface en polymère ci-dessus citée, l'utilisation de la technique de dépôt par plasma peut être très avantageuse et constituer une alternative extrêmement intéressante à la méthode classique de fluoration.In order to provide a diffusion barrier for the surface hydrocarbons in polymer mentioned above, the use of the plasma deposition technique can be very advantageous and constitute an extremely interesting alternative to the conventional fluorination method.
En effet, ladite méthode classique de fluoration consiste conventionnellement à exposer la surface en matériau polymère à un gaz fluoré dans des conditions de pression et de température précises, pendant un temps très long, pouvant atteindre plusieurs heures.Indeed, said conventional fluorination method conventionally consists in exposing the polymer material surface to a fluorinated gas under precise pressure and temperature conditions, for a very long time, up to several hours.
Cette technique de fluoration, qui est d'un investissement très coûteux, nécessite l'utilisation de gaz fluorés en grande quantité qu'il est nécessaire de retraiter en fin de phase de fluoration.This fluorination technique, which is a very expensive investment, requires the use of fluorinated gases in large quantities that must be reprocessed at the end of the fluorination phase.
Le dépôt par plasma permet d'obtenir des performances de barrière à la diffusion des hydrocarbures comparables à celles obtenues par fluoration classique en utilisant cependant des quantités de gaz précurseur très faibles et des temps de réalisation en général beaucoup plus courts.Plasma deposition makes it possible to obtain hydrocarbon diffusion barrier performances comparable to those obtained by conventional fluorination, while using however very small amounts of precursor gas and generally very long completion times. shorter.
Cependant, les deux inconvénients majeurs de la technique de dépôt par plasma sont l'utilisation de gaz précurseurs généralement très coûteux et les procédés de mise en oeuvre souvent complexes qui en font une technique très difficilement industrialisable.However, the two major drawbacks of the plasma deposition technique are the use of generally very expensive precursor gases and the often complex methods of implementation which make it a very difficult industrialization technique.
La réalisation d'une barrière à la diffusion des hydrocarbures de surface en polymère trouve une importante application dans le domaine des réservoirs automobiles.Achieving a barrier to the diffusion of surface hydrocarbons made of polymer finds an important application in the field of automobile tanks.
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La mise en oeuvre industrielle des techniques ci-dessus évoquées reste délicate et peu adaptée aux contraintes technico-économiques, du fait notamment du coût élevé des gaz précurseurs et des temps de cycle élevés.The industrial implementation of the aforementioned techniques remains delicate and poorly adapted to techno-economic constraints, particularly because of the high cost of precursor gases and high cycle times.
Préalablement à la réalisation du dépôt d'une couche mince à effet de barrière à la diffusion sur une surface en polymère, il est souvent procédé à une préparation de ladite surface en polymère avec par exemple la même technique de génération de plasma sous basse pression que celle utilisée pour réaliser ledit dépôt de couche mince.Prior to performing the deposition of a diffusion barrier thin layer on a polymer surface, it is often carried out a preparation of said polymer surface with for example the same technique of low pressure plasma generation as that used to make said thin film deposition.
Les gaz ou les mélanges gazeux utilisés dans ce cas doivent modifier l'état énergétique et parfois même chimique de la surface en polymère sans entraîner si possible la croissance d'une couche mince d'un matériau amorphe.The gases or gas mixtures used in this case must change the energy state and sometimes even the chemical state of the polymer surface without, if possible, causing the growth of a thin layer of an amorphous material.
Parmi ces gaz on peut citer, de manière non exhaustive, l'argon, l'oxygène, le dioxyde de carbone, l'hydrogène ou une combinaison de ces gaz.Among these gases, it is possible to cite, in a non exhaustive, argon, oxygen, carbon dioxide, hydrogen or a combination of these gases.
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Dans un premier mode de réalisation actuellement préféré de la présente invention, le revêtement sur matériau polymère est obtenu à basse pression à partir d'un plasma gazeux de tétrafluoroéthane-1,1,1,2 (C2H2F4, ou H2FC-CF3), mélange désigné conventionnellement par l'appellation HFC R134a.In a presently preferred embodiment of the present invention, the polymeric material coating is obtained at low pressure from a gaseous plasma of 1,1,1,2-tetrafluoroethane (C 2 H 2 F 4 , or H 2 FC-CF 3 ), conventionally referred to as HFC R134a.
Dans un deuxième mode de réalisation actuellement préféré de la présente invention, le revêtement sur matériau polymère est obtenu à basse pression à partir d'un plasma gazeux de pentafluoroéthane (C2HF5 ou HF2C-CF3), produit conventionnellement désigné sous l'appellation HFC R125.In a second presently preferred embodiment of the present invention, the coating on polymeric material is obtained at low pressure from a gaseous plasma of pentafluoroethane (C 2 HF 5 or HF 2 C-CF 3 ), a product conventionally referred to as the name HFC R125.
D'autres objets et avantages de la présente invention apparaîtront clairement dans la description détaillée ci-dessous.Other objects and advantages of the present invention will become apparent from the detailed description below.
L'invention permet, entre autres, l'obtention d'un revêtement ayant des propriétés barrières à plusieurs composés simultanément dans des conditions technico-économiques très avantageuses.The invention makes it possible, inter alia, to obtain a coating having barrier properties to several compounds simultaneously under very advantageous technical-economic conditions.
