EP1507604A1 - Method and device for local treatment of substrates - Google Patents
Method and device for local treatment of substratesInfo
- Publication number
- EP1507604A1 EP1507604A1 EP03720014A EP03720014A EP1507604A1 EP 1507604 A1 EP1507604 A1 EP 1507604A1 EP 03720014 A EP03720014 A EP 03720014A EP 03720014 A EP03720014 A EP 03720014A EP 1507604 A1 EP1507604 A1 EP 1507604A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- fluid
- substrate
- local
- local area
- suction force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/6708—Apparatus for fluid treatment for etching for wet etching using mainly spraying means, e.g. nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/04—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases
- B05D3/0493—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to gases using vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/022—Cleaning travelling work
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
- C23C10/18—Solid state diffusion of only metal elements or silicon into metallic material surfaces using liquids, e.g. salt baths, liquid suspensions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/123—Spraying molten metal
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/40—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using liquids, e.g. salt baths, liquid suspensions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/20—Light-sensitive devices
- H01G9/2027—Light-sensitive devices comprising an oxide semiconductor electrode
- H01G9/2031—Light-sensitive devices comprising an oxide semiconductor electrode comprising titanium oxide, e.g. TiO2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
- H01G9/00—Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
- H01G9/20—Light-sensitive devices
- H01G9/2068—Panels or arrays of photoelectrochemical cells, e.g. photovoltaic modules based on photoelectrochemical cells
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/12—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by mechanical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2203/00—Details of cleaning machines or methods involving the use or presence of liquid or steam
- B08B2203/02—Details of machines or methods for cleaning by the force of jets or sprays
- B08B2203/0229—Suction chambers for aspirating the sprayed liquid
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
- H10K71/231—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers
- H10K71/236—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers using printing techniques, e.g. applying the etch liquid using an ink jet printer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/542—Dye sensitized solar cells
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electrochemistry (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Plasma & Fusion (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Photovoltaic Devices (AREA)
- Chemically Coating (AREA)
Abstract
Description
Claims
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP10004817A EP2218522B1 (en) | 2002-05-07 | 2003-05-07 | Method and device for local treatment of substrates |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AUPS212502 | 2002-05-07 | ||
AUPS2125A AUPS212502A0 (en) | 2002-05-07 | 2002-05-07 | Method and device for local treatment of substrates with fluids |
PCT/AU2003/000532 WO2003095115A1 (en) | 2002-05-07 | 2003-05-07 | Method and device for local treatment of substrates |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1507604A1 true EP1507604A1 (en) | 2005-02-23 |
EP1507604A4 EP1507604A4 (en) | 2007-07-04 |
Family
ID=3835698
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10004817A Expired - Lifetime EP2218522B1 (en) | 2002-05-07 | 2003-05-07 | Method and device for local treatment of substrates |
EP03720014A Withdrawn EP1507604A4 (en) | 2002-05-07 | 2003-05-07 | Method and device for local treatment of substrates |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10004817A Expired - Lifetime EP2218522B1 (en) | 2002-05-07 | 2003-05-07 | Method and device for local treatment of substrates |
Country Status (4)
Country | Link |
---|---|
EP (2) | EP2218522B1 (en) |
AT (1) | ATE530265T1 (en) |
AU (1) | AUPS212502A0 (en) |
WO (1) | WO2003095115A1 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2472608B (en) * | 2009-08-12 | 2013-09-04 | M Solv Ltd | Method and Apparatus for making a solar panel that is partially transparent |
NO20100616A1 (en) * | 2010-04-28 | 2011-10-31 | Innotech Solar Asa | Method and apparatus for removing a defect from a solar cell |
