EP1742069B1 - Inertial sensor with reduced error currents due to reduced width and distance of conductors in critical zones - Google Patents
Inertial sensor with reduced error currents due to reduced width and distance of conductors in critical zones Download PDFInfo
- Publication number
- EP1742069B1 EP1742069B1 EP06291012.0A EP06291012A EP1742069B1 EP 1742069 B1 EP1742069 B1 EP 1742069B1 EP 06291012 A EP06291012 A EP 06291012A EP 1742069 B1 EP1742069 B1 EP 1742069B1
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- European Patent Office
- Prior art keywords
- distance
- conductive tracks
- sensor
- width
- disturbing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000004020 conductor Substances 0.000 title description 2
- 230000005284 excitation Effects 0.000 claims description 12
- 230000001133 acceleration Effects 0.000 claims description 7
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 229940082150 encore Drugs 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
Definitions
- the present invention relates to a piezoelectric inertial sensor.
- inertial sensors made from a piezoelectric quartz plate in which are delimited by etching, a support member, a decoupling frame connected to the support member, and a vibrating member connected to a mass associated with the frame of decoupling, the vibrating member carrying excitation electrodes connected to an excitation circuit comprising conductive tracks carried by the piezoelectric plate.
- the excitation circuit is supplied with an alternating current causing, by a piezoelectric effect, the vibration of the vibrating member according to a natural frequency of vibration of this vibrating element.
- the mass exerts on the vibrating element a force which modifies the vibration frequency so that the variation of the vibration frequency of the vibrating element makes it possible to determine the acceleration to which the sensor is submitted.
- the modification of the vibration frequency is measured by measuring a current in the excitation circuit.
- the measured current does not exactly correspond to the variation of the vibrating frequency of the vibrating element, the current collected comprising a disturbing current adding to the current useful in a way disturbing the useful information and can go as far as to cause a saturation of the electronics of implementation of the sensor and thus a malfunction of the accelerometer.
- An object of the invention is to minimize the interfering current superimposed on the useful current.
- the interfering current is mainly generated by disturbing portions of the excitation circuit in which two conductive tracks extend one beside the other on either side of a median plane of a plate portion undergoing deformation when the sensor is subjected to acceleration. It has indeed been found that charges of opposite signs then appear on either side of the median plane and are collected by the closest conductive track so that these charges generate a disturbing current which is all the stronger as the conductive tracks are closer to the edges of the corresponding plate portion.
- the conductive tracks have a width of 50 microns and are spaced a distance of 100 microns.
- conductor tracks having a width of less than 50 ⁇ m, and preferably a width of between 5 ⁇ m and 20 ⁇ m, are provided in the disturbing circuit portions, the conductive tracks being spaced apart by a distance of less than 100 ⁇ m. ⁇ m, and preferably a distance of between 10 ⁇ m and 50 ⁇ m. It has been found that a width of the conductive tracks of less than 5 ⁇ m can cause disturbances in the conduction of the tracks and a distance of less than 10 ⁇ m may cause parasitic capacitive effects reducing the beneficial effects obtained by the reduction of the disturbing current. .
- the sensor according to the invention comprises, in a manner known per se of the aforementioned document, a piezoelectric quartz plate 1 in which are delimited: a support member 2 intended to be fixed in a housing, a decoupling frame 3 having a side connected to the support member 2 by a bridge 4, and an opposite side connected to a first ground 5 by a bridge 6, a second ground 7 connected to the first ground 5 and the bridge 6 by connecting elements 8 , and a vibrating element 9 having integral ends of the masses 5 and 7, all these elements being obtained by etching the piezoelectric plate 1.
- the vibrating member 9 carries two excitation electrodes 10 connected to an excitation circuit comprising two conductive tracks 11 connected to supply and measurement terminals 12.
- the excitation circuit comprises circuit portions 13 in which the conductive tracks 11 extend next to each other on both sides of the circuit. a median plane M of the bridges.
- the conductive tracks 11 have a width l less than 50 microns, and preferably a width of 10 microns or at least a width of between 5 microns and 20 microns, and are spaced apart by a distance of less than 100 microns. preferably a distance equal to 40 ⁇ m and at least a distance of between 10 ⁇ m and 50 ⁇ m.
- the invention applies to any sensor whose excitation circuit comprises a disturbing circuit portion in which two conductive tracks extend one beside the other on either side of a median plane of a part of the plate undergoing deformation when the sensor is subjected to an acceleration, regardless of the structure of the sensor.
