EP1354135A2

EP1354135A2 - Miniature precision bearings for minisystems or microsystems and method for assembling such systems

Info

Publication number: EP1354135A2
Application number: EP02701261A
Authority: EP
Inventors: Gerald Voegele; Thomas Weisener; Helmut Christmann; Armin Reichardt; Harald Helget
Original assignee: HNP Mikrosysteme GmbH
Current assignee: HNP Mikrosysteme GmbH
Priority date: 2001-01-22
Filing date: 2002-01-21
Publication date: 2003-10-22
Anticipated expiration: 2022-01-21
Also published as: US7698818B2; ATE348956T1; US20050081366A1; WO2002057631A2; EP1354135B1; DE50209005D1; WO2002057631A3

Abstract

The aim of the invention is to obtain a cost-effective solution for providing a microsystem with bearings, which have sufficiently high precision and long-term stress resistance. The invention proposes a method for manufacturing, adapting or adjusting a bearing portion in a fluidal microcomponent (M) comprising a stator (30) and a rotor (40,2). Said rotor is rotatably supported on the at least one bearing portion (L10,L11) relative to said stator. Said rotor (40,2) is rotatably supported by a sleeve (10, 11) inserted into said stator (30), for forming said bearing portion, the at least one sleeve being inserted in said stator as a bearing sleeve and comprising an inner surface and an outer surface (10i, 10a; 11i, 11a). Before being inserted in said stator, said bearing sleeve (10, 11) is a separate bearing component comprising an inner surface (10i, 11i) as an inner bearing surface, which is mechanically micro-finished before being inserted into said stator (30). The outer surface (10a, 11a) of said bearing component (10, 11) is mechanically permanently connected with said stator (30).

Description

Precise small storage in mini to microsystems and assembly processes for such systems

The invention relates to a method for producing, adapting or adjusting a bearing point in a mini to microsystem, such a microsystem being described in WO 97/12147 (Fraunhofer-Gesellschaft) as, for example, a micropump or micromotor in order to convey a fluid or to be powered by a fluid.

Due to the small nominal dimensions for the microsystems, for which reference is made, for example, to the true-to-scale drawing of FIG. 1, there is an increased requirement for the mounting of outer wheels, inner wheels or of shafts, which are to be referred to collectively as “rotors”. Especially when passing (conveying or driving) non-lubricating media, there is a need to use very hard and at the same time corrosion-resistant materials, e.g. Ceramic or hard metal. The use of these materials makes sense for all tribologically stressed parts of the microsystem in order to avoid the use of soft or corrosive materials with constant or severe wear. Especially with the small and smallest dimensions in the millimeter range (mini to microsystem), wear in the storage area quickly leads to failure of the entire system.

In addition, there is the manufacturing side, which, with such small nominal dimensions, brings with it difficulties in permanently adhering to the highly precise dimensions required. These dimensional accuracies are in the micrometer range, with the required accuracies in the range of 1 to 2 μm. Especially when using eccentric microsystems consisting of two intermeshing rotors, so-called internally toothed micropumps based on the gerotor principle, the high-precision maintenance of the eccentricity is achieved, which is achieved by two eccentrically arranged bearings. The bearings which have such a radial offset also have an axial offset, but are axially close to one another. The axes of the two sleeves are inherent to the principle, i.e. they are offset eccentrically. This eccentricity requires an accuracy in the micrometre range, which is complicated or technically impossible when using cutting manufacturing processes with conventional housing construction. The object of the invention is accordingly to propose a cost-effective solution to provide a microsystem of the type shown, for example, in FIG. 1 with bearings which have the required highest accuracy as well as long-term durability, in particular when operated with non-lubricating fluids.

This almost impossible task is solved with a microsystem according to claim 20 or a manufacturing method, adjustment method or adjustment method according to claim 1, 35 or 27, for manufacturing at least one bearing point of said microsystem.

According to the invention, a mechanically precise overall system consisting of simple precise bodies (sleeves) and an "inaccurately" manufactured housing (stator) is inexpensively constructed by connection technology (soldering, gluing, pressing), in particular in connection with two axially spaced bearings or bearing points and in an order of magnitude of the "rotors" to be stored in one

Diameter range under 15 mm, whereby larger versions should not be excluded, but the smaller diameters are given increased attention.

In the context of the explanation of the invention, reference is made both to the microsystem and to the method for producing the bearing of the

Microsystems, in which process variant the microsystem is described negatively in the sense that spaces and storage locations are created in which this microsystem can then be used positively. If the microsystem itself is affected, the finished state is described in which the manufacturing process can only be recognized indirectly, as can be seen from the following explanation in support of the claims.

For claims 1, 35 and 27 it should be noted that the terms of a hard bearing material are compared with those of a "soft" stator material. The terms are to be understood so that the hard bearing material is, for example, ceramic or hard metal, in order to ensure long-term durability and long-term accuracy of the at least one bearing point. Compared to these hard materials, the softer stator materials that are easier to machine are meant, which are cheaper to obtain and can be machined more easily in terms of production technology. They take up the essentially small bearing components that provide the accuracy and abrasion resistance to solve the task (claim 20). The stator has at least one section made of material that is easier to machine and that receives at least one bearing body made of the hard material. The rotor is mounted in the bearing body, preferably a sleeve, either as a shaft or as an outer rotor or inner rotor.

