EP1383709A2 - Sulfur trioxide delivery system - Google Patents
Sulfur trioxide delivery systemInfo
- Publication number
- EP1383709A2 EP1383709A2 EP02769302A EP02769302A EP1383709A2 EP 1383709 A2 EP1383709 A2 EP 1383709A2 EP 02769302 A EP02769302 A EP 02769302A EP 02769302 A EP02769302 A EP 02769302A EP 1383709 A2 EP1383709 A2 EP 1383709A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- sulfur trioxide
- sorbent
- weight
- heated
- zeolite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- AKEJUJNQAAGONA-UHFFFAOYSA-N sulfur trioxide Chemical compound O=S(=O)=O AKEJUJNQAAGONA-UHFFFAOYSA-N 0.000 title claims abstract description 412
- 239000002594 sorbent Substances 0.000 claims abstract description 74
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 70
- 239000010457 zeolite Substances 0.000 claims abstract description 46
- 238000001179 sorption measurement Methods 0.000 claims abstract description 39
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 claims abstract description 26
- 238000000034 method Methods 0.000 claims abstract description 26
- 229910021536 Zeolite Inorganic materials 0.000 claims abstract description 23
- 239000011148 porous material Substances 0.000 claims abstract description 20
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 14
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 10
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000010703 silicon Substances 0.000 claims abstract description 9
- 230000002441 reversible effect Effects 0.000 claims abstract description 6
- 238000004064 recycling Methods 0.000 claims abstract description 3
- 241001507939 Cormus domestica Species 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 102
- 229910052757 nitrogen Inorganic materials 0.000 description 51
- 239000007787 solid Substances 0.000 description 38
- 238000003795 desorption Methods 0.000 description 35
- -1 poly(tetrafluoroethylene) Polymers 0.000 description 25
- 229910052680 mordenite Inorganic materials 0.000 description 22
- 239000000741 silica gel Substances 0.000 description 22
- 229910002027 silica gel Inorganic materials 0.000 description 22
- 230000004580 weight loss Effects 0.000 description 22
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 20
- 239000000843 powder Substances 0.000 description 20
- 238000010926 purge Methods 0.000 description 19
- 239000010453 quartz Substances 0.000 description 18
- 230000004584 weight gain Effects 0.000 description 18
- 235000019786 weight gain Nutrition 0.000 description 18
- 238000011068 loading method Methods 0.000 description 17
- 239000000463 material Substances 0.000 description 12
- 238000002411 thermogravimetry Methods 0.000 description 12
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 11
- 239000000203 mixture Substances 0.000 description 10
- 239000002808 molecular sieve Substances 0.000 description 10
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 10
- 239000007788 liquid Substances 0.000 description 9
- 150000002500 ions Chemical class 0.000 description 7
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- 239000012159 carrier gas Substances 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 239000011230 binding agent Substances 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 229910000323 aluminium silicate Inorganic materials 0.000 description 4
- 150000001768 cations Chemical class 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000011282 treatment Methods 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 230000002378 acidificating effect Effects 0.000 description 3
- 239000000440 bentonite Substances 0.000 description 3
- 229910000278 bentonite Inorganic materials 0.000 description 3
- SVPXDRXYRYOSEX-UHFFFAOYSA-N bentoquatam Chemical compound O.O=[Si]=O.O=[Al]O[Al]=O SVPXDRXYRYOSEX-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000003197 catalytic effect Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000007142 ring opening reaction Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229910003910 SiCl4 Inorganic materials 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 description 2
- 238000002083 X-ray spectrum Methods 0.000 description 2
- BYFGZMCJNACEKR-UHFFFAOYSA-N aluminium(i) oxide Chemical compound [Al]O[Al] BYFGZMCJNACEKR-UHFFFAOYSA-N 0.000 description 2
- JYIBXUUINYLWLR-UHFFFAOYSA-N aluminum;calcium;potassium;silicon;sodium;trihydrate Chemical compound O.O.O.[Na].[Al].[Si].[K].[Ca] JYIBXUUINYLWLR-UHFFFAOYSA-N 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000006555 catalytic reaction Methods 0.000 description 2
- 229910001603 clinoptilolite Inorganic materials 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000003112 inhibitor Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 229910052700 potassium Inorganic materials 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 150000004760 silicates Chemical class 0.000 description 2
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 2
- 238000002336 sorption--desorption measurement Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000006277 sulfonation reaction Methods 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910019975 (NH4)2SiF6 Inorganic materials 0.000 description 1
- 229910017119 AlPO Inorganic materials 0.000 description 1
- 239000005995 Aluminium silicate Substances 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000005909 Kieselgur Substances 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 229910004074 SiF6 Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 238000010306 acid treatment Methods 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 235000012211 aluminium silicate Nutrition 0.000 description 1
