EP1509480A1 - Method for the production of a mineral substrate with modified surface and substrate thus obtained - Google Patents
Method for the production of a mineral substrate with modified surface and substrate thus obtainedInfo
- Publication number
- EP1509480A1 EP1509480A1 EP03755999A EP03755999A EP1509480A1 EP 1509480 A1 EP1509480 A1 EP 1509480A1 EP 03755999 A EP03755999 A EP 03755999A EP 03755999 A EP03755999 A EP 03755999A EP 1509480 A1 EP1509480 A1 EP 1509480A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- substrate
- mineral substrate
- organic
- silica
- organotrihydrosilane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 59
- 238000000034 method Methods 0.000 title claims abstract description 56
- 229910052500 inorganic mineral Inorganic materials 0.000 title claims abstract description 13
- 239000011707 mineral Substances 0.000 title claims abstract description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 39
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 15
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 11
- 239000010703 silicon Substances 0.000 claims abstract description 11
- 125000005372 silanol group Chemical group 0.000 claims abstract description 9
- 239000011521 glass Substances 0.000 claims abstract description 3
- 239000010445 mica Substances 0.000 claims abstract description 3
- 229910052618 mica group Inorganic materials 0.000 claims abstract description 3
- 239000003960 organic solvent Substances 0.000 claims abstract description 3
- 239000010453 quartz Substances 0.000 claims abstract description 3
- 230000008569 process Effects 0.000 claims description 20
- 239000010410 layer Substances 0.000 claims description 18
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 claims description 12
- 239000002356 single layer Substances 0.000 claims description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 125000006850 spacer group Chemical group 0.000 claims description 7
- 239000012298 atmosphere Substances 0.000 claims description 6
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 239000002904 solvent Substances 0.000 claims description 5
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 claims description 4
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Thiophene Chemical compound C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 claims description 4
- 125000003118 aryl group Chemical group 0.000 claims description 4
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 claims description 4
- 239000000010 aprotic solvent Substances 0.000 claims description 3
- 239000012044 organic layer Substances 0.000 claims description 3
- NLMDJJTUQPXZFG-UHFFFAOYSA-N 1,4,10,13-tetraoxa-7,16-diazacyclooctadecane Chemical compound C1COCCOCCNCCOCCOCCN1 NLMDJJTUQPXZFG-UHFFFAOYSA-N 0.000 claims description 2
- 239000004593 Epoxy Substances 0.000 claims description 2
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 claims description 2
- VTJUKNSKBAOEHE-UHFFFAOYSA-N calixarene Chemical compound COC(=O)COC1=C(CC=2C(=C(CC=3C(=C(C4)C=C(C=3)C(C)(C)C)OCC(=O)OC)C=C(C=2)C(C)(C)C)OCC(=O)OC)C=C(C(C)(C)C)C=C1CC1=C(OCC(=O)OC)C4=CC(C(C)(C)C)=C1 VTJUKNSKBAOEHE-UHFFFAOYSA-N 0.000 claims description 2
- 239000008139 complexing agent Substances 0.000 claims description 2
- 150000003983 crown ethers Chemical group 0.000 claims description 2
- 239000002739 cryptand Substances 0.000 claims description 2
- 150000002148 esters Chemical class 0.000 claims description 2
- 229910052736 halogen Inorganic materials 0.000 claims description 2
- 150000002367 halogens Chemical class 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 230000007935 neutral effect Effects 0.000 claims description 2
- 125000004076 pyridyl group Chemical group 0.000 claims description 2
- 229930192474 thiophene Natural products 0.000 claims description 2
- JOXIMZWYDAKGHI-UHFFFAOYSA-N toluene-4-sulfonic acid Chemical compound CC1=CC=C(S(O)(=O)=O)C=C1 JOXIMZWYDAKGHI-UHFFFAOYSA-N 0.000 claims description 2
- 239000004215 Carbon black (E152) Substances 0.000 claims 1
- 125000003277 amino group Chemical group 0.000 claims 1
- 229930195733 hydrocarbon Natural products 0.000 claims 1
- 125000000962 organic group Chemical group 0.000 abstract description 7
- 150000001282 organosilanes Chemical class 0.000 description 8
- 239000000243 solution Substances 0.000 description 8
- 235000012431 wafers Nutrition 0.000 description 8
- 238000004630 atomic force microscopy Methods 0.000 description 6
- -1 alkane thiols Chemical class 0.000 description 5
- 238000000572 ellipsometry Methods 0.000 description 5
- 230000002209 hydrophobic effect Effects 0.000 description 5
- 230000008520 organization Effects 0.000 description 5
- 229910021642 ultra pure water Inorganic materials 0.000 description 5
- 239000012498 ultrapure water Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 239000013545 self-assembled monolayer Substances 0.000 description 4
- 229910000077 silane Inorganic materials 0.000 description 4