Between the hard material and the stator material there is an area which establishes the mechanically firm connection and which can be obtained in three ways. If part of the housing material is displaced in the bearing area with a mechanical pressing process, a direct mechanically firm connection leads to holding the bearing component in the sense that after insertion there is a mechanically firm connection between the bearing component and the stator and the bearing component is precisely aligned (claim 2 ). An alternative variant for producing the mechanically firm connection consists in the temporally occurring hardening of a filler material which is inserted into a gap which is between the bearing component and the somewhat larger internal dimension of the

Receiving section of the stator (claim 3). This gap can be in the range between 20 μhϊ and 70 μhϊ, in particular below 100 μm. After curing, there is a composite of materials that is mechanically stable, durable in the long term and manufactured precisely. In addition, the realization of the at least one bearing point thus formed is inexpensive. A third variant lies in the combination of the two methods described above if two axially spaced bearings are provided. Then a curing of a filler material between the second bearing component and the stator can be used for pressing in during a mechanical pressing process with a mechanical, direct, fixed connection for holding the first bearing component. First, the first bearing is mechanically pressed in to push the soft material. Then the second bearing is first loosely inserted into the stator, supported by the mechanically already fixed bearing, the center of which is axially spaced. A subsequent position positioning of the second bearing with respect to the first bearing and thus also the absolute positioning of the second bearing with respect to the stator follows, and a hardening filler material ensures that hardening and fixing takes place between the second bearing and the stator. The adhesive effect forms in a gap which is left between the second bearing and the stator, as described above. The first bearing point, which is mechanically positioned by displacing a surface section of the stator material, is preferably that of a shaft, the outer diameter of the sleeve forming the bearing point having a smaller diameter than the sleeve which forms the subsequently defined second bearing point, which is formed by hardening a Filler material is precisely positioned (claim 5, 31 or 32).

The displacement or the filling with a hardening material is the area that is to be described as an "incongruity" (cf. claim 27). The mismatch becomes a fit during the manufacturing process. Either the mismatch is achieved by mechanically displacing part of the stator material (claim 24, 26), or the mismatch becomes a mechanically firm connection by creating a hardening intermediate material which, as filler material, achieves the mechanically firm connection.

When pressing the bearing body during the entire pressing operation h ^'öcRgenäu is guided to an accurate recording position in the stator to ensure (claim 7). During mechanical guiding and during the displacement process, at least the surface of the stator section that receives the bearing component is changed, in particular more than the surface or radial piece is displaced (claim 7, claim 26).

The hardening of the filler material works without displacement, the bearing component being held in position during the hardening in order to allow the mechanically firm connection to become a positionally precise connection.

The at least one bearing body, which was a bearing body made of another material separate from the stator before the end of production, is machined by mechanical finishing of the inner surface, for example grinding, honing or lapping (claim 6), so that a suitable bearing surface for the shaft or the outer rotor is created. Particularly rotationally symmetrical bearing bodies are suitable for grinding operations, such as centerless grinding, and can be manufactured comparatively inexpensively with the necessary precision. Grinding also enables hard materials to be processed without restriction, which means that the choice of materials is not restricted. After the high-precision production of the bearing surfaces, the mechanical connection to the stator is carried out, the introduction of the bearing sleeves and their mutual alignment, in particular by Gluing or pressing in, is done with a separate device that defines the position and orientation of one, preferably two eccentric bearing points (claims 21, 22 and 23) and achieves the necessary tolerances with comparatively little effort.

Before the solder or the adhesive substance has hardened, the sleeves can be adjusted relative to one another so that they first move and align in the gap filled with adhesive.

The position is stabilized with the holding device and secured during the progressive hardening of the solder or the adhesive.

The manufacturing process advantageously limits the variety of parts in a modular system with different rotor sizes of the gerotor pump, since the same bearing bodies can be used with different gears - defined by an eccentricity and the gearing parameters.

When pressing in, a slight interference fit is used, in which the manufacturing tolerance of a "not sufficiently precise" stator, for example machined (with chip formation), defines the excess of the fit. Since the

Tolerance of the position of the negative form in the housing generally does not correspond to the specified position of the corresponding bearing body, the material is displaced during the pressing-in process. In most cases, this process takes place asymmetrically and is made possible by the roughness or a defined low proportion of the surface of the negative mold. The roughness of the surface to be produced is set in such a way that tips of the surface which carry the bearing body to be pressed in can be displaced relatively easily. Alternatively, the surface is also made possible by a defined axial or radial structure (comparable to a wooden dowel). The radial offset to be compensated for can be approximately 10 μm to 20 μm between the bearing body and the section of the stator that receives it.

The principle of the bearing can also be transferred to other mechanical systems with defined bearings, such as external gear pumps, etc., so that the invention does not necessarily only affect eccentric axes with two bearing points.

The rough specification of the position of the bearing body is inexpensive through metal-cutting processes (turning, milling or similar) or original (e.g. through injection molding), reshaping or specified in other manufacturing processes. The recesses (the negative forms) have only limited exact dimensions, so they can have larger tolerances than directly inserted bearing points. Parts of manufacturing costs are already saved here in order to subsequently achieve the precise and precise position of the bearing bodies relative to one another with the aid of the assembly device, which places the hard bearing bodies in the comparatively soft stator with high precision and fixes them in relation to one another with micrometer accuracy in position and orientation.

A separately essential assembly device, which is also described below, has a decisive influence in all assembly operations. With its micrometer-exact geometry, it defines the eccentric position of the two sleeve axes with respect to one another and stabilizes this position during the assembly process, either when pressing in, or during the holding time when the joining material hardens.

