EP1756468B1 - System und verfahren zur zufuhr von nh3 mit hohem durchfluss zur herstellung von flachen anzeigepaneelen - Google Patents

System und verfahren zur zufuhr von nh3 mit hohem durchfluss zur herstellung von flachen anzeigepaneelen Download PDF

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Publication number
EP1756468B1
EP1756468B1 EP04735932A EP04735932A EP1756468B1 EP 1756468 B1 EP1756468 B1 EP 1756468B1 EP 04735932 A EP04735932 A EP 04735932A EP 04735932 A EP04735932 A EP 04735932A EP 1756468 B1 EP1756468 B1 EP 1756468B1
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EP
European Patent Office
Prior art keywords
liquid
ammonia
vaporizer
delivery
product
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP04735932A
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English (en)
French (fr)
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EP1756468A1 (de
Inventor
Richard J. Udischas
Joseph E. Paganessi
Guillaume Rameau
Hervé Dulphy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
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Publication of EP1756468A1 publication Critical patent/EP1756468A1/de
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • F17C13/021—Special adaptations of indicating, measuring, or monitoring equipment having the height as the parameter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • F17C13/023—Special adaptations of indicating, measuring, or monitoring equipment having the mass as the parameter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • F17C13/025—Special adaptations of indicating, measuring, or monitoring equipment having the pressure as the parameter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • F17C13/026—Special adaptations of indicating, measuring, or monitoring equipment having the temperature as the parameter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C9/00—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure
    • F17C9/02—Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure with change of state, e.g. vaporisation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/01—Shape
    • F17C2201/0104—Shape cylindrical
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/03—Orientation
    • F17C2201/035—Orientation with substantially horizontal main axis
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/05—Size
    • F17C2201/052—Size large (>1000 m3)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/05—Size
    • F17C2201/054—Size medium (>1 m3)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0123—Mounting arrangements characterised by number of vessels
    • F17C2205/013—Two or more vessels
    • F17C2205/0134—Two or more vessels characterised by the presence of fluid connection between vessels
    • F17C2205/0142—Two or more vessels characterised by the presence of fluid connection between vessels bundled in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0123—Mounting arrangements characterised by number of vessels
    • F17C2205/013—Two or more vessels
    • F17C2205/0134—Two or more vessels characterised by the presence of fluid connection between vessels
    • F17C2205/0146—Two or more vessels characterised by the presence of fluid connection between vessels with details of the manifold
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0352—Pipes
    • F17C2205/0355—Insulation thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/03—Mixtures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0146—Two-phase
    • F17C2223/0153—Liquefied gas, e.g. LPG, GPL
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/033—Small pressure, e.g. for liquefied gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/035—High pressure (>10 bar)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/04—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by other properties of handled fluid before transfer
    • F17C2223/042—Localisation of the removal point
    • F17C2223/046—Localisation of the removal point in the liquid
    • F17C2223/047—Localisation of the removal point in the liquid with a dip tube
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
    • F17C2225/0107—Single phase
    • F17C2225/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/03—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the pressure level
    • F17C2225/035—High pressure, i.e. between 10 and 80 bars
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/01—Propulsion of the fluid
    • F17C2227/0107—Propulsion of the fluid by pressurising the ullage
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/01—Propulsion of the fluid
    • F17C2227/0128—Propulsion of the fluid with pumps or compressors
    • F17C2227/0135—Pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0302—Heat exchange with the fluid by heating
    • F17C2227/0304—Heat exchange with the fluid by heating using an electric heater
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0302—Heat exchange with the fluid by heating
    • F17C2227/0309—Heat exchange with the fluid by heating using another fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0367—Localisation of heat exchange
    • F17C2227/0388—Localisation of heat exchange separate
    • F17C2227/0393—Localisation of heat exchange separate using a vaporiser
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/04—Methods for emptying or filling
    • F17C2227/041—Methods for emptying or filling vessel by vessel
    • F17C2227/042—Methods for emptying or filling vessel by vessel with change-over from one vessel to another
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/04—Methods for emptying or filling
    • F17C2227/044—Methods for emptying or filling by purging
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/04—Methods for emptying or filling
    • F17C2227/045—Methods for emptying or filling by vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
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    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
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    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
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    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/0408—Level of content in the vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/0421—Mass or weight of the content of the vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/043—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/0439—Temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/06—Controlling or regulating of parameters as output values
    • F17C2250/0605—Parameters
    • F17C2250/0626—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/07—Actions triggered by measured parameters
    • F17C2250/072—Action when predefined value is reached
    • F17C2250/077—Action when predefined value is reached when empty
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors

