EP1330331B1 - Verfahren zum laserschneiden von optischen fasern oder wellenleitern - Google Patents

Verfahren zum laserschneiden von optischen fasern oder wellenleitern Download PDF

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Publication number
EP1330331B1
EP1330331B1 EP01976529A EP01976529A EP1330331B1 EP 1330331 B1 EP1330331 B1 EP 1330331B1 EP 01976529 A EP01976529 A EP 01976529A EP 01976529 A EP01976529 A EP 01976529A EP 1330331 B1 EP1330331 B1 EP 1330331B1
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EP
European Patent Office
Prior art keywords
fibre
waveguide
cutting
laser
distribution
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EP01976529A
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English (en)
French (fr)
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EP1330331A1 (de
Inventor
Michael R. Osborne
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Irvus Ltd
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Iruvis Ltd
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Priority claimed from GB0026129A external-priority patent/GB0026129D0/en
Priority claimed from GB0029914A external-priority patent/GB0029914D0/en
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Publication of EP1330331A1 publication Critical patent/EP1330331A1/de
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/25—Preparing the ends of light guides for coupling, e.g. cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • B23K26/0734—Shaping the laser spot into an annular shape
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4202—Packages, e.g. shape, construction, internal or external details for coupling an active element with fibres without intermediate optical elements, e.g. fibres with plane ends, fibres with shaped ends, bundles
    • G02B6/4203—Optical features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device

Definitions

  • This invention relates to a laser cutting method and more particularly, but not exclusively, concerns a cutting method utilising a laser in optical fibre and optical waveguide applications.
  • Mechanical cleaving involves producing a fiducial stress-raising mark on the periphery of the fibre (typically with a diamond blade), and then snapping the fibre from the mark. When carried out correctly, this leaves a high quality, flat surface across the vast majority of the end of the fibre, including across the crucial core region.
  • Mechanical cleaving has a number of disadvantages and limitations. Firstly, it produces very sharp edges on the corner of thee cleaved (cut) fibre. These are susceptible to handling damage, particularly if the fibre is to be inserted longitudinally into another component.
  • these sharp edges are removed in a second process, for example by introducing the tip of the fibre into a flame.
  • the size of the hardware involved in the mechanical cleave means that is not possible to cleave very close to other objects. For example, cleaving cannot generally be carried out closer than about 10mm from a ferrule or connector.
  • the problem here is to couple the divergent optical output from the laser diode, which will have an effective source size of a few microns and usually different beam divergences in the two orthogonal dimensions, into the (usually) circularly symmetric core of an optical fibre or waveguide which, for a single mode fibre or waveguide, will be between 3 and 20 ⁇ m in diameter, or may be up to 62 ⁇ m or more for multi-mode fibre or waveguides.
  • optical transfer from the source to the fibre or waveguide is often accomplished using micro-optics inserted between the two components as shown in Figure 2(c) .
  • the production and alignment, assembly and subsequent permanent fixturing of these discrete components is problematic.
  • the lenses are often spherical and symmetric, although it is clear that aspheric, asymmetric lenses would provide superior performance.
  • Producing a lens-shape directly on the end of the optical fibre or waveguide can reduce the alignment difficulties by avoiding the need for the additional (aligned) component.
  • Various techniques for manufacturing such a lens have been described, including etching, selective etching (where the cladding is selectively removed and the core then etched), grinding, pulling the fibre in the presence of a heat source (usually an electric arc) and laser micro-machining.
  • the laser route has a number of advantages in terms of speed, flexibility and reproducibility.
  • the significant thermal input can cause severe problems when machining polarisation maintaining (PM) fibre, which typically have asymmetrically distributed inserts of a different or doped material within the fibre to provide stress directions and hence the PM axis.
  • PM polarisation maintaining
  • This different material will generally have different thermal properties to the surrounding quartz, in particular it will melt and re-solidify at a different (usually lower) temperature. If the laser lensing process produces a significant melt region, as the micro-lathe does, the effects of different parts of the end face of the fibre re-solidifying at different times can severely distort the overall surface form.
