EP1186047A1 - Minimal strukturiertes halbleiterbauelement für anzeigeanwendungen - Google Patents

Minimal strukturiertes halbleiterbauelement für anzeigeanwendungen

Info

Publication number
EP1186047A1
EP1186047A1 EP00932073A EP00932073A EP1186047A1 EP 1186047 A1 EP1186047 A1 EP 1186047A1 EP 00932073 A EP00932073 A EP 00932073A EP 00932073 A EP00932073 A EP 00932073A EP 1186047 A1 EP1186047 A1 EP 1186047A1
Authority
EP
European Patent Office
Prior art keywords
transistor
electrode
semiconductor layer
data line
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP00932073A
Other languages
English (en)
French (fr)
Inventor
Paul S. Drzaic
Karl R. Amundson
Gregg M. Duthaler
Peter T. Kazlas
Yu Chen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
E Ink Corp
Original Assignee
E Ink Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by E Ink Corp filed Critical E Ink Corp
Publication of EP1186047A1 publication Critical patent/EP1186047A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40—Organic transistors
    • H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462—Insulated gate field-effect transistors [IGFETs]
    • H10K10/466—Lateral bottom-gate IGFETs comprising only a single gate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K19/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic element specially adapted for rectifying, amplifying, oscillating or switching, covered by group H10K10/00

Definitions

  • the present invention relates generally to electronic displays and methods of
  • Encapsulated, particle-based displays offer a useful means of creating electronic displays.
  • encapsulated particle-based displays including encapsulated electrophoretic displays, encapsulated suspended particle displays, and rotating ball displays.
  • Encapsulated, particle-based displays can be made highly reflective, bistable, and
  • pixels of a display must be addressable without interference from adjacent pixels.
  • each transistor or diode is associated with each pixel.
  • An addressing electrode is connected to each pixel through the transistor or the diode.
  • Thin-film transistors for example, can be WO 00/67327 PCT/USOO/l 2193
  • a transistor includes a gate
  • gate electrode, the source electrode, and the drain electrode are typically patterned.
  • the gate electrode, the source electrode, and the drain electrode are typically patterned.
  • the semiconductor layer and the gate dielectric layer are also patterned in order to minimize stray conduction (i.e., cross-talk) between neighboring circuit elements. Following these steps, thin-
  • film transistors can be fabricated to provide high performance. These processes, however, can
  • the invention features electronic circuits that have a lower manufacturing
  • the invention features a method of making electronic circuits that
  • circuits have application, in particular, in display devices.
  • the circuits comprise thin-film transistors where the semiconductor O 193
  • the semiconductor layer is unpattemed.
  • the circuits can include an unpattemed
  • the spacing between transistors is selected to obtain
  • the geometry of the transistors can be selected to obtain an
  • the spacing between the first data line and a first pixel electrode can be chosen to provide an acceptable leakage current between the first data line and the first pixel electrode.
  • a thin-film transistor array comprises at least first and second transistors
  • each of the transistors comprise: a source electrode; a drain electrode spaced from the
  • source electrode a semiconductor layer in electrical communication with both the source and
  • drain electrodes disposed adjacent to the semiconductor layer such that the resistance of the semiconductor layer between the source and drain electrodes can be varied by
  • the semiconductor layer extends continuously from the
  • an electronic display comprises: a display medium; a first pixel
  • the first electronic device comprising a
  • first electrode and the second electronic device comprising a second electrode
  • an array of thin-film transistors that comprises at least a first
  • transistor and a second transistor is manufactured by a method that comprises the steps of:
  • the drain electrodes in electrical communication with the semiconductor layer; forming at least
  • the transistors the gate electrode disposed adjacent to the semiconductor layer such that the
  • resistance of the semiconductor layer between the source and drain electrodes of one of the transistors can be varied by varying the potential of the gate electrode.
  • Figure 1 shows a cross-sectional view of an array of thin-film transistors according to one
  • Figure 2 shows a top view of one embodiment of an electronic display, with the display
  • Figure 3 illustrates locations of resistive leakage paths for the display of Figure 2.
  • Figure 4a shows a top view of an embodiment of a thin-film transistor.
  • Figure 4b shows a diagrammatic cross sectional view that corresponds to the transistor embodiment shown in Figure 4a.