- PYJJCSYBSYXGQQ-UHFFFAOYSA-N trichloro(octadecyl)silane Chemical compound CCCCCCCCCCCCCCCCCC[Si](Cl)(Cl)Cl PYJJCSYBSYXGQQ-UHFFFAOYSA-N 0.000 description 4
- 238000002604 ultrasonography Methods 0.000 description 4
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- 229910002808 Si–O–Si Inorganic materials 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 150000001298 alcohols Chemical class 0.000 description 3
- 125000000217 alkyl group Chemical group 0.000 description 3
- 125000002947 alkylene group Chemical group 0.000 description 3
- 125000004432 carbon atom Chemical group C* 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 125000001424 substituent group Chemical group 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- ZBTMRBYMKUEVEU-UHFFFAOYSA-N 1-bromo-4-methylbenzene Chemical compound CC1=CC=C(Br)C=C1 ZBTMRBYMKUEVEU-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 238000004566 IR spectroscopy Methods 0.000 description 2
- 238000005481 NMR spectroscopy Methods 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- 229910008051 Si-OH Inorganic materials 0.000 description 2
- 229910006358 Si—OH Inorganic materials 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- 150000001335 aliphatic alkanes Chemical class 0.000 description 2
- 238000005102 attenuated total reflection Methods 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 239000007822 coupling agent Substances 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 125000003709 fluoroalkyl group Chemical group 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- 238000003760 magnetic stirring Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000004375 physisorption Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 2
- 150000004756 silanes Chemical class 0.000 description 2
- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 150000003573 thiols Chemical class 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000005046 Chlorosilane Substances 0.000 description 1
- KCADUUDDTBWILK-UHFFFAOYSA-N Cumulene Natural products CCCC=C=C=C1OC(=O)C=C1 KCADUUDDTBWILK-UHFFFAOYSA-N 0.000 description 1
- 238000001074 Langmuir--Blodgett assembly Methods 0.000 description 1
- 239000002879 Lewis base Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 150000001343 alkyl silanes Chemical class 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910001566 austenite Inorganic materials 0.000 description 1
- 239000003637 basic solution Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 150000001718 carbodiimides Chemical class 0.000 description 1
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical class Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 1
- 238000004587 chromatography analysis Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000008119 colloidal silica Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 150000008049 diazo compounds Chemical class 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000001962 electrophoresis Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 230000005660 hydrophilic surface Effects 0.000 description 1
- 230000005661 hydrophobic surface Effects 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000012948 isocyanate Substances 0.000 description 1
- 150000002513 isocyanates Chemical class 0.000 description 1
- 150000002540 isothiocyanates Chemical class 0.000 description 1
- 150000007527 lewis bases Chemical class 0.000 description 1
- 150000002678 macrocyclic compounds Chemical class 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000000269 nucleophilic effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- LXNAVEXFUKBNMK-UHFFFAOYSA-N palladium(II) acetate Substances [Pd].CC(O)=O.CC(O)=O LXNAVEXFUKBNMK-UHFFFAOYSA-N 0.000 description 1
- YJVFFLUZDVXJQI-UHFFFAOYSA-L palladium(ii) acetate Chemical compound [Pd+2].CC([O-])=O.CC([O-])=O YJVFFLUZDVXJQI-UHFFFAOYSA-L 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 238000005424 photoluminescence Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000548 poly(silane) polymer Polymers 0.000 description 1
- 150000004053 quinones Chemical class 0.000 description 1
- 239000012429 reaction media Substances 0.000 description 1
- 239000011541 reaction mixture Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- COIOYMYWGDAQPM-UHFFFAOYSA-N tris(2-methylphenyl)phosphane Chemical compound CC1=CC=CC=C1P(C=1C(=CC=CC=1)C)C1=CC=CC=C1C COIOYMYWGDAQPM-UHFFFAOYSA-N 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/28—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
- C03C17/30—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with silicon-containing compounds
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31652—Of asbestos
- Y10T428/31663—As siloxane, silicone or silane
Definitions
- the present invention relates to a process for the preparation of a mineral substrate modified at the surface by organic groups, as well as the modified substrates obtained.