  • US 5,421,928 (Siecor Corporation) describes a method in which a focussed laser beam is used to cut excess optical fibre protruding from a ferrule prior to polishing
  • EP 0 987 570 A (The Whitaker Corporation) describes a process in which a focussed laser beam is translated across a fibre in order progressively to cut through the fibre (a similar technique is disclosed in US 4 932 989 ).
  • EP 0 803 747 discloses a process for producing an optical waveguide device including a substrate and a ridge-shaped optical waveguide projecting at a main plane of the substrate, comprising the step of forming said ridge-shaped optical waveguide at the main plane of the substrate by abrasion working, e.g. by means of an excimer laser.
  • US 5 850 300 discloses a beam homogenizer that minimizes undesired intensity variations at the output plane caused by sharp breaks between facets in previous embodiments.
  • the homogenizer includes a hologram made up of irregularly patterned diffractive fringes.
  • An input beam illuminates at least part of the hologram.
  • the hologram transmits a portion of the input beam onto an output plane. In doing so, the energy of the input beam is spatially redistributed at the output plane into a homogenized output beam having a preselected spatial energy distribution at the output plane.
  • the illuminated portion of the output plane has a shape predetermined by the designer of the homogenizer.
  • WO 93/08491 discloses a method that is based on processing a substance to any desired form based on altering the energy distribution of the laser beam so that the substrate can be processed to the desired spatial structure in a parallel fashion, even for lasers that have poor beam quality such as low spatial or temporal coherence or unreproducible multimode structure or poor beam pointing stability by using a method of beam homogenization like a channel integrator and altering the profile of the beam with appropriate optical elements based on the principles of geometric optics, such as aspherical lenses or mirrors whose surfaces are derived by mathematical solutions that are related to the desired energy redistribution and by working in a region where the material laser interaction's dependence on energy is known.
  • EP 0391 598 discloses a process and apparatus for fabricating microlenses on optical fibers.
  • a pulsed laser beam and an end portion of a fiber are arranged relative each to another so that the laser beam is incident on the end portion of the fiber at an acute angle ⁇ to the longitudinal axis of the fiber. The angle is selected to attain a desired curvature of a lens formed by ablation and heating of the end portion of the fiber by the laser beam.
  • a movement of the fiber and the laser relative each to another results in progressive engagement of the end portion of the fiber with the laser for a preselected distance so as to produce a short taper with a lens at the end thereof.
  • the fiber rotated about its axis within a passage of the holder which moves the end-portion of the fiber into and through the laser beam resulting in the said lens.
  • the precise repeatability of the lens formation may be controlled by a computer.
  • EP 0 558 230 discloses an asymmetric hyperbolic microlens on the end of a single-mode optical fiber enhances the fiber's coupling to elliptical laser beams.
  • the lenses, with controlled eccentricity ratios, are made by micromachining the end of the fiber with a pulsed CO 2 laser as the fiber is directed, preferably by computer control, about the focused leaser beam.
  • Coupling efficiencies of 90 percent (-0.75 dB) have been realized with single transverse mode lasers at a wavelength of 0.98 ⁇ m having an approximately 3 to 1 beam ellipticity.
  • the asymmetric lenses demonstrate an almost 2 dB increase in coupling efficiency over symmetric hyperbolic microlenses.
  • Such lasers are useful to pump erbium-doped fiber amplifiers.
  • About 120 mw was coupled from such a laser into single-mode fiber.
  • the principal object of the present invention is to overcome or at least substantially reduce some at least of the abovementioned problems.
  • It is an object of the present invention also to provide an improved laser cutting method which is precise, reliable and reproducible during operation for optical fibre and optical waveguide applications.
  • It is another object of the present invention also to provide an improved laser cutting method which is capable of achieving one or more of a reduction in the volume of molten fibre or waveguide material produced, a low interaction time to substantially prevent thermal conduction/diffusion effects, a low fibre or waveguide end flare, a sharp cutting action and a high local laser intensity at the fibre portion or waveguide to be cut.
