EP1448292A1 - Verfahren zur gasreinigung mittels plasmaentladung - Google Patents
Verfahren zur gasreinigung mittels plasmaentladungInfo
- Publication number
- EP1448292A1 EP1448292A1 EP02792629A EP02792629A EP1448292A1 EP 1448292 A1 EP1448292 A1 EP 1448292A1 EP 02792629 A EP02792629 A EP 02792629A EP 02792629 A EP02792629 A EP 02792629A EP 1448292 A1 EP1448292 A1 EP 1448292A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- gas
- plasma
- process gas
- cleaned
- ignited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title claims abstract description 48
- 239000007789 gas Substances 0.000 claims abstract description 54
- 230000008569 process Effects 0.000 claims abstract description 20
- 239000003344 environmental pollutant Substances 0.000 claims abstract description 13
- 231100000719 pollutant Toxicity 0.000 claims abstract description 11
- 230000007935 neutral effect Effects 0.000 claims abstract description 3
- 239000000126 substance Substances 0.000 claims abstract description 3
- 238000004140 cleaning Methods 0.000 claims description 9
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 230000001939 inductive effect Effects 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 230000001960 triggered effect Effects 0.000 claims 1
- 210000002381 plasma Anatomy 0.000 description 20
- 239000012634 fragment Substances 0.000 description 4
- 238000000746 purification Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 231100000331 toxic Toxicity 0.000 description 2
- 230000002588 toxic effect Effects 0.000 description 2
- 238000004887 air purification Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
- B01J19/122—Incoherent waves
- B01J19/126—Microwaves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
- B01D2259/806—Microwaves
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S588/00—Hazardous or toxic waste destruction or containment
- Y10S588/90—Apparatus
Definitions
- the invention relates to a method for gas purification according to the preamble of patent claim 1.
- EP 0 785 016 A1 describes a complex process for removing pollutant-containing exhaust air by combining a biological cleaning stage with a non-thermal plasma cleaning stage. Another disadvantage of the process described in EP 0 785 016 A1 is that the non-thermal plasma only partially oxidizes the pollutants, which means that toxic constituents can be formed. For the cleaning of these components, the use of further moderators is used, which means a further construction effort.
- thermal plasmas are used for cleaning gases.
- the gas to be cleaned is fed into the between two electrodes e.g. generated by an arc burner thermal plasma.
- the disadvantage here is that due to the high gas velocity of the plasma and the high density gradient, the gas to be cleaned can only penetrate insufficiently into the hot plasma zones.
- the gas to be cleaned is passed through a thermal plasma, the plasma being generated by electrodeless ignition of a process gas, so that the pollutants contained in the gas to be cleaned are converted into environmentally neutral, fully oxidized substances by means of the thermal plasma.
- An advantage of the method according to the invention is that due to the high plasma temperatures, which are in the range of a few 10,000 K, the pollutants, which usually consist of long-chain CH compounds, are split into individual environmentally compatible CH fragments, which is also referred to as cracking.
- Another advantage is that no further filters or moderators are necessary. As a result, the method according to the invention is simpler and less expensive than conventional methods.
- the plasma is generated without electrodes in the method according to the invention, no wearing parts such as e.g. the electrodes of an arc torch. This also prevents any reactions of the pollutants with the electrodes, which would lead to the formation of toxic constituents, particularly in tungsten electrodes in conventional arc burners.
- the process gas required to ignite the plasma contains oxygen and / or nitrogen. Air can expediently be used as the process gas, but it is also possible to use process gases with other stoichiometric ratios.
- the thermal plasma can be ignited by means of resonant coupling of high-frequency microwaves to the process gas. Such an ignition is known for example from DE 195 13 250 A1.
- the method according to the invention can be used in particular in the cleaning of gases and vapors which arise in the bath care in electroplating or degreasing baths.
- the method according to the invention can also be used in other fields of application in which the purification of exhaust air containing pollutants or harmful to health is required.
- Fig. 1 shows a sectional view of a first exemplary embodiment of the method according to the invention, wherein the process gas is ignited by means of microwaves.
- Fig. 2 shows a sectional view of a second exemplary embodiment of the method according to the invention, wherein the process gas is ignited by means of radio waves.
- a first exemplary device for performing the method according to the invention is shown in a sectional view.
- a dielectric microwave-transparent tube 1 with a gas inlet opening 2 and a gas outlet opening 3 is advantageously present.
- the process gas P is advantageously introduced into the pipe 1 through the gas inlet opening 2, the process gas P being introduced in such a way that it advantageously has a tangential and an axial flow component directed in the direction of the gas outlet opening 3.