- SAMs Self-assembled monolayers
- These SAMs monolayers have great stability and resistance to various disturbances, in particular to corrosion or to the presence of solvents, because the organic molecules are fixed to the silica by covalent bonds.
- Various techniques for grafting an organic layer onto the surface of a silica substrate are known: organization of the layer by physisorption, for example grafting an alkane onto a gold or silver substrate, from alkane thiols; organization of the layer by chemisorption, for example grafting of an alkane onto a platinum substrate from alcohols or amines, or onto alumina substrate from carboxylic acid; grafting of organic groups onto a substrate comprising surface OH groups, by covalent bonding from organosilanes such as alkylchlorosilanes, alkylalkoxysilanes or alkylaminosilanes (cf. in particular A. Ulman, Chem.
- organosilanes such as alkylchlorosilanes, alkylalkoxysilanes or alkylaminosilanes
- the object of the present invention is to provide a process for obtaining surface-modified silica substrates by depositing a dense, homogeneous and well-organized layer.
- the process according to the invention consists in bringing a mineral substrate carrying silanol functions on its surface into contact with a solution of an organotrihydrosilane in an organic solvent, at a temperature below 30 ° C.
- a wafer-type silicon substrate carrying a layer of silica on its surface can be obtained by various methods.
- a first method consists in removing the native silica layer by soaking the silicon substrate in an HF solution containing at least 10% by volume of HF in ultra-pure water under ultrasound, rinsing with ultrapure water. , then treat with ozone under UV.
- Such treatment which is particularly preferred, is described in particular by JR Vig, J. Vac. Sci. Technol., 1985, 3, 1027-1034.
- a second method consists in subjecting said silicon substrate to a flow of oxygen at a high temperature, for example at 1150 ° C., as described in particular by DL Angst, Langmuir, 1991, 7, 2236-2242.
- the silicon substrate is subjected to chemical oxidation by the basic route: after cleaning the surface of the substrate with a solvent under ultrasound, the substrate is left in a mixture H 2 0, NH 4 OH, H 2 0 2 5/1/1, then rinsed with deionized water, dried and rehydrated (Cf. for example "JD Legrange, et al., Langmuir, 1993, 9, 1749-1753").
- the silicon substrate is subjected to an acidic chemical oxidation: the substrate is cleaned with a basic solution, then immersed in an acid mixture of the H 2 S0 4 / H 2 ⁇ 2 type (Cf. AK Kakkar , et al., Langmuir, 1998, 14, 6941-6947).
- the actual grafting step that is to say bringing the organotrihydrosilane into contact with the silica substrate, is carried out in a neutral atmosphere (preferably under argon), using an organotrihydrosilane solution in a aprotic solvent.
- aprotic solvents it is preferable to use those which have a low hygroscopic character.
- the organotrihydrosilane can be chosen from the compounds XE-SiH 3 in which E is a spacer segment and X represents H or a reactive terminal function.
- X can be chosen from any function capable of allowing the attachment of other organic groups (for example an inated group, a halogen, an epoxy, a pyridyl, an ester, a tosylate (p-toluenesulfonyl), a hetero- cumulene (such as an isocyanate, isothiocyanate or carbodiimide) or a metal complexing agent (for example a crown ether, a cryptand, a calixarene which is a macrocycle obtained by condensation of a phenolic derivative with formaldehyde).
- organic groups for example an inated group, a halogen, an epoxy, a pyridyl, an ester, a tosylate (p-toluenesulfonyl), a hetero
- the spacer group E makes it possible to confer particular properties on the film obtained by implementing the method.
- Group E is chosen from the radicals making it possible to obtain an organized monolayer.
- a long chain alkylene type E radical allows interchain interaction.
- the radicals E of the alkylene type very particularly preferred are those which have from 8 to 24 carbon atoms.
- a radical E comprising two triple bonds -C ⁇ C- allows crosslinking.
- a radical E comprising a conjugated aromatic chain confers non-linear optical properties.
