EP1186854A3 - Illuminating und imaging device for a plurality of spectral regions and coordinates measuring machine with a illuminating and imaging device for a plurality of spectral regions - Google Patents

Illuminating und imaging device for a plurality of spectral regions and coordinates measuring machine with a illuminating and imaging device for a plurality of spectral regions Download PDF

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Publication number
EP1186854A3
EP1186854A3 EP01120206A EP01120206A EP1186854A3 EP 1186854 A3 EP1186854 A3 EP 1186854A3 EP 01120206 A EP01120206 A EP 01120206A EP 01120206 A EP01120206 A EP 01120206A EP 1186854 A3 EP1186854 A3 EP 1186854A3
Authority
EP
European Patent Office
Prior art keywords
imaging device
illuminating
spectral regions
measuring machine
illumination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP01120206A
Other languages
German (de)
French (fr)
Other versions
EP1186854A2 (en
Inventor
Arnold Müller-Rentz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leica Microsystems CMS GmbH
Original Assignee
Leica Microsystems Wetzlar GmbH
Leica Microsystems CMS GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leica Microsystems Wetzlar GmbH, Leica Microsystems CMS GmbH filed Critical Leica Microsystems Wetzlar GmbH
Publication of EP1186854A2 publication Critical patent/EP1186854A2/en
Publication of EP1186854A3 publication Critical patent/EP1186854A3/en
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates

Abstract

Eine Beleuchtungs- und Abbildungseinrichtung (2) für mehrere Spektralbereiche umfasst ein Objektiv (21), das eine optische Achse (20) definiert. Ein Strahlteilermodul (32) ist in der optischen Achse (20) angeordnet. Mehrere Lichtquellen (35), von denen jeweils ein Beleuchtungsstrahlengang (35a, 35b, 35c) ausgeht, sind den Strahlteilermodul (32) zugeordnet. Ebenso sind mehrere Detektoren (34), denen jeweils ein Abbildungsstrahlengang (34a, 34b) zugeordnet ist, vorgesehen. Die Beleuchtungsstrahlengänge (35a, 35b, 35c) und die Abbildungsstrahlengänge(34a, 34b) weisen eine gemeinsame optische Wegstrecke auf, in der das Strahlteilermodul (32) angeordnet ist. Die Beleuchtungs- und Abbildungseinrichtung (2) kann vorteilhafter Weise in einer Koordinatenmessmaschine (1) eingesetzt werden.

Figure 00000001
An illumination and imaging device (2) for several spectral ranges comprises an objective (21) which defines an optical axis (20). A beam splitter module (32) is arranged in the optical axis (20). A plurality of light sources (35), each of which emits an illumination beam path (35a, 35b, 35c), are assigned to the beam splitter module (32). A plurality of detectors (34), each of which is assigned an imaging beam path (34a, 34b), are also provided. The illumination beam paths (35a, 35b, 35c) and the imaging beam paths (34a, 34b) have a common optical path in which the beam splitter module (32) is arranged. The illumination and imaging device (2) can advantageously be used in a coordinate measuring machine (1).
Figure 00000001
EP01120206A 2000-08-28 2001-08-23 Illuminating und imaging device for a plurality of spectral regions and coordinates measuring machine with a illuminating and imaging device for a plurality of spectral regions Withdrawn EP1186854A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10042140 2000-08-28
DE10042140A DE10042140A1 (en) 2000-08-28 2000-08-28 Illumination and imaging device for several spectral ranges and coordinate measuring machine with an illumination and imaging device for several spectral ranges

Publications (2)

Publication Number Publication Date
EP1186854A2 EP1186854A2 (en) 2002-03-13
EP1186854A3 true EP1186854A3 (en) 2003-03-26

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP01120206A Withdrawn EP1186854A3 (en) 2000-08-28 2001-08-23 Illuminating und imaging device for a plurality of spectral regions and coordinates measuring machine with a illuminating and imaging device for a plurality of spectral regions

Country Status (5)

Country Link
US (1) US6542251B2 (en)
EP (1) EP1186854A3 (en)
JP (1) JP4035303B2 (en)
DE (1) DE10042140A1 (en)
TW (1) TW479129B (en)