  • it is another object of the present invention also to provide an improved method of forming a lens on optical fibre or waveguide which is precise and reliable, and which is capable of achieving in a controllable manner one or more of: low thermal conduction/diffusion effects, a low optical absorption depth of laser in the fibre or waveguide material, a sharply curved lens-shape (for example, with a tight lens tip radius), a fast processing of the fibre or waveguide material, a low fibre or waveguide end flare and a low core diffusion.
  • the present invention in one of its aspects resides in the concept of taking advantage of the sharp cutting edge of a predetermined laser beam intensity profile to provide a controllable ablation and vaporisation of selected optical fibre or waveguide material, such ablation and vaporisation enabling a cutting action of the type which meets the aforementioned objects to be effected.
  • a method of cutting a portion of an optical fibre or waveguide with a laser beam comprising: generating a beam of laser light with a predetermined intensity distribution, aligning said beam distribution in relation to a portion of an optical fibre or waveguide to permit an amount of said beam exceeding a predetermined level of intensity to impinge on said portion to be cut; and cutting said portion in dependence upon the impingement of said beam on said portion so as to form a substantially flat optical fibre or waveguide surface.
  • a method of forming a lens at an end portion of an optical fibre or waveguide with a stationary laser beam comprising: generating a beam of laser light with a predetermined intensity distribution; aligning said beam distribution in relation to an end portion of an optical fibre or waveguide to permit an amount of said beam exceeding a predetermined level of intensity to impinge on said end portion; and severing said end portion in dependence upon the impingement of said beam on said end portion so as to form a lens at said end portion.
  • the present invention resides in the concept of utilising means other than focussing of the laser beam to provide the desired sharp cutting edge of a predetermined laser beam intensity profile, enabling a cutting action of the type which meets the aforementioned objects to be effected.
  • the desired generated beam distribution can be formed by optical interference, imaging or diffraction or by a combination of such techniques.
  • the method(s) of the aforementioned aspects of the invention have definite advantages over known cutting methods and apparatuses; for example, the method(s) and apparatus of the invention address the limitations of the mechanical cleaving (cutting) route.
  • the laser cutting action of the invention produces fibre or waveguide corners which are rounded, and therefore, are more robust.
  • the angle of the cut/cleave is governed by simple geometric considerations between the fibre or waveguide and the cutting laser beam, and so can reach large angles (certainly >45°).
  • the cut/cleave angle reproducibility reflects the reproducibility of this geometry, and can easily better the ⁇ 0.5 degree of reproducibility obtained by mechanical cutters/cleavers and indeed the ⁇ 0.2 degree of reproducibility specified in some applications.
  • the laser cutting action of the invention is inherently suited to automated loading and unloading of the fibre or waveguide.
  • the cut can be positioned very close to other components, certainly ⁇ 1mm.
  • the laser cutting of the present invention combines several techniques designed to reduce the undesirable thermal effects of the conventional laser micro-lathe approach. These include, as mentioned previously, minimising the volume of molten material produced, keeping the overall interaction time as short as possible to prevent thermal conduction/diffusion and fibre or waveguide flaring, minimising the optical absorption depth of the laser radiation in the material, using the sharpest feasible "cutting edge" to the laser beam, and employing constructive interference to enhance the local laser intensity, thereby allowing shorter interaction times.
  • keeping the quantity of molten material produced during all stages of the interaction to a minimum minimises the undesirable effects of the re-flow of this melted volume. It also minimises the potential transport of the fibre or waveguide dopant from the core region into the cladding (refer to Figure 4 ). Note also that keeping the laser interaction time to a minimum reduces the thermal conduction from the region which is directly heated by the laser into other parts of the fibre or waveguide, thereby reducing the overall thermal impact.
  • the lens forming method of the present invention combines several techniques designed to reduce the undesirable thermal effects inherent in the conventional laser micro-lathe approach, allowing, as previously mentioned, the achievement of tighter tip radii, faster processing, minimising fibre flare and core diffusion, and providing the ability to handle polarisation maintaining (PM) fibre. It also avoids the need to move the laser beam into and through the optical fibre as specified in EP 0 391 598 B1 for example.