- a radical E of the pyrrole, thiophene or polysilane type confers electronic conduction.
- a radical E of the heterosubstituted polyaromatic type confers photo / electroluminescence properties.
- a radical E of the heterosubstituted polyaromatic type confers photo / electroluminescence properties.
- a group E of the alkyl or fluoroalkyl type in particular an alkyl or fluoroalkyl group having from 3 to 24 carbon atoms, makes it possible to use the layers obtained in chromatography or in electrophoresis.
- the organotrihydrosilane solution preferably contains from 10 ⁇ 3 to 10 "1 mole / 1. Solutions in which the concentration of organotrihydroxilane is of the order of 10 -2 mole / 1 are particularly preferred.
- the duration of the grafting is preferably between 4 and 24 hours, a duration of around 12 hours allows good results to be obtained.
- the reaction medium must be maintained at a temperature below 30 ° C.
- the limit value depends on the substituent XE-. This limit value tends to decrease when the number of carbon atoms of the substituent decreases. The determination of the limit value for a given substituent is within the reach of the man of job. Useful information can be found in particular in Brzoska et al, (Langmuir, 1994, 10, 4367), which mentions the existence of a critical temperature Te controlling the quality of the self-assembled monolayers obtained from different alkyltrichlorosilanes.
- the limit temperature is generally less than 30 ° C. For example, the temperature must be less than 30 ° C if R is C ⁇ sH 37 and less than 10 ° C if R is C ⁇ 2 H 25 .
- organosilane XE-SiH 3 as a coupling agent allows the initial formation of an Si-O-Si bond by direct condensation between the Si-H function of the reagent with a Si-OH silanol function carried by the surface. of the substrate. This grafting method considerably limits the formation of aggregates, which are detrimental to the deposition of a homogeneous layer.
- the use of XE-SiH 3 also has the advantage of producing easily eliminated by-products, namely H 2 . There is no risk of finding anionic entities or protic compounds inherent in the processes of the prior art using chlorosilanes or alkoxysilanes on the treated substrate.
- the silica substrate modified according to the method of the present invention comprises on its surface a monolayer of XE- segments fixed by covalent Si-O-Si bond, said layer comprising X functions uniformly distributed over the surface and accessible.
- the method of the invention consists in depositing an organic monolayer on a surface layer of initially very hydrophilic silica, the contact angle being less than 10 °. After grafting, the wettability of the o
- FIG. 1 illustrates the state of a drop of water on a hydrophilic surface, the angle ⁇ being less than 90 °.
- FIG. 2 illustrates the state of a drop of water on a hydrophobic surface, the angle ⁇ being greater than 90 °.
- the images obtained by AFM show that the surface is homogeneous and has a very low average surface roughness (RMS), generally less than 0.2 nm.
- RMS average surface roughness
- the roughness of the treated substrate is independent of the nature of the grafted organic group, it remains very close to that of the initial untreated substrate.
- the substrate coated with a monolayer obtained by the proposed process is generally characterized by a good recovery rate and a good organization of the chains on its surface.
- the covalent bond by which the substrate is attached to the organic group is of the -SiH 2 O-Si- type.
- the presence of SiH 2 groups is revealed by the si-H vibration band at 2150 cm -1 . This band is not found on the substrates modified according to the methods of the prior art using an alkyltrichlorosilane or an alkyltrialkoxysilane comprising the same alkyl group.
- the present invention is described in more detail with the aid of the following examples, to which it is not however limited.
- Example 1 A series of silicon substrates coated with an organic layer were prepared by treatment with octadecyl trihydrosilane.
- cut silicon disks (1,0,0) were used to obtain rectangular plates of 1 x 2 cm 2 .
- each wafer was soaked in a concentrated HF solution for a few seconds, until the surface became completely hydrophobic. Then, each plate was rinsed with ultra-pure water, then treated with ozone under UV.
- Each plate thus treated was immediately introduced into a Schlenck tube containing 20 ml of a 10 ⁇ 2 M solution of octadecyltrihydrosilane in CC1 4 , and kept in the tube for 24 h at a temperature of 15 ° C, without shaking. .
- the platelets were extracted from the Schlenck tubes, washed with CCl 4 , with absolute ethanol, then with chloroform, each washing being carried out under ultrasound, for a period of the order of 5 min.
