EP1702087A2 - Vacuum coating unit and a method for the differentiated coating of spectacle lenses - Google Patents

Vacuum coating unit and a method for the differentiated coating of spectacle lenses

Info

Publication number
EP1702087A2
EP1702087A2 EP04738592A EP04738592A EP1702087A2 EP 1702087 A2 EP1702087 A2 EP 1702087A2 EP 04738592 A EP04738592 A EP 04738592A EP 04738592 A EP04738592 A EP 04738592A EP 1702087 A2 EP1702087 A2 EP 1702087A2
Authority
EP
European Patent Office
Prior art keywords
aperture
vacuum coating
coating system
substrates
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04738592A
Other languages
German (de)
French (fr)
Inventor
Walter Zültzke
Markus Fuhr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Buehler Alzenau GmbH
Original Assignee
Leybold Optics GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Optics GmbH filed Critical Leybold Optics GmbH
Publication of EP1702087A2 publication Critical patent/EP1702087A2/en
Withdrawn legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Definitions

  • the invention relates to a vacuum coating system for the simultaneous coating of several substrates, in particular spectacle lenses in a vacuum chamber, in which an evaporator crucible and above it a calotte serving as a substrate holder are arranged, on the underside of which a plurality of substrates are arranged in circles at radially equal intervals a vertical axis of symmetry of the evaporator crucible is held in an invariable position relative to the cap, with a rotary drive for the cap to rotate it about the axis of symmetry (5), the substrates being moved in circular paths around the axis of symmetry, and with Apertures to partially shade the substrates.
  • Such a device is e.g. B. disclosed in DE 31 31 583 AI.
  • highly uniform coatings of the substrates that is, for. B. the spectacle lenses, which can still be improved in that the substrate holder is rotatably arranged and the substrates move on circular paths in the conical evaporation lobe emerging from the evaporator crucible.
  • Apertures have therefore already been proposed which shade the areas of the substrate surface to be coated from the evaporator crucible, so that the zones of the substrate which are in the shadow or penumbra of this aperture are less strongly vaporized than the exposed zones.
  • individual diaphragms are located directly in front of the substrates, which among other things leads to undesirably sharp transitions between the individual zones. Since the individual diaphragms are also attached to the substrate holder, this arrangement can be handled inflexibly as a whole, since when the diaphragms are exchanged they have to be readjusted individually with respect to the respective substrate.
  • the invention is therefore based on the problem of creating a vacuum coating system in which targeted non-uniform coatings, that is to say a zone-wise coating of the substrates, can be achieved in the simplest possible way.
  • the invention provides that the diaphragms for the substrates arranged on a circle each form a continuous diaphragm ring, which is arranged between the evaporator crucible and the dome within the cone formed by the evaporator crucible and the dome, all the way to the axis of symmetry.
  • An aperture ring thus acts for a group of substrates which are attached to a circle on the substrate holder. Instead of providing an aperture for each individual substrate, an entire group of one can be used here Aperture in the form of an aperture ring can be detected. The great advantage of this arrangement is therefore that an aperture ring causes the shading of several substrates lying at the same radial distance from the axis of symmetry. The panels can therefore be replaced quickly and easily.
  • the aperture rings are attached to the arms of an aperture holder directed into the evaporator lobe. These arms should be made as thin as possible so that they themselves have no shadow effect.
  • the aperture holder is preferably attached to the bottom of the evaporator chamber and defines a plane on which the aperture rings are located.
  • These arms can be provided with markings or catches, which simplify centering of the aperture rings.
  • the aperture rings are preferably in the form of a closed circular ring. This has the advantage that they are easy to assemble. In addition, the corresponding zone of the substrates always remains in the shadow of the aperture ring when the substrates migrate around the axis of symmetry.
  • the aperture rings have a periodic edge structure on their outer or inner edge, the period of which is significantly smaller than the distances from adjacent substrates held on the spherical cap. These are preferably wavy or sawtooth-like patterns.
  • the course of the transition can also be varied by changing the distance between the aperture rings and the substrate holder.
  • the invention provides that the distance between the substrate holder and the diaphragm ring is adjustable. This is preferably achieved in that the diaphragm holder is adjustable in height.
  • a vertical drive for the panel holder is provided inside or outside the vacuum vessel.
  • a control for the drive is provided which can be actuated during the coating process. If this is also the simplest solution to change the distance between the screens and the substrates, it can also be considered to move the substrate holder vertically.
