EP1409400A4 - Purification of gaseous inorganic halide - Google Patents

Purification of gaseous inorganic halide

Info

Publication number
EP1409400A4
EP1409400A4 EP00942748A EP00942748A EP1409400A4 EP 1409400 A4 EP1409400 A4 EP 1409400A4 EP 00942748 A EP00942748 A EP 00942748A EP 00942748 A EP00942748 A EP 00942748A EP 1409400 A4 EP1409400 A4 EP 1409400A4
Authority
EP
European Patent Office
Prior art keywords
purification
inorganic halide
gaseous inorganic
gaseous
halide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00942748A
Other languages
German (de)
French (fr)
Other versions
EP1409400A1 (en
Inventor
Dalbir Rajoria
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell Intellectual Properties Inc
Original Assignee
Honeywell Intellectual Properties Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Intellectual Properties Inc filed Critical Honeywell Intellectual Properties Inc
Publication of EP1409400A1 publication Critical patent/EP1409400A1/en
Publication of EP1409400A4 publication Critical patent/EP1409400A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B9/00—General methods of preparing halides
    • C01B9/08—Fluorides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/08—Compounds containing halogen
    • C01B33/107—Halogenated silanes
    • C01B33/10778—Purification
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B35/00—Boron; Compounds thereof
    • C01B35/06—Boron halogen compounds
    • C01B35/061—Halides
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B9/00—General methods of preparing halides
    • C01B9/02—Chlorides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Silicon Compounds (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
EP00942748A 1999-06-11 2000-06-12 Purification of gaseous inorganic halide Withdrawn EP1409400A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13892499P 1999-06-11 1999-06-11
US138924P 1999-06-11
PCT/US2000/016051 WO2000076915A1 (en) 1999-06-11 2000-06-12 Purification of gaseous inorganic halide

Publications (2)

Publication Number Publication Date
EP1409400A1 EP1409400A1 (en) 2004-04-21
EP1409400A4 true EP1409400A4 (en) 2004-09-15

Family

ID=22484283

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00942748A Withdrawn EP1409400A4 (en) 1999-06-11 2000-06-12 Purification of gaseous inorganic halide

Country Status (4)

Country Link
EP (1) EP1409400A4 (en)
AU (1) AU5732800A (en)
TW (1) TWI257875B (en)
WO (1) WO2000076915A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3909385B2 (en) 2001-07-12 2007-04-25 昭和電工株式会社 Tetrafluorosilane production method and use thereof
TW200512159A (en) * 2003-09-25 2005-04-01 Showa Denko Kk Method for producing tetrafluorosilane
CN101993088A (en) * 2010-10-15 2011-03-30 天津市泰源工业气体有限公司 Technology of method for preparing high-purity boron trifluoride by rectification and adsorption combined purification mode
CN103950948B (en) * 2014-05-20 2015-11-04 方治文 The preparation method of high-purity boron trifluoride-11
CN103950949B (en) * 2014-05-20 2015-09-09 方治文 The preparation method of high-purity boron tribromide-11
CN108821254B (en) * 2018-09-11 2021-11-26 安徽东至广信农化有限公司 Method for removing inorganic and organic impurities in phosphorus trichloride synthesis process
CN114525485A (en) * 2022-01-21 2022-05-24 亚芯半导体材料(江苏)有限公司 Large-size high-entropy high-purity refractory metal alloy sputtering target material and preparation process thereof

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3037337A (en) * 1955-09-06 1962-06-05 Thiokol Chemical Corp Purification of boron trichloride
US3043665A (en) * 1955-09-06 1962-07-10 Thiokol Chemical Corp Purification of boron trichloride
US3207581A (en) * 1961-11-14 1965-09-21 American Potash & Chem Corp Process for purifying boron trichloride
US3625661A (en) * 1969-08-11 1971-12-07 Atomic Energy Commission Separation of titanium fluoride and niobium fluoride from gaseous uranium hexafluoride containing same
US4564509A (en) * 1983-06-30 1986-01-14 Northeast Semiconductor Inc. Method and apparatus for improved gettering for reactant gases
US5183647A (en) * 1988-04-11 1993-02-02 Mitsui Toatsu Chemicals, Inc. Method for purifying nitrogen trifluoride gas

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1667582B2 (en) * 1968-03-09 1977-09-22 Kali-Chemie Ag, 3000 Hannover PROCESS FOR THE REMOVAL OF SULFUR DIOXIDE FROM BORON TRIFLUORIDE
US4263467A (en) * 1979-11-29 1981-04-21 Gulf Research & Development Company Recovery of boron trifluoride from a hydrocarbon liquid
US4755370A (en) * 1982-03-18 1988-07-05 General Electric Company Purification of silicon halides
US4943423A (en) * 1988-11-29 1990-07-24 Allied-Signal Inc. Process for recovering boron trifluoride from an impure gaseous boron trifluoride residue
US4965055A (en) * 1990-03-27 1990-10-23 The United States Of America As Represented By The Secretary Of The Navy Preparation of ultra-pure metal halides

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3037337A (en) * 1955-09-06 1962-06-05 Thiokol Chemical Corp Purification of boron trichloride
US3043665A (en) * 1955-09-06 1962-07-10 Thiokol Chemical Corp Purification of boron trichloride
US3207581A (en) * 1961-11-14 1965-09-21 American Potash & Chem Corp Process for purifying boron trichloride
US3625661A (en) * 1969-08-11 1971-12-07 Atomic Energy Commission Separation of titanium fluoride and niobium fluoride from gaseous uranium hexafluoride containing same
US4564509A (en) * 1983-06-30 1986-01-14 Northeast Semiconductor Inc. Method and apparatus for improved gettering for reactant gases
US5183647A (en) * 1988-04-11 1993-02-02 Mitsui Toatsu Chemicals, Inc. Method for purifying nitrogen trifluoride gas

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO0076915A1 *

Also Published As

Publication number Publication date
AU5732800A (en) 2001-01-02
WO2000076915A1 (en) 2000-12-21
EP1409400A1 (en) 2004-04-21
TWI257875B (en) 2006-07-11

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Legal Events

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PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

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Effective date: 20020524

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Effective date: 20040730

17Q First examination report despatched

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18D Application deemed to be withdrawn

Effective date: 20100811