Definitions

  • the invention relates to a system and method for high flow delivery of liquefied NH3 for use in the manufacture of flat panel display.
  • US-A-6 647 930 describes a system and method to deliver high flow rates of liquids.
  • a condenser is required to assure liquid delivery to a secondary containment tank where vaporization occurs.
  • the secondary containment tank needs to be custom designed to allow for piping to be run inside for containment of heat transfer fluid, liquid product entry, gas phase withdrawal, pressure, temperature, and level measurement.
  • US-A-6 637 212 discloses a NH3 gas delivery system having a constant impurity level in the liquid phase and gaseous phase, by completely vaporizing all of the liquefied gas and the soluble impurities that enter the vaporization unit. Accordingly, contrary to the present invention, the invention disclosed in this patent uses a non conventional vaporizer.
  • US 5,467,603 relates to a compact gas supply installation or supplying a gas under high pressure to at least one user station, of the type comprising an insulated tank for storing the gas in at least partially liquid form, having an upper part and a lower part, and at least one supply line comprising an evaporator extending between the lower part of the first tank and the user station.
  • US 6,395,064 discloses a system for vaporizing and purifying a gas to produce ultra pure chemical gases employed at a semiconductor processing facility.
  • a pressure build circuit (vaporizer) is used at the source, potentially being an ISO-Container . of more than 20,000 litre capacity, to help maintain pressure in the container during high flow withdrawal of liquid.
  • This pressure maintained in the gaseous headspace above liquid in the container helps to keep liquid phase during delivery, while helping delivery of this liquid without the need of a pump.
  • the NH3 product is preferably delivered from the NH3 container source in liquid phase to a main vaporizer located at a remote distance from the source. Vaporization is preferably done indoors near the point of use of the NH3 gas minimizing the distance to transport gas phase product.
  • back pressure regulation means back pressure regulator is used to minimize the size of the gas surge tank needed to compensate for potential flow requirement changes.
  • Vaporisers useful for the invention are for example electrical type vaporizers or shell and tube heat exchanger type vaporizers, which can be operated for high flow of vapor phase product with a liquid phase feed. These vaporizers have two modes of operation : a feed back mode and a feed through mode.
  • the feed back mode is when the vaporizer is used as a pressure builder for the source tank, the feed through mode being when the vaporizer provides gas product to point of use or the head space of the source tank.
  • the system and process according to the invention comprises usually three different portions (from upstream to downstream following the flow of NH3) :
  • an electronic controller such as a PLC is used to control the opening or the closing of the valves in response to pressure detector signals, temperature detector signals, request of product signals from the customer (e.g. reactor cleaning), alarm signals, empty container signals, purge signals, etc ...
  • Bulk supply will normally be accomplished with large source containers as shown an fig. 1 and 2 as ISO-containers. These source containers will normally be stored outside and experience the temperature fluctuations of ambient temperatures.
  • a pressure build circuit 10 receives a portion of the liquid phase to a pressure build vaporizer(s) that produces gas phase to return to the head space of the bulk container. This is the pressure build circuit (electrical vaporizer connected to a bulk tank). The head space pressure then can drive the delivery of the liquid phase bulk material to the (indoor) main vaporizer(s), which may be located several kilometres away.
  • Vacuum / pressure purge can be done using N2 or other appropriate purge gas during disconnection / reconnection of the old / new source container Purging needs to be done on the liquid and gas connections to the source container.
  • the outdoor liquid supply could be experiencing temperature and humidity variations of the outdoor environment for several kilometres to supply several customer fabrication facilities. Vacuum jacketing, or insulation could be used for the tubing to avoid heating or cooling of tubing in high or low temperature extremes.
  • the liquid supply When the liquid supply reaches the inside of the fabrication facility it will enter into a vaporizer(s) to provide the heat exchange to produce the vapor phase product.
  • the heater means to the vaporizer(s) can be left on at all times.
  • the valve upstream of the vaporizer(s) is opened or closed based on the pressure in the surge tank downstream.
  • a back pressure regulator is used immediately downstream of the main vaporizer for dual purposes. Operated at high pressures it helps assure single-phase liquid supply to the vaporizer(s) while also allowing the gas surge tank size to be minimized.