  • Another way to achieve a smooth transition between the different zones is to arrange the diaphragm rings slightly eccentrically and to drive the substrate holder in rotation. This results in a core zone, which is always shaded, and an edge zone, which depending on the angular position of the substrate holder in relation to the eccentricity axis is shaded in one revolution of the substrate holder and is exposed, so that a transition zone is defined by this edge zone.
  • the phrase "essentially concentric arrangement of the Diaphragm rings also include arrangements in which the diaphragm rings are arranged slightly eccentrically to the axis of symmetry, but a circular ring remains which is always covered by the diaphragm ring.
  • the device described is used in particular for the zone-wise coating of spectacle lenses with a colored absorption layer.
  • several spectacle lenses are inserted into the system described above, the diaphragm rings being selected and arranged in such a way that their outer or inner edge marks the transition between two circular section-shaped zones on the spectacle lenses, the zone being coated and the other zone remaining free.
  • FIG. 1 is a schematic representation and a side view of the combination of a substrate holder and an evaporator crucible
  • Fig. 2 is a plan view of the arrangement of Fig. 1 and
  • Fig. 3 is an enlarged view of the partial section of an aperture ring.
  • the substrate holder 1 is a spherical cap, which is attached below a cover of a vacuum vessel (not shown here) and can be rotated about a vertical axis by means of a rotary drive 2.
  • a rotary drive 2 On the inside of the calotte there are two (or even more) circles 3 a plurality of spectacle lenses 4 which are still in blank form and whose radial distance from the symmetry tri-axis 5 is identical for each circle 3. This is clearly shown once again in the top view of FIG. 2. They are firmly connected to the spherical cap and therefore do not rotate relative to the spherical cap, as is the case with so-called planetary systems.
  • evaporator crucible 6 in which the material that is to be applied to the glasses 4 is evaporated.
  • the material that is to be applied to the glasses 4 is evaporated.
  • electrons can be bombarded.
  • three supports 7 attached to the bottom of the evaporator boiler, which form a diaphragm holder 8.
  • arms 9 are directed inwards, on which 5 diaphragm rings 10 lie concentrically to the axis of symmetry.
  • Each aperture ring is self-contained and has an inner and an outer edge that run coaxially to each other.
  • each aperture ring 10 is provided for each circle 3 on the calotte. This can also be clearly seen in FIG. 2.
  • each aperture ring 10 forms a shadow zone 11 on the spectacle lenses 4, which is at least less vaporized than the exposed, unshaded free zone 12.
  • the farther away the aperture rings are from the substrates the more vaporized material gets into them into the (geometrically defined) shadow zone 11, whereby a kind of penumbra zone is formed.
  • the transition between the zones runs across the lens so that the two zones each form a circular section. In order to obtain sharp transitions, the aperture rings 10 are moved close to the substrate holder 1.
  • a vertical drive 13 is attached to the orifice holder 8 within the boiler, with which the orifice holder 8 can be moved in the vertical direction, that is to say parallel to the axis of symmetry 5.
  • a further possibility for making the transitions between the coated free zone 12 and the shadow zone 11 more fluid is to design the outer and inner edges 14 of the aperture rings 10 in a wave-like or sawtooth shape, as is shown in the enlarged illustration of an aperture ring 10 in FIG. 3 is shown.
  • the period is small compared to the size of the glasses.
  • the amplitude of the pattern influences the course of the thickness of the absorption layer or tint in the transition between the zones.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Eyeglasses (AREA)

Abstract

According to the invention, spectacle lenses (4), for example, may be provided with a coating which is not uniform by means of the provision of screens, said screens being aperture rings (10), arranged concentric to a symmetry axis of the vapourising crucible (6) in a vacuum coating unit, by means of a screen holder. The spectacle lenses (4) are arranged on a substrate holder (1) also in circles (3) about the symmetry axis, whereby the shadows cast by the aperture rings (10) cover but a partial region of the spectacle lenses (4) such that said regions of the lenses receive less coating than in the unshaded free regions. The aperture rings (10) are exchangeable in order to match the coating process to the customer requirements. Furthermore, the separation of the substrate holder (1) from the aperture rings (10) is adjustable.