Les inventeurs ont découvert de manière très surprenante que l'amélioration des propriétés de barrière à la diffusion aux hydrocarbures obtenue par dépôt plasma basse pression sur un matériau polymère donné pouvait varier dans une plage de gain très large, pouvant aller de un à plusieurs dizaines, selon le gaz fluoré ou la composition gazeuse comprenant au moins un gaz fluoré porté à l'état de plasma employé, et ceci pour des conditions opératoires par ailleurs identiques (débit des gaz, pression, température, puissance de la décharge électrique pour la génération du plasma, technique de génération du plasma, durée de l'application du plasma).The inventors have surprisingly discovered that the improvement of the hydrocarbon diffusion barrier properties obtained by low pressure plasma deposition on a given polymer material can vary in a very wide range of gain, ranging from one to several tens, depending on the fluorinated gas or the gaseous composition comprising at least one fluorinated gas brought to the plasma state employed, and this for otherwise identical operating conditions ( gas flow, pressure, temperature, electric discharge power for plasma generation, plasma generation technique, plasma application time).
Les inventeurs ne sont pas en mesure de donner une explication de cette surprenante découverte.The inventors are not able to give an explanation of this surprising discovery.
Les inventeurs ont constaté que, dans le domaine exploré, il n'y a pas de corrélations évidentes entre les performances de barrière à la diffusion aux hydrocarbures et les rapports entre les différentes quantités d'atomes par unité de volume de gaz fluoré ou de composition gazeuse comprenant au moins un gaz fluoré.The inventors have found that, in the field under study, there are no obvious correlations between the hydrocarbon diffusion barrier performance and the ratios between the different quantities of atoms per unit volume of fluorinated gas or composition. gas comprising at least one fluorinated gas.
Les inventeurs ont également découvert que, de manière surprenante, il peut être extrêmement avantageux de réaliser une première couche de dépôt particulière puis de procéder ensuite au dépôt de la couche fluorée, sans pouvoir l'expliquer de manière claire.The inventors have also discovered that, surprisingly, it can be extremely advantageous to make a first deposition layer and then proceed with the deposition of the fluorinated layer, without being able to explain it clearly.
De manière préférentielle, les auteurs proposent la réalisation d'un premier dépôt de carbone amorphe hydrogéné avec un gaz d'acétylène à basse pression porté à l'état de plasma, puis la réalisation d'un second dépôt de carbone fluoré à l'aide d'un plasma de R134 (C2H2F4, ou H2FC-CF3 ou Tétrafluoroéthane-1,1,1,2)Preferably, the authors propose carrying out a first hydrogenated amorphous carbon deposition with a low-pressure acetylene gas brought to the plasma state, and then producing a second fluorinated carbon deposit using a plasma of R134 (C 2 H 2 F 4 , or H 2 FC-CF 3 or 1,1,1,2 Tetrafluoroethane)
Outre les excellentes performances de propriétés de barrière à la diffusion aux hydrocarbures obtenues, un des avantages d'un tel procédé est que les fluides réactionnels utilisés sont inertes, pas dangereux et peu onéreux, ce qui rend l'invention très avantageuse d'un point de vue économique.In addition to the excellent performance of hydrocarbon diffusion barrier properties obtained, one of the advantages of such a process is that the reaction fluids used are inert, not dangerous and inexpensive, which makes the invention very advantageous from one point of time. from an economic point of view.
Les inventeurs ont par ailleurs pu vérifier que la réalisation de la seconde couche fluorée à partir du gaz R134 est particulièrement intéressante, parce que l'hydrogène et/ou les molécules hydrogénées libérées par ce précurseur permettaient, par leur incorporation dans ladite seconde couche fluorée, d'améliorer très sensiblement la stabilité de la couche.The inventors have also been able to verify that the production of the second fluorinated layer from the gas R134 is particularly interesting because the hydrogen and / or the hydrogenated molecules released by this precursor, by their incorporation in said second fluorinated layer, very substantially improve the stability of the layer.
Ils attribuent ce comportement à des phénomènes de saturation des liaisons pendantes qui permet de diminuer les contraintes mécaniques aux interfaces.They attribute this behavior to phenomena of saturation of the hanging links which makes it possible to reduce the mechanical stresses at the interfaces.
Cette particularité n'a pas été constatée lorsque la seconde couche fluorée était réalisée à partir d'autres gaz fluorocarbonés comme le C2F6, C6F6 ou le C4F8 qui nécessitent généralement l'addition d'hydrogène ou bien encore à partir d'autres gaz fluorés pourtant a priori similaires au gaz R134.This particularity was not observed when the second fluorinated layer was made from other fluorocarbon gases such as C 2 F 6 , C 6 F 6 or C 4 F 8 which generally require the addition of hydrogen or else still from other fluorinated gases that are a priori similar to R134 gas.
Du point de vue opératoire, la surface polymère pour laquelle on souhaite améliorer les propriétés de barrière à la diffusion aux hydrocarbures est introduite dans une chambre de traitement étanche au vide.From the operating point of view, the polymer surface for which it is desired to improve the hydrocarbon diffusion barrier properties is introduced into a vacuum-tight treatment chamber.