The execution of the storage corresponds to a so-called flying (one-sided) storage (claim 9). The one-sided bearing point is closer to the drive than the part of the bearing used by the microsystem. With the one-sided bearing, the number of bearings requiring accuracy is reduced. Thus, by using a bearing sleeve that receives the rotor (outer rotor, inner rotor or shaft), the radial bearing of the rotating one

Functional elements are ensured. If two bearings are provided, which are arranged eccentrically to one another, the bearing body serves to form the shaft bearing as an axial support for the outer rotor of the microsystem (claims 15 to 18). For this purpose, the inner diameter of the bearing body for the shaft is smaller than the inner diameter of the bearing body for the outer rotor of the

Microsystem. Because the outer diameter of the bearing body for the shaft is also larger than the inner diameter of the bearing body for the outer rotor, an axial bearing surface is created. The outer rotor (and also the inner rotor) thus rest on the axial end face of the bearing component having the smallest inner diameter. A strip is formed between the two bearing components (claim 17), which has no constant width in the circumferential direction due to the eccentricity (claim 18).

The eccentric sleeves lie against one another along their entire circumference (on at least one inner surface) and are in particular attached to an axial end section, that is to say to an end face of the stator. At the other end of the stator, a coupling device is provided, which creates a connection to a motor device in the sense of a drive. If there is talk of a radially offset bearing and of an axially offset bearing, reference can be made to the respective centers. In the case of radial displacement, the axes are offset from one another, which is what the parameter dr stands for. An axial offset corresponds to a distance between the centers of the bearing points, the distance being denoted by dL. However, the two bearing points themselves have a finite axial length, and they are closely adjacent, in particular immediately adjacent to one another (claim 15).

The dimension of the bearing points, which is only limited in space, also allows the use of highly specialized and expensive materials for the bearing points, without making the entire system unnecessarily expensive.

In the case of mechanical fine machining, based on the separate bearing component, which has a surface suitable as an inner bearing surface before insertion, a right angle of this inner bearing surface with respect to an end face of the bearing component can also be taken into account. A squareness is advantageous for an additional Hilfslägeπing in the ^"sense of a mechanical support point during assembly of the bearing points (claim 14, 17, and 34).

A further adjustment possibility is provided in the axial direction if a finished first support point can already be assumed as the first bearing point (claims 31 to 33, claim 5). The height (measured in the axial direction) of the bearing point for receiving the rotor, that is to say the second bearing point, can be set precisely in relation to the stator in terms of production technology so that a defined end play can be achieved. The front play refers to the rotor used later, which is rotatably supported in the second bearing. With the forehead play, friction and fluid bearing can be specified. The inner opening of the stator, into which the at least one bearing point, preferably two axially spaced bearing points, is inserted, has two sections (claim 12), each of which forms an inwardly facing surface. These surfaces are the sections of the surface that are not yet suitable for storage, to which the bearing points are attached by adhesive, pressing or a combination of these joining techniques using the bearing sleeves that are more precise in terms of production technology. These two surface sections of the raw bearing are already aligned eccentrically to one another in order to form a respective axis which have an axial spacing in the radial direction of "dr". The inner receptacle thus has two functional sections, for accommodating two functionally different bearing points with a respective bearing body. A compensating function by pressing or gluing then acts in a very small dimension range, an eccentricity being dependent on the toothing, for example 180 μm, in which example an adhesive gap has a size of at most 70 μm and a pressing then has an excess of about 10 μm.

Exemplary embodiments explain and supplement the claimed invention.

Figure 1 illustrates the complete in original size with a scale of 1: 1

Microsystem 1, consisting of a fluid connection F, the actual fluid-permeated microcomponent M, e.g. as a pump with motor drive A, or as a fluid motor M with drive object A.

FIG. 1 a illustrates, in high magnification, an exploded view of FIG. 1 with all the components to be described in more detail below, the micro component M consisting of an inner rotor 3 and an outer rotor 2, which inner rotor is mounted on a shaft 40. This microcomponent is explained in more detail in the WO document described at the outset and is therefore to be referred to below as a gerotor system or as an internally toothed toothed ring system with intermeshing teeth during the rotational movement.

Figure 2 is a sectional view along the major axis of Figure 1a and illustrates the assembly of the toothed ring system with all

Components.

FIG. 3 illustrates a section along the central axis of the system designated in the previous figures, only the stator 30 being shown schematically as a housing, to illustrate the sleeves 10, 11 used here as bearing points.

FIG. 3a illustrates the surfaces 30i and 10a of the bearing sleeve 10 and the stator 30 before and after the sleeve has been inserted.

FIG. 4 illustrates a support and positioning system 50 for the insertion of the sleeves 10, 11 from FIG. 3. FIG. 5 shows a perspective view of FIG. 3 with the stator and at a distance therefrom, that is to say the first sleeve part 10 and the second sleeve part 11 before insertion Receiving the shaft 40 in the space W and the outer rotor of the microsystem in the rotor space R. Both parts are inserted in the direction s in the interior 31 of the stator provided for this purpose.

FIG. 6 illustrates an alternative adjustment and fastening of the sleeves 10, 11 from FIG. 5 compared to FIG. 3a.

FIG. 7 illustrates a top view in the axial direction of FIG. 3, still without the rotor and the shaft 40 inserted, to illustrate the axial bearing and support surface 10b. The microsystem of Figure 1 in an original size shows the requirements for miniaturization as well as the need to manufacture bearings provided in this system with high precision and to ensure their durability and abrasion resistance.

FIGS. 1a and 2 are to be described together in order to obtain an insight into the microsystem illustrated in FIG. 1.