- INJRKJPEYSAMPD-UHFFFAOYSA-N aluminum;silicic acid;hydrate Chemical compound O.[Al].[Al].O[Si](O)(O)O INJRKJPEYSAMPD-UHFFFAOYSA-N 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O ammonium group Chemical group [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 159000000007 calcium salts Chemical class 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- GUJOJGAPFQRJSV-UHFFFAOYSA-N dialuminum;dioxosilane;oxygen(2-);hydrate Chemical compound O.[O-2].[O-2].[O-2].[Al+3].[Al+3].O=[Si]=O.O=[Si]=O.O=[Si]=O.O=[Si]=O GUJOJGAPFQRJSV-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 229910001657 ferrierite group Inorganic materials 0.000 description 1
- 230000009969 flowable effect Effects 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 239000000499 gel Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000036571 hydration Effects 0.000 description 1
- 238000006703 hydration reaction Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical compound O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 229910052901 montmorillonite Inorganic materials 0.000 description 1
- APVPOHHVBBYQAV-UHFFFAOYSA-N n-(4-aminophenyl)sulfonyloctadecanamide Chemical compound CCCCCCCCCCCCCCCCCC(=O)NS(=O)(=O)C1=CC=C(N)C=C1 APVPOHHVBBYQAV-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005453 pelletization Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 159000000000 sodium salts Chemical class 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical class S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 description 1
- 229910052815 sulfur oxide Inorganic materials 0.000 description 1
- 239000000454 talc Substances 0.000 description 1
- 229910052623 talc Inorganic materials 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/28—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties
- B01J20/28054—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof characterised by their form or physical properties characterised by their surface properties or porosity
- B01J20/28078—Pore diameter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D15/00—Separating processes involving the treatment of liquids with solid sorbents; Apparatus therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
- B01J20/10—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising silica or silicate
- B01J20/103—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising silica or silicate comprising silica
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
- B01J20/10—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising silica or silicate
- B01J20/16—Alumino-silicates
- B01J20/18—Synthetic zeolitic molecular sieves
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B17/00—Sulfur; Compounds thereof
- C01B17/69—Sulfur trioxide; Sulfuric acid
- C01B17/90—Separation; Purification
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S502/00—Catalyst, solid sorbent, or support therefor: product or process of making
- Y10S502/515—Specific contaminant removal
- Y10S502/517—Sulfur or sulfur compound removal
Definitions
- the present invention relates to a process for the reversible sorption of sulfur trioxide on a recyclable sorbent, and to the composition of sorbent and sulfur trioxide.
- Liquid sulfur trioxide should be stored at a fairly precise temperature range of 35-41 °C to maintain a liquid state and keep it from freezing. Also, to avoid the formation of alpha and beta forms, it is necessary to store the sulfur trioxide in the presence of a polymerization inhibitor. Temperatures of35 - 41°C result in a significant sulfur trioxide vapor pressure and thus require storage in a pressure vessel. If sulfur trioxide were sorbed on a substrate, it could be stored under an inert atmosphere at room temperature in a non-pressure container made of a suitable material such as stainless steel or glass. No inhibitor would be required to prevent polymerization.
- sulfur trioxide in a safer and more easily used form, such as reversibly sorbed on a substrate that allows easy desorption at lower temperatures and thus simple delivery of the sulfur trioxide.
- sorbed sulfur trioxide in an easily flowable form, for instance as free- flowing pellets, available in a commercial quality (typically 98% minimum) for conventional uses or in a highly purified quality for use in the electronics industry (typically 99.9%).
- the desorbed sulfur trioxide should be no lower in purity than the sulfur trioxide feedstock.
- the sorbent it is desirable for the sorbent to be reusable. The present invention provides such an sorbent and a process for its use.
- the present invention comprises a process for reversible sorption of sulfur trioxide onto a sorbent comprising a) contacting from about 15% to 100% sulfur trioxide with the sorbent under anhydrous conditions at a temperature of from about 35°C to about 150°C thereby sorbing the sulfur trioxide onto the sorbent, b) desorbing sulfur trioxide from the sorbent at a temperature of from about 150°C to about 350°C at about atmospheric pressure, or under a vacuum pressure, and c) recycling said sorbent by continuously repeating steps a) and b), wherein said sorbent has a pore size of at least 0.5 nm and consists essentially of silica or zeolite, said zeolite having a silicon to aluminum ratio in the ranges of from about 1 to about 4.4 or greater than about 5.1.
- the present invention further comprises a sorbent consisting essentially of silica or zeolite, said zeolite having a silicon to aluminum ratio in the ranges of from about 1 to about 4.4 or greater than about 5.1, said sorbent having a pore size of at least 0.5 nm, and having adsorbed thereon a minimum of about 1% by weight sulfur trioxide.
- a sorbent consisting essentially of silica or zeolite, said zeolite having a silicon to aluminum ratio in the ranges of from about 1 to about 4.4 or greater than about 5.1, said sorbent having a pore size of at least 0.5 nm, and having adsorbed thereon a minimum of about 1% by weight sulfur trioxide.