  • Figure 5 illustrates, in schematic form, how the cutting action of a method of the invention is effected on a portion of optical fibre or waveguide so as to form an optical fibre or waveguide surface of enhanced quality. More specifically, as shown, the cutting action is affected by impinging an amount 1' of a predetermined laser intensity distribution 1, for example in the form of a Gaussian intensity distribution 1, onto a section 2 (to be cut) of fibre or waveguide material 3 in alignment therewith and ablating or vaporising the fibre or waveguide section 2. Regions 4 of the fibre, adjacent to the fibre section 2, are further subjected to significant levels of heating in dependence upon the impingement, the regions 4 being heated to an appropriately significant level below the fibre or waveguide material's vaporisation point.
  • a predetermined laser intensity distribution 1 for example in the form of a Gaussian intensity distribution 1
  • Regions 4 of the fibre, adjacent to the fibre section 2 are further subjected to significant levels of heating in dependence upon the impingement, the regions 4 being heated to an appropriately significant level below the fibre or wave
  • the laser cutting procedure of the invention does not involve the production of a mark on the fibre periphery and then mechanical fracture of the fibre as required by the conventional cleaving technique.
  • the laser beam is absorbed within a thin layer of the fibre or waveguide material 3, and the laser beam profile 1 is arranged to have the sharpest possible cutting "edge".
  • a CO 2 laser (not shown) is preferably used to generate the laser-beam profile, and advantageously, the CO 2 laser wavelength is changed to 9.4-9.8 ⁇ m from the more usual 10.6 ⁇ m to permit the optical absorption in the quartz of the fibre or waveguide to be increased by almost an order of magnitude, resulting in a corresponding decrease in the optical absorption depth.
  • FIG. 6 there is shown, for comparison purposes, a conventional laser cutting arrangement in which a cut is performed on a workpiece 10 by using a laser focus to provide a laser "incision" in the workpiece 10, and then moving either the laser focus or the workpiece to translate this incision producing a narrow slot or cut 11, as is shown in Figure 6 .
  • This is analogous to the use of a jig-saw in woodworking. This approach can lead, however, to significant thermal input.
  • the present invention is different in principle to this mode of operation, and uses an asymmetric laser beam profile to perform the cutting. This more closely resembles the use of a chisel in the woodworking analogy, and results advantageously in a much more rapid process, leading to a significantly reduced thermal impact.
  • a cylindrical telescope 20 is combined with a symmetric (spherical or aspheric) focussing optic 22, and the resulting different numeral aperture in two axes produces a single high intensity line focus 25 ideally suited to laser cutting.
  • the intensity in the focal line is maximised. This yields the highest optical intensity, with the sharpest "edge" to the beam allowed by free-space Gaussian beam propagation, and allows the shortest possible interaction time to be used which reduces heat conduction, melt depth and hence reduces flaring and core diffusion.
  • the laser cutting of the invention is carried out by appropriate apparatus using the edge of the incident predetermined laser power density distribution (see also Figure 5 ). It is possible to sharpen this edge beyond the limits which Gaussian optics would generally impose by employing a mask to aperture the beam. This results in an Airy-type power density distribution 28 having sharper edges (albeit with additional diffraction structure 28') as shown in one dimension in Figure 8 . A Gaussian power density distribution 27 is also shown in Figure 8 for comparison.
  • the essentially 1-D geometry of the laser cut means that a mask with different properties in two orthogonal dimensions is most appropriate.
  • a rectangular mask 30 is used as shown in Figure 9 .
  • An alternative possibility, giving a somewhat modified focal distribution is to use a single sided mask, for example a knife-edge 31, and that kind of mask is also shown in Figure 9 .
  • the laser beam may be caused to propagate in such a direction that the partially cleaved (cut) fibre or waveguide reflects the laser beam in such a way that the reflected beam constructively interferes with the non-reflected part of the beam.