KR101434658B1 (en) * | 2011-12-28 | 2014-08-29 | 코오롱인더스트리 주식회사 | Manufacturing for polymer solar cell |
CN202725553U (en) * | 2012-07-09 | 2013-02-13 | 深圳市华星光电技术有限公司 | Cleaning device |
CN104550157B (en) * | 2014-12-24 | 2016-08-17 | 深圳市华星光电技术有限公司 | Clean device |
TWI818037B (en) * | 2018-06-20 | 2023-10-11 | 美商維克儀器公司 | Semiconductor processing system |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5224235A (en) * | 1991-06-28 | 1993-07-06 | Digital Equipment Corporation | Electronic component cleaning apparatus |
WO1994012349A1 (en) * | 1992-11-25 | 1994-06-09 | Sjoeberg Staffan | Apparatus for cleaning objects in movement |
US5443653A (en) * | 1994-06-01 | 1995-08-22 | Hughes Missile Systems Company | System for cleaning contaminants from small areas with minimal incontained waste |
DE19651693A1 (en) * | 1996-12-12 | 1998-06-18 | Fidor Vermoegensverwaltung Gmb | Automatic window cleaning system |
WO2002097402A2 (en) * | 2001-05-31 | 2002-12-05 | Ian Robert Fothergill | Analysis or disposal of surface adherents |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3915739A (en) * | 1974-07-12 | 1975-10-28 | Montreal | Method of cleaning foreign matter from a cavity in a semiconductor |
SU1296239A1 (en) * | 1985-04-02 | 1987-03-15 | Ленинградский инженерно-строительный институт | Arrangement for cleaning surface |
US5608943A (en) * | 1993-08-23 | 1997-03-11 | Tokyo Electron Limited | Apparatus for removing process liquid |
FR2719788B1 (en) * | 1994-05-13 | 1996-07-19 | Interblast | Pickling installation. |
JPH09235895A (en) * | 1996-03-04 | 1997-09-09 | Tokyu Constr Co Ltd | Washing, peeling, crushing device for concrete surface |
ES2169805T3 (en) * | 1996-06-24 | 2002-07-16 | Sundwig Gmbh | DEVICE FOR ELIMINATING LIQUID FROM THE SURFACE OF A BAND. |
JP2000325903A (en) * | 1999-05-25 | 2000-11-28 | Sumitomo Electric Ind Ltd | Method for removing soil adherent to long strip |
US6479745B2 (en) * | 2000-01-26 | 2002-11-12 | Sharp Kabushiki Kaisha | Dye-sensitized solar cell and method of manufacturing the same |
DE10053198C2 (en) * | 2000-10-26 | 2003-01-02 | Infineon Technologies Ag | Local etching process |
DE10065265A1 (en) * | 2000-12-29 | 2002-07-04 | Hans G Platsch | Device for dusting products |
-
2002
- 2002-05-07 AU AUPS2125A patent/AUPS212502A0/en not_active Abandoned
-
2003
- 2003-05-07 WO PCT/AU2003/000532 patent/WO2003095115A1/en not_active Application Discontinuation
- 2003-05-07 AT AT10004817T patent/ATE530265T1/en not_active IP Right Cessation
- 2003-05-07 EP EP10004817A patent/EP2218522B1/en not_active Expired - Lifetime
- 2003-05-07 EP EP03720014A patent/EP1507604A4/en not_active Withdrawn
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5224235A (en) * | 1991-06-28 | 1993-07-06 | Digital Equipment Corporation | Electronic component cleaning apparatus |
WO1994012349A1 (en) * | 1992-11-25 | 1994-06-09 | Sjoeberg Staffan | Apparatus for cleaning objects in movement |
US5443653A (en) * | 1994-06-01 | 1995-08-22 | Hughes Missile Systems Company | System for cleaning contaminants from small areas with minimal incontained waste |
DE19651693A1 (en) * | 1996-12-12 | 1998-06-18 | Fidor Vermoegensverwaltung Gmb | Automatic window cleaning system |
WO2002097402A2 (en) * | 2001-05-31 | 2002-12-05 | Ian Robert Fothergill | Analysis or disposal of surface adherents |
Non-Patent Citations (1)
Title |
---|
See also references of WO03095115A1 * |
Also Published As
Publication number | Publication date |
---|---|
EP2218522A1 (en) | 2010-08-18 |
EP1507604A4 (en) | 2007-07-04 |
ATE530265T1 (en) | 2011-11-15 |
AUPS212502A0 (en) | 2002-06-06 |
EP2218522B1 (en) | 2011-10-26 |
WO2003095115A1 (en) | 2003-11-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20041206 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR |
|
AX | Request for extension of the european patent |
Extension state: AL LT LV MK |
|
DAX | Request for extension of the european patent (deleted) | ||
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: DYESOL LTD |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: H01L 21/00 20060101ALI20070306BHEP Ipc: H01G 9/20 20060101ALI20070306BHEP Ipc: C23C 26/00 20060101ALI20070306BHEP Ipc: C23C 10/18 20060101ALI20070306BHEP Ipc: C23C 8/40 20060101ALI20070306BHEP Ipc: C23C 4/12 20060101ALI20070306BHEP Ipc: B05D 3/04 20060101ALI20070306BHEP Ipc: B05D 1/26 20060101ALI20070306BHEP Ipc: B08B 3/02 20060101AFI20031125BHEP |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 20070604 |
|
17Q | First examination report despatched |
Effective date: 20080314 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20100614 |