- a metallic expansion nozzle 4 is advantageously attached to the gas outlet opening 3 of the tube 1.
- the tube 1 is expediently in a waveguide 5, in which the microwaves, which are generated by a microwave source, not shown, are transported. By absorption of microwave energy, a thermal microwave plasma 7 is ignited in the area 6 in which the tube 1 is located in the waveguide 5.
- the microwave source can be operated continuously or pulsed.
- the gas RG to be cleaned is advantageously passed through the gas inlet opening 2 into the pipe 1 and thus through the region 6 in which the plasma 7 burns.
- the cleaning of the pollutant-containing gas RG takes place in this area 6, the pollutants being cracked into individual environmentally compatible fragments.
- This gas mixture consisting of the plasma 7, the cleaned gas G and the fragments, flows through the expansion nozzle 4 at the gas outlet opening 3 of the tube 1.
- the gas mixture is expanded, thereby preventing, in particular, recombination of the fragments present in the gas mixture into toxic substances becomes.
- FIG. 2 essentially corresponds to the embodiment shown in FIG. 1. 2, the tube 1 is wrapped with a coupling coil 8, however. Furthermore, the tube 1 is advantageously transparent to radio waves. Thus, according to the embodiment in FIG. 1, a thermal rf plasma 7 is generated in the region 6 by means of absorption of radio energy.
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Treating Waste Gases (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Plasma Technology (AREA)
Abstract
Description
Claims
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10159152 | 2001-12-01 | ||
| DE10159152A DE10159152A1 (de) | 2001-12-01 | 2001-12-01 | Verfahren zur Gasreinigung |
| PCT/DE2002/004396 WO2003047727A1 (de) | 2001-12-01 | 2002-11-29 | Verfahren zur gasreinigung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP1448292A1 true EP1448292A1 (de) | 2004-08-25 |
Family
ID=7707769
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP02792629A Withdrawn EP1448292A1 (de) | 2001-12-01 | 2002-11-29 | Verfahren zur gasreinigung mittels plasmaentladung |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7217903B2 (de) |
| EP (1) | EP1448292A1 (de) |
| DE (1) | DE10159152A1 (de) |
| WO (1) | WO2003047727A1 (de) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7452122B2 (en) * | 2003-07-24 | 2008-11-18 | Bio-Lab, Inc. | Feeder device |
| FR2864795B1 (fr) * | 2004-01-06 | 2008-04-18 | Air Liquide | Procede de traitement des gaz par des decharges hautes frequence |
| KR100636845B1 (ko) * | 2004-09-15 | 2006-10-19 | (주)오토엠아이티 | 유해가스 처리용 플라즈마 장치 |
| DE102004046814B3 (de) * | 2004-09-27 | 2006-03-09 | Siemens Ag | Verfahren und Vorrichtung zur Beeinflussung von Verbrennungsvorgängen, insbesondere zum Betrieb einer Gasturbine |
| JP2011521735A (ja) | 2008-05-30 | 2011-07-28 | コロラド ステート ユニバーシティ リサーチ ファンデーション | プラズマを発生させるためのシステム、方法、および装置 |
| WO2009146432A1 (en) | 2008-05-30 | 2009-12-03 | Colorado State University Research Foundation | Plasma-based chemical source device and method of use thereof |
| US8994270B2 (en) | 2008-05-30 | 2015-03-31 | Colorado State University Research Foundation | System and methods for plasma application |
| KR101025035B1 (ko) * | 2009-06-23 | 2011-03-25 | 주성호 | 프라즈마를 이용한 버어너 |
| US8222822B2 (en) | 2009-10-27 | 2012-07-17 | Tyco Healthcare Group Lp | Inductively-coupled plasma device |
| JP2013529352A (ja) | 2010-03-31 | 2013-07-18 | コロラド ステート ユニバーシティー リサーチ ファウンデーション | 液体−気体界面プラズマデバイス |
| EP2552340A4 (de) | 2010-03-31 | 2015-10-14 | Univ Colorado State Res Found | Plasmavorrichtung mit flüssig-gas-schnittstelle |
| US9532826B2 (en) | 2013-03-06 | 2017-01-03 | Covidien Lp | System and method for sinus surgery |
| US9555145B2 (en) | 2013-03-13 | 2017-01-31 | Covidien Lp | System and method for biofilm remediation |
| DE102014016380A1 (de) * | 2014-11-06 | 2016-05-12 | Brückner Maschinenbau GmbH & Co. KG | Plasma Abgasreinigung |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4916273A (en) * | 1987-03-11 | 1990-04-10 | Browning James A | High-velocity controlled-temperature plasma spray method |