  • Figure 5 shows a graph of drain current versus gate voltage for a sample of a two-mask
  • Figure 6 shows a cross-sectional view of an array of thin-film transistors according to one
  • Figure 7 shows a cross-sectional view of an array of thin-film transistors according to one embodiment of the present invention.
  • Figure 8 shows a cross-sectional view of an array of thin-film transistors according to one
  • Figure 9 shows a cross-sectional view of an array of thin-film transistors according to one embodiment of the present invention.
  • Figure 10 shows a cross-sectional view of an electronic display according to one
  • Figure 1 la shows a diagrammatic cross-sectional view of an electronic display according to one embodiment of the present invention.
  • Figure 1 lb shows a diagrammatic cross-sectional view of an electronic display according
  • Figure l ie shows a diagrammatic cross-sectional view of an electronic display according to one embodiment of the present invention.
  • Figure l id shows a diagrammatic cross-sectional view of an electronic display according to one embodiment of the present invention.
  • the invention features minimally-patterned semiconductor devices for display applications.
  • the semiconductor devices are an array of thin-
  • an array of transistors 10 include a substrate 12, a gate
  • a semiconductor layer 18 is provided adjacent to the substrate 12 and the gate electrodes 14, a semiconductor layer 18
  • the substrate 12 can be, for example: a silicon
  • the gate electrodes 14, for example, can be
  • any conductive material such as metal or conductive polymer.
  • semiconductor layer 18 can be inorganic materials such as amorphous silicon or
  • the semiconductor layer 18 can be formed of organic semiconductors
  • the material for the gate dielectric layer 16 can be an organic or an inorganic
  • suitable materials include, but are not limited to, polyimides, silicon
  • conductive material such as metal or conductive polymer.
  • the array of transistors shown Figure 1 can be manufactured using any one of many WO 00/67327 PCT/USOO/l 2193
  • vacuum based methods such as evaporation or sputtering can be used.
  • material can be patterened.
  • wet printing methods or transfer methods can be used to deposit the materials necessary to form the transistors.
  • electrodes 14, 20, 22 i.e., gate electrode, source
  • a degree of cross-talk can be tolerated. For example, if only a few gray level states of a display are addressed, then small stray voltages will not significantly affect
  • a monochrome display may be able to tolerate leakage currents in excess of 10%, whereas a 256-level display would typically require a much lower leakage
  • the display incorporates pixels with a limited number of gray levels. In this case, a given pixel is less sensitive to cross-talk induced voltage errors because it
  • the acceptable leakage will depend on the extent of error in the
  • acceptable leakage corresponds a maximum tolerable error in the optical state of a display pixel.
  • the array of transistors described in reference to Figure 1 can be used for addressing an
  • This embodiment is applicable to a variety of electronic displays, including: electrophoretic displays; liquid crystal displays; emissive displays (including organic light
  • An array of transistors with acceptable cross-talk can be prepared by following the design rules provided herein in reference to Figure 2, which illustrates a plan-view of the conductive
  • An array comprises: data lines 30, 32; select lines
  • pixel electrodes 34, 38, 40, 42 To address a pixel electrode 34, 38, 40, 42, voltages are applied to appropriate data lines 30, 32 and select lines 36, 46. For example, to address
  • the optical characteristics of a display element are achieved by addressing a pixel electrode 34,
  • a preferred embodiment includes two design criteria for a properly functioning display.
  • pixel electrodes 34, 40 next to the data line 30. Note that the display has a first row of pixel electrodes 34, 38 and a second row of pixel electrodes 40, 42. More generally, if there are N
  • N an integer
  • RT FT is the resistance between the first data line 30 and the pixel
  • neighboring pixel electrodes 34, 40 can be neglected as being insignificant in comparison to the
  • N is the number of rows of pixel electrodes
  • p is the bulk resistivity of the
  • L is the distance between source and drain electrodes
  • Li is the distance
  • L is the distance between the pixel
  • Y p is a width of a pixel electrode
  • W is the channel
  • a properly functioning display will have a resistance between adjacent data lines 30, 32
  • the data line also should not charge up an adjacent pixel while the select line is off (row
  • R p is the resistance through the pixel.
  • the resistivity (undoped) is approximately 10 ohm-cm.