- Figure 1 shows X-ray spectra of an example sorbent before the first sulfur trioxide sorption (denoted as "A") and after ten sulfur trioxide sorption and desorption cycles (denoted as “B”). Units of intensity on the ordinate are counts and the 2-theta abscissa is the scattering angle in degrees.
- the present invention comprises a process for the reversible sorption and desorption of sulfur trioxide onto certain molecular sieves or sorbents with recycle of the sorbent. This process is used to provide the composition of the present invention, sorbent having sulfur trioxide sorbed thereon, to an end user requiring a source of sulfur trioxide.
- the present invention further comprises a sorbent having a pore size of at least 5 nm, and comprising a silicon or zeolite, said zeolite having a silica to aluminum ratio of from about 1 to about 4.4 or about 5.1 or greater, said sorbent having adsorbed thereon a minimum of about 1% by weight sulfur trioxide.
- the sorbent When charged, the sorbent contains from about 3% to about 60% by weight sorbed sulfur trioxide, preferably from about 10% to about 45% by weight sorbed sulfur trioxide, and most preferably from about 15% to about 45% by weight sorbed sulfur trioxide.
- the sulfur trioxide, sorbed on the sorbent, and in a suitable container, is readily desorbed. It exhibits substantially reduced hazards in transportation and use.
- sulfur trioxide as applied to the process and composition of this invention is meant a composition of substrate and sulfur trioxide exhibiting a partial vapor pressure of sulfur trioxide less that that of sulfur trioxide itself, e.g., at 24°C a partial vapor pressure of less than 0.3 atmosphere (29 kPa).
- the composition of the present invention is prepared by step a) of the process of the present invention.
- Sulfur trioxide of purity from about 98% to 100%, is sorbed onto a sorbent. Any source of sulfur trioxide of adequate purity for the intended end-use may be used, typically a container of pure liquid sulfur trioxide is used.
- the sulfur trioxide as vapor or liquid, is passed through a bed of the dried sorbent to generate the sorbent/sulfur trioxide composition of this invention at a temperature in the range of from about 35 to about 150°C, preferably from about 50 to about 125°C, and most preferably in the range of from about 70 to about 100°C.
- the sorbent container optionally may be heated up to about 150°C during the sorption or optionally heated and then cooled to increase sorption.
- the sorbent is contained in any suitable container inert to sulfur trioxide and suitable for the intended desorption temperatures. Materials of construction for containing sulfur trioxide are well known to those skilled in the art.
- Steel or stainless steel cylinders which may be lined with an inert lining such as poly(tetrafluoroethylene), are preferred.
- an inert carrier gas may be used to move the sulfur trioxide into the sorbent.
- dry nitrogen may be passed through liquid sulfur trioxide maintained at 35°C to provide a gas stream containing about 50% by volume of sulfur trioxide.
- the sulfur trioxide concentration in the feed stream during the sorption step is preferably at least 15% by volume, the remainder being the inert carrier gas.
- inert carrier gas is meant a gas that is unreactive with sulfur trioxide, sorbent, or container, and is typically dry nitrogen.
- inert carrier gas the purity of the sulfur trioxide is described exclusive of the carrier gas.
- the sulfur trioxide stream can be sorbed under a positive pressure to accelerate sorption.
- the present invention uses thermally stable and dry sorbents such as silicalites, zeolites, clays, and silicas to provide long-term cyclability while allowing the sulfur trioxide to be expelled at relatively low temperatures, up to about 350°C.
- thermally stable and dry sorbents such as silicalites, zeolites, clays, and silicas to provide long-term cyclability while allowing the sulfur trioxide to be expelled at relatively low temperatures, up to about 350°C.
- the inorganic molecular sieves used for sorbing and desorbing sulfur trioxide in accordance with this invention include various silicates (e.g., titanosilicates, borosilicates, silicalites, low alumina-containing zeolites such as mordenite and ZSM-5, and high alumina- containing zeolites such as 5 A, NaY and 13X).
- the preferred molecular sieves useful as sorbents in the invention are either acidic or are non-acidic silicates.
- Zeolites can be generically described as complex aluminosilicates characterized by a three-dimensional framework structure enclosing cavities occupied by ions and water molecules, all of which can move with significant freedom within the zeolite matrix. In commercially useful zeolites, the water molecules can be removed from or replaced within the framework without destroying its structure. Zeolites can be represented by the following formula: M 2/n O-Al 2 O 3 -xSiO 2 -yH 2 O, wherein M is a cation of valence n, x is greater than or equal to 2, and y is a number determined by the porosity and the hydration state of the zeolite, generally from 0 to 8.
- M is principally represented by Na, Ca, K, Mg and Ba in proportions usually reflecting their approximate geochemical abundance.
- the cations M are loosely bound to the structure and can frequently be completely or partially replaced with other cations or hydrogen by conventional ion exchange.