| US4883570A (en) * | 1987-06-08 | 1989-11-28 | Research-Cottrell, Inc. | Apparatus and method for enhanced chemical processing in high pressure and atmospheric plasmas produced by high frequency electromagnetic waves |
| US5468356A (en) | 1991-08-23 | 1995-11-21 | The United States Of America As Represented By The Secretary Of The Navy | Large scale purification of contaminated air |
| US5349154A (en) * | 1991-10-16 | 1994-09-20 | Rockwell International Corporation | Diamond growth by microwave generated plasma flame |
| US5387775A (en) | 1993-03-31 | 1995-02-07 | The United States Of America As Represented By The United States Department Of Energy | Apparatus for the plasma destruction of hazardous gases |
| DE4319118A1 (de) * | 1993-06-09 | 1994-12-15 | Breitbarth Friedrich Wilhelm D | Verfahren und Vorrichtung zur Entsorgung von Fluorkohlenstoffen und anderen fluorhaltigen Verbindungen |
| DE4428418C2 (de) * | 1994-08-11 | 1997-03-06 | Buck Chem Tech Werke | Verfahren und Vorrichtung zum Inertisieren toxischer Gase oder toxischer vergasbarer Stoffe |
| US5611947A (en) * | 1994-09-07 | 1997-03-18 | Alliant Techsystems, Inc. | Induction steam plasma torch for generating a steam plasma for treating a feed slurry |
| DE19513250C2 (de) | 1995-04-07 | 1999-06-10 | Dornier Gmbh | Verfahren und Vorrichtung zur kontinuierlichen Entfernung von Stickoxiden in Abgasen von Verbrennungsmaschinen |
| US6045618A (en) * | 1995-09-25 | 2000-04-04 | Applied Materials, Inc. | Microwave apparatus for in-situ vacuum line cleaning for substrate processing equipment |
| EP0785016A1 (de) | 1996-01-17 | 1997-07-23 | Rafflenbeul & Partner | Verfahren zur Reinigung von schadstoffhaltiger Abluft durch Kombination einer biologischen Reinigungsstufe mit einer nicht-thermischen Plasmareinigungsstufe |
| JP2000133494A (ja) | 1998-10-23 | 2000-05-12 | Mitsubishi Heavy Ind Ltd | マイクロ波プラズマ発生装置及び方法 |
| US6830662B2 (en) * | 1999-02-12 | 2004-12-14 | Chang Yul Cha | Process for microwave destruction of harmful agents and waste |
| US6153852A (en) * | 1999-02-12 | 2000-11-28 | Thermal Conversion Corp | Use of a chemically reactive plasma for thermal-chemical processes |
| AUPP979099A0 (en) | 1999-04-16 | 1999-05-13 | Swinburne Limited | Ioniser for effluent gas |
| US6552295B2 (en) * | 1999-12-20 | 2003-04-22 | Research Triangle Institute | Plasma furnace disposal of hazardous wastes |
| US6617538B1 (en) * | 2000-03-31 | 2003-09-09 | Imad Mahawili | Rotating arc plasma jet and method of use for chemical synthesis and chemical by-products abatements |
| US6417625B1 (en) * | 2000-08-04 | 2002-07-09 | General Atomics | Apparatus and method for forming a high pressure plasma discharge column |
| DE10140298B4 (de) | 2001-08-16 | 2005-02-24 | Mtu Aero Engines Gmbh | Verfahren zum Plasmaschweißen |
-
2001
- 2001-12-01 DE DE10159152A patent/DE10159152A1/de not_active Withdrawn
-
2002
- 2002-11-29 EP EP02792629A patent/EP1448292A1/de not_active Withdrawn
- 2002-11-29 WO PCT/DE2002/004396 patent/WO2003047727A1/de not_active Ceased
- 2002-11-29 US US10/497,074 patent/US7217903B2/en not_active Expired - Fee Related
Non-Patent Citations (2)
| Title |
|---|
| None * |
| See also references of WO03047727A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| US7217903B2 (en) | 2007-05-15 |
| WO2003047727A1 (de) | 2003-06-12 |
| DE10159152A1 (de) | 2003-06-12 |
| US20050139593A1 (en) | 2005-06-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
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| 17P | Request for examination filed |
Effective date: 20040519 |
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| AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LI LU MC NL PT SE SK TR |
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| RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: MTU AERO ENGINES GMBH |
|
| 17Q | First examination report despatched |
Effective date: 20070207 |
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| GRAP | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOSNIGR1 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
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| 18D | Application deemed to be withdrawn |
Effective date: 20101201 |