The largest section is occupied by a drive system A, which is coupled to the microcomponent via a flange area. A shaft of the engine is over a

Coupling 23 is coupled to the shaft 40 of the microcomponent in a rotationally rigid or rotationally fixed manner. The interior 32 provided for this purpose is delimited by a sleeve 21 which extends axially longer than the length of the coupling 23. In the area of the shaft 40, a first hat-shaped seal 24 with a collar-like thin flange section is provided, which seal 24 has an opening for the shaft 40 to pass through. The seal is seated in an axial inner space 31, in which a first ^"warehouses sleeve 10 is placed, which also has an internal opening in which the shaft is suitably mounted for rotation 40th

Above the first sleeve 10 there is a second sleeve 11, which is larger in terms of its outer diameter and has a larger inner opening for receiving the rotor or rotors 2, 3 of the microsystem M, one of which is placed on the shaft 40 in a rotationally fixed manner via a pin 40a is.

When the shaft rotates, both internally toothed rotors also rotate, for which purpose the outer bearing of the outer toothed ring is provided on the second sleeve 11.

The second sleeve 11 has an axially significantly shorter extension, but a larger radial inner recess, while the first sleeve 10 has a small bore suitable for the shaft, but on an axially greater length.

The microcomponent described is generally designated M, but consists of the two internally toothed rotors 2 and 3 shown in FIG. 1a.

Said sleeves 10, 11, seal 24 and shaft 40 are received in a stator 30, which can be viewed as a portion of the housing. It has an elongated flange portion 30b which extends over the Spacer sleeve 21 extends on the outside and engages at the edge on the drive A for fixing, and a section 30a located further up, in which the microsystem M and the shaft 40 are mounted. The stator 30 is screwed directly to the motor. For this purpose, small electric motors have a uniform thread or connection holes, via which motor gears are usually attached.

The inner opening of the second sleeve 11 for receiving the microsystem M is arranged in the stator on its end face. The sleeve can be mounted flush with the end face of the stator 30. A small overhang can preferably also be provided in order to achieve a better sealing effect on the rotors if the overlying section 29 29 ', which contains the fluid guide to the connections F, with a stronger pressure via a screw flange 28 to the stator 30 with intermediate Sealing ring 25 and a kidney plate 25a is pressed. For this purpose, a left-hand thread, which is arranged on the outside, is preferably provided between the screw flange 28 and the stator 30. The screw connection is made with a special claw wrench that engages in a side hole. This could prevent unauthorized opening. The section 29 29 'contains the fluidic control contours (inlet opening and outlet opening) and is aligned precisely (radially and circumferentially) with its lower section 29' via a cylindrical pin 22 for engagement in a fitting opening 22a in the stator 30 and possibly a collar on the stator 30 ,

The described flush contact of the lower section 29 'of the fluid guide section 29, 29' with its drive-oriented surface on the rotors of the fluid system M is improved if a compensating ring 27 is provided in an annular manner between the tensioning arrangement 28 and the fluid guide section 29. This compensating ring 27 is made of a soft material, for example aluminum, copper or plastic and ensures that the section 29 'lies flush and flush against the stator, which is also provided with an O-shaped seal 25 or an additional disk 25a with fluid-conducting kidneys, in particular also on the outward-facing end faces of the rotors, in order to achieve a better sealing effect here. Due to the higher surface pressure (the richer fit) of the fluid guide section 29 'against the second sleeve 11, the better sealing effect is achieved, which is favored by the soft compensating ring 27.

Three constructive sections can be seen from the above description. The

Fluid guide section F with those also to be viewed as a stator

Components 28, 29, 29 '. The actual stator 30 in section 30a for receiving the Microsystem with subsequent coupling area 23 of shaft 40 in section 30b. The drive area A connects to this area.

It should be emphasized that a separation of the fluid guide section 28, 29, 29 ', F from the microsystem is provided in the stator, and this separation is located on the end face of the rotors of the microsystem facing away from the bearing side. In other words, the stator 30 is constructed in such a way that the bearing is placed flush on the end face pointing away from the drive A, so that a placement of the fluid guide section 29, 29 'directly adjoins the fluidic microcomponent and with an intended fluid guide structure made of kidneys and Drilling a passage and the functional operation of the micro component M ensures.

The overview given above is intended to increase the ability to understand how a microsystem according to FIG. 1 is constructed. Details are explained below, which describe in particular the attachment and installation of the first and second sleeves 10, 11 from FIG. 2, for which reference is made to FIG. 3.

FIG. 3 is a section through the axis of the system from FIG. 2, two axes 100 and 101 being offset relative to one another. The axis offset is labeled dr. The axis 100 is that axis of the first sleeve 10 which has a length L10. The sleeve is made of a hard material, for example hard metal or ceramic. It is initially not inserted into the stator 30, which has an elongated opening 31 for its reception, the lower section of which has an inner surface 30i. This inner surface can be seen schematically in FIG. 3a (in the lower field). It has a high degree of roughness, which can arise in a cutting process. It does not have to be particularly precise and can even be made larger, as can be seen from FIG.

In the same way, another, axially above receiving section is in the

Stator 30 is provided as part of the opening 31, for receiving the second sleeve 1, which can also be made of a hard material such as ceramic or hard metal. It is also not used at first.

The use of hard materials compared to the "soft" materials of the stator 30 secures the bearing sleeves against abrasion. They are spatially of a small extent, so that expensive materials can also be used. The Bearing sleeves are primarily designed as hollow cylinders and have a respective interior to accommodate the respective "rotor".

The first sleeve 10 has an inner space with an inner surface 10i, for receiving the shaft 40. The inner space is designated W and has a longitudinal extension corresponding to the sleeve length L10.

The axially adjoining second sleeve 11 is provided for receiving and mounting the outer rotor 2. For this purpose, it has a rotor holder R, whose diameter d11 i is larger than that diameter d1 Oi of the shaft space W. The inner surface 11 ϊ is designed in such a way that the rotor can be supported. The inner surface 10i of the first sleeve part 10 is also designed so that the shaft 40 can be supported.

Both surfaces are highly precise and designed for their respective storage functions by grinding, eroding, honing or lapping.