Description

Beschreibung description
Vakuumbeschichtungsanlage und ein Verfahren zum zonenweise Beschichten von BrillengläsernVacuum coating system and a method for the zone-wise coating of spectacle lenses
Die Erfindung bezieht sich auf eine Vakuumbeschichtungsanlage für die gleichzeitige Beschichtung von mehreren Substraten, insbesondere von Brillengläsern in einer Vakuumkammer, in der ein Verdampfertiegel und oberhalb davon eine als Substrathalter dienende Kalotte angeordnet sind, an deren Unterseite auf Kreisen jeweils mehrere Substrate in radial gleichen Abständen um eine vertikale Symmetrieachse des Verdampfertiegels in relativ zur Kalotte unveränderlicher Lage gehalten sind, mit einem Drehantrieb für die Kalotte, um diese um die Symmetrieachse (5) zu drehen, wobei bei einer Drehung der Kalotte die Substrate auf Kreisbahnen um die Symmetrieachse bewegt werden, und mit Blenden zum teilweise Abschatten der Substrate .The invention relates to a vacuum coating system for the simultaneous coating of several substrates, in particular spectacle lenses in a vacuum chamber, in which an evaporator crucible and above it a calotte serving as a substrate holder are arranged, on the underside of which a plurality of substrates are arranged in circles at radially equal intervals a vertical axis of symmetry of the evaporator crucible is held in an invariable position relative to the cap, with a rotary drive for the cap to rotate it about the axis of symmetry (5), the substrates being moved in circular paths around the axis of symmetry, and with Apertures to partially shade the substrates.
Eine derartige Vorrichtung ist z. B. in der DE 31 31 583 AI offenbart. Mit der dort beschriebenen Anordnung lassen sich höchst gleichmäßige Beschichtungen der Substrate, also z. B. der Brillengläser, erzielen, die noch dadurch verbessert werden können, dass der Substrathalter drehend angeordnet ist und sich die Substrate auf Kreisbahnen in der aus dem Verdampfertiegel heraustretenden kegelförmigen Verdampfungskeule bewegen.Such a device is e.g. B. disclosed in DE 31 31 583 AI. With the arrangement described there, highly uniform coatings of the substrates, that is, for. B. the spectacle lenses, which can still be improved in that the substrate holder is rotatably arranged and the substrates move on circular paths in the conical evaporation lobe emerging from the evaporator crucible.
So lange es sich z. B. um Beschichtungen zum Entspiegeln von Brillengläsern handelt, ist ein über die gesamte Substratfläche gleichmäßig dicker Schichtauftrag erwünscht. Für einige Anwendungsfälle sind aber auch, z. B. aus ästhetischen Gründen, Schichtdicken- oder Farbverläufe von Interesse. Dabei werden lediglich Kreisab- schnitte des Brillenglases mit einer Tönung versehen, die bezogen auf den späteren Einbau in ein Brillengestell sich in der oberen Zone des Brillenglases befinden, während die untere Zone nicht oder nur schwach getönt wird.As long as it B. is coatings for anti-reflective coating of glasses, a uniformly thick layer application is desired over the entire substrate surface. For some applications, however, such. B. for aesthetic reasons, layer thickness or color gradients of interest. Only circular sections of the lens are provided with a tint, which is related to the later installation in an eyeglass frame in the upper zone of the lens, while the lower zone is not or only slightly tinted.
Es sind daher schon Blenden vorgeschlagen worden, die Bereiche der zu beschichtenden Substratfläche gegenüber dem Verdampfertiegel abschatten, so dass die Zonen des Substrates, die im Schatten bzw. Halbschatten dieser Blende liegen, weniger stark bedampft werden als die frei liegenden Zonen. Bei den bisherigen vorgeschlagenen Lösungen befinden sich Einzelblenden unmittelbar vor den Substraten, was unter anderem zu unerwünscht scharfen Übergängen zwischen den einzelnen Zonen führt. Da außerdem die Einzelblenden am Substrathalter befestigt sind, ist diese Anordnung insgesamt unflexibel zu handhaben, da bei einem Austauschen der Blenden diese einzeln in Bezug zu dem jeweiligen Substrat neu justiert werden müssen.Apertures have therefore already been proposed which shade the areas of the substrate surface to be coated from the evaporator crucible, so that the zones of the substrate which are in the shadow or penumbra of this aperture are less strongly vaporized than the exposed zones. In the solutions proposed so far, individual diaphragms are located directly in front of the substrates, which among other things leads to undesirably sharp transitions between the individual zones. Since the individual diaphragms are also attached to the substrate holder, this arrangement can be handled inflexibly as a whole, since when the diaphragms are exchanged they have to be readjusted individually with respect to the respective substrate.
Die Erfindung beruht somit auf dem Problem, eine Vakuumbeschichtungsanlage zu schaffen, bei der in möglichst einfacher Weise gezielt ungleichmäßige Beschichtungen, das heißt eine zonenweise Beschichtung der Substrate erzielt werden können.The invention is therefore based on the problem of creating a vacuum coating system in which targeted non-uniform coatings, that is to say a zone-wise coating of the substrates, can be achieved in the simplest possible way.
