EP1742356A4 - Electromechanical filter - Google Patents

Electromechanical filter

Info

Publication number
EP1742356A4
EP1742356A4 EP05728565A EP05728565A EP1742356A4 EP 1742356 A4 EP1742356 A4 EP 1742356A4 EP 05728565 A EP05728565 A EP 05728565A EP 05728565 A EP05728565 A EP 05728565A EP 1742356 A4 EP1742356 A4 EP 1742356A4
Authority
EP
European Patent Office
Prior art keywords
electromechanical filter
electromechanical
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP05728565A
Other languages
German (de)
French (fr)
Other versions
EP1742356A1 (en
EP1742356B1 (en
Inventor
Yasuyuki Naito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Original Assignee
Panasonic Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp filed Critical Panasonic Corp
Publication of EP1742356A1 publication Critical patent/EP1742356A1/en
Publication of EP1742356A4 publication Critical patent/EP1742356A4/en
Application granted granted Critical
Publication of EP1742356B1 publication Critical patent/EP1742356B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2426—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators in combination with other electronic elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2447—Beam resonators
    • H03H9/2463—Clamped-clamped beam resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/462—Microelectro-mechanical filters
    • H03H9/465—Microelectro-mechanical filters in combination with other electronic elements
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
EP05728565.2A 2004-04-28 2005-04-11 Electromechanical filter Active EP1742356B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2004132655 2004-04-28
JP2005080286A JP4602130B2 (en) 2004-04-28 2005-03-18 Electromechanical filter
PCT/JP2005/007027 WO2005107070A1 (en) 2004-04-28 2005-04-11 Electromechanical filter

Publications (3)

Publication Number Publication Date
EP1742356A1 EP1742356A1 (en) 2007-01-10
EP1742356A4 true EP1742356A4 (en) 2009-06-10
EP1742356B1 EP1742356B1 (en) 2014-07-02

Family

ID=35241982

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05728565.2A Active EP1742356B1 (en) 2004-04-28 2005-04-11 Electromechanical filter

Country Status (4)

Country Link
US (1) US7545236B2 (en)
EP (1) EP1742356B1 (en)
JP (1) JP4602130B2 (en)
WO (1) WO2005107070A1 (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4593239B2 (en) * 2003-11-19 2010-12-08 パナソニック株式会社 Electromechanical filter
JP4728866B2 (en) * 2006-04-13 2011-07-20 株式会社東芝 Resonant circuit, filter circuit, and oscillation circuit
GB0612754D0 (en) * 2006-06-27 2006-08-09 Univ Cambridge Tech Semiconductor device transducer and method
JP4930769B2 (en) * 2006-09-04 2012-05-16 セイコーインスツル株式会社 Oscillator
JP4977431B2 (en) * 2006-10-12 2012-07-18 三洋電機株式会社 Micromechanical resonator
JP5046966B2 (en) * 2007-01-23 2012-10-10 パナソニック株式会社 Electromechanical resonator and manufacturing method thereof
DE102007034072B3 (en) * 2007-07-20 2009-03-19 Ludwig-Maximilians-Universität München Apparatus and method for charge transfer
JP2009060173A (en) * 2007-08-29 2009-03-19 Seiko Instruments Inc Oscillation element and oscillator having the same
JP5055596B2 (en) * 2007-08-29 2012-10-24 セイコーインスツル株式会社 Oscillator and oscillator having the oscillator
JP5339755B2 (en) * 2008-03-25 2013-11-13 ラピスセミコンダクタ株式会社 MEMS vibrator, semiconductor package
US20100171569A1 (en) * 2008-11-18 2010-07-08 Ecole Polytechnique Federale De Lausanne (Epfl) Active double or multi gate micro-electro-mechanical device with built-in transistor
FR2942681B1 (en) * 2009-02-27 2011-05-13 Commissariat Energie Atomique MICROMETRIC OR NANOMETRIC RESONANT DEVICE WITH TRANSISTORS
FR2942682A1 (en) * 2009-02-27 2010-09-03 Commissariat Energie Atomique DEVICE RESULTING IN IMPROVED CHARACTERISTICS
US20120180004A1 (en) * 2010-06-30 2012-07-12 Paul John Werbos Circuit Design Methods for Quantum Separator (QS) and Systems to Use Its Output
JP5075296B2 (en) * 2011-02-21 2012-11-21 パナソニック株式会社 MEMS resonator
EP2788863B1 (en) * 2011-12-07 2018-12-12 Quintessencelabs Pty Ltd Integrated quantum-random noise generator using quantum vacuum states of light
US11189435B2 (en) 2019-12-10 2021-11-30 International Business Machines Corporation Switch device facilitating frequency shift of a resonator in a quantum device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0797758B1 (en) * 1994-12-16 2002-09-18 Honeywell Inc. Integrated resonant microbeam sensor and transistor oscillator

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5694059A (en) 1991-12-24 1997-12-02 Hitachi Ltd. Buffer of fine connection structure for connecting an atom level circuit and a general semiconductor circuit
JPH07221322A (en) * 1994-02-04 1995-08-18 Hitachi Ltd Circuit
WO1994014240A1 (en) * 1992-12-11 1994-06-23 The Regents Of The University Of California Microelectromechanical signal processors
AU3346000A (en) * 1999-01-15 2000-08-01 Regents Of The University Of California, The Polycrystalline silicon germanium films for forming micro-electromechanical systems
US6621134B1 (en) * 2002-02-07 2003-09-16 Shayne Zurn Vacuum sealed RF/microwave microresonator
GB0206509D0 (en) * 2002-03-20 2002-05-01 Qinetiq Ltd Micro-Electromechanical systems

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0797758B1 (en) * 1994-12-16 2002-09-18 Honeywell Inc. Integrated resonant microbeam sensor and transistor oscillator

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
FLORIAN W BEIL ET AL: "Comparing schemes of displacement detection and subharmonic generation in nanomachined mechanical resonators", NANOTECHNOLOGY, IOP, BRISTOL, GB, vol. 14, no. 7, 1 July 2003 (2003-07-01), pages 799 - 802, XP020067597 *
M BLENCOWE: "Nanomechanical Quantum Limits", SCIENCE, vol. 304, no. 5667, 2 April 2004 (2004-04-02), pages 56 - 57, XP007907608 *
NGUYEN C T C: "MICROMACHINING TECHNOLOGIES FOR MINIATURIZED COMMUNICATION DEVICES", PROCEEDINGS OF THE SPIE, vol. 3511, 21 September 1998 (1998-09-21), pages 24 - 38, XP001085288 *
R G KNOBEL, A N CLELAND: "Nanometre-scale displacement sensing using a single electron transistor", NATURE, vol. 424, no. 6946, 17 July 2003 (2003-07-17), pages 291 - 293, XP007907583 *
See also references of WO2005107070A1 *

Also Published As

Publication number Publication date
WO2005107070A1 (en) 2005-11-10
EP1742356A1 (en) 2007-01-10
EP1742356B1 (en) 2014-07-02
US20070222541A1 (en) 2007-09-27
US7545236B2 (en) 2009-06-09
JP4602130B2 (en) 2010-12-22
JP2005341536A (en) 2005-12-08

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