- the zeolite structure is a corner-linked tetrahedra with Al or Si atoms at centers of tetrahedra and oxygen atoms at corners. Such tetrahedra are combined in a well-defined repeating structure comprising various combinations of 4-, 6-, 8-, 10-, and 12-membered rings.
- the resulting framework is one of regular channels and cages, which impart a useful pore structure for separation.
- Pore dimensions are determined by the geometry of the aluminosilicate tetrahedra forming the zeolite channels or cages, with nominal openings of 0.26 nm for 6 rings, 0.40 nm for 8 rings, 0.55 nm for 10 rings and 0.74 nm for 12 rings (these numbers assume ionic radii for oxygen). Those skilled in the art will recognize that zeolites with the largest pores being 8 rings, 10 rings, and 12 rings are considered small, medium, and large pore zeolites, respectively. Pore dimensions are critical to the performance of these materials in catalytic and separation applications, since this characteristic determines whether reactant molecules can enter and product molecules (in the catalytic application case) can exit the zeolite framework. In practice, it has been observed that very slight decreases in ring dimensions can effectively hinder or block movement of particular reactants or catalysis products within a zeolite structure.
- the pore dimensions that control access to the interior of the zeolite are determined not only by the tetrahedra forming the pore opening, but also by the presence or absence of ions in or near the pore.
- access can be restricted by monovalent ions, such as Na + or K + , which are situated in or near 8-ring openings as well as 6-ring openings.
- Access is enhanced by divalent ions, such as Ca 2+ , which are situated only in or near 6-ring openings.
- the potassium and sodium salts of zeolite A exhibit effective pore openings of about 0.3 nm and 0.4 nm respectively, whereas the calcium salt of zeolite A has an effective pore opening of 0.5 nm.
- the pore opening be of sufficient size (at least 0.5 nm) to allow the ingress and egress of sulfur trioxide.
- the presence or absence of ions in or near the pores, channels, and/or cages can also significantly modify the accessible pore volume of the zeolite for sorbing materials. To maximize capacity, generally protons or small cations are preferred.
- zeolites are available from various sources. A comprehensive listing of zeolites vendors is contained in "CEH Marketing Research Report: Zeolites" by M. Smart and T. Esker with A. Leder and K. Sakota, 1999, Chemical Economics Handbook-SRI International.
- Low alumina-containing zeolites can be prepared synthetically (e.g., mordenite, ZSM-5, silicalite) or by modification of high alumina-containing zeolites using methods well known in the art. These methods include but are not limited by treatment using SiCl 4 or (NH 4 ) 2 SiF 6 as well as steaming followed by acid treatment.
- the SiCl 4 treatment is described in J. Chem. Ed. 67(6), 519 - 521, 1990.
- the (NH ) 2 SiF 6 treatment by Breck et al. is described in US Patent 4,503,023. These treatments are generally very effective at increasing the Si/Al ratio for zeolites such as zeolites Y and mordenite.
- Acid forms of molecular sieve sorbents can be prepared by a variety of techniques including ammonium exchange followed by calcination or by direct exchange of alkali ions for protons using mineral acids or ion exchangers (for a discussion of acid sites in zeolites see J. Dwyer, "Zeolite, Structure, Composition and Catalysis” in Chemistry and Industry, Apr., 2, 1984). Binders for molecular sieve particles may be used as long as they do not affect the molecular sieve's ability to sorb and desorb sulfur trioxide.
- silicalites, zeolites (aluminosilicates), titanosilicates, aluminophosphates, silicas, clays, and borosilicates are all suitable for use as sorbents in the present invention.
- suitable silicalites are silicalite-1 and silicalite-2.
- suitable zeolites (aluminosilicates) are mordenite, Y, X, 5 A, US-Y, DA-Y, ZSM-5, ZSM- 11 , beta, L, ferrierite, and clinoptilolite.
- suitable titanosilicates are TS-1, TS-2, and Ti-beta.
- Suitable clays are bentonite, montmorillonite, kaolin, and talc.
- suitable borosilicates are boralite-A, boralite-B, boralite-C, and boralite-D.
- suitable aluminophosphates are AlPO -5, SAPO-5, AlPO 4 -l l, SAPO-34, and so on.
- Silicas include precipitated silica, dried silica sols, diatomaceous earth, silica gels, and fumed silicas.
- Preferred sorbent materials include high surface area silicas and the high silica-containing molecular sieve materials (Si/Al greater than about 5.1) prepared either by synthesis or modification.
- sorbent materials include silicalite, mordenite, beta, US-Y, DA-Y, ZSM-5, ZSM- 11 , borosilicates, titanosilicates and the like.
- the most preferred sorbent materials have a Si/Al ratio of at least about 25.
- Sorbent materials with Si/Al ratios in the range from about 1 to about 4.4 can also be used, but are less preferred as the sulfur trioxide/sorbent structure becomes less structurally stable to higher temperatures as this ratio decreases.
