EP1552243A4 - Common-path frequency-scanning interferometer - Google Patents

Common-path frequency-scanning interferometer

Info

Publication number
EP1552243A4
EP1552243A4 EP03739268A EP03739268A EP1552243A4 EP 1552243 A4 EP1552243 A4 EP 1552243A4 EP 03739268 A EP03739268 A EP 03739268A EP 03739268 A EP03739268 A EP 03739268A EP 1552243 A4 EP1552243 A4 EP 1552243A4
Authority
EP
European Patent Office
Prior art keywords
common
scanning interferometer
path frequency
path
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03739268A
Other languages
German (de)
French (fr)
Other versions
EP1552243A2 (en
Inventor
Joseph C Marron
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lightgage Inc
Original Assignee
Lightgage Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lightgage Inc filed Critical Lightgage Inc
Priority claimed from PCT/US2003/019757 external-priority patent/WO2004001427A2/en
Publication of EP1552243A2 publication Critical patent/EP1552243A2/en
Publication of EP1552243A4 publication Critical patent/EP1552243A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
EP03739268A 2002-06-24 2003-06-23 Common-path frequency-scanning interferometer Withdrawn EP1552243A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US39097002P 2002-06-24 2002-06-24
US390970P 2002-06-24
PCT/US2003/019757 WO2004001427A2 (en) 2002-06-24 2003-06-23 Common-path frequency-scanning interferometer

Publications (2)

Publication Number Publication Date
EP1552243A2 EP1552243A2 (en) 2005-07-13
EP1552243A4 true EP1552243A4 (en) 2008-08-20

Family

ID=34589984

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03739268A Withdrawn EP1552243A4 (en) 2002-06-24 2003-06-23 Common-path frequency-scanning interferometer

Country Status (1)

Country Link
EP (1) EP1552243A4 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113237427B (en) * 2021-05-14 2022-04-29 清华大学 Common-path differential interference displacement measurement system and method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4594003A (en) * 1983-07-20 1986-06-10 Zygo Corporation Interferometric wavefront measurement
US5357341A (en) * 1991-07-22 1994-10-18 Carl-Zeiss-Stiftung Method for evaluating interferograms and interferometer therefor
EP1209442A2 (en) * 2000-11-20 2002-05-29 Zygo Corporation Automated radius of curvature measurements

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4594003A (en) * 1983-07-20 1986-06-10 Zygo Corporation Interferometric wavefront measurement
US5357341A (en) * 1991-07-22 1994-10-18 Carl-Zeiss-Stiftung Method for evaluating interferograms and interferometer therefor
EP1209442A2 (en) * 2000-11-20 2002-05-29 Zygo Corporation Automated radius of curvature measurements

Also Published As

Publication number Publication date
EP1552243A2 (en) 2005-07-13

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Legal Events

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