On réalise le vidage de l'air contenu initialement de ladite chambre de traitement grâce à des moyens conventionnels de pompage, jusque un niveau de vide compris entre 0.001 mbar et 1 mbar; préférentiellement en dessous de 0.1 mbar.The emptying of the air initially contained in said treatment chamber is carried out by conventional pumping means up to a vacuum level of between 0.001 mbar and 1 mbar; preferentially below 0.1 mbar.
Ensuite, un débit de gaz ou de mélange gazeux est introduit dans ladite chambre de traitement.Then, a flow of gas or gas mixture is introduced into said processing chamber.
Cela a généralement pour effet d'augmenter la pression à l'intérieur de la chambre de traitement à des valeurs comprises entre 0.002 mbar et 10 mbar; le débit étant choisi de préférence pour atteindre une pression en dessous de 1 mbar mais au-dessus de 0.01 mbar.This generally has the effect of increasing the pressure inside the treatment chamber to values between 0.002 mbar and 10 mbar; the flow rate being preferably chosen to reach a pressure below 1 mbar but above 0.01 mbar.
Le gaz ou le mélange gazeux est libéré à proximité de la surface polymère qui a été introduite dans la chambre de traitement que l'on appellera zone de traitement.The gas or gas mixture is released near the polymer surface which has been introduced into the treatment chamber which will be called the treatment zone.
Dans cette zone de traitement, une énergie électrique ou électromagnétique est appliquée à l'aide de moyens spécifiques de génération et de transport de la dite énergie, ce qui a généralement pour effet de porter le gaz ou le mélange gazeux à l'état de plasma si certaines conditions de pression et de densité de puissance d'énergie sont réunies.In this treatment zone, electrical or electromagnetic energy is applied using specific means for generating and transporting said energy, which generally has the effect of bringing the gas or gas mixture to the plasma state if certain pressure conditions and energy power density are met.
L'ensemble des réactions décrites plus haut et qui se produisent dans tout le volume délimité par la présence du plasma se produit également à proximité immédiate du polymère.All the reactions described above which occur in the entire volume defined by the presence of the plasma also occurs in the immediate vicinity of the polymer.
Elles dépendent d'un certain nombre de paramètres de procédé comme la pression ou bien encore la nature de l'énergie utilisée pour créer le plasma par exemple mais aussi et principalement du gaz ou du mélange gazeux utilisé.They depend on a certain number of process parameters such as the pressure or even the nature of the energy used to create the plasma for example but also and mainly of the gas or gaseous mixture used.
Les énergies utilisées pour la création dudit plasma peuvent être issues d'une tension continue (DC), d'une haute fréquence HF, d'une radiofréquence (13,46 MHz et ses harmoniques par exemple) ou bien encore de micro-ondes (915 MHz, 2 450 MHz).The energies used for the creation of said plasma can come from a DC voltage, a high frequency RF, a radio frequency (13.46 MHz and its harmonics for example) or even microwaves ( 915 MHz, 2,450 MHz).
Les densités volumiques de puissance mises en jeu sont comprises entre 0.01 W/cm3 et 10 W/cm3, mais préférentiellement comprises entre 0.1 W/cm3 et 3 W/cm3.The volume densities of power involved are between 0.01 W / cm 3 and 10 W / cm 3 , but preferably between 0.1 W / cm 3 and 3 W / cm 3 .
Les fréquences préférentiellement utilisées sont celles, industrielles, de 40 kHz, 13.56 MHz et 2450 MHz.The frequencies preferentially used are those, industrial, of 40 kHz, 13.56 MHz and 2450 MHz.
L'état plasma a alors pour effet de porter dans un état d'ionisation partielle dudit gaz ou mélange gazeux.The plasma state then has the effect of bringing into a partial ionization state of said gas or gas mixture.
Les particules issues de ces mécanismes d'excitation et de décomposition peuvent alors soit se recombiner entre-elles pour aboutir à des particules plus ou moins instables qui peuvent alors se condenser sur la surface du polymère qui se trouve plongée dans ce mélange plasma, soit également se condenser sur la surface du polymère.The particles resulting from these excitation and decomposition mechanisms can then be recombined with one another to result in more or less unstable particles which can then condense on the surface of the polymer which is immersed in this plasma mixture, or condense on the surface of the polymer.
On observe alors, pour le procédé de dépôt, la réalisation d'une couche de dépôt dont l'épaisseur dépend du temps d'application de la phase plasma.We then observe, for the deposition process, the realization of a deposition layer whose thickness depends the time of application of the plasma phase.
Donc, après un temps de phase plasma suffisant qui peut être compris entre une seconde et quelques minutes mais préférentiellement au moins de une seconde et au plus de trente secondes, l'application d'énergie est arrêtée ce qui stoppe toute génération de plasma.Therefore, after a sufficient plasma phase time which can be between a second and a few minutes but preferably at least one second and at most thirty seconds, the application of energy is stopped which stops any generation of plasma.
Le débit de gaz ou de mélange gazeux est également arrêté, puis l'enceinte est remise à la pression atmosphérique.The flow of gas or gas mixture is also stopped, then the chamber is returned to atmospheric pressure.