- the amount of sulfur trioxide sorbed is at least about 1%, preferably at least about 3%, and most preferably at least about 5% by weight, based on the weight of the sorbent.
- the maximum amount sorbed is dependent upon the physical structure of the sorbent used, typically in the range from about 40% to about 60% based on the weight of the sorbent. Additionally and preferably, the sorbent is used in a pelletized, beaded, or extruded and chopped form to facilitate gas or liquid flow through the sorbent bed.
- the typically powdered sorbent may be pelletized using suitable binder. Binders must be stable to exposure to sulfur trioxide and the sorption desorption conditions. Gamma-alumina, silica, and clays are examples of suitable binders. The pelletization of such sorbents is well known to those skilled in the art and provides pellets that remain free flowing after repeated sorption and desorption cycles.
- the use of the present invention is not limited to the supply of pure sulfur trioxide for such specialized applications as etching for the electronics industry.
- the sorbed sulfur trioxide composition of the present invention provides a major hazards management method for all users.
- Typical specifications for the sulfur trioxide feed during the sorption step has a sulfur trioxide content equal or greater than 99.5% and preferably equal or greater than 99.9%.
- the sulfur trioxide feed contains equal or less than 0.4% by weight sulfuric acid and preferably equal or less than 0.1%, and has an iron (measured as Fe) concentration of less than 5 parts per million by weight (ppm) and preferably equal or less than 0.7 ppm.
- Desorbed sulfur trioxide quality corresponds to the quality of the sorbed sulfur trioxide.
- the sorbent/sulfur trioxide composition can be stored indefinitely and transported under ambient temperature conditions in a dry container of inert materials of construction as described above.
- a container holding the sorbent/sulfur trioxide composition is subjected to 1) controlled heating (at from about 150 to about 350°C, termed heat-assisted desorption) and/or 2) vacuum pressures down to about 100 mm (13 kPa), (termed vacuum-assisted desorption) to provide a source of pure sulfur trioxide.
- Temperatures are given for heat-assisted desorption at, or close to, atmospheric pressure. Temperatures for vacuum-assisted desorption are correspondingly lower.
- the depleted sorbent When the sorbed sulfur trioxide is depleted, as indicated by cessation of the flow of sulfur trioxide, the depleted sorbent is then be recharged with pure sulfur trioxide and thus recycled. Desorption may be facilitated by desorption at reduced pressure, use of an inert carrier gas, or both. Various methods for controlled heating may be used, such as ovens, heating jackets, or the heat may be supplied by using a heated inert gas carrier and insulating the container.
- the initial charging of sulfur trioxide onto the sorbent and subsequent recharging is preferably performed by a provider at a site equipped for the safe handling of bulk quantities of sulfur trioxide.
- the user receives suitable containers, e.g., cylinders, of the charged sulfur trioxide-sorbent into the appropriate reaction area, where the container is heated and can be subjected to vacuum to desorb pure sulfur trioxide as required.
- the user then recycles the sorbent to the provider. The user is thereby relieved of the problems of safe handling of bulk sulfur trioxide.
- Examples 1 - 16 and Comparative Example A demonstrate the sorption of sulfur trioxide with various sorbents.
- Thermogravimetric analysis was used to characterize desorption from low temperature sites (where desorption occurs at less than 350°C) and total of low and high temperature sites (where desorption occurs at less than 750°C). Such characterization distinguishes the more useful and practical sites (where heat-assisted desorption occurs at less than 350°C) from those that have a significant part of the sulfur trioxide sorbed on high temperature sites (where heat-assisted desorption occurs at 350-750°C). In most applications, only the low temperature sites (less than 350°C) will be used to minimize hazards and facilitate handling. Sulfur trioxide bound at the higher temperature sites remains on the support. It should be noted that the thermogravimetric analysis procedure used in these small scale evaluations does not provide particularly accurate or consistent weight changes during desorption due to such factors as variable moisture sorption as the charged sorbent sample is prepared.
- Examples 17 and 18 demonstrate the process of repeated sorption and desorption cycles. Examples 17 and 18 are on a larger scale and desorption does not involve exposure of the charged sorbent to ambient conditions. Thus weight changes in Examples 17 and 18 are indicative of the sorption and desorption capacity for sulfur trioxide.
- Example 1
- a sample of 5A powder (Molecular Sieve Type 5 A, from Linde Division of Union Carbide, New York NY) was calcined in air by raising the temperature 60°C per hour to 500°C and holding at 500°C for 5 hours. The sample was cooled to 110°C and transferred to a dried vial. A poly(tetrafluoroethylene) vessel was loaded with 0.53 g of the dried 5 A powder and heated to approximately 60°C. Distilled sulfur trioxide vapor (44-45°C) was purged over the solid for 10 minutes. The solid was then heated to 91°C under a dry nitrogen purge for 1.25 h to remove surface bound sulfur trioxide. The sample was rapidly cooled to room temperature.