Zur Lösung des Problems sieht die Erfindung vor, dass jeweils die Blenden für die auf einem Kreis angeordneten Substrate einen durchgehenden Blendenring bilden, der zwischen dem Verdampfertiegel und der Kalotte innerhalb des von dem Verdampfertiegel und der Kalotte gebildeten Kegels umlaufend zur Symmetrieachse angeordnet ist.To solve the problem, the invention provides that the diaphragms for the substrates arranged on a circle each form a continuous diaphragm ring, which is arranged between the evaporator crucible and the dome within the cone formed by the evaporator crucible and the dome, all the way to the axis of symmetry.
Ein Blendenring wirkt somit für eine Gruppe von Substraten, die auf einem Kreis am Substrathalter angebracht sind. Statt für jedes einzelne Substrat eine Blende vorzusehen, kann hier eine ganze Gruppe von einer einzigen Blende in Form eines Blendenringes erfasst werden. Der große Vorteil dieser Anordnung liegt somit darin, dass ein Blendenring die Abschattung von mehreren im gleichen radialen Abstand zur Symmetrieachse liegenden Substraten bewirkt. Ein Austausch der Blenden ist daher leicht und schnell durchzuführen.An aperture ring thus acts for a group of substrates which are attached to a circle on the substrate holder. Instead of providing an aperture for each individual substrate, an entire group of one can be used here Aperture in the form of an aperture ring can be detected. The great advantage of this arrangement is therefore that an aperture ring causes the shading of several substrates lying at the same radial distance from the axis of symmetry. The panels can therefore be replaced quickly and easily.
Des Weiteren ergibt sich ein kontinuierlicher Färb- oder Dickenübergang, weil die Blendenringe in einem gewissen Abstand zu den Substraten gehalten werden, so dass ein Halbschatten entsteht, in dem die Substrate etwas schwächer als in den nicht abgeschatteten Zonen, aber doch stärker als im Kernschatten beschichtet werden.Furthermore, there is a continuous color or thickness transition because the aperture rings are kept at a certain distance from the substrates, so that a penumbra is created in which the substrates are somewhat weaker than in the unshaded zones, but coated more than in the umbra become.
Um eine optimale Blendenwirkung zu erreichen, ist vorgesehen, dass die Blendenringe an in die Verdampferkeule gerichteten Armen eines Blendenhalters befestigt sind. Diese Arme sind möglichst dünn auszuführen, so dass sie selbst keine Schattenwirkung haben. Der Blendenhalter ist vorzugsweise am Boden der Verdampferkammer befestigt und definiert eine Ebene, auf der sich die Blendenringe befinden.In order to achieve an optimal aperture effect, it is provided that the aperture rings are attached to the arms of an aperture holder directed into the evaporator lobe. These arms should be made as thin as possible so that they themselves have no shadow effect. The aperture holder is preferably attached to the bottom of the evaporator chamber and defines a plane on which the aperture rings are located.
Diese Arme können mit Markierungen oder Rasten versehen werden, die eine Zentrierung der Blendenringe vereinfachen.These arms can be provided with markings or catches, which simplify centering of the aperture rings.
Die Blendenringe haben vorzugsweise die Form eines geschlossenen Kreisringes. Dies hat den Vorteil, dass sie leicht zu montieren sind. Außerdem bleibt die entsprechende Zone der Substrate bei der Wanderung der Substrate um die Symmetrieachse stets im Schatten des Blendenringes.The aperture rings are preferably in the form of a closed circular ring. This has the advantage that they are easy to assemble. In addition, the corresponding zone of the substrates always remains in the shadow of the aperture ring when the substrates migrate around the axis of symmetry.
Um den Übergang zwischen den beschichteten und teilbeschichteten Zonen noch kontinuierlicher zu erhalten, wird vorgeschlagen, dass die Blendenringe an ihrem Außen- oder Innenrand eine periodische Randstruktur aufweisen, deren Periode deutlich kleiner ist als die Abstände von benachbarten, an der Kalotte gehaltenen Substraten. Hierbei handelt es sich vorzugsweise um wellenförmige oder säge- zahnartige Muster.In order to maintain the transition between the coated and partially coated zones even more continuously proposed that the aperture rings have a periodic edge structure on their outer or inner edge, the period of which is significantly smaller than the distances from adjacent substrates held on the spherical cap. These are preferably wavy or sawtooth-like patterns.