- the platelets thus obtained can be stored in an ambient atmosphere, without undergoing degradation.
- the contact angle on the surface of the platelets is 98 ° ⁇ 2, which indicates a hydrophobic and homogeneous surface.
- silicon wafers were treated with octadecyltrichlorosilane, for comparison.
- the substrates treated according to the invention have a Vsi-H band at 2150 cm "1 which does not exist for the substrates obtained from C ⁇ 8 H 37 SiCl 3 and which corresponds to the existence of Si-H bonds in a type environment
- the images obtained in AFM for the wafers of the invention show a homogeneous surface with a very low roughness, of the order of 0.15 - 0.20 nm.
- Example 3 The procedure of Example 1 was reproduced using octadecyltrihydrosilane, only changing the reaction temperature in the Schlenck tube. Two series of tests were carried out at 5 ° C and 20 ° C respectively. The analyzes carried out on the platelets gave identical results.
- Example 3 The procedure of Example 1 was reproduced using octadecyltrihydrosilane, only changing the reaction temperature in the Schlenck tube. Two series of tests were carried out at 5 ° C and 20 ° C respectively. The analyzes carried out on the platelets gave identical results.
- Example 3 The procedure of Example 1 was reproduced using octadecyltrihydrosilane, only changing the reaction temperature in the Schlenck tube. Two series of tests were carried out at 5 ° C and 20 ° C respectively. The analyzes carried out on the platelets gave identical results.
- Example 3 The procedure of Example 1 was reproduced using octadecyltrihydrosilane, only changing the reaction temperature in the Schl
- Example 1 The procedure of Example 1 was reproduced, but replacing the octadecytrihydrosilane with phenyltrihydrosilane, all the other conditions being identical.
- the contact angle measured on the surface of the modified inserts is 74 ° ⁇ 4.
- the images obtained in AFM for the wafers of the invention show a homogeneous surface with a very low roughness, of the order of 0.2 nm.
- FIG. 3 illustrates the surface condition of the wafer after grafting of p-methylstilbényltrihydrosilane.
- the contact angle measured on the surface of the modified inserts is 85 ° + 3.
- the images obtained in AFM for the platelets show a homogeneous surface with a very low roughness, of the order of 0.2 nm.
- the contact angle measured on the surface of the modified wafers is 75 ° + 4.
- the images obtained in AFM for the platelets show a homogeneous surface with a very low roughness, of the order of 0.2 nm.
- FIG. 4 illustrates the surface condition of the wafer after the post-grafting reaction of p-bromotoluene.
- the platelets thus obtained can be stored in an ambient atmosphere, without undergoing degradation.
- the method according to the invention has been implemented for a silica substrate in the form of colloidal silica.
- the substrate is an activated silica sold by the company Merck under the name Silica Merck 60F.
- 0.5 g of the activated silica was treated with 1 g of octadecyltrihydrosilane in 20 ml of CCl 4 at 19-20 ° C for 24 h with magnetic stirring.
- the powder obtained was filtered, washed 2 times with 20 ml of CC1 4 , then 4 times with 20 ml of THF to remove any physisorbed silanes.
- grafted silane is characterized by infrared and NMR spectroscopy.
- An IR band at 2165 cm ⁇ 1 and a signal at -31 ppm in NMR 29 Si show the presence of -0-SiR (H) -0- functions. This result supposes the hydrolysis of a consecutive Si-H bond fixing the organosilane on the surface.