Dans une variante, avant de remettre l'enceinte à la pression atmosphérique, un second cycle de dépôt est réalisé en reproduisant selon le cycle décrit précédemment à partir d'un nouveau gaz ou mélange gazeux.In a variant, before returning the chamber to atmospheric pressure, a second deposition cycle is performed by reproducing according to the cycle described above from a new gas or gas mixture.
Dans une autre variante, plusieurs cycles sont réalisés avec différents gaz ou mélanges gazeux permettant ainsi de revêtir la surface du polymère d'autant de couches.In another variant, several cycles are carried out with different gases or gas mixtures thus making it possible to coat the surface of the polymer with as many layers.
Dans une autre variante, le premier cycle peut être une étape de préparation de la surface du polymère qui consiste à « nettoyer chimiquement » ladite surface du polymère.In another variant, the first cycle may be a step of preparing the surface of the polymer which consists in "chemically cleaning" said surface of the polymer.
Dans cette dernière variante, il est procédé à une préparation de la surface du polymère en utilisant de manière préférentielle un plasma d'argon ou de mélange argon + hydrogène.In this latter variant, the polymer surface is prepared by preferably using an argon plasma or an argon + hydrogen mixture.
Les inventeurs ont également constaté qu'il pouvait être avantageux d'utiliser un plasma de dioxyde dé carbone pour augmenter le nombre de sites oxydés sur la surface du polymère favorable en particulier à l'obtention de meilleures performances des dépôts barrières à l'oxygène par exemple.The inventors have also found that it could be advantageous to use a carbon dioxide plasma to increase the number of oxidized sites on the surface of the favorable polymer, in particular to obtain better performance of the oxygen barrier deposits by example.
Les conditions de pression sont comprises alors entre 0.01 mbar et 5 mbar mais de façon préférentielle comprises entre 0.05 mbar et 1 mbar.The pressure conditions are then between 0.01 mbar and 5 mbar, but preferably between 0.05 mbar and 1 mbar.
Les conditions de puissance sont celles décrites plus haut et les temps de préparation plasma sont généralement compris entre 1 seconde et 30 secondes selon la nature de la surface polymère à préparer.The power conditions are those described above and the plasma preparation times are generally between 1 second and 30 seconds depending on the nature of the polymer surface to be prepared.
Après cette phase de préparation, il est procédé au dépôt de la couche barrière ou des différentes sous-couches constituant la couche barrière.After this preparation phase, the barrier layer or the various sub-layers constituting the barrier layer are deposited.
Ainsi, cette couche barrière peut être constituée d'une couche unique ou de la superposition de deux ou plusieurs couches de nature chimique différente.Thus, this barrier layer may consist of a single layer or the superposition of two or more layers of different chemical nature.
De manière préférentielle, et selon une variante préférée, les inventeurs réalisent deux types de sous-couches : une première sous-couche de carbone amorphe hydrogéné et une seconde sous-couche du carbone amorphe fluoré.Preferably, and according to a preferred variant, the inventors produce two types of sublayers: a first sublayer of hydrogenated amorphous carbon and a second sublayer of fluorinated amorphous carbon.
La première sous-couche de carbone amorphe hydrogéné est réalisée à partir du gaz acétylène dont la particularité bénéfique est un effondrement plus ou moins important de la pression quand ce gaz est mis dans un état de plasma favorisant ainsi l'obtention d'un dépôt plus homogène.The first sublayer of hydrogenated amorphous carbon is produced from acetylene gas, the beneficial feature of which is a more or less significant collapse of the pressure when this gas is put into a plasma state, thus favoring the obtaining of a more stable deposit. homogeneous.
La seconde sous-couche de carbone amorphe fluoré est réalisée à partir du gaz précurseur R134 de formulation chimique C2F4H2 ou bien à partir du gaz précurseur R125 de formulation chimique C2F5H selon l'application.The second fluorinated amorphous carbon sublayer is made from the precursor gas R134 of chemical formulation C 2 F 4 H 2 or from the precursor gas R125 of chemical formulation C 2 F 5 H according to the application.
Le R125 est utilisé dans certains cas, car il permet une meilleure stabilité et résistance chimique notamment aux produits ayant un effet tensio-actif important.R125 is used in some cases, because it allows a better stability and chemical resistance in particular to products having a significant surfactant effect.
Des récipients en polymère Polyéthylène Haute Densité (PEHD) rigides, creux et à ouverture totale, d'une contenance de 0,2 litre ont été traités selon le procédé de l'invention.Polyethylene High Density Polyethylene (HDPE) polymer containers, rigid, hollow and with total opening, of a 0.2 liter capacity were treated according to the process of the invention.
On entend par rigide un récipient dont la paroi est d'une épaisseur d'au moins un mm comme c'est le cas dans le présent exemple.Rigid means a container whose wall is of a thickness of at least one mm as is the case in this example.
Un tel récipient est placé dans une chambre de traitement métallique de forme cylindrique reliée à un dispositif d'émission de micro-ondes émettant à 2450 MHz avec des moyens classiques de guide d'ondes aux dimensions standards.Such a container is placed in a cylindrical metal processing chamber connected to a microwave emitting device emitting at 2450 MHz with conventional standard size waveguide means.