  • the second design criterion The minimum spacing of a pixel electrode 34 to a data line 30, L ms , can be derived from a consideration of the effect of the leakage on the pixel voltage. In order to avoid undesirable voltge shifts on the pixel, the following condition must be met:
  • I ⁇ eak is the leakage current from the data line to the pixel electrode through the unpattemed
  • Tf is the frame time
  • C p is the total capacitance of the pixel.
  • ⁇ V p is the
  • Ii eak at the minimum spacing
  • Iiea k ⁇ wh(V p -V d ) / L ms
  • ⁇ is the conductivity of the semiconductor material
  • w is the width of the leakage path
  • h is the width of the leakage path
  • V d is the voltage of the data line.
  • I ⁇ ea k will include leakage currents from each leakage source and the minimum spacing L ms for each leakage path must be derived accordingly.
  • FIG. 4a this preferred embodiment includes data lines 30', 32', a selection line 36', a pixel electrode 34', and a capacitor 92'.
  • Figure 4a The embodiment of Figure 4a is illustrated in cross section in Figure 4b, though not to
  • the embodiment includes gate electodes 53', a SiN dielectric layer
  • samples were prepared through either a two-mask process, as preferred, or a three-mask process, for
  • the drain current can be caused to vary by over five orders of magnitude by changing the gate voltage from zero to 30 volts. This
  • an array of bottom gate transistors 50 include a substrate 52, a patterned gate electrode 53 for each transistor provided adjacent the substrate 52, a dielectric layer 54 provided adjacent the gate electrodes 53 and the substrate 52, a boron-doped amorphous silicon layer 56
  • Each patterned n+ doped amorphous silicon contact 58 is provided between the amorphous
  • the contacts 58 can be deposited
  • the contacts 58 can also be achieved by direct
  • n-type dopants in selected areas of the intrinsic amorphous silicon layer 56 followed by high temperature annealing as an alternative to the additional n+ amorphous silicon
  • the contacts 58 are not essential to produce a sufficiently functioning transistor.
  • an array of top gate transistors 60 include a substrate 62, patterned
  • amorphous silicon layer 68 provided adjacent the contacts 66 and the substrate 62, a dielectric layer 70 provided adjacent to the boron doped amorphous silicon layer 68, and a gate electrode
  • an array of bottom gate transistors 80 is substantially similar to the
  • the transistors 50 of Figure 6 include a passivation layer 82 provided
  • the passivation layer 82 can consist of silicon nitride.
  • a light blocking layer is incorporated into
  • the light blocking layer can be any exposed silicon layer 56.
  • the light blocking layer can be any exposed silicon layer 56.
  • an array of bottom gate transistors 90 is substantially similar to the array of transistors 80 of Figure 8.
  • the array of transistors 90 further incorporates a substrate
  • the substrate capacitor 92 can be formed simply by extending the pixel electrode
  • inexpensive displays can be constructed by minimizing the number of
  • Such a display can take different forms, including but not limited to: large area
  • the semiconductor layer 18, 56, or 68 is
  • the dielectric layer 16, 54, or 70 is unpattemed.
  • both the semiconductor layer 18, 56, or 68 and the dielectric layer 16, 54, or 70 layer are unpattemed.
  • an electronic display can incorporate an array of transistors as described above.
  • an electronic display 100 includes a substrate 101 supporting an electrode
  • a display medium 106 provided next to the electrode 102, a plurality of pixel electrodes 104
  • a plurality of discrete electronic devices e.g.,
  • transistors provided next to and in electrical communication with the pixel electrodes 104
  • the discrete electronic devices are transistors.
  • electrodes 120 of the transistors are shown in this cross-section.
  • the substrate 101 can be made of a transparent material.
  • the substrate 101 can also be a flexible substrate.
  • the substrate 101 can consist of polyester.
  • the electrode 102 can be a common electrode.
  • the electrode 102 can be a plurality of row electrodes.
  • the electrode 102 can consist of a transparent conductive material.
  • a transparent conductive material for example, an indium tin
  • ITO ITO
  • polyaniline or polythiophene coating can be provided on an inner surface of the
  • the display medium 106 can include a plurality of microcapsules 124 dispersed in a
  • Each microcapsule 124 can include an electro-optical material.
  • material refers to a material which displays an optical property in response to an electrical signal.