- 5A powder Molecular Sieve Type 5 A, from Linde Division of Union Carbide, New York NY
- a sample of 13X powder (13X, Lot number 01820CY, Aldrich Chemical, Milwaukee WI) was calcined in air by raising the temperature 60°C per hour to 500°C and holding at 500°C for 5 hours. The sample was cooled to 110°C and transferred to a dried vial. A poly(tetrafluoroethylene) vessel was loaded with 0.58 g of the dried 13X powder and heated to approximately 60°C. Distilled sulfur trioxide vapor (about 45°C) was purged over the solid for 10 minutes. The solid was then heated to about 90°C under a dry nitrogen purge for 3.5 h to remove surface bound sulfur trioxide.
- Example 3 A sample of 13X powder (13X, Lot number 01820CY, see Example 2) was calcined in air by raising the temperature 60°C per hour to 500°C and holding at 500°C for 5 hours. The sample was cooled to 110°C and transferred to a dried vial. A poly(tetrafluoroethylene) vessel was loaded with 0.51 g of the dried 13X powder and heated to approximately 60°C. Distilled sulfur trioxide vapor (about 45 °C) was purged over the solid for 10 minutes. The solid was then heated to about 90°C under a dry nitrogen purge for 3.67 h to remove surface bound sulfur trioxide.
- Example 4 A 20 g sample of silicalite powder (S- 115, from Union Carbide, New
- a 20 g sample of silicalite beads (S-l 15, see Example 4) was placed in a quartz tube in a vertically mounted tube furnace, heated by raising the temperature 60°C per hour to 500°C and holding at 500°C for 5 hours under flowing nitrogen. The sample was cooled under flowing nitrogen and then transferred to a dry box.
- a poly(tetrafluoroethylene) vessel was loaded with 3.07 g of the dried silicalite beads. Ten drops of distilled sulfur trioxide liquid was added to the solid at 35°C. The solid was heated to approximately 40°C under a dry nitrogen purge for approximately 2 h and then heated to 60°C for 4.25 h to remove surface bound sulfur trioxide. The sample was cooled to room temperature overnight.
- Degussa Corp., Frankfurt, Germany and South Plainfield NJ was placed in a quartz tube in a vertically mounted tube furnace, heated by raising the temperature 60°C per hour to 500°C and holding at 500°C for 5 hours under flowing nitrogen.
- the solid was then heated to 73 °C under a dry nitrogen purge for 3.8 h to remove surface bound sulfur trioxide.
- a 20 g sample of silica gel (powder, 952-08-5x1950, Davison Division of W. R. Grace, Baltimore MD) was placed in a quartz tube in a vertically mounted tube furnace, heated by raising the temperature 60°C per hour to 500°C and holding at 500°C for 5 hours under flowing nitrogen.
- a poly(tetrafluoroethylene) vessel containing 1.01 g dried silica gel was heated to about 60°C and distilled sulfur trioxide vapor (about 44°C) was purged over the solid for 1.25 hours. The solid was then heated to 78°C under a dry nitrogen purge for 4.85 h to remove sin-face bound sulfur trioxide.
- the final weight of the silica gel/sulfur trioxide complex was 1.69 g (67.33% weight gain, 38.84% sulfur trioxide loading).
- the silica gel/sulfur trioxide complex was then transferred under anhydrous conditions to the thermogravimetric analyzer where the average weight loss was 44.79% of its weight between room temperature and 350°C and 45.92% between room temperature and 750°C.
- Example 10 A 20 g sample of silica gel (powder, 952-08-5x1950, Davison Division of
- a 20 g sample of silica gel (powder, 952-08-5x1950, Davison Division of W. R. Grace, Baltimore MD) was placed in a quartz tube in a vertically mounted tube furnace, heated by raising the temperature 60°C per hour to 500°C and holding at 500°C for 5 hours under flowing nitrogen.
- a poly(tetrafluoroethylene) vessel containing 1.00 g dried silica gel was heated to about 62°C and distilled sulfur trioxide vapor (about 47°C) was purged over the solid for 1.25 hours. The solid was then heated to 79°C under a dry nitrogen purge for 3.2 h to remove surface bound sulfur trioxide.
- the final weight of the silica gel/sulfur trioxide complex was 1.56 g (56% weight gain, 35.9% sulfur trioxide loading).
- the silica gel/sulfur trioxide complex was then transferred under anhydrous conditions to the thermogravimetric analyzer where the average weight loss was 21.25% of its weight between room temperature and 350°.
- a 20 g sample of silica gel (powder, 952-08-5x1950, Davison Division of W. R. Grace, Baltimore MD) was placed in a quartz tube in a vertically mounted tube furnace, heated by raising the temperature 60°C per hour to 500°C and holding at 500°C for 5 hours under flowing nitrogen.