- the mass 5 can be totally integrated in the decoupling frame 3 so that the sensor then comprises a single disturbing circuit portion (on the bridge 4).
- the sensor may also include a first mass 5 directly connected to the support member. As in the previous case, the sensor then comprises a single portion of disturbing circuit.
- the sensor may comprise several cascade associated elements, multiplying the number of disruptive circuit portions.
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
- Gyroscopes (AREA)
Description
La présente invention concerne un capteur inertiel piézo-électrique.The present invention relates to a piezoelectric inertial sensor.
On connaît, notamment du document
Le circuit d'excitation est alimenté avec un courant alternatif provoquant, par un effet piézo-électrique, la mise en vibration de l'organe vibrant selon une fréquence propre de vibration de cet élément vibrant. Lorsque le capteur est soumis à une accélération, la masse exerce sur l'élément vibrant une force qui modifie la fréquence de vibration de telle manière que la variation de la fréquence de vibration de l'élément vibrant permet de déterminer l'accélération à laquelle le capteur est soumis.The excitation circuit is supplied with an alternating current causing, by a piezoelectric effect, the vibration of the vibrating member according to a natural frequency of vibration of this vibrating element. When the sensor is subjected to acceleration, the mass exerts on the vibrating element a force which modifies the vibration frequency so that the variation of the vibration frequency of the vibrating element makes it possible to determine the acceleration to which the sensor is submitted.
La modification de la fréquence de vibration est mesurée par la mesure d'un courant dans le circuit d'excitation.The modification of the vibration frequency is measured by measuring a current in the excitation circuit.
On a toutefois constaté que lorsque le capteur est soumis à une accélération définie, le courant mesuré ne correspond pas de façon exacte à la variation de la fréquence de vibration de l'élément vibrant, le courant recueilli comportant un courant perturbateur s'ajoutant au courant utile d'une façon perturbant l'information utile et pouvant aller jusqu'à provoquer une saturation de l'électronique de mise en oeuvre du capteur et donc un dysfonctionnement de l'accéléromètre.However, it has been found that when the sensor is subjected to a defined acceleration, the measured current does not exactly correspond to the variation of the vibrating frequency of the vibrating element, the current collected comprising a disturbing current adding to the current useful in a way disturbing the useful information and can go as far as to cause a saturation of the electronics of implementation of the sensor and thus a malfunction of the accelerometer.
Un but de l'invention est de minimiser le courant perturbateur se superposant au courant utile.An object of the invention is to minimize the interfering current superimposed on the useful current.
Selon une constatation qui fait partie de l'invention, il a été analysé que le courant perturbateur est en majeure partie généré par des portions perturbatrices du circuit d'excitation dans lesquelles deux pistes conductrices s'étendent l'une à côté de l'autre de part et d'autre d'un plan médian d'une partie de plaque subissant des déformations lorsque le capteur est soumis à une accélération. Il a en effet été constaté que des charges de signes opposés apparaissent alors de part et d'autre du plan médian et sont recueillies par la piste conductrice la plus proche de sorte que ces charges génèrent un courant perturbateur qui est d'autant plus fort que les pistes conductrices sont plus proches des bords de la partie de plaque correspondante. Typiquement, dans les capteurs existants, les pistes conductrices ont une largeur de 50 µm et sont espacées d'une distance de 100 µm.According to a finding that is part of the invention, it has been analyzed that the interfering current is mainly generated by disturbing portions of the excitation circuit in which two conductive tracks extend one beside the other on either side of a median plane of a plate portion undergoing deformation when the sensor is subjected to acceleration. It has indeed been found that charges of opposite signs then appear on either side of the median plane and are collected by the closest conductive track so that these charges generate a disturbing current which is all the stronger as the conductive tracks are closer to the edges of the corresponding plate portion. Typically, in existing sensors, the conductive tracks have a width of 50 microns and are spaced a distance of 100 microns.