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US6608321B1 (en) * 2001-02-01 2003-08-19 Advanced Micro Devices, Inc. Differential wavelength inspection system
US6603543B1 (en) 2001-02-01 2003-08-05 Advanced Micro Devices, Inc. Inspection system with enhanced contrast
US6771043B2 (en) * 2001-05-09 2004-08-03 Makita Corporation Power tools
US20040082859A1 (en) 2002-07-01 2004-04-29 Alan Schaer Method and apparatus employing ultrasound energy to treat body sphincters
EP1596746B1 (en) * 2003-02-20 2016-10-19 ReCor Medical, Inc. Ultrasonic ablation devices
DE10311286A1 (en) 2003-03-14 2004-09-23 Leica Microsystems Semiconductor Gmbh Illumination device for an optical system
WO2007136566A2 (en) 2006-05-19 2007-11-29 Prorhythm, Inc. Ablation device with optimized input power profile and method of using the same
US7656540B2 (en) * 2006-12-06 2010-02-02 Applied Kiietics, Inc. Apparatus and method for measuring suspension and head assemblies
DE102007049133A1 (en) * 2007-02-13 2008-08-21 Vistec Semiconductor Systems Gmbh Device for determining the position of at least one structure on an object, using a lighting device for the device and using protective gas for the device
US8582113B2 (en) 2007-02-13 2013-11-12 Kla-Tencor Mie Gmbh Device for determining the position of at least one structure on an object, use of an illumination apparatus with the device and use of protective gas with the device
US8974445B2 (en) 2009-01-09 2015-03-10 Recor Medical, Inc. Methods and apparatus for treatment of cardiac valve insufficiency
US20100295919A1 (en) * 2009-05-21 2010-11-25 Palo Alto Research Center Incorporated Multiple Integrated Multi-Beam Laser Scanning System
DE102009044294A1 (en) 2009-10-20 2011-05-05 Kla-Tencor Mie Gmbh Coordinate measuring machine for determining the position of structures on a mask
DE102011008655A1 (en) 2011-01-14 2012-07-19 Inb Vision Ag Apparatus and method for the three-dimensional optical measurement of surfaces
DE102012014768B4 (en) 2012-07-23 2014-03-20 Carl Zeiss Sms Gmbh Microscope with an overview optics
DE102014222271B4 (en) * 2014-10-31 2017-02-02 Carl Zeiss Smt Gmbh Mask inspection system for inspection of lithographic masks

Citations (4)

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US5048946A (en) * 1990-05-15 1991-09-17 Phoenix Laser Systems, Inc. Spectral division of reflected light in complex optical diagnostic and therapeutic systems
US5120134A (en) * 1988-12-23 1992-06-09 Canon Kabushiki Kaisha Exposure system including a device for analyzing an affect of a wafer resist upon a mark signal
US5521733A (en) * 1993-04-09 1996-05-28 Fujikura Ltd Optical switching device for wavelength-multiplexing optical communication
DE19819492A1 (en) * 1998-04-30 1999-11-11 Leica Microsystems Measuring device for measuring structures on a transparent substrate

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DE2851750B1 (en) * 1978-11-30 1980-03-06 Ibm Deutschland Method and device for measuring the flatness of the roughness or the radius of curvature of a measuring surface
JPS61219802A (en) * 1985-03-27 1986-09-30 Hitachi Ltd Apparatus for optical measurement of displacement
JP2949179B2 (en) * 1990-07-09 1999-09-13 群馬県 Non-contact type shape measuring device and shape measuring method
US5528368A (en) * 1992-03-06 1996-06-18 The United States Of America As Represented By The Department Of Health And Human Services Spectroscopic imaging device employing imaging quality spectral filters
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Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5120134A (en) * 1988-12-23 1992-06-09 Canon Kabushiki Kaisha Exposure system including a device for analyzing an affect of a wafer resist upon a mark signal
US5048946A (en) * 1990-05-15 1991-09-17 Phoenix Laser Systems, Inc. Spectral division of reflected light in complex optical diagnostic and therapeutic systems
US5521733A (en) * 1993-04-09 1996-05-28 Fujikura Ltd Optical switching device for wavelength-multiplexing optical communication
DE19819492A1 (en) * 1998-04-30 1999-11-11 Leica Microsystems Measuring device for measuring structures on a transparent substrate

Also Published As

Publication number Publication date
US6542251B2 (en) 2003-04-01
DE10042140A1 (en) 2002-03-14
US20020027663A1 (en) 2002-03-07
JP2002148557A (en) 2002-05-22
TW479129B (en) 2002-03-11
EP1186854A2 (en) 2002-03-13
JP4035303B2 (en) 2008-01-23

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