- a poly(tetrafluoroethylene) vessel containing 3.01 g dried silica gel was heated to about 57°C and distilled sulfur trioxide vapor (about 36°C) was purged over the solid for 1 hour. The solid was then heated to 64°C under a dry nitrogen purge for 2.4 h to remove surface bound sulfur trioxide.
- the final weight of the silica gel/sulfur trioxide complex was 3.51 g (16.61% weight gain, 14.25% sulfur trioxide loading).
- the silica gel/sulfur trioxide complex was then transferred under anhydrous conditions to the thermogravimetric analyzer where the average weight loss was 13.55% of its weight between room temperature and 350°.
- M-5 (Lot Number 962483061001-S-10, UOP Corp., Des Plaines IL) was placed in a quartz tube in a vertically mounted tube furnace, heated by raising the temperature 60°C per hour to 500°C and holding at 500°C for 5 hours under flowing nitrogen.
- the solid was then heated to 38°C under a dry nitrogen purge for 6.6 h to remove surface bound sulfur trioxide.
- a 9.12 g sample of FCC catalyst (Super Nova D, W. R. Grace Co., Baltimore MD) was placed in a quartz tube in a vertically mounted tube furnace, heated by raising the temperature 60°C per hour to 550°C and holding at 500°C for 5 hours under flowing nitrogen.
- a poly(tetrafluoroethylene) vessel containing 2.03 g of resulting dried FCC powder was heated to about 35°C and distilled sulfur trioxide vapor (about 45 °C) was purged over the solid for 1 hour. The solid was then heated to about 83 °C under a dry nitrogen purge for 3.5 h to remove surface bound sulfur trioxide.
- FCC/sulfur trioxide complex was 2.54 g (25.12% weight gain, 20.08% sulfur trioxide loading).
- the FCC/sulfur trioxide complex was then transferred under anhydrous conditions to the thermogravimetric analyzer where the average weight loss was 1.33% of its weight between room temperature and 350°C and 9.97% between room temperature and 750°C.
- Example 17 A sample (100 g) of silica gel powder (Lot number 952-08-5x1950,
- a poly(tetrafluoroethylene) vessel was loaded with 20.0 g of the dried silica gel and heated to approximately 38°C. Distilled sulfur trioxide vapor (about 38°C) was purged over the solid for 2.67 h. The sample was also shaken for 30 seconds every 10 minutes. The solid was then maintained at 60°C under a dry nitrogen purge for 4.5 h to remove surface bound sulfur trioxide. The final weight of the silica gel/sulfur trioxide complex was 23.85 g (19.25% weight gain, 16.14% sulfur trioxide loading).
- a sample (9.96 g) of the silica gel/sulfur trioxide complex prepared in (i) above was loaded in a drybox into a quartz tube and then placed in a vertically mounted tube furnace. Under flowing nitrogen the material was heated to 350°C and held for 24 h and then cooled. Effluent gases were passed through aqueous KOH scrubbers to remove sulfur trioxide. The final weight was 8.24 g (17.27% weight loss).
- a sample of the desorbed silica gel/sulfur trioxide complex was then transferred under anhydrous conditions to a thermogravimetric analyzer where it lost 4.87%) of its weight between room temperature and 350°C and 7.02% between room temperature and 750°C under flowing nitrogen.
- the loss to 350°C is an indication of the effectiveness of the desorption procedure.
- the loss from 350 to 750°C is an indication of amounts of "unusable" sulfur trioxide.
- a poly(tetrafluoroethylene) vessel was loaded with 30.0 g of the dried H- ZSM-5 extrudates and heated to approximately 60°C. Distilled sulfur trioxide vapor (about 38°C) was purged over the solid for 2 h. The sample was also shaken for 30 seconds every 10 minutes. The solid was then maintained at 60°C under a dry nitrogen purge for 9.25 h to remove surface bound sulfur trioxide. The final weight of the H-ZSM-5 extrudate/sulfur trioxide complex was 37.25 g (24.17% weight gain, 19.46% sulfur trioxide loading).
- H-ZSM-5 extrudate/sulfur trioxide complex was then transferred under anhydrous conditions to a thermogravimetric analyzer where it on average lost 14.01% of its weight between room temperature and 350°C and 18.85%) between room temperature and 750°C under flowing nitrogen.
- Cycle 1 Desorption The H-ZSM-5 extrudate/sulfur trioxide complex (30.03 g) was loaded in a drybox into a quartz tube and then placed in a vertically mounted tube furnace. Under flowing nitrogen the material was heated to 350°C and held for 24 h and then cooled. (Effluent gases were passed through aqueous potassium hydroxide scrubbers to remove sulfur trioxide.) The final weight was 25.48 g (15.09% weight loss).