Der Verlauf des Überganges ist weiterhin durch eine Veränderung des Abstandes der Blendenringe zum Substrathalter variierbar. Je näher sich die Blendenringe am Substrat befinden, desto schärfer wird der Übergang. Um den Übergang weicher bzw. härter gestalten zu können, sieht die Erfindung vor, dass der Abstand zwischen dem Substrathalter und dem Blendenring verstellbar ist. Vorzugsweise wird dies dadurch erreicht, dass der Blendenhalter höhenverstellbar ist . Dazu ist innerhalb oder außerhalb des Vakuumkessels ein Vertikalantrieb für den Blendenhalter vorgesehen. Außerdem ist eine Steuerung für den Antrieb bereitgestellt, die während des Beschich- tungsVorganges betätigbar ist. Wenn dies auch die einfachste Lösung sein dürfte, den Abstand zwischen den Blenden und den Substraten zu verändern, so kann aber auch daran gedacht werden, den Substrathalter vertikal zu verschieben.The course of the transition can also be varied by changing the distance between the aperture rings and the substrate holder. The closer the aperture rings are to the substrate, the sharper the transition. In order to make the transition softer or harder, the invention provides that the distance between the substrate holder and the diaphragm ring is adjustable. This is preferably achieved in that the diaphragm holder is adjustable in height. For this purpose, a vertical drive for the panel holder is provided inside or outside the vacuum vessel. In addition, a control for the drive is provided which can be actuated during the coating process. If this is also the simplest solution to change the distance between the screens and the substrates, it can also be considered to move the substrate holder vertically.
Eine andere Möglichkeit, einen fließenden Übergang zwischen den verschiedenen Zonen zu erzielen, besteht darin, die Blendenringe leicht exzentrisch anzuordnen und den Substrathalter drehend anzutreiben. Dadurch ergibt sich eine Kernzone, die stets abgeschattet ist, und eine Randzone, die je nach Winkelstellung des Substrathalters in Bezug zur Exzentrizitätsachse in einem Umlauf des Substrathalters mal abgeschattet ist und mal frei liegt, so dass durch diese Randzone eine Übergangszone definiert ist. Um auch diese Anordnung zu erfassen, soll die Formulierung "im Wesentlichen konzentrische Anordnung der Blendenringe" auch Anordnungen beinhalten, bei denen die Blendenringe leicht exzentrisch zur Symmetrieachse angeordnet sind, wobei aber ein Kreisring verbleibt, der vom Blendenring stets abgedeckt ist.Another way to achieve a smooth transition between the different zones is to arrange the diaphragm rings slightly eccentrically and to drive the substrate holder in rotation. This results in a core zone, which is always shaded, and an edge zone, which depending on the angular position of the substrate holder in relation to the eccentricity axis is shaded in one revolution of the substrate holder and is exposed, so that a transition zone is defined by this edge zone. In order to capture this arrangement as well, the phrase "essentially concentric arrangement of the Diaphragm rings "also include arrangements in which the diaphragm rings are arranged slightly eccentrically to the axis of symmetry, but a circular ring remains which is always covered by the diaphragm ring.
Die beschriebene Vorrichtung dient insbesondere zum zonenweise Beschichten von Brillengläsern mit einer farbigen Absorptionsschicht. Dazu werden mehrere Brillengläser in die vorbeschriebene Anlage eingesetzt, wobei die Blendenringe so ausgewählt und angeordnet werden, dass ihre äußere bzw. innere Kante den Übergang zwischen zwei kreisabschnittsförmigen Zonen auf den Brillengläsern markiert, wobei die Zone beschichtet und die andere Zone frei bleibt.The device described is used in particular for the zone-wise coating of spectacle lenses with a colored absorption layer. For this purpose, several spectacle lenses are inserted into the system described above, the diaphragm rings being selected and arranged in such a way that their outer or inner edge marks the transition between two circular section-shaped zones on the spectacle lenses, the zone being coated and the other zone remaining free.
Zur Erläuterung des Erfindungsgedankens wird im Folgenden anhand eines Ausführungsbeispiels die Erfindung näher erläutert. Dazu zeigenTo explain the concept of the invention, the invention is explained in more detail below using an exemplary embodiment. Show this
Fig. 1 in schematischer Darstellung und in Seitenansicht die Kombination aus einem Substrathalter und einem Verdampfertiegel,1 is a schematic representation and a side view of the combination of a substrate holder and an evaporator crucible,
Fig. 2 eine Draufsicht auf die Anordnung nach Fig. 1 undFig. 2 is a plan view of the arrangement of Fig. 1 and
Fig. 3 die vergrößerte Darstellung des Teilausschnittes eines Blendenringes .Fig. 3 is an enlarged view of the partial section of an aperture ring.