The insertion of the two bearing sleeves into the corresponding axial section of the opening 31 of the stator 30 with the inner surface 30i or the radially larger inner surface 30i 'is carried out with the insertion device from FIG.

Here, the two sleeves 10, 11 are spatially aligned with one another by placeholders 53, 52, which ensures the high precision. Both placeholders 52, 53 are spatially fixed relative to a support plate 51. The placeholder 52 for the outer rotor receives the second sleeve 11, the placeholder filling the rotor geometry of the rotor space R. The second placeholder 53 for the shaft 40 is axially longer. It takes over the filling of the shaft space W and places the first sleeve 10 spatially geometrically so that the two spaced axes 100, 101 are obtained for the eccentric mounting of the microsystem M consisting of two rotors. A not shown pin on the support plate 51 allows their absolute

Positioning relative to the stator 30, for engagement in the recess 22a.

After the sleeves 10, 11 are placed on the insertion device 50 and their two placeholders 52, 53 which are radially offset by "dr", the insertion device with a mechanical arrangement (which is not shown) becomes geometrically and massively precise, even highly precise the intended opening 31 of the stator 30 axially inserted. The resulting thrust path s or the thrust direction s is shown in FIGS. 5 and 3a. Due to the dimensioning and the The surface structure of the two sleeves 10, 11 and the inner surfaces 30i 'and 30i of the stator is subject to a change in at least the inner surfaces of the stator 30, which can be seen from FIG. 3a before the insertion and after the insertion of the sleeve part 10. The rough surface of the inner surfaces, which are not manufactured with high precision, is leveled or even removed or displaced, the soft material on the surface being changed, but at the same time applying mechanical forces, for the spatial geometric fixation of the pressed-in sleeves 10, 11, which serve as bearing pieces.

The inner surfaces 11i, 10i of the two sleeves are highly precise, and then geometrically precisely defined by insertion in order to fulfill their storage function.

The outer surfaces 10a and 11a of the two sleeves mechanically connect to the inner surfaces 30i 'and 30i of the stator when the insertion device 50 is inserted axially by pressure.

An alternative setting can be made by a hardening substance 12 if the inner surfaces 30P and / or 30i are designed somewhat larger in their spatial geometry than the outer surfaces 11a and / or 10a of the sleeves 10 and / or 11, as illustrated in FIG. 6 , The insertion device then takes over the assignment of the eccentrically offset axes 100, 101 of the two sleeves and places them in the interior 31 with the two eccentric sections 30i, 30i 'of the stator 30 until an introduced hardening substance 12 fills the gap 13 in a fixed manner and the sleeves mechanically determined.

A solder or an adhesive can be used as the hardening substance; the first hardens by a drop in temperature, the second by a chemical reaction.

The insertion device has the task of taking over the mechanical assignment during the axial pressing. In the variant of fixing with a curable substance in gap 13 (also as an irregular space), which has a size of between 20 μm and 70 μm, it takes over the geometrical fixing of the sleeves during curing, so it does not need any additional mechanical means when inserted in direction s To muster strength.

The second sleeve 11 is axially shorter and has an axial length L11. The total stator length is L. After the stator 30 has the axial length L, the sum of the two sleeve lengths L11 and L10 is still shorter than the stator length. The The distance between the centers of the two sleeves is dL, which represents an axial offset, but the end faces of the two sleeves 10, 11 lie against one another. This arrangement of the two end faces will be explained using FIG. 7.

FIG. 7 illustrates a top view in the axial direction 100, 101 from above (seen from FIG. 3 or FIG. 6), the interior spaces R and W being still open for the outer rotor and shaft, that is to say no shaft 40 and no rotor 2 or 3 of the microsystem M has yet been used is. An end bearing surface 10b can be seen, which is also shown in FIG. 3 and in FIG. 6. It has a width b which is not constant over the circumference, which is caused by the offset dr or Δr of the two axes 100, 101, and also by the choice of the two diameters of the sleeves, here the outer diameter d10a of the longer sleeve 10 and the inner diameter d11i of the shorter ones Sleeve 11. The diameters or the associated radii as the respective half diameters, as well as the radial offset (eccentricity) are selected such that one of the hard bearing components 10, 11 forms an annular axial support surface 10c lying outside the surface 10b, which is also entirely circumferential is continuous and change on the ^"as hard Lagerb ^'auteϊϊ 11 rests.

If the radial offset dr is observed, the outer diameter d10a of the sleeve 10 is so much larger than the inner diameter d11 i of the sleeve 11 that the soft material of the stator 30 as part of the support surface 10b for the rotor 2 from FIG and possibly also the inner rotor 3 from FIG. 1a - viewed in the axial direction - comes to the fore or comes to bear. The rotor or the rotors - inserted into the rotor space R - are then axially securely supported, geometrically precise and there is a good seal on the surface 10b, while the ring section 10c, which supports the sleeves 10 and 11 to one another and aligns them orthogonally, is no longer visible from the outside.

The inner surfaces 11i and 10i form bearing surfaces for the shaft 40 and the outer rotor of the fluid microcomponent M to serve as a plain bearing. The ring surfaces 10c and 10b together form the axially facing end face of the entire bearing component 10 which is provided for the shaft. The inner section 10b serves to support and align the microsystem and the outer section 10c lying around it, which lies on the same plane, serves to align and support the second bearing component 11.