Dans la pratique, le dispositif permet de réaliser une pression différentielle entre le volume interne du récipient et le volume externe de sorte que la pression extérieure soit supérieure à la pression interne.In practice, the device makes it possible to produce a differential pressure between the internal volume of the container and the external volume so that the external pressure is greater than the internal pressure.
De cette façon, si la pression externe est suffisamment grande, la génération du plasma se fait uniquement à l'intérieur du récipient et le dépôt est alors réalisé sur la paroi interne de ce dernier.In this way, if the external pressure is large enough, the generation of plasma is only inside the container and the deposit is then formed on the inner wall of the latter.
Conformément à la présente invention, le traitement du récipient se fait en plusieurs étapes.According to the present invention, the treatment of the container is in several stages.
Le circuit de pompage est mis en communication avec la chambre de traitement et du volume interne du récipient en polymère.The pumping circuit is in communication with the treatment chamber and the internal volume of the polymer container.
Le vide est réalisé à l'aide d'une pompe primaire à vide classique.Vacuum is achieved using a conventional vacuum prime pump.
La pression à l'intérieur du récipient est ramenée jusqu'à une pression inférieure à 0.05 mbar alors que la pression à l'extérieur est maintenue à environ 30 mbar.The pressure inside the container is reduced to a pressure of less than 0.05 mbar while the outside pressure is maintained at about 30 mbar.
Un débit de mélange de gaz argon et hydrogène est introduit dans le récipient dans des proportions 90/10 bien que cela ne soit pas une exigence de sorte que la pression interne se retrouve à une valeur comprise entre 0.05 et 1 mbar.A mixing flow of argon gas and hydrogen is introduced into the container in proportions 90/10 although this is not a requirement so that the internal pressure is found at a value between 0.05 and 1 mbar.
Une énergie micro-ondes est alors appliquée avec une puissance d'environ 200 W, ce qui permet la création d'un plasma de préparation de surface maintenu pendant une durée de 6 secondes. Après ce temps, l'énergie micro-ondes et le débit de mélange de gaz sont coupés.A microwave energy is then applied with a power of about 200 W, which allows the creation a surface preparation plasma maintained for a period of 6 seconds. After this time, the microwave energy and the gas mixture flow rate are cut off.
Un débit de gaz acétylène est introduit dans le récipient de sorte que la pression interne se retrouve à une valeur comprise entre 0.05 et 0.3 mbar.A flow of acetylene gas is introduced into the container so that the internal pressure is found at a value between 0.05 and 0.3 mbar.
Une énergie micro-ondes est alors appliquée avec une puissance d'environ 300 W, ce qui permet la création d'un plasma de dépôt maintenu pendant une durée de une seconde.Microwave energy is then applied with a power of about 300 W, which allows the creation of a deposition plasma maintained for a period of one second.
Après ce temps, l'énergie micro-onde et le débit de gaz sont coupés.After this time, the microwave energy and the gas flow are cut off.
Un débit de gaz R134 est introduit dans le récipient de sorte que la pression interne se retrouve à une valeur comprise entre 0.05 et 0.3 mbar.A flow of gas R134 is introduced into the container so that the internal pressure is found at a value between 0.05 and 0.3 mbar.
Une énergie micro-ondes est alors appliquée avec une puissance d'environ 300 W, ce qui permet la création d'un plasma de dépôt maintenu pendant une durée de six secondes.Microwave energy is then applied with a power of about 300 W, which allows the creation of a deposition plasma maintained for a period of six seconds.
Après ce temps, l'énergie micro-onde et le débit de gaz sont coupés.After this time, the microwave energy and the gas flow are cut off.
Le circuit de pompage est isolé de la chambre de traitement et du volume interne du récipient en polymère.The pumping circuit is isolated from the treatment chamber and the internal volume of the polymer container.
La chambre de traitement et le récipient en polymère sont remis à la pression atmosphérique.The treatment chamber and the polymer container are returned to atmospheric pressure.
Il a été suivi un protocole de conditionnement et de mesure qui est décrit dans les normes relatives au transport de matières dangereuses.It was followed a conditioning and measurement protocol that is described in the standards for the transport of hazardous materials.
Les récipients sont remplis d'une charge de liquide d'environ 100 grammes, puis leurs ouvertures sont fermées à l'aide d'un film aluminium thermo-scellable.The containers are filled with a liquid load of about 100 grams, then their openings are closed with a heat-sealable aluminum film.
Ainsi conditionnés, les récipients sont placés en étude à 40 °C pendant un certain temps. On mesure la perméabilité par pesées à intervalles réguliers d'au moins 1 jour sur une période pouvant s'étaler sur plusieurs mois.Thus packaged, the containers are placed in study at 40 ° C for a while. The permeability is measured by weighing at regular intervals of at least 1 day over a period that may extend over several months.
Les pertes de produit par diffusion au travers de la paroi du récipient sont alors exprimés en mg/jour.Loss of product by diffusion through the wall of the container is then expressed in mg / day.
La mesure de perméabilité à l'oxygène est faite avec un appareil OXTRAN (MOCON) sur une durée d'au moins 24 heures. La perméabilité est exprimée dans ce cas en cm3/jour.Oxygen permeability is measured with an OXTRAN (MOCON) device for a period of at least 24 hours. The permeability is expressed in this case in cm 3 / day.