- thermogravimetric analyzer A sample of the desorbed H-ZSM-5 extrudate/sulfur trioxide complex was then transferred under anhydrous conditions to a thermogravimetric analyzer where it on average lost 1.14% of its weight between room temperature and 350°C and 5.07% between room temperature and 750°C under flowing nitrogen. (The loss to 350°C is an indication of the effectiveness of the desorption procedure. The loss from 350 to 750°C is an indication of amounts of "unusable" sulfur trioxide.)
- A denotes the sulfur trioxide sorption step
- D the sulfur trioxide desorption step
- Table 2 illustrate the capacity for repeated sorption and desorption cycles and demonstrate the stability of the H-ZSM-5 extrudate to such cycles.
- a 20 g sample of alumina (Al-3945, 1/12" extrudates, Lot 4, 0537-178, Harshaw Corp., Beechwood OH) was placed in a quartz tube in a vertically mounted tube furnace, heated by raising the temperature 60°C per hour to 500°C and holding at 500°C for 5 hours under flowing nitrogen.
- a poly(tetrafluoroethylene) vessel containing 1.00 g dried alumina was heated to about 59°C and distilled sulfur trioxide vapor (about 44°C) was purged over the solid for 1.25 hours. The solid was then heated to 74°C under a dry nitrogen purge for 3.8 h to remove surface bound sulfur trioxide.
- the final weight of the alumina sulfur trioxide complex was 1.67 g (67% weight gain, 39.12% sulfur trioxide loading).
- the alumina sulfur trioxide complex was then transferred under anhydrous conditions to the thermogravimetric analysis where the average weight loss was 4.03% of its weight between room temperature and 350°C and 21.98% between room temperature and 750°C. Comparative Example A demonstrated the unsuitability of alumina in the practice of this invention.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US848896 | 2001-05-04 | ||
| US09/848,896 US6773490B2 (en) | 2001-05-04 | 2001-05-04 | Sulfur trioxide delivery system |
| PCT/US2002/013779 WO2002090253A2 (en) | 2001-05-04 | 2002-05-01 | Process for reversible sorption of sulfur trioxide and sorbent therefor |
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| EP1383709B1 EP1383709B1 (en) | 2006-01-11 |
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| US (1) | US6773490B2 (en) |
| EP (1) | EP1383709B1 (en) |
| KR (1) | KR20040012785A (en) |
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| US9890042B2 (en) * | 2015-12-09 | 2018-02-13 | Chevron Phillips Chemical Company, Lp | System and method for containing an emission of sulfur trioxide |
| CN110372546A (en) * | 2018-04-12 | 2019-10-25 | 广州市浪奇实业股份有限公司 | The sulfur trioxide and sulfuric acid minimizing technology and device of Sulfonates anionic surfactant |
| CN110368715B (en) * | 2018-04-12 | 2021-10-08 | 广州市浪奇实业股份有限公司 | Impurity removal method and device for sulfonate anionic surfactant |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US3362786A (en) | 1965-10-05 | 1968-01-09 | Donald B. Burkhardt | Sulfur trioxide production |
| US3980454A (en) | 1972-05-19 | 1976-09-14 | Hitachi, Ltd. | Adsorption method |
| CA1253669A (en) | 1985-01-21 | 1989-05-09 | C-I-L Inc. | Generation of sulphur trioxide from oleum |
| US4775587A (en) | 1985-10-07 | 1988-10-04 | The Dow Chemical Company | Treatment of the interior surfaces of resinous enclosure members |
| JP3078850B2 (en) * | 1990-12-28 | 2000-08-21 | 日揮ユニバーサル株式会社 | Adsorption composition containing zeolite and adsorption decomposition composition containing this adsorption composition |
| DK167910B1 (en) | 1991-05-24 | 1994-01-03 | Topsoe Haldor As | PROCEDURE FOR THE REMOVAL OF Sulfur Oxides From Exhausts |
| US5223237A (en) * | 1992-01-03 | 1993-06-29 | Lehigh University | Process for removing sulfur oxides from a gas stream |
| US5233081A (en) | 1992-03-30 | 1993-08-03 | Walles Wilhelm E | Method for sulfonation using porous absorber material |
| US5426083A (en) | 1994-06-01 | 1995-06-20 | Amoco Corporation | Absorbent and process for removing sulfur oxides from a gaseous mixture |
| US5647903A (en) * | 1995-10-03 | 1997-07-15 | Mcgill; Patrick D. | Microporous high structure precipitated silicas and methods |
| AU1421597A (en) * | 1995-12-20 | 1997-07-14 | E.I. Du Pont De Nemours And Company | Rapid process for making silica gel and silicate polymer and low density gels made thereby |
| US5763016A (en) | 1996-12-19 | 1998-06-09 | Anon, Incorporated | Method of forming patterns in organic coatings films and layers |
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| EP1383709B1 (en) | 2006-01-11 |
| KR20040012785A (en) | 2004-02-11 |
| WO2002090253A2 (en) | 2002-11-14 |
| US6773490B2 (en) | 2004-08-10 |
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