The top view in FIG. 7 also illustrates the gap 13 from FIG. 6, which is already filled here with an adhesive or a solder 12 around the inserted one Set sleeve 11 relative to the softer material of the stator 30. Before the solder or the adhesive hardens, the sleeve 11 has been aligned with the outer ring surface 10c of the lower sleeve 10 so that its axis 101 is also aligned exactly parallel to the axis 100. The exact alignment results from a high-precision production of the end faces, which run exactly perpendicular to the axes and can thus indirectly influence the positioning and positional accuracy. In one exemplary embodiment of specific dimensions, which are not to be understood as restrictive, the sleeve 10 was manufactured with an outer diameter of 5 mm and had an inner diameter of 1.2 mm. The outer rotor 2 had an outer dimension of 3.8 mm and is thus - also taking into account the selected eccentricity of the two axes 100, 101 within the outer dimension of 5.0 mm of the sleeve 10 supporting it axially to provide a pivot bearing. The inner dimension d11i is also from this dimension to see the second sleeve 11, corresponding to the outer dimension of the rotor, in order to support it radially with an annular bearing. Both perpendicular bearings, the

Inner wall surface 11i and the axially facing bearing surface of the sleeve 10 to ensure a precise alignment ^"and precise positioning of the Rotörbauteils. 2

The gap 13 shown in FIG. 7 in an oversize for clarification results from the difference between the radius of the inner surface 30i 'of the stator 30, see FIG. 3, and the outer dimension of the outer surface 11a of the hard bearing sleeve 11. Its dimension is one Adhesion is preferably between 50 μm and 70 μm, which would not be recognizable to scale in the illustration according to FIG. 7 if it had not been shown on a substantially enlarged scale.

FIG. 5 shows a perspective view when the two bearing sleeves 10, 11 are inserted, used in the case of assembly and adjustment of the sleeves provided with an adhesive substance. The adhesive substance 12 is introduced into the gap 13, which is between 20 μm and 70 μm, based on the respective inner diameter of the stator 30 on the surfaces 30i and 30i '. The interior 31 for receiving the first sleeve 10 is longer than the bearing sleeve 10. The corresponding difference - as can be seen in FIG. 2 - is taken up by the radial shaft seal 24, which is fixed against the motor A by the spacer sleeve 21. An insertion path s of the two bearing sleeves 10, 11, supported by the insertion device 50 according to FIG. 4, leads to the exact placement. After filling in the adhesive substance 12, which can also be placed on the inner surfaces according to FIG. 5 even before insertion, the spatial geometrical assignment and absolute placement of the sleeves 10, 11 becomes at least for a period of curing of the adhesive substance or the solder until the mechanical solidification occurs.

FIG. 5 also shows the receptacle 22a into which the positioning pin 22 from FIG. 2 engages when the fluid guide section 28, 29, 29 'is put on. A radially offset stepped bore 22b on the inside of the surface 30i 'and 30i of the stator 30 is predetermined. At a distance from the receptacle 22a, it offers the possibility of using the fluid in a small amount after inserting and attaching the bearing sleeves 10, 11 when operating the system M as a sliding bearing lubrication or in the ring flow. The bore 22b has a minimum depth L10 + L11. The stepped bore 22b, which can also be seen in FIG. 1a, lies with a section of its drilling depth in the surface area 30i '(cf. FIG. 3) and with a further section in the surface area 30i. It is used to achieve the ring flow for the fluid that flows through the shaft bearing. By the stepped bore a derivation of the fluid between the seal and shaft bearing is reached to the suction side of a microsystem, which ^'is formed Pümpe ^{^"The"} fluid from the so far as a channel for the ^Ffuiά' in this example AELS ^<working stepped bore 22b in the fluid guide section 28, 29, 29 ', here in section 29' facing the microsystem, is resumed by covering the channel and returned to the microsystem 2, 3.

It should be mentioned that the spatially geometrically high-precision mounting takes place only on one side, but with regard to the shaft W, a second mounting can also be provided in the fluid guide part 29, which, however, does not have to have the same precision as the first mounting in the sleeve 10 is also effective on an axially greater length L10.

The bearing parts can be produced as sleeves in a rotationally symmetrical manner. They can also have a different geometry in the outer diameter, only their inner diameter and their inner surface must be aligned so that the rotors 40.2 (shafts and outer rotor of the microsystem) can be geometrically accurate and abrasion-resistant.

The described types of insertion and positioning can also be combined.

A less rigid mechanical connection can be provided during insertion by pressing in the sleeves 10, 11, determined by the corresponding adaptation of the Diameter geometries of the interior and outside diameter of the sleeves. After the press-in process has been carried out, alignment and then gluing can take place via an additional device, so that both methods can also be used in combination.

The combined type of insertion can also take place sequentially. The first receptacle with the inner surface 30i in the first section of the opening 31 of the stator can be connected by a mechanical press-in process in which the sleeve 10 is positioned in the correct position, as shown in FIG. 3a. Compared to the first sleeve defined in this way, which can then serve as an auxiliary bearing or an auxiliary device, the arrangement according to FIG. 4 can be used to position the second bearing point (here with the sleeve 11) in section L11, a gap 13 shown in FIG Circumference between the outer surface 11a and the inner surface 30i 'is filled with an adhesive substance 12. If the first sleeve 0 is firmly seated, the second sleeve can be positioned and glued relative to it and thus also relative to the stator. As an alternative to gluing in, a pressing process can also take place in the second process, which corresponds to the variant described above, only in chronological succession. The device according to FIG. 4 can be used for all of these variants.

The combination of pressing and gluing has proven to be particularly precise. First, the first sleeve 10 is pressed into the stator 30, the two opening sections 30i, 30P being provided as two eccentrically arranged sections of the total recess 31. After the pressing-in, the second bearing point 11 is then formed, in which the bearing sleeve, which is manufactured with high precision, is inserted into the housing, whereby it lies flat on the first sleeve, specifically on the end face section 10c. The position of the second sleeve relative to the first sleeve is then defined, for which the device according to FIG. 4 can be used. An adhesive 12 is then allowed to pull into the gap 13 on the outer surface 11a of the second sleeve and cure in order to fix this bearing point, that is to say to firmly connect it to the stator 30.