Selon l'invention, on prévoit dans les portions de circuit perturbatrices, des pistes conductrices ayant une largeur inférieure à 50 µm, et de préférence une largeur comprise entre 5 µm et 20 µm, les pistes conductrices étant espacées d'une distance inférieure à 100 µm, et de préférence une distance comprise entre 10 µm et 50 µm. Il a été constaté qu'une largeur des pistes conductrices inférieure à 5 µm risque de provoquer des perturbations dans la conduction des pistes et une distance inférieure à 10 µm risque de provoquer des effets capacitifs parasites diminuant les effets bénéfiques obtenus par la réduction du courant perturbateur.According to the invention, conductor tracks having a width of less than 50 μm, and preferably a width of between 5 μm and 20 μm, are provided in the disturbing circuit portions, the conductive tracks being spaced apart by a distance of less than 100 μm. μm, and preferably a distance of between 10 μm and 50 μm. It has been found that a width of the conductive tracks of less than 5 μm can cause disturbances in the conduction of the tracks and a distance of less than 10 μm may cause parasitic capacitive effects reducing the beneficial effects obtained by the reduction of the disturbing current. .
D'autres caractéristiques et avantages de l'invention apparaîtront à la lecture de la description qui suit d'un mode de réalisation particulier non limitatif de l'invention, en relation avec les figures ci-jointes parmi lesquelles :
- la
figure 1 est une vue en perspective agrandie d'un mode de réalisation préféré du capteur inertiel selon l'invention, - la
figure 2 est une vue de dessus partielle encore agrandie d'une de la zone II de lafigure 1 .
- the
figure 1 is an enlarged perspective view of a preferred embodiment of the inertial sensor according to the invention, - the
figure 2 is an enlarged partial top view of one of Zone II of thefigure 1 .
En référence aux figures, le capteur selon l'invention comporte de façon connue en soi du document précité une plaque en quartz piézo-électrique 1 dans laquelle sont délimités : un organe support 2 destiné à être fixé dans un boîtier, un cadre de découplage 3 ayant un côté relié à l'organe support 2 par un pontet 4, et un côté opposé relié à une première masse 5 par un pontet 6, une seconde masse 7 reliée à la première masse 5 et au pontet 6 par des éléments de liaison 8, et un élément vibrant 9 ayant des extrémités solidaires des masses 5 et 7, tous ces éléments étant obtenus par gravure de la plaque piézo-électrique 1.With reference to the figures, the sensor according to the invention comprises, in a manner known per se of the aforementioned document, a piezoelectric quartz plate 1 in which are delimited: a
De façon également connue en soi, l'organe vibrant 9 porte deux électrodes d'excitation 10 reliées à un circuit d'excitation comportant deux pistes conductrices 11 reliées à des bornes d'alimentation et de mesure 12. Au niveau des pontets 4 et 6, lesquels subissent des déformations lorsque le capteur est soumis à une accélération, le circuit d'excitation comporte des portions de circuit 13 dans lesquelles les pistes conductrices 11 s'étendent l'une à côté de l'autre de part et d'autre d'un plan médian M des pontets.In a manner also known per se, the vibrating
Ainsi qu'il a été indiqué ci-dessus, il a été constaté selon l'invention que la structure de ces portions de circuit est génératrice d'un courant perturbateur.As indicated above, it has been found according to the invention that the structure of these circuit portions is generating a disturbing current.
Selon l'invention, dans les portions de circuit perturbatrices 13, les pistes conductrices 11 ont une largeur l inférieure à 50 µm, et de préférence une largeur de 10 µm ou à tout le moins une largeur comprise entre 5 µm et 20 µm, et sont espacées d'une distance inférieure à 100 µm, de préférence une distance égale à 40 µm et à tout le moins une distance comprise entre 10 µm et 50 µm.According to the invention, in the
Bien entendu, l'invention n'est pan limitée au mode de réalisation décrit et on peut y apporter des variantes de réalisation sans sortir du cadre de l'invention tel que défini par les revendications.Of course, the invention is not limited to the embodiment described and can be made variants without departing from the scope of the invention as defined by the claims.
En particulier, l'invention s'applique à tout capteur dont le circuit d'excitation comporte une portion de circuit perturbatrice dans laquelle deux pistes conductrices s'étendent l'une à côté de l'autre de part et d'autre d'un plan médian d'une partie de la plaque subissant des déformations lorsque le capteur est soumis à une accélération, quelle que soit par ailleurs la structure du capteur. A titre d'exemple non limitatif la masse 5 peut être totalement intégrée au cadre de découplage 3 de sorte que le capteur comporte alors une seule portion de circuit perturbatrice (sur le pontet 4). Le capteur peut également comporter une première masse 5 directement reliée à l'organe support. Comme dans le cas précédent, le capteur comporte alors une seule portion de circuit perturbatrice. A l'inverse le capteur peut comporter plusieurs éléments associés en cascade, multipliant le nombre de portions de circuit perturbatrices.In particular, the invention applies to any sensor whose excitation circuit comprises a disturbing circuit portion in which two conductive tracks extend one beside the other on either side of a median plane of a part of the plate undergoing deformation when the sensor is subjected to an acceleration, regardless of the structure of the sensor. By way of non-limiting example, the
Claims (6)
- An inertial sensor including a piezoelectric plate (1) in which is defined a vibrating member (9) carrying excitation electrodes (10) connected to an excitation circuit including conductive tracks (11) carried by the piezoelectric plate, the excitation circuit including a disturbing circuit portion (13) in which two conductive tracks (11) extend alongside each other on either side of a median plane of a part (4, 6) of the plate undergoing deformation when the sensor is subjected to acceleration, characterized in that in the disturbing circuit portion (13) the conductive tracks (11) have a width (1) of less than 50 µm.