  • This effect is illustrated in Figures 10(a) and 10(b) .
  • the local amplitude is doubled (assuming perfect reflection), resulting in a four-fold increase in the local intensity.
  • the thermal loading on the fibre or waveguide is advantageously reduced by allowing all but the cutting edge of the laser beam to pass by the fibre or waveguide in use. This is achieved by carrying out the laser cut(s) in accordance with the aforementioned geometry of Figures 10(a) and 10(b) , as opposed to the alternative approach shown in Figure 11(b) (top schematic) where the laser beam propagation is shown to be directed into the plane of the paper.
  • the thermal loading on the fibre or waveguide can still further be advantageously reduced by utilising the geometry of Figures 11(a) and 11(b) (bottom schematic).
  • a preliminary laser cut 35, 35' in the normal described way is performed on the fibre or waveguide portion 37, 37' to be treated, and thereafter, one or more subsequent laser cuts 36, 36' are performed, there being slight relative movement (not shown) between the fibre or waveguide and the laser beam along the longitudinal axis of the fibre or waveguide between successive cuts.
  • the laser cutting procedure of the invention provides a high intensity beam with the sharpest possible cutting edge, enabling core diffusion and fibre flaring to be minimised and producing the most accurate cut end on the fibre.
  • a Gaussian intensity distribution is the best likely distribution to be achieved
  • the intensity distribution for use in the present invention may advantageously be produced by means other than by focussing, for example by imaging, optical interference or diffraction, or by a combination of such techniques.
  • the laser cutting of the invention is carried out by appropriate apparatus using the cutting edge of the generated laser power density distribution.
  • an advantageous laser intensity distribution for use in the practice of the present invention may be produced by imaging a rectangular mask 40 in the image plane by use of a lens 41.
  • the arrangement provides optical demagnification of the laser beam in order to increase the local intensity of the laser beam on the fibre to be cut.
  • the present invention in this aspect, is therefore different in principle to conventional modes of operation, and uses a laser beam profile with a sharp cutting edge, produced by means other than by focussing, to perform the cutting. This more closely resembles the use of a chisel in the woodworking analogy, and results advantageously in a much more rapid process, leading to a significantly reduced thermal impact.
  • Figure 13 shows a different mask geometry from that of Figure 12 for use in the present invention. More particularly, as shown, a mask geometry with a curve-shaped cut 42 is used to provide a varying level of light transmission such as to permit a particular optical structure such as a lens to be formed on the end of a fibre. Note that the intensity distribution in the image (machining) plane is altered by the way in which the object (mask) is illuminated by the laser, which need not be uniform.
  • Figure 14 shows another optical arrangement of the present invention in which optical interference is used to produce the high local intensity desired.
  • an optical interference arrangement 50 similar to the so-called Lloyds Mirror in classical optics is used. This is used with a point/slit source 51 and gives rise to a number of parallel fringes 52.
  • it may be used to produce the high local intensities desired. With correct control over the divergence of the laser beam (and/or the effective source size), the majority of the photons are advantageously concentrated into the first fringe, with little energy wasted in the higher order fringes. The resulting intensity pattern is highly concentrated, yielding the high intensities required.
  • wavefront-splitting interferometers are known in classical optics which produce fringe patterns similar to the Lloyd's mirror arrangement, and which are similarly adapted to optical fibre cutting in accordance with the present invention. These include Fresnel's double mirror arrangement, Young's slits arrangement and Fresnel's Bi-prism arrangement.
  • the constructive interference of phase-shifted beams is used to produce the required local high intensity.
  • This phenomenon is known in classical optics, but has not been employed in laser machining. Diffraction of the cutting beam using phase masks, zone plates and/or echelle gratings is envisaged so as to effect fibre cutting in accordance with the present invention.
  • the laser cutting action proposed by the present invention finds utility for various optical fibre or waveguide applications.