  • the vapor supply line coming from the vaporizer(s) shown in red could be insulated up to the forward pressure regulator. Heating may or may not be required depending on the gas and flow rate required.
  • a surge tank 30 is provided to compensate for the change in customer flow rate requirements. For the case when the customer is not running and in the next moment requires full design capacity, the surge tank is sized to supply until the main vaporizer 20 comes up to full delivery capacity. For the case where the customer is running full flow then stops production completely the pressure measured with the pressure sensor 31 at the surge tank 30 will rise above the upper authorized pressure limit. The upper authorized pressure limit when reached will trigger closure of the valve 32 upstream of the main vaporizer 20.
  • the surge tank 30 in this case may be sized to receive the gas that will be produced by the vaporization of the maximum remaining liquid in the vaporizer.
  • the vaporizer used allows flow backward when closed so that there is no need to size the surge tank taking into account this consideration.
  • a bulk storage means including pressure build-up means 1 is provided upstream: this bulk storage means comprises two containers 11 and 12 such as iso-containers, having preferably a large capacity for the use envisioned herein (flat display panels). These containers are each located above a scale 13, 14. Each container is filled up with liquid 15, 17 having respectively a gaseous headspace 16, 18 above. The liquid is withdrawn through pipes 19, 21 (alternatively) then flown through valves 22, 23, 24 and pipe 28, respectively through valves 25, 26, 27 and pipe 29 to pipe 50 on the one hand which is part of the outdoor liquid supply 2 and to pipe 40 which feeds the pressure build circuit 10 with liquid 15 or 17.
  • Pipe 40 is connected to valve 41, pipe 42 then the input of the vaporizer of the pressure build circuit 10 which delivers in pipe 43 the gaseous product under pressure so vaporized (the pressure build circuit comprises, e.g. electrical heating means to vaporize the liquid and build a pressurized gaseous phase).
  • the pressure build circuit comprises, e.g. electrical heating means to vaporize the liquid and build a pressurized gaseous phase.
  • This gaseous product is then fed through valve 44, pipe 46 and valve 47 to the gaseous headspace 16 above liquid 15 to build up pressure in container 11, respectively through valve 45 pipe 48, valve 49 to the gaseous headspace 18 above liquid 17 to build up pressure in container 12.
  • the PLC controller of the system allows to switch from one container 11 to the other 12 or vice versa, when necessary (the switch is usually controlled by level detection, or by using the scales 13, 14 which give an indication of the volume of liquid still contained in each of the containers).
  • the piping system may comprise different valving system (check valve, close valve, three ways valve to purge the piping anytime it is needed with e g high purity nitrogen and at least one control valve controlled by the PLC system to open or close the line.
  • the second portion or liquid supply means 2 comprises at least one common liquid supply line 50 to transport the liquid from the first portion (bulk storage 1) to the main vaporizer 20.There may be several branches 51, 52 etc... connected to this common line 50 (only one being represented) for feeding a vaporizer 20 (there may be several vaporizers and gaseous supply sections like 3 on fig 1 ). Usually this second portion 2 is located outdoor (as usually first portion 1 is), with a temperature which may vary from -20°C to 80°C. These lines 50, 51, 52 need to be insulated in such a way that no or substantially no gaseous phase is present in said line portions (purge valves / check valves associated with appropriate abatement, if necessary, may be provided on these lines, if appropriate).
  • the third portion or vaporizer and gaseous supply means 3 is usually located indoor, even though not mandatory. It usually comprises two sub portions (from upstream to downstream) 4 and 5:
  • an electronic controller such as a PLC (represented as 130 on fig. 2 ) is used to control the opening or the closing of the valves in response to pressure detector signals, temperature detector signals, request of product signals from the customer (e.g. reactor cleaning), alarm signals, empty container signals, purge signals, etc sent by detectors like 59 60 65 72 31 or others with no specific references on the drawings.
  • a back pressure regulator 64 is used to maintain liquid delivery up to the main vaporizer (in cooperation with other means as explained hereabove).
  • FIG. 2 shows an alternate embodiment accomplishing the same function by using a pump104 instead of the pressure build circuit to deliver the liquid to indoor vaporizers such as 20.
  • the pump 104 is fed through the valve 101 and pipe 102 and delivers pressurized liquid in valves 105, 106 to the pipe 57; the PLC 130 is controlling the signals from various sensors, valves or the like such as 132, 131, 134, 135, 136, 133, 140, 141; 142 etc....
  • the pump is used to pump liquid from the containers (bottom) with no pressure build circuit means provided contrary to the embodiment of fig 1 .