Bei dem Substrathalter 1 handelt es sich um eine Kalotte, die unterhalb eines Deckels eines hier nicht näher dargestellten Vakuumkessels angebracht und mittels eines Drehantriebs 2 um eine vertikale Achse drehbar ist. An der Innenseite der Kalotte befinden sich auf zwei (oder auch mehr) Kreisen 3 mehrere noch in Rohlingform vorliegende Brillengläser 4, deren radialer Abstand zur Symme- trieachse 5 für jeden Kreis 3 identisch ist. Deutlich wird dies auch noch einmal in der Draufsicht der Figur 2. Sie sind fest mit der Kalotte verbunden, führen somit keine Drehung relativ zur Kalotte durch, wie dies bei sogenannten Planetensystemen der Fall ist.The substrate holder 1 is a spherical cap, which is attached below a cover of a vacuum vessel (not shown here) and can be rotated about a vertical axis by means of a rotary drive 2. On the inside of the calotte there are two (or even more) circles 3 a plurality of spectacle lenses 4 which are still in blank form and whose radial distance from the symmetry tri-axis 5 is identical for each circle 3. This is clearly shown once again in the top view of FIG. 2. They are firmly connected to the spherical cap and therefore do not rotate relative to the spherical cap, as is the case with so-called planetary systems.
Unterhalb des Substrathalters 1 befindet sich ein Verdampfertiegel 6, in dem das Material, das auf die Gläser 4 aufgebracht werden soll, verdampft wird. Hierfür gibt es verschiedene Möglichkeiten, die hier nicht näher erläutert werden sollen, da sie dem Fachmann hinreichend genau bekannt sind. Z. B. kann ein Beschuss mit Elektronen erfolgen. Um den Verdampfertiegel 6 herum verteilt befinden sich am Boden des Verdampferkessels befestigt drei Stützen 7, die einen Blendenhalter 8 bilden. Von diesen Stützen 7 ausgehend sind nach innen Arme 9 gerichtet, auf denen konzentrisch zur Symmetrieachse 5 Blendenringe 10 aufliegen. Jeder Blendenring ist in sich geschlossen und hat eine innere und eine äußere Kante, die koaxial zueinander verlaufen.Below the substrate holder 1 there is an evaporator crucible 6 in which the material that is to be applied to the glasses 4 is evaporated. There are various possibilities for this, which are not to be explained in more detail here, since they are sufficiently well known to the person skilled in the art. For example, electrons can be bombarded. Distributed around the evaporator crucible 6 are three supports 7 attached to the bottom of the evaporator boiler, which form a diaphragm holder 8. Starting from these supports 7, arms 9 are directed inwards, on which 5 diaphragm rings 10 lie concentrically to the axis of symmetry. Each aperture ring is self-contained and has an inner and an outer edge that run coaxially to each other.
Für jeden Kreis 3 an der Kalotte ein Blendenring 10 vorgesehen. Deutlich ist dies ebenfalls in Figur 2 zu erkennen. Ausgehend von dem Verdampfertiegel bildet jeder Blendenring 10 eine Schattenzone 11 auf den Brillengläsern 4, die zumindest schwächer bedampft wird als die frei liegende, nicht abgeschattete Freizone 12. Je weiter die Blendenringe von den Substraten entfernt angeordnet sind, desto mehr gelangt verdampftes Material auch noch in die (geometrisch definierte) Schattenzone 11 hinein, wodurch eine Art Halbschattenzone gebildet ist . Der Übergang zwischen den Zonen verläuft quer über das Brillenglas, so dass die beiden Zone jeweils einen Kreisabschnitt bilden. Um scharfe Übergänge zu erhalten, werden die Blendenringe 10 nah an den Substrathalter 1 herangefahren. Für einen etwas breiteren Übergang zwischen der Schattenzone 11 und der Freizone 12 wird ein größerer Abstand zwischen dem Substrathalter 1 und den Blendenringen 10 gewählt . Dazu ist innerhalb des Kessels am Blendenhalter 8 ein Vertikalantrieb 13 angebracht, mit dem der Blendenhalter 8 in vertikaler Richtung, also parallel zur Symmetrieachse 5, bewegt werden kann.A diaphragm ring 10 is provided for each circle 3 on the calotte. This can also be clearly seen in FIG. 2. Starting from the evaporator crucible, each aperture ring 10 forms a shadow zone 11 on the spectacle lenses 4, which is at least less vaporized than the exposed, unshaded free zone 12. The farther away the aperture rings are from the substrates, the more vaporized material gets into them into the (geometrically defined) shadow zone 11, whereby a kind of penumbra zone is formed. The transition between the zones runs across the lens so that the two zones each form a circular section. In order to obtain sharp transitions, the aperture rings 10 are moved close to the substrate holder 1. For a somewhat wider transition between the shadow zone 11 and the free zone 12, a larger distance between the substrate holder 1 and the aperture rings 10 is selected. For this purpose, a vertical drive 13 is attached to the orifice holder 8 within the boiler, with which the orifice holder 8 can be moved in the vertical direction, that is to say parallel to the axis of symmetry 5.