  • it permits a selected region of an optical fibre or waveguide to be cut in a controlled fashion enabling various cut angles ( ⁇ to >45 degrees) to be formed in the fibre or waveguide, and as described above, it can be successfully applied to optical fibre or waveguide to form, for example, (1) a substantially flat optical fibre or waveguide surface of enhanced optical quality or (2) a lens of enhanced optical quality at said region.
  • the laser beam during the cutting operation is kept at a stationary position in relation to the fibre or waveguide.
  • the described embodiment of the invention uses a Gaussian or Airy-type (non Gaussian) laser intensity distribution
  • the same or similar technical effect might be obtainable by using a different kind of non-Gaussian laser intensity distribution having a sharp cutting edge.
  • the laser source need not be a CO 2 laser as in the described embodiment and could alternatively be a UV-excimer laser.
  • the invention can also be applied to different optical fibre or waveguide structures where a sharp cutting action is required. It is also to be appreciated that a very wide range of laser intensity distributions might be produced using different kinds of masks having different forms and shapes. Different masks having varying levels of transmission can be used to produce the same or similar technical effect.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Light Guides In General And Applications Therefor (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Laser Beam Processing (AREA)
  • Laser Surgery Devices (AREA)

Claims (23)

  1. Verfahren zum Schneiden eines Abschnittes einer optischen Faser oder eines Wellenleiters mit einem Laserstrahl, wobei das Verfahren umfasst:
    Erzeugen eines Strahles Laserlicht mit einer vorbestimmten Intensitätsverteilung (1),
    Ausrichten der Strahlverteilung in Bezug auf einen Abschnitt einer optischen Faser oder eines Wellenleiters, so dass eine Menge des Strahls, die einen vorbestimmten Intensitätspegel übersteigt, auf den zu schneidenden Abschnitt (2) trifft; und
    Schneiden des Abschnittes abhängig von dem Auftreffen des Strahls auf dem Abschnitt, so dass eine im Wesentlichen flache optische Faser- oder Wellenleiteroberfläche gebildet wird.
  2. Verfahren nach Anspruch 1, wobei das Laserlicht eine vorbestimmte Intensitätsverteilung (1) aufweist, die in einer Dimension größer als die Breite der Faser oder des Wellenleiters (2, 3, 4) ist.
  3. Verfahren zum Bilden einer Linse an einem Endabschnitt einer optischen Faser oder eines Wellenleiters (2, 3, 4) mit einem stationären Laserstrahl (1), wobei das Verfahren umfasst:
    Erzeugen eines Strahles Laserlicht mit einer vorbestimmten Intensitätsverteilung (1),
    Ausrichten der Strahlverteilung in Bezug auf einen Endabschnitt einer optischen Faser oder eines Wellenleiters (2, 3, 4), so dass eine Menge des Strahls, die einen vorbestimmten Intensitätspegel übersteigt, auf den Endabschnitt trifft; und
    Schneiden des Endabschnitts abhängig von dem Auftreffen des Strahls auf dem Abschnitt, so dass eine Linse an dem Endabschnitt gebildet wird.
  4. Verfahren nach Anspruch 1, 2 oder 3, wobei das Schneiden durch Abtragung oder Verdampfen des Abschnittes (2) und Erwärmen benachbarter Abschnitte der Faser oder des Wellenleiters ausgeführt wird.
  5. Verfahren nach einem der vorangehenden Ansprüche, wobei die erzeugte Strahlverteilung einen asymmetrischen Strahl umfasst.
  6. Verfahren nach Anspruch 5, wobei der asymmetrische Strahl durch Verwendung eines zylindrischen Teleskopmittels (20) gebildet wird.
  7. Verfahren nach einem der vorangehenden Ansprüche, wobei die vorbestimmte Intensitätsverteilung (1) eine Gaußsche Intensitätsverteilung ist.
  8. Verfahren nach einem der Ansprüche 1 bis 6, wobei die vorbestimmte Intensitätsverteilung eine Intensitätsverteilung vom Airy-Typ ist.
