EP1712923A3 - Apparatus and method for balancing and for providing a compliant range to a test head - Google Patents

Apparatus and method for balancing and for providing a compliant range to a test head Download PDF

Info

Publication number
EP1712923A3
EP1712923A3 EP06014164A EP06014164A EP1712923A3 EP 1712923 A3 EP1712923 A3 EP 1712923A3 EP 06014164 A EP06014164 A EP 06014164A EP 06014164 A EP06014164 A EP 06014164A EP 1712923 A3 EP1712923 A3 EP 1712923A3
Authority
EP
European Patent Office
Prior art keywords
force
test head
load
providing
balancing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP06014164A
Other languages
German (de)
French (fr)
Other versions
EP1712923A2 (en
EP1712923B1 (en
Inventor
Henri M. Akouka
Alyn R. Holt
Nil O. Ny
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
InTest Corp
Original Assignee
InTest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by InTest Corp filed Critical InTest Corp
Priority claimed from EP01971267A external-priority patent/EP1322965B1/en
Publication of EP1712923A2 publication Critical patent/EP1712923A2/en
Publication of EP1712923A3 publication Critical patent/EP1712923A3/en
Application granted granted Critical
Publication of EP1712923B1 publication Critical patent/EP1712923B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations

Abstract

A load, such as an electronic test head (100), is supported. A force sensor (120) detects a force received from the load, the force resulting from the load being imbalanced such that a torque is created about a rotational axis (102) of the load. A source of force provides a counter force relative to the load in response to the force detected by the force sensor. A method of docking an electronic test head held in a test head manipulator to an electronic device handler is also provided. The method of docking includes measuring a magnitude of an imbalance force along or about at least one of a plurality of motion axes of the test head manipulator; and providing a counter force to the imbalance force.
EP06014164.5A 2000-09-22 2001-09-20 Apparatus and method for balancing and for providing a compliant range to a test head Expired - Lifetime EP1712923B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US23459800P 2000-09-22 2000-09-22
US30122801P 2001-06-27 2001-06-27
EP01971267A EP1322965B1 (en) 2000-09-22 2001-09-20 Manipulator for a test head with active compliance

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
EP01971267A Division EP1322965B1 (en) 2000-09-22 2001-09-20 Manipulator for a test head with active compliance
EP01971267.8 Division 2001-09-20

Publications (3)

Publication Number Publication Date
EP1712923A2 EP1712923A2 (en) 2006-10-18
EP1712923A3 true EP1712923A3 (en) 2008-05-07
EP1712923B1 EP1712923B1 (en) 2013-05-15

Family

ID=36968470

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06014164.5A Expired - Lifetime EP1712923B1 (en) 2000-09-22 2001-09-20 Apparatus and method for balancing and for providing a compliant range to a test head

Country Status (1)

Country Link
EP (1) EP1712923B1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114607682B (en) * 2022-04-06 2023-04-21 中国工程物理研究院流体物理研究所 Hydraulic system, device and moving method of experimental device
CN115371600B (en) * 2022-09-26 2023-03-10 凯士电子(浙江)有限公司 High-precision electronic scale flatness detection device
CN116141385B (en) * 2023-04-25 2023-06-27 江西明天高科技股份有限公司 Multifunctional test bench for force feedback mechanical arm and test method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4696197A (en) * 1986-04-11 1987-09-29 Lockheed Corporation System for counterbalancing tool mount loads in a machine tool
JPH07240448A (en) * 1986-11-25 1995-09-12 Tokyo Electron Ltd Wafer prober
US5949002A (en) * 1997-11-12 1999-09-07 Teradyne, Inc. Manipulator for automatic test equipment with active compliance

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA998071A (en) 1974-04-24 1976-10-05 Wescan Mining Trucks And Equipment Ltd. Automatically balancing roll-over fixture
US4527942A (en) 1982-08-25 1985-07-09 Intest Corporation Electronic test head positioner for test systems
US5136227A (en) * 1985-09-10 1992-08-04 Agency Of Industrial Science & Technology, Ministry Of International Trade & Industry Active gravity compensation device for force control system
US5600258A (en) 1993-09-15 1997-02-04 Intest Corporation Method and apparatus for automated docking of a test head to a device handler
EP1145018B1 (en) 1999-01-13 2004-08-04 inTEST IP Corp. Test head manipulator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4696197A (en) * 1986-04-11 1987-09-29 Lockheed Corporation System for counterbalancing tool mount loads in a machine tool
JPH07240448A (en) * 1986-11-25 1995-09-12 Tokyo Electron Ltd Wafer prober
US5949002A (en) * 1997-11-12 1999-09-07 Teradyne, Inc. Manipulator for automatic test equipment with active compliance

Also Published As

Publication number Publication date
EP1712923A2 (en) 2006-10-18
EP1712923B1 (en) 2013-05-15

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