Les performances de barrières à la diffusion de produits standards ont été mesurées et sont rappelées dans le tableau 1.The performance of barriers to the diffusion of standard products have been measured and are recalled in Table 1.
Les valeurs de pertes de produit sont données après un temps de conditionnement (en jours) indiqué entre parenthèses.
Les récipients ainsi traités ont montré une très bonne barrière à plusieurs composés tels que l'essence, le White Spirit, l'eau, le n-Butyle acétate, l'oxygène.The containers thus treated have shown a very good barrier to several compounds such as gasoline, white spirit, water, n-butyl acetate, oxygen.
Lors du processus de diffusion du produit contenu au travers d'une paroi en polymère, une part plus ou moins grande dudit produit est piégée dans la masse du polymère se traduisant ainsi à une prise de poids.During the diffusion process of the product contained through a polymer wall, a greater or lesser part of said product is trapped in the mass of the polymer thus resulting in weight gain.
L'application du procédé inventif tel que décrite ci dessus, sur ces récipients en polymères, donnent également une amélioration de leur tenue à la prise de poids après 40 jours de conditionnement.
De même, une amélioration à la tenue à l'abrasion est constatée.Similarly, an improvement in abrasion resistance is noted.
Ces résultats ont pu être confirmés par une expertise réalisée par le TNO (Netherlands Organisation for Applied Scientific Reseacrch).These results have been confirmed by an expert report made by the Netherlands Organization for Applied Scientific Reseacr (TNO).
Des récipients en polymère Polyéthylène Haute Densité (PEHD) souples, creux, d'une contenance de 0,5 litre ont été traités selon le procédé de l'invention.Flexible, hollow, 0.5 liter polyethylene high density polyethylene (HDPE) containers were treated according to the method of the invention.
On entend par souple un récipient dont la paroi est d'une épaisseur inférieure à 1 mm comme c'est le cas dans le présent exemple pour lequel l'épaisseur est de 0.5 mm.Flexible means a container whose wall is of a thickness less than 1 mm as is the case in this example for which the thickness is 0.5 mm.
Un tel récipient est placé dans une chambre de traitement métallique de forme cylindrique reliée à un dispositif d'émission de micro-ondes émettant à 2450 MHz avec des moyens classiques de guide d'ondes aux dimensions standards.Such a container is placed in a cylindrical metal processing chamber connected to a microwave emitting device emitting at 2450 MHz with conventional standard size waveguide means.
Ces récipients sont traités de manière similaire à la procédure décrite dans les résultats 1 ci-dessus.These containers are treated similarly to the procedure described in results 1 above.
La puissance est ajustée dans chaque phase en relation avec la surface à traiter.The power is adjusted in each phase in relation to the surface to be treated.
Les récipients ainsi traités ont montré une très bonne barrière à plusieurs composés tels que l'essence, le White Spirit, l'eau, le n-Butyle acétate, l'oxygène et hydrocarbures classiques.The containers thus treated have shown a very good barrier to several compounds such as gasoline, White Spirit, water, n-Butyl acetate, oxygen and conventional hydrocarbons.
Par exemple, de tels récipients non traités présentent un pouvoir de barrière à la diffusion aux hydrocarbures de 3000 mg/jour, alors que ces mêmes récipients traités ont un pouvoir de barrière à la diffusion aux hydrocarbures de 25 mg/jour à 40 °C.For example, such untreated containers have a hydrocarbon diffusion barrier of 3000 mg / day, while these same treated containers have a hydrocarbon diffusion barrier of 25 mg / day at 40 ° C.
Des récipients en polymère Polyéthylène Haute Densité (PEHD) rigides, creux et à ouverture totale, d'une contenance de 5 litres ont été traités selon.le procédé de l'invention.Hollow, full opening, high density polyethylene (HDPE) polymer containers having a capacity of 5 liters were treated according to the process of the invention.
Un tel récipient est placé dans une chambre de traitement métallique de forme cylindrique reliée à un dispositif d'émission de micro-ondes émettant à 2450 MHz avec des moyens classiques de guide d'ondes aux dimensions standards.Such a container is placed in a cylindrical metal processing chamber connected to a microwave emitting device emitting at 2450 MHz with conventional standard size waveguide means.
Ces récipients sont traités de manière similaire à la procédure décrite dans les résultats 1 ci-dessus.These containers are treated similarly to the procedure described in results 1 above.
La puissance est ajustée dans chaque phase en relation avec la surface à traiter.The power is adjusted in each phase in relation to the surface to be treated.
Les récipients ainsi traités ont montré une très bonne barrière à plusieurs composés tels que l'essence, le White Spirite, l'eau, le n-Butyle acétate, l'oxygène et hydrocarbures classiques.The containers thus treated have shown a very good barrier to several compounds such as gasoline, White Spirite, water, n-butyl acetate, oxygen and conventional hydrocarbons.
Par exemple, de tels récipients non traités présentent un pouvoir de barrière à la diffusion au white spirit de 1400 mg/jour, alors que ces mêmes récipients traités ont un pouvoir de barrière à la diffusion au white spirit de 15 mg mg/jour à 40 °C et après 2 mois de macération.For example, such untreated containers have a 1400 mg / day white spirit diffusion barrier, whereas these same treated containers have a barrier to diffusion of 15 mg / day at 40 ° C and after 2 months of maceration.