The perpendicularity of the previous mechanical finishing of the sleeve 11 or the sleeve 10 can ensure that two auxiliary bearing points help with the positioning and fixing. An axial support surface 10c and the circumferential inner surface 10i, which can also influence the positional accuracy of the second sleeve 11 used indirectly via the device according to FIG. The two sleeves 10 and 11 can also be interchanged in the order of attachment. First, the larger diameter sleeve 11, then - axially supported by the support surface section 10c - the longer sleeve 10 for the shaft 40. The second sleeve 10 is then inserted from the coupling space 32 into the lower receiving section of the recess 31.

It should be noted that the mechanically precise positioning in terms of spatially geometrical definition relates to two important dimensions. First, the amount of the eccentricity vector "dr" as a radial offset. On the other hand, the correct absolute positioning of the two bearing sleeves 10, 11 in the stator 30, that is to say their position in relation to the housing. This position is ensured by a pin which is inserted into the plate 51 of the device 50 from FIG. 4 and which engages in the housing instead of the pin 22a when mounting the bearing sleeves 10, 11. This pin is not shown in FIG. 4, but it reveals itself from the context and the spatial / geometric arrangement of the receptacle 22a from FIG. 2, in which the pin 22 taking over the final assembly is shown. It takes over the extensive definition of the fluid guide section 28, 29, 29 'with respect to the ^" housing 30 ^" , which is referred to as the stator.

Claims

Expectations:

1. A method for producing, adapting and / or adjusting at least one bearing point in a fluidic mini to micro component (M), which component has a stator (30) and at least one rotor (40, 2), the rotor on the at least one Bearing (L10.L11) is rotatably mounted with respect to the stator (hereinafter "rotatably"); characterized in that

(a) the rotor (40, 2) is rotatably supported via a sleeve (10, 11) inserted into the stator (30) to form the bearing point, for which purpose the at least one sleeve is used as a bearing sleeve in the stator and an inner and an outer one Surface (10i, 10a; 11i, 11a);

(b) the bearing sleeve (10, 11) is a separate bearing component before insertion into the stator, which has the inner surface (10i, 11i) as an inner bearing surface and mechanically at least on this surface before insertion into the stator (30) is fine-machined; (c) the outer surface (10a, 11a) of the bearing component (10,11) with the

Stator (30) is brought into a mechanically firm connection.

2. The method according to claim 1, wherein the outer surface (10a, 11a) of the bearing component (10, 11) is inserted by being pressed into a receptacle (30i, 30i ') of its inner dimension smaller, whereby a particularly radial displacement of a Surface proportion of the softer material of the

Stator takes place through the bearing sleeve (10, 11) for mechanically fixed connection to the stator (30).

3. The method according to claim 1, wherein the outer surface (10a, 11a) of the bearing component (11, 10) is inserted into a receptacle of the stator (30) which is larger in terms of its internal dimension, and an interposed gap (13) or irregular intermediate space is a hardenable one Has filler (12), which hardens after filling, for mechanically firm connection of the bearing component (10, 11) to the stator (30).

4. The method according to claim 3, wherein the curing takes place by cooling, in particular with a solder as filler, or by a chemical

Reaction takes place, especially with an adhesive substance as filler (12).

5. The method according to claim 1, wherein at least two axially spaced bearings (L10.L11; 10, 11) are provided in the stator (30) and one of the bearings from a first sleeve (10) and the other of the bearings from a further sleeve ( 11) is formed, in particular the first sleeve

Claim 2 and the second sleeve according to claim 3 relative to the stator (30) and relative to each other.

6. The method according to claim 1, wherein the mechanical finishing of the inner surface (10i, 11i) of the bearing component is a grinding, honing or lapping.

7. The method according to claim 2, wherein the bearing component is guided and held during the entire insertion process by mechanical contact (50) in such a way that an accurate position of the bearing component when pressed into the

Stator (30) is obtained.

8. The method according to claim 3, wherein the bearing component (10, 11) is held in position during the hardening in order to obtain a positionally accurate alignment of the held bearing component in the stator (30) after the hardening.

9. The method according to claim 1, wherein the bearing is a one-sided bearing, in particular in the stator (30) is arranged as a housing so that it is closer to the drive than the microsystem (M).

10. The method according to claim 1, wherein the at least one bearing component (10, 11) is cylindrical, in particular is also cylindrical on the outside. 11, Method according to one of the preceding claims, wherein a first and a second bearing body (10,

11) are designed as a respective sleeve and each define an axis (100, 101), the two sleeves being mounted in a housing (30, 31) as a stator with eccentric or radially offset (dr) axes and axially offset in order to an axial distance (dL) or at different axial locations (L11, L10) a bearing of the shaft (40) and a

Obtaining the outer rotor (2) as two rotors.

12. The method of claim 1, wherein two bearing components are used in two axially spaced sections (30i, 30i ') of an inner opening (31) of the stator in the stator (30), and wherein the two sections of the opening (31) are formed eccentrically to each other are to assign one of two rotors to one of the two bearing components for the rotary bearing.

13. The method according to claim 5 or 12, wherein the first bearing component (10) for mounting the shaft (40) and the second bearing component (11) is provided for mounting the rotor (2).