- A sensor according to claim 1, characterized in that in the disturbing circuit portion (13) the conductive tracks (11) have a width (l) of between 5 µm and 20 µm.
- A sensor according to claim 1, characterized in that in the disturbing circuit portion (13) the conductive tracks (11) have a width (l) of 10 µm.
- A sensor according to claim 1, characterized in that in the disturbing circuit portion (13) the conductive tracks are spaced by a distance (d) less than 100 µm.
- A sensor according to claim 4, characterized in that in the disturbing circuit portion (13) the tracks are spaced by a distance (d) between 10 µm and 50 µm.
- A sensor according to claim 5, characterized in that in the disturbing circuit portion (13) the tracks are spaced by a distance (d) equal to 40 µm.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0507070A FR2887990B1 (en) | 2005-07-04 | 2005-07-04 | INERTIAL SENSOR WITH REDUCING CURRENT CURRENT BY REDUCING WIDTH AND TRACK CLEARANCE IN CRITICAL AREAS |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP1742069A2 EP1742069A2 (en) | 2007-01-10 |
| EP1742069A3 EP1742069A3 (en) | 2010-01-20 |
| EP1742069B1 true EP1742069B1 (en) | 2015-09-02 |
Family
ID=35871085
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP06291012.0A Active EP1742069B1 (en) | 2005-07-04 | 2006-06-21 | Inertial sensor with reduced error currents due to reduced width and distance of conductors in critical zones |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US7628070B2 (en) |
| EP (1) | EP1742069B1 (en) |
| FR (1) | FR2887990B1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011117944A (en) * | 2009-10-29 | 2011-06-16 | Seiko Epson Corp | Acceleration sensor |
| FR2957414B1 (en) | 2010-03-15 | 2012-09-28 | Commissariat Energie Atomique | FORCE SENSOR WITH REDUCED NOISE |
| WO2013111785A1 (en) * | 2012-01-23 | 2013-08-01 | 上田日本無線株式会社 | Method for monitoring animal respiration and/or pulse changes |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4215570A (en) * | 1979-04-20 | 1980-08-05 | The United States Of America As Represented By The United States Department Of Energy | Miniature quartz resonator force transducer |
| FR2784752B1 (en) * | 1998-10-20 | 2000-11-17 | Onera (Off Nat Aerospatiale) | MONOLITHIC MINIATURE ACCELEROMETER |
| FR2838522B1 (en) * | 2002-04-12 | 2004-06-25 | Sagem | INERTIAL SENSOR WITH INTEGRATED TEMPERATURE SENSOR |
| FR2842914B1 (en) * | 2002-07-26 | 2004-08-27 | Sagem | COMPACT INERTIAL SENSOR |
| FR2851659B1 (en) * | 2003-02-24 | 2005-06-24 | Sagem | VIBRATORY SENSOR WITH RADIATION SCREEN |
| FR2887989B1 (en) * | 2005-07-04 | 2007-09-07 | Sagem Defense Securite | INERTIAL SENSOR WITH REDUCER CURRENT REDUCED BY COMPENSATION BRANCHES |
-
2005
- 2005-07-04 FR FR0507070A patent/FR2887990B1/en not_active Expired - Fee Related
-
2006
- 2006-06-21 EP EP06291012.0A patent/EP1742069B1/en active Active
- 2006-06-30 US US11/477,923 patent/US7628070B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP1742069A3 (en) | 2010-01-20 |
| FR2887990A1 (en) | 2007-01-05 |
| FR2887990B1 (en) | 2007-09-07 |
| US20070022812A1 (en) | 2007-02-01 |
| EP1742069A2 (en) | 2007-01-10 |
| US7628070B2 (en) | 2009-12-08 |
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