Claims (15)
- Method for treatment of an article made of polymer material in order to deposit on it a coating with a barrier effect on at least one of its surfaces, characterised in that it comprises the creation of a discharge plasma in tetrafluoroethane-1,1,1,2 or pentafluoroethane precursor gas and in that it comprises, before the creation of a discharge plasma in tetrafluoroethane-1,1,1,2 or pentafluoroethane gas, the creation of a discharge plasma in acetylene gas at low pressure.
- Method for treatment of an article made of polymer material as claimed in claim 1, characterised in that the space densities of power are between 0.01 W/cm3 and 10 W/cm3, preferentially between 0.1 W/cm3 and 3 W/cm3.
- Method for treatment of an article made of polymer material as claimed in claim 1 or 2, characterised in that the frequencies are 40 kHz, 13.56 MHz or 2,450 MHz.
- Method for treatment of an article made of polymer material as claimed in any of claims 1 to 3, characterised in that the plasma phase time is between one second and a few minutes, preferentially between one second and thirty seconds.
- Method for treatment of an article made of polymer material as claimed in any of claims 1 to 4, characterised in that the precursor gas is introduced into the reaction chamber at a flow rate such that the pressure inside this treatment chamber is brought to values between 0.002 mbar and 10 mbar, more preferably between 0.01 mbar and 1 mbar.
- Method for treatment of an article made of polymer material as claimed in any of claims 1 to 5, characterised in that it comprises, in addition, a prior preparation of the surface of the article made of polymer material that is to be coated, this preparation implementing a low pressure discharge plasma in a gas comprising at least one of the following gases: oxygen, hydrogen, argon, carbon dioxide, helium, nitrogen.
- Method for treatment of an article made of polymer material as claimed in claim 6, characterised in that, for the surface preparation step, the low pressure discharge plasma is a plasma made of a mixture of argon/hydrogen, the pressure being between 0.01 mbar and 5 mbar, more preferably between 0.05 mbar and 1 mbar.
- Method for treatment of an article made of polymer material as claimed in claim 7, characterised in that, for the surface preparation, the space densities of power are between 0.01 W/cm3 and 10 W/cm3, preferentially between 0.1 W/cm3 and 3 W/cm3.
- Method for treatment of an article made of polymer material as claimed in claim 7 or 8, characterised in that the time for surface preparation by the plasma is between one second and thirty seconds.
- Method for treatment of an article made of polymer material as claimed in any of claims 1 to 9, wherein an additional coating is created with a low pressure discharge plasma in C2H2 or pentafluoroethane gas at low pressure.
- Method for treatment of an article made of polymer material as claimed in any of claims 1 to 10, characterised in that the polymer is a polyethylene, a polypropylene, a polyamide, a PET or a vinyl polychloride.
- Method for treatment of an article made of polymer material as claimed in any of claims 1 to 11, characterised in that the article is a totally open hollow container.
- Application of the method as claimed in claim 12 to the treatment of a rigid or flexible container made of high density polyethylene (PEHD), characterised in that the pressure inside the container is brought to a pressure less than 0.05 mbar while the pressure on the outside is maintained at approximately 30 mbar, and in that a flow of a mixture of argon and hydrogen gases is introduced into the container in such a way that the internal pressure attains a value between 0.05 and 1 mbar, microwave energy then being applied with a power of approximately 200 W, causing the creation of a surface preparation plasma that is maintained for a duration of 6 seconds, the microwave energy and the flow of the gas mixture being cut off after this surface preparation time.
- Application as claimed in claim 13, characterised in that a flow of acetylene gas is then introduced into the container in such a way that the internal pressure attains a value between 0.05 and 0.3 mbar, microwave energy then being applied with a power of approximately 300 W, causing the creation of a deposit plasma that is maintained for a duration of one second, the microwave energy and the gas flow being cut off afterwards.
