EP1510869A3 - Lithographischer Apparat, Verfahren zur Herstellung einer Vorrichtung und damit erzeugte Vorrichtung - Google Patents

Lithographischer Apparat, Verfahren zur Herstellung einer Vorrichtung und damit erzeugte Vorrichtung Download PDF

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Publication number
EP1510869A3
EP1510869A3 EP04077366A EP04077366A EP1510869A3 EP 1510869 A3 EP1510869 A3 EP 1510869A3 EP 04077366 A EP04077366 A EP 04077366A EP 04077366 A EP04077366 A EP 04077366A EP 1510869 A3 EP1510869 A3 EP 1510869A3
Authority
EP
European Patent Office
Prior art keywords
lithographic apparatus
radiation
mask
wavelength
radiation component
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04077366A
Other languages
English (en)
French (fr)
Other versions
EP1510869A2 (de
Inventor
Jörg Brübach
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML Netherlands BV
Original Assignee
ASML Netherlands BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from EP03077702A external-priority patent/EP1517183A1/de
Application filed by ASML Netherlands BV filed Critical ASML Netherlands BV
Priority to EP04077366A priority Critical patent/EP1510869A3/de
Publication of EP1510869A2 publication Critical patent/EP1510869A2/de
Publication of EP1510869A3 publication Critical patent/EP1510869A3/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/7005—Production of exposure light, i.e. light sources by multiple sources, e.g. light-emitting diodes [LED] or light source arrays
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70191—Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70575—Wavelength control, e.g. control of bandwidth, multiple wavelength, selection of wavelength or matching of optical components to wavelength
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70616—Monitoring the printed patterns
    • G03F7/70625—Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
EP04077366A 2003-08-29 2004-08-20 Lithographischer Apparat, Verfahren zur Herstellung einer Vorrichtung und damit erzeugte Vorrichtung Withdrawn EP1510869A3 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP04077366A EP1510869A3 (de) 2003-08-29 2004-08-20 Lithographischer Apparat, Verfahren zur Herstellung einer Vorrichtung und damit erzeugte Vorrichtung

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP03077702A EP1517183A1 (de) 2003-08-29 2003-08-29 Lithographischer Apparat, Verfahren zur Herstellung eines Artikels und damit erzeugter Artikel
EP03077702 2003-08-29
EP04077366A EP1510869A3 (de) 2003-08-29 2004-08-20 Lithographischer Apparat, Verfahren zur Herstellung einer Vorrichtung und damit erzeugte Vorrichtung

Publications (2)

Publication Number Publication Date
EP1510869A2 EP1510869A2 (de) 2005-03-02
EP1510869A3 true EP1510869A3 (de) 2009-07-29

Family

ID=34105750

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04077366A Withdrawn EP1510869A3 (de) 2003-08-29 2004-08-20 Lithographischer Apparat, Verfahren zur Herstellung einer Vorrichtung und damit erzeugte Vorrichtung

Country Status (1)

Country Link
EP (1) EP1510869A3 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101302244B1 (ko) * 2005-07-01 2013-09-02 가부시키가이샤 니콘 노광 장치, 노광 방법 및 디바이스 제조 방법, 및 시스템

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4083634A (en) * 1973-01-16 1978-04-11 Canon Kabushiki Kaisha Pattern exposure apparatus using polychromatic light source
US4937619A (en) * 1986-08-08 1990-06-26 Hitachi, Ltd. Projection aligner and exposure method
US5303002A (en) * 1993-03-31 1994-04-12 Intel Corporation Method and apparatus for enhancing the focus latitude in lithography
US5372901A (en) * 1992-08-05 1994-12-13 Micron Technology, Inc. Removable bandpass filter for microlithographic aligners
US5739898A (en) * 1993-02-03 1998-04-14 Nikon Corporation Exposure method and apparatus
US20020048288A1 (en) * 1997-07-22 2002-04-25 Armen Kroyan Laser spectral engineering for lithographic process
US20020186741A1 (en) * 1998-06-04 2002-12-12 Lambda Physik Ag Very narrow band excimer or molecular fluorine laser
US20030099040A1 (en) * 2001-06-07 2003-05-29 Carl Zeiss Cemiconductor Manufacturing Technologies Ag Illumination system with a plurality of individual gratings

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4083634A (en) * 1973-01-16 1978-04-11 Canon Kabushiki Kaisha Pattern exposure apparatus using polychromatic light source
US4937619A (en) * 1986-08-08 1990-06-26 Hitachi, Ltd. Projection aligner and exposure method
US5372901A (en) * 1992-08-05 1994-12-13 Micron Technology, Inc. Removable bandpass filter for microlithographic aligners
US5739898A (en) * 1993-02-03 1998-04-14 Nikon Corporation Exposure method and apparatus
US5303002A (en) * 1993-03-31 1994-04-12 Intel Corporation Method and apparatus for enhancing the focus latitude in lithography
US20020048288A1 (en) * 1997-07-22 2002-04-25 Armen Kroyan Laser spectral engineering for lithographic process
US20020186741A1 (en) * 1998-06-04 2002-12-12 Lambda Physik Ag Very narrow band excimer or molecular fluorine laser
US20030099040A1 (en) * 2001-06-07 2003-05-29 Carl Zeiss Cemiconductor Manufacturing Technologies Ag Illumination system with a plurality of individual gratings

Also Published As

Publication number Publication date
EP1510869A2 (de) 2005-03-02

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