  9. Verfahren nach einem der vorangehenden Ansprüche, wobei das Auftreffen des Strahles auf dem Abschnitt (2) derart ausgeführt wird, dass eine konstruktive Interferenz zwischen reflektierten und nicht reflektierten Teilen des Strahles möglich ist.
  10. Verfahren nach einem der vorangehenden Ansprüche, des Weiteren umfassend das Ausführen einer relativen Bewegung zwischen dem Abschnitt und dem Strahl nach einem ersten Schneidvorgang und anschließend das Durchführen eines zweiten Schnittes.
  11. Verfahren nach Anspruch 10, wobei die relative Bewegung eine kleine vorbestimmte Bewegung entlang der Längsachse der Faser oder des Wellenleiters umfasst.
  12. Verfahren nach Anspruch 10 oder Anspruch 11, des Weiteren umfassend das Schneiden des Abschnittes ein drittes Mal oder mehrere Male.
  13. Verfahren nach Anspruch 1, wobei der Strahl Laserlicht mit einer vorbestimmten Intensitätsverteilung durch ein anderes Mittel als Fokussieren erzeugt wird.
  14. Verfahren nach Anspruch 13, wobei das Schneiden durch Abtragung oder Verdampfen des Abschnittes und Erwärmen benachbarter Abschnitte der Faser oder des Wellenleiters bei einem vorbestimmten Pegel ausgeführt wird.
  15. Verfahren nach Anspruch 13 oder Anspruch 14, wobei die erzeugte Strahlverteilung durch Abbildung gebildet wird.
  16. Verfahren nach Anspruch 13 oder Anspruch 14, wobei die erzeugte Strahlverteilung durch Interferenz gebildet wird.
  17. Verfahren nach Anspruch 16, wobei die erzeugte Strahlverteilung durch Verwendung einer Lloydschen optischen Interferenzspiegelgeometrie gebildet wird, oder durch Verwendung einer Fresnelschen optischen Interferenzdoppelspiegelgeometrie oder durch Verwendung einer Fresnelschen optischen Interferenzdoppelprismengeometrie oder durch Verwendung einer Young-Doppelspaltgeometrie.
  18. Verfahren nach Anspruch 13 oder Anspruch 14, wobei die erzeugte Strahlverteilung durch Beugung gebildet wird.
  19. Verfahren nach Anspruch 18, wobei die erzeugte Strahlverteilung mit Hilfe eines Maskenmittels gebildet wird.
  20. Verfahren nach Anspruch 19, wobei das Maskenmittel eine Phasenmaske oder Zonenplatte umfasst.
  21. Verfahren nach einem der Ansprüche 18 bis 20, wobei die erzeugte Strahlverteilung durch Verwendung eines Echellegitters gebildet wird.
  22. Verfahren nach Anspruch 13 oder Anspruch 14, wobei die erzeugte Strahlverteilung mit Hilfe einer optischen Interferenz und/oder einer Abbildung und/oder einer Beugung gebildet wird.
  23. Verfahren nach Anspruch 13, wobei das Schneiden der optischen Faser oder des Wellenleiters ohne Verschiebung des Laserstrahls über die Faser oder den Wellenleiter ausgeführt wird.
EP01976529A 2000-10-25 2001-10-25 Verfahren zum laserschneiden von optischen fasern oder wellenleitern Expired - Lifetime EP1330331B1 (de)

Applications Claiming Priority (5)

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GB0026129A GB0026129D0 (en) 2000-10-25 2000-10-25 A cutting method and apparatus
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JP2004518157A (ja) 2004-06-17
AU2001295797A1 (en) 2002-05-06
CA2426848A1 (en) 2002-05-02
CN1482955A (zh) 2004-03-17
WO2002034452A9 (en) 2003-05-08
EP1330331A1 (de) 2003-07-30
DE60138207D1 (de) 2009-05-14
US20040047587A1 (en) 2004-03-11
ATE427181T1 (de) 2009-04-15
CA2426848C (en) 2009-08-25
WO2002034452A1 (en) 2002-05-02
US7142741B2 (en) 2006-11-28
CN100537112C (zh) 2009-09-09

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