Eine weitere Möglichkeit, die Übergänge zwischen der beschichteten Freizone 12 und der Schattenzone 11 fließender zu gestalten, besteht darin, den Außen- und Innenrand 14 der Blendenringe 10 wellenförmig oder sägezahnförmig zu gestalten, wie dies in der vergrößerten Darstellung eines Blendenringes 10 in der Figur 3 gezeigt ist. Die Periode ist klein gegenüber der Größe der Brillengläser. Insbesondere die Amplitude des Musters beeinflusst den Dickenverlauf der Absorptionsschicht bzw. Tönung im Übergang zwischen den Zonen. A further possibility for making the transitions between the coated free zone 12 and the shadow zone 11 more fluid is to design the outer and inner edges 14 of the aperture rings 10 in a wave-like or sawtooth shape, as is shown in the enlarged illustration of an aperture ring 10 in FIG. 3 is shown. The period is small compared to the size of the glasses. In particular, the amplitude of the pattern influences the course of the thickness of the absorption layer or tint in the transition between the zones.
BezugszeichenlisteLIST OF REFERENCE NUMBERS
Substrathalter Drehantrieb Kreis Brillengläser SymmetrieachseSubstrate holder rotary drive circle glasses symmetry axis
Verdampfertiegel Stütze Blendenhalter Arme BlendenringEvaporator crucible support aperture holder arms aperture ring
Schattenzone Freizone Vertikalantrieb Rand Shadow zone free zone vertical drive edge

Claims

Patentansprüche claims
1. Vakuumbeschichtungsanlage für die gleichzeitige Beschichtung von mehreren Substraten, insbesondere von Brillengläsern in einer Vakuumkammer, in der ein Verdampfertiegel (6) und oberhalb davon eine als Substrathalter dienende Kalotte (1) angeordnet sind, an deren Unterseite auf Kreisen (3) jeweils mehrere Substrate (4) in radial gleichen Abständen um eine vertikale Symmetrieachse (5) des Verdampfertiegels1. Vacuum coating system for the simultaneous coating of several substrates, in particular spectacle lenses in a vacuum chamber in which an evaporator crucible (6) and above it a calotte (1) serving as substrate holder are arranged, on the underside of which a plurality of substrates on circles (3) (4) at radially equal intervals around a vertical axis of symmetry (5) of the evaporator crucible
(6) in relativ zur Kalotte unveränderlicher Lage gehalten sind, mit einem Drehantrieb für die Kalotte, um diese um die Symmetrieachse (5) zu drehen, wobei bei einer Drehung der Kalotte die Substrate auf Kreisbahnen um die Symmetrieachse (5) bewegt werden, und mit Blenden zum teilweise Abschatten der Substrate, dadurch gekennzeichnet, dass jeweils die Blenden für die auf einem Kreis angeordneten Substrate einen durchgehenden Blendenring bilden, der zwischen dem Verdampfertiegel (6) und der Kalotte (1) innerhalb des von dem Verdampfertiegel (6) und der Kalotte (1) gebildeten Kegels umlaufend zur Symmetrieachse (5) angeordnet ist.(6) are held in an invariable position relative to the spherical cap, with a rotary drive for the spherical cap to rotate it about the axis of symmetry (5), the substrates being moved on circular paths around the symmetrical axis (5) when the spherical cap rotates, and with screens for partial shading of the substrates, characterized in that the screens for the substrates arranged on a circle form a continuous screen ring, which between the evaporator crucible (6) and the spherical cap (1) within the evaporator crucible (6) and Dome (1) formed cone is arranged circumferentially to the axis of symmetry (5).
2. Vakuumbeschichtungsanlage nach Anspruch 1, dadurch gekennzeichnet, dass die Blendenringe (10) an in den Kegel gerichteten Armen (9) eines Blendenhalters (8) in einer Ebene über dem Tiegel befestigt sind.2. Vacuum coating system according to claim 1, characterized in that the aperture rings (10) on the cone-oriented arms (9) of an aperture holder (8) are attached in one plane above the crucible.
3. Vakuumbeschichtungsanlage nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die Blendenringe (10) die Form eines geschlossenen Kreisringes haben.3. Vacuum coating system according to claim 1 or 2, characterized in that the aperture rings (10) have the shape of a closed circular ring.