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Claims (4)

  1. System zur Zufuhr von flüssigem Ammoniak als ein verflüssigtes Produkt (15; 17) mit hohem Durchfluss zu einem Ort, an dem flache Anzeigepaneele oder dergleichen hergestellt werden, mit einem Mittel (1) zur Bulkspeicherung von flüssigem Ammoniak, das mindestens einen Behälter (11, 12) zur Speicherung des Ammoniaks in flüssiger Phase (15; 17) enthält, wobei sich eine gasförmige Phase (16; 18) des Ammoniaks über dem flüssigen Ammoniak befindet, einem Flüssigkeitsversorgungszufuhrmittel (2) zum Leiten des flüssigen Ammoniaks von dem Bulkspeicherungsmittel (1) zu einem Hauptverdampfermittel (4), während das flüssige Ammoniak während der ganzen Zufuhr zu dem Hauptverdampfermittel (4) im Wesentlichen in flüssiger Form gehalten wird, und einem Hauptverdampfermittel (4) zum Verdampfen des flüssigen Ammoniaks als Reaktion auf die am Herstellungsort gestellte Anforderung an gasförmigem Produkt; wobei ein Druckaufbaukreislaufmittel (10) als Teil des Bulkspeicherungsmittels (1) vorgesehen ist, das ein Ende aufweist, das flüssigen Ammoniak empfängt, und am anderen Ende gasförmiges Ammoniak zuführt, das den Raum über mindestens einen der flüssiges Ammoniak speichernden Behälter (11; 12) versorgt, um einen Druck über der Flüssigkeit aufrechtzuerhalten, der dazu ausreicht, im Wesentlichen nur flüssiges Ammoniak durch den entsprechenden mindestens einen Behälter (11, 12) dem Flüssigkeitsversorgungszufuhrmittel (2) zuzuführen, dadurch gekennzeichnet, dass es weiterhin ein Gegendruckregelmittel (64) umfasst, das stromabwärts des Hauptverdampfers (20) angeordnet ist und dazu beiträgt, eine Flüssigkeitszufuhr von dem Behälter zum Hauptverdampfer bereitzustellen.
  2. System nach Anspruch 1, wobei der Ausgang (62) des Hauptverdampfermittels (4) durch ein Ventilsystem (32; 63) mit einem Dampfausgleichsbehälter (30) verbunden ist, der eine geeignete Größe im Verhältnis zu der Anforderung des Herstellungsorts aufweist.
  3. System nach einem der Ansprüche 1 oder 2, weiterhin mit einem PLC-Mittel (130) zur Steuerung des Stroms flüssigen und/oder gasförmigen Ammoniaks bis zu der Verwendungsstelle im Herstellungsort.
  4. System nach Anspruch 1, das einen Ausgleichsbehälter (30) umfasst, der stromabwärts des Hauptverdampfers (20) angeordnet ist, wobei das Gegendruckregelmittel (64) stromaufwärts des Ausgleichsbehälters (30) angeordnet ist.
EP04735932A 2004-06-03 2004-06-03 System und verfahren zur zufuhr von nh3 mit hohem durchfluss zur herstellung von flachen anzeigepaneelen Active EP1756468B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/IB2004/001815 WO2005119121A1 (en) 2004-06-03 2004-06-03 System and method for high flow delivery of nh3 for flat display panel manufacture

Publications (2)

Publication Number Publication Date
EP1756468A1 EP1756468A1 (de) 2007-02-28
EP1756468B1 true EP1756468B1 (de) 2009-08-12

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Country Status (5)

Country Link
EP (1) EP1756468B1 (de)
JP (1) JP2008501903A (de)
AT (1) ATE439547T1 (de)
DE (1) DE602004022596D1 (de)
WO (1) WO2005119121A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11248747B2 (en) * 2014-05-29 2022-02-15 Chart Inc. LNG delivery system with saturated fuel reserve
AU2015360297B2 (en) * 2014-12-12 2020-05-14 Chart Inc. System and method for manifolding portable cryogenic containers

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1458560A (en) * 1974-06-11 1976-12-15 Coal Industry Patents Ltd Pneumatic power units using revaporised liquefied gas
FR2707371B1 (fr) * 1993-07-08 1995-08-11 Air Liquide Installation de fourniture d'un gaz sous haute pression.
US6122931A (en) * 1998-04-07 2000-09-26 American Air Liquide Inc. System and method for delivery of a vapor phase product to a point of use
US6032483A (en) * 1998-04-07 2000-03-07 American Air Liquide Inc. System and method for delivery of a vapor phase product to a point of use
US6395064B1 (en) * 1999-10-26 2002-05-28 American Air Liquide, Inc System and method for purifying and distributing chemical gases
DE10040679A1 (de) * 2000-08-19 2002-02-28 Messer Griesheim Gmbh Vorrichtung und Verfahren zur druckgeregelten Versorgung aus einem Flüssiggastank
FR2814530A1 (fr) * 2000-09-22 2002-03-29 Jean Andre Justin Coton Alimentation de moteurs pneumatiques autonomes avec stockage du gaz en phase liquide
US6637212B2 (en) * 2001-04-27 2003-10-28 Matheson Tri-Gas Method and apparatus for the delivery of liquefied gases having constant impurity levels

Also Published As

Publication number Publication date
EP1756468A1 (de) 2007-02-28
JP2008501903A (ja) 2008-01-24
DE602004022596D1 (de) 2009-09-24
ATE439547T1 (de) 2009-08-15
WO2005119121A1 (en) 2005-12-15

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