14. The method according to claim 12, wherein the first bearing component (10) has an outer diameter of the outer surface (10a) with the first diameter (d10a) and the second bearing component has an inner diameter of an inner bearing surface (11 i) with the inner diameter (d11i) , and wherein the inside diameter is smaller than the outside diameter,

- For an axial support surface (1 Oc) between the bearing pieces (10, 11) in the difference range;

- for an axial bearing surface (b, 10b) within the inner diameter.

15. The method according to claim 1, wherein the at least one bearing component is an arbitrarily shaped bearing body, with a suitable for storage

Inner surface (11i, 10i).

16. The method of claim 11, wherein the radial offset (dr) and the

The inside diameter and the outside diameter (d10a, d11i) are matched to one another so that ^" both Lägerkδfpe lie face to face on a SÜfz chenrihg (10c) over the entire circumference.

17. The method according to claim 11 or 14, wherein the radial offset (dr), said inner diameter and said outer diameter of the respective sleeve are matched to one another in such a way that a circumferentially extending end or strip region (10c, 10b, b) is formed, for axial support when fixing the second bearing body or for operational storage (b) of at least one rotatable part of the microsystem (M), in particular the

Outer rotor or inner rotor.

18. The method according to claim 17, wherein the strip area as the end face (1 Ob) has no constant width (b) along its circumferential extent.

19. The method according to any one of the preceding claims, wherein the hard material is hardened steel, ceramic or hard metal.

20. Microsystem with fluid throughput, which microsystem has a first section for the inlet or outlet of fluid (F) and is provided in a second section with at least one bearing point (10, 11), wherein

(a) a rotor (40, 2) is rotatably supported relative to a stator (30) via at least one bearing body (10, 11), which bearing body consists of a hard

Material is prefabricated;

(b) the stator (30) has an inner surface section (30i, 30i ') which receives the bearing body (10, 11) and which consists of a material which is softer than the bearing body. 21. The microsystem according to claim 20, wherein two bearing bodies (10, 11) are formed from the hard material and are arranged in the stator.

22. Microsystem according to claim 20 or 21, wherein two radially offset bearing bodies are arranged in the stator such that a respective central axis (100, 101) of a respective bearing body (10, 11) have a radial distance s from one another (dr).

23. Microsystem according to claim 20, rrilt two axially offset (dL) but closely adjacent bearing points as separate bearing bodies (10, 11) in the stator (30).

24. The microsystem according to claim 20, wherein the stator (30) has a receptacle (30i \ 30i) which is initially not suitable for the bearing body (10, 11) as the inner section.

25. Microsystem according to claim 24, wherein the initially mismatched section and the at least one bearing body (10, 11) form a gap with a thickness greater than zero when the bearing body is inserted into the mismatched section and a hardening gap (13) Joining material is introduced to fix the bearing body in relation to the stator after the

Joining material (12).

26. Microsystem according to claim 20, wherein the section which does not initially fit is an undersize of the receptacle (30i ', 30i) of the stator, into which a bearing body (10, 11) which is radially larger than the receptacle is mechanically pressed, 0 of which of Part of the harder bearing body material

Displaced receiving portion of the stator (30), but at least changed in its surface structure.

27. Method of manufacturing, adapting and / or adjusting at least one

Bearing point in a fluidic mini to microsystem (M), which system has a stator (30) and at least one rotor (40, 2), the rotor being rotatably mounted on the at least one bearing point (L10, L11) with respect to the stator, characterized in that

(a) the stator before inserting at least one separate one

Bearing body has a section (30i, 30P) which is not suitable for storage and is made of a material which is softer than the bearing body (10,11) (as an incongruity); (b) the mismatch by inserting, in particular pressing or gluing, the bearing body out of a material that is harder than the material of the stator becomes a mechanical assembly and adjustment point around the inner surface (11 i, 10i) defined by the bearing body as a bearing surface for the rotary bearing of the rotor (40.2) to define spatially and geometrically with high precision.

28. The method according to claim 27, wherein the indentation takes place while displacing, but at least deforming an inner surface (30i) of the bearing body.

29. The method according to claim 27 or 28, wherein a hardening material (12) is introduced into a gap or following the mechanical displacement in remaining gaps in order to mechanical fixation and spatial / geometric positioning of the bearing body as a bearing after the curing Obtain filler material (12).

30. The method or system according to one of the above claims, wherein the bearing component (10, 11) has an outer diameter of less than 15 mm, in particular less than 10 mm, and / or an inner diameter of less than 5 mm, in particular less than 2 mm, for storage of the outer rotor (2), in particular the shaft (40).

31. The method according to claim 27, wherein two bearing points (L10.L11) are determined one after the other in time, one by pressing (10a, 10i) and another by soldering, gluing (11a, 11i) or pressing.

32. The method according to claim 3, wherein first a press-in and then a gluing takes place.

33. The method according to claim 31 or 32, wherein the pressed-in first bearing point is used as an auxiliary bearing point set relative to the stator (30) in order to spatially / geometrically position the second bearing point (L11) before it is fixed by the hardening material (12) becomes.

34. The method according to claim 31 or 33, wherein the positioning of the second bearing point (11; 11a, 11i) in the axial (10b) and / or radial (10i, 11 i) direction takes place, supported by the first bearing point (0).

35.Method for producing a first and a second bearing point for two rotating bodies (2, 40) and forming an overall system comprising a stator and rotors rotatable relative thereto, the mechanically precise overall system comprising two bearing points (L10, L11) and correspondingly two rotors ( 2.40) arises - from simple but mechanically / geometrically precise bodies (10, 11), and a stator (30) which is inaccurate for storage, and a connection technique which defines the precise bodies to one another and to the stator; - from a subsequent insertion and storage of the two

Rotors (2.40) in the stator (30; 10.11) which is suitable for storage due to the connection technology and the precise bodies (10.11).

* * *