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Abstract
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0206736A FR2840297B1 (en) | 2002-05-31 | 2002-05-31 | PROCESS FOR PRODUCING SURFACE-MODIFIED MINERAL SUBSTRATE, AND SUBSTRATE OBTAINED |
FR0206736 | 2002-05-31 | ||
PCT/FR2003/001515 WO2003101905A1 (en) | 2002-05-31 | 2003-05-20 | Method for the production of a mineral substrate with modified surface and substrate thus obtained |
Publications (1)
Publication Number | Publication Date |
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EP1509480A1 true EP1509480A1 (en) | 2005-03-02 |
Family
ID=29558885
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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EP03755999A Withdrawn EP1509480A1 (en) | 2002-05-31 | 2003-05-20 | Method for the production of a mineral substrate with modified surface and substrate thus obtained |
Country Status (6)
Country | Link |
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US (2) | US20050214546A1 (en) |
EP (1) | EP1509480A1 (en) |
JP (1) | JP4509776B2 (en) |
AU (1) | AU2003260556A1 (en) |
FR (1) | FR2840297B1 (en) |
WO (1) | WO2003101905A1 (en) |
Families Citing this family (2)
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JP4614330B2 (en) * | 2005-01-31 | 2011-01-19 | 独立行政法人科学技術振興機構 | Method for producing silicon substrate modified with organic group |
GB201012661D0 (en) * | 2010-07-28 | 2010-09-15 | Dow Corning | Organosilicon hydrophobing agents |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
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ES457293A1 (en) * | 1976-03-30 | 1978-02-01 | Union Carbide Corp | Silica support catalyst and processes |
US5783299A (en) * | 1986-01-21 | 1998-07-21 | Seiko Epson Corporation | Polarizer plate with anti-stain layer |
JP2632956B2 (en) * | 1988-08-26 | 1997-07-23 | キヤノン株式会社 | Method of forming flat film |
JP2741815B2 (en) * | 1991-02-19 | 1998-04-22 | 松下電器産業株式会社 | Manufacturing method of chemisorption membrane |
JPH04345633A (en) * | 1991-05-23 | 1992-12-01 | Matsushita Electric Ind Co Ltd | Organic functional built-up film and its production |
DE59802546D1 (en) * | 1997-05-28 | 2002-01-31 | Global Surface Ag Zuerich | METHOD FOR COATING A SURFACE |
US6284317B1 (en) * | 1998-04-17 | 2001-09-04 | Massachusetts Institute Of Technology | Derivatization of silicon surfaces |
EP1132147A3 (en) * | 1999-02-10 | 2003-12-10 | Matsushita Electric Industrial Co., Ltd. | Organic thin films, process for the production thereof and equipment therefor |
FR2792628B1 (en) * | 1999-04-22 | 2001-06-15 | Saint Gobain Vitrage | TEXTURE SUBSTRATE CAPABLE OF CONSTITUTING GLAZING, PROCESS FOR OBTAINING SAME |
US6331329B1 (en) * | 1999-05-17 | 2001-12-18 | University Of Massachusetts | Surface modification using hydridosilanes to prepare monolayers |
JP3933857B2 (en) * | 1999-10-04 | 2007-06-20 | 松下電器産業株式会社 | THIN FILM, ITS MANUFACTURING METHOD AND ITS MANUFACTURING DEVICE, AND LIQUID CRYSTAL DISPLAY DEVICE USING THIN FILM AND ITS MANUFACTURING METHOD |
JP2001170521A (en) * | 1999-12-15 | 2001-06-26 | Matsushita Electric Ind Co Ltd | Organic film, method of manufacturing the same and film forming apparatus used therein |
JP2001031447A (en) * | 2000-01-01 | 2001-02-06 | Matsushita Electric Ind Co Ltd | Functional float glass and its production |
-
2002
- 2002-05-31 FR FR0206736A patent/FR2840297B1/en not_active Expired - Fee Related
-
2003
- 2003-05-20 WO PCT/FR2003/001515 patent/WO2003101905A1/en active Application Filing
- 2003-05-20 AU AU2003260556A patent/AU2003260556A1/en not_active Abandoned
- 2003-05-20 US US10/516,243 patent/US20050214546A1/en not_active Abandoned
- 2003-05-20 JP JP2004509601A patent/JP4509776B2/en not_active Expired - Fee Related
- 2003-05-20 EP EP03755999A patent/EP1509480A1/en not_active Withdrawn
-
2008
- 2008-06-12 US US12/213,010 patent/US20080318068A1/en not_active Abandoned
Non-Patent Citations (2)
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None * |
See also references of WO03101905A1 * |
Also Published As
Publication number | Publication date |
---|---|
JP4509776B2 (en) | 2010-07-21 |
AU2003260556A1 (en) | 2003-12-19 |
AU2003260556A8 (en) | 2003-12-19 |
US20080318068A1 (en) | 2008-12-25 |
US20050214546A1 (en) | 2005-09-29 |
WO2003101905A1 (en) | 2003-12-11 |
FR2840297A1 (en) | 2003-12-05 |
FR2840297B1 (en) | 2005-03-25 |
JP2005528262A (en) | 2005-09-22 |
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