- Application as claimed in claim 13 or 14, characterised in that a flow of tetrafluoroethane-1,1,1,2 precursor gas is introduced into the container in such a way that the internal pressure attains a value between 0.05 and 0.3 mbar, microwave energy then being applied with a power of approximately 300 W, causing the creation of a deposit plasma that is maintained for a duration of six seconds, after which the microwave energy and gas flow are cut off.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0413862A FR2880027B1 (en) | 2004-12-23 | 2004-12-23 | PROCESS FOR PROCESSING A POLYMERIC MATERIAL, DEVICE FOR CARRYING OUT SAID METHOD AND USE OF SAID DEVICE FOR TREATING HOLLOW BODIES |
PCT/FR2005/003277 WO2006070136A1 (en) | 2004-12-23 | 2005-12-23 | Method for treating a polymer material, device for implementing said method and use of said device for treating hollow bodies |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1827716A1 EP1827716A1 (en) | 2007-09-05 |
EP1827716B1 true EP1827716B1 (en) | 2014-05-21 |
Family
ID=34953812
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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EP05850613.0A Active EP1827716B1 (en) | 2004-12-23 | 2005-12-23 | Method for treating a polymer material, device for implementing said method and use of said device for treating hollow bodies |
Country Status (6)
Country | Link |
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US (1) | US20080081129A1 (en) |
EP (1) | EP1827716B1 (en) |
BR (1) | BRPI0519402A2 (en) |
ES (1) | ES2490594T3 (en) |
FR (1) | FR2880027B1 (en) |
WO (1) | WO2006070136A1 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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EP2059555B1 (en) * | 2006-08-23 | 2012-04-04 | Europlasma Nv | Method for pre-treating fibre reinforced composite plastic materials prior to painting and method for applying a painting layer on fibre reinforced composite plastic materials |
GB2460843A (en) * | 2008-06-10 | 2009-12-16 | Consort Medical Plc | Cold plasma polymer coated pressurised dispensing apparatus |
ES2949408T3 (en) * | 2019-01-09 | 2023-09-28 | Europlasma Nv | Plasma polymerization method for coating a substrate with a polymer |
FR3091875B1 (en) | 2019-01-17 | 2021-09-24 | Innovative Systems Et Tech Isytech | Process and treatment device for the deposition of a barrier effect coating |
AR127433A1 (en) | 2021-10-25 | 2024-01-24 | Adama Makhteshim Ltd | METHOD AND COMPOSITION TO REDUCE SOLVENT RELEASE AND ODOR FROM AGROCHEMICAL FORMULATIONS |
Family Cites Families (17)
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US4900622A (en) * | 1986-09-18 | 1990-02-13 | Tdk Corporation | Magnetic recording medium |
DE69032773T2 (en) * | 1989-02-14 | 1999-05-27 | Seiko Epson Corp., Tokio/Tokyo | Method of manufacturing a semiconductor device |
DE59406143D1 (en) * | 1993-06-01 | 1998-07-09 | Buck Chem Tech Werke | METHOD FOR PRODUCING A POLYMER COATING ON PLASTIC HOLLOW BODIES |
DE4318086A1 (en) * | 1993-06-01 | 1994-12-08 | Kautex Werke Gmbh | Process and device for producing a polymeric outer layer in plastic blow mouldings |
DE4318084A1 (en) * | 1993-06-01 | 1994-12-08 | Kautex Werke Gmbh | Process and device for producing a polymeric outer layer in plastic blow mouldings |
US5521351A (en) * | 1994-08-30 | 1996-05-28 | Wisconsin Alumni Research Foundation | Method and apparatus for plasma surface treatment of the interior of hollow forms |
JP3630831B2 (en) * | 1995-04-03 | 2005-03-23 | キヤノン株式会社 | Method for forming deposited film |
DE59505516D1 (en) * | 1995-04-28 | 1999-05-06 | Inpro Innovations Gmbh | Process for the plasma-based production of multifunctional layers on plastic parts |
US5674621A (en) * | 1996-01-29 | 1997-10-07 | Eastman Kodak Company | Fuser members with an outermost layer of a fluorinated diamond like carbon |
US6132813A (en) * | 1997-12-11 | 2000-10-17 | International Business Machines Corporation | High density plasma surface modification for improving antiwetting properties |
WO2001037314A1 (en) * | 1999-11-15 | 2001-05-25 | Lam Research Corporation | Materials and gas chemistries for processing systems |
JP2002100623A (en) * | 2000-09-20 | 2002-04-05 | Fuji Daiichi Seisakusho:Kk | Thin film semiconductor manufacturing apparatus |
US20030070608A1 (en) * | 2001-10-12 | 2003-04-17 | Buschbeck Hans Martin | Method for producing components and ultrahigh vacuum CVD reactor |
GB0125380D0 (en) * | 2001-10-23 | 2001-12-12 | Glaxo Group Ltd | Medicament dispenser |
US7087305B2 (en) * | 2002-05-30 | 2006-08-08 | Eastman Kodak Company | Fuser member with tunable gloss level and methods and apparatus for using the same to fuse toner images |
KR20050086510A (en) * | 2002-11-12 | 2005-08-30 | 다우 글로벌 테크놀로지스 인크. | Process and apparatus for depositing plasma coating onto a container |
EP1595913A1 (en) * | 2004-05-14 | 2005-11-16 | Inergy Automotive Systems Research (SA) | Method for preparing a hollow element of a fuel system |
-
2004
- 2004-12-23 FR FR0413862A patent/FR2880027B1/en not_active Expired - Fee Related
-
2005
- 2005-12-23 US US11/793,968 patent/US20080081129A1/en not_active Abandoned
- 2005-12-23 BR BRPI0519402-4A patent/BRPI0519402A2/en not_active IP Right Cessation
- 2005-12-23 EP EP05850613.0A patent/EP1827716B1/en active Active
- 2005-12-23 ES ES05850613.0T patent/ES2490594T3/en active Active
- 2005-12-23 WO PCT/FR2005/003277 patent/WO2006070136A1/en active Application Filing
Also Published As
Publication number | Publication date |
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US20080081129A1 (en) | 2008-04-03 |
EP1827716A1 (en) | 2007-09-05 |
FR2880027A1 (en) | 2006-06-30 |
FR2880027B1 (en) | 2007-04-20 |
ES2490594T3 (en) | 2014-09-04 |
BRPI0519402A2 (en) | 2009-01-20 |
WO2006070136A1 (en) | 2006-07-06 |
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