4. Vakuumbeschichtungsanlage nach Anspruch 3, dadurch gekennzeichnet, dass die Blendenringe (10) an ihrem Außen- und/oder Innenrand (14) eine umlaufend periodische Randstruktur aufweisen, deren Periode deutlich kleiner ist als die Abstände von benachbarten an der Kalotte gehaltenen Substraten.4. Vacuum coating system according to claim 3, characterized in that the aperture rings (10) on their The outer and / or inner edge (14) have a circumferential periodic edge structure, the period of which is significantly smaller than the distances from adjacent substrates held on the spherical cap.
5. Vakuumbeschichtungsanlage nach Anspruch 4, dadurch gekennzeichnet, dass die Randstruktur der Blendenringe (10) ein wellenförmiges oder sägezahnartiges Muster ist.5. Vacuum coating system according to claim 4, characterized in that the edge structure of the aperture rings (10) is a wavy or sawtooth-like pattern.
6. Vakuumbeschichtungsanlage nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der Abstand zwischen der Kalotte (1) und den Blendenringen (10) verstellbar ist.6. Vacuum coating system according to one of the preceding claims, characterized in that the distance between the cap (1) and the aperture rings (10) is adjustable.
7. Vakuumbeschichtungsanlage nach Anspruch 6, dadurch gekennzeichnet, dass der Blendenhalter (8) höhenverstellbar ist.7. Vacuum coating system according to claim 6, characterized in that the diaphragm holder (8) is adjustable in height.
8. Vakuumbeschichtungsanlage nach Anspruch 7, dadurch gekennzeichnet, dass der Blendenhalter (8) mit einem Vertikalantrieb (13) gekoppelt ist, der von einer Steuerung während des Beschichtungsvorganges betätigbar ist.8. Vacuum coating system according to claim 7, characterized in that the aperture holder (8) is coupled to a vertical drive (13) which can be actuated by a controller during the coating process.
9. Vakuumbeschichtungsanlage nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Blendenringe (10) koaxial zur Symmetrieachse (5) angeordnet sind.9. Vacuum coating system according to one of the preceding claims, characterized in that the aperture rings (10) are arranged coaxially to the axis of symmetry (5).
10. Vakuumbeschichtungsanlage nach einem der Ansprüche 1 bis 8 , dadurch gekennzeichnet, dass die Blendenringe (10) exzentrisch zur Symmetrieachse (5) angeordnet sind und der Substrathalter (1) um die Symmetrieachse (5) drehbar ist. 10. Vacuum coating system according to one of claims 1 to 8, characterized in that the aperture rings (10) are arranged eccentrically to the axis of symmetry (5) and the substrate holder (1) is rotatable about the axis of symmetry (5).
1. Verfahren zum Beschichten eines Kreisabschnittes eines Brillenglases mit einer Absorptionsschicht, mit den folgenden Schritten:1. A method for coating a circular section of a spectacle lens with an absorption layer, comprising the following steps:
(a) Bereitstellen einer Anlage gemäß einem der vorhergehenden Ansprüche;(a) providing a system according to one of the preceding claims;
(b) Befüllen des Tiegels mit einem Material, das der Bildung der Absorptionsschicht auf dem Brillenglas dient;(b) filling the crucible with a material which serves to form the absorption layer on the spectacle lens;
(c) Anbringen von mehreren in gleicher Weise zu beschichtenden Brillengläsern an der Kalotte;(c) attaching a plurality of spectacle lenses to be coated in the same way to the calotte;
(d) Anbringen der Blendenringe derart, dass eine gedachte Verlängerung vom Tiegel zur Kalotte entlang der inneren oder äußere Kante eines Blendenringes den Übergang zwischen den beschichteten und nicht beschichteten Kreisabschnitten eines jeden Brillenglases auf dem zugehörigen Kalottenring bestimmt. (d) Attaching the diaphragm rings such that an imaginary extension from the crucible to the dome along the inner or outer edge of a diaphragm ring determines the transition between the coated and uncoated circular sections of each lens on the associated dome ring.
EP04738592A 2003-06-03 2004-06-03 Vacuum coating unit and a method for the differentiated coating of spectacle lenses Withdrawn EP1702087A2 (en)

Applications Claiming Priority (2)

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DE10324928A DE10324928A1 (en) 2003-06-03 2003-06-03 Vacuum coating system
PCT/DE2004/001138 WO2004108977A2 (en) 2003-06-03 2004-06-03 Vacuum coating unit and a method for the differentiated coating of spectacle lenses

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WO2004108977A2 (en) 2004-12-16
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WO2004108977A3 (en) 2005-03-17
US20060130760A1 (en) 2006-06-22

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