  • Electro-optical material for example, can be electrophoretic particles or liquid crystals dispersed
  • An electro-optical material can also be bichromal spheres dispersed in a solvent. Details of electro-optical materials within the microcapsules 124 will be discussed below.
  • the electro-optical material within the microcapsules 124 is that the material is capable of displaying one visible state upon application of an electric field and a
  • the display medium 106 comprises a particle-based display medium.
  • the particle-based display medium comprises an electronic ink.
  • electronic ink is an optoelectronically active material which comprises at least two phases: an
  • electrophoretic contrast medium phase and a coating/binding phase.
  • electrophoretic phase is encapsulated, that is, there is a capsule wall phase between the two
  • the coating/binding phase includes, in one embodiment, a polymer matrix that
  • the polymer in the polymeric binder is capable of being dried, crosslinked, or otherwise cured as in traditional inks, and therefore a
  • printing process can be used to deposit the electronic ink onto a substrate.
  • optical quality of an electronic ink is quite distinct from other electronic display
  • Electronic ink can be made optically stable in
  • the ink can be set to a persistent optical state. Fabrication of a
  • Electronic ink displays are novel in that they can be addressed by DC voltages and draw very little current.
  • ITO indium tin oxide
  • Electrodes are in contact only with a solid binder, not with a fluid layer (like liquid crystals). This means that some conductive materials, which would otherwise dissolve or be degraded by
  • conductive coatings include conducting or
  • semiconducting colloids examples of which are indium tin oxide and antimony-doped tin oxide.
  • Organic conductors polymeric conductors and molecular organic conductors also may be used.
  • Polymers include, but are not limited to, polyaniline and derivatives, polythiophene and
  • naphthalene examples include, but are not limited to, derivatives of naphthalene, phthalocyanine, and pentacene.
  • Polymer layers can be made thinner and more transparent than with traditional displays because
  • the pixel electrodes 104 can be bonded to the display medium 106 through a binder.
  • the pixel electrodes 104 can be made
  • the pixel electrodes 104 can be transparent or opaque.
  • the pixel electrodes 104 can be made from solder paste, copper, copper-clad polyimide,
  • the pixel electrodes 104 are graphite inks, silver inks and other metal containing conductive inks.
  • the discrete electronic devices can be non-linear devices such as transistor for addressing
  • the non-linear devices can be diodes.
  • the electrodes 112, 120 can be made of any conductive material, either transparent or
  • the conductive material can be printed, coated, or vacuum sputtered.
  • the electrodes 102, 112, 120 can also be made using transparent materials such as indium tin oxide
  • electrodes 102, 112, 120 can be made of opaque materials such as solder paste, copper, copper- clad polyimide, graphite inks, silver inks and other metal-containing conductive inks.
  • the architecture of the electronic display 100 shown in Figure 10 is exemplary only and
  • microencapsulation The combination of these materials and processes, along with the other
  • a particle is any component that is charged or
  • this mobility may be zero or close to zero (i.e., the particles will not move).
  • particles may be neat pigments, dyed (laked) pigments or pigment/polymer composites, or any combination thereof
  • electrophoretic particle are its optical properties, electrical properties, and surface chemistry.
  • the particles may be organic or inorganic compounds, and they may either absorb light or scatter
  • the particles for use in the invention may further include scattering pigments, absorbing
  • the particles may be retroreflective, such as corner cubes, or they may be electroluminescent, such as zinc sulfide particles, which emit light when excited
  • the particles may be surface treated so they are characterized by an AC field, or they may be photoluminescent. Finally, the particles may be surface treated so they are characterized by an AC field, or they may be photoluminescent. Finally, the particles may be surface treated so they are photoluminescent. Finally, the particles may be surface treated so they are photoluminescent. Finally, the particles may be surface treated so they are photoluminescent. Finally, the particles may be surface treated so they are photoluminescent. Finally, the particles may be surface treated so they are photoluminescent. Finally, the particles may be surface treated so
  • a preferred particle for use in electrophoretic displays of the invention is Titania.
  • titania particles may be coated with a metal oxide, such as aluminum oxide or silicon oxide, for
  • the titania particles may have one, two, or more layers of metal-oxide coating.
  • a titania particle for use in electrophoretic displays of the invention may have a coating
  • the coatings may be added to the particle in
  • the electrophoretic particle is usually a pigment, a polymer, a laked pigment, or some
  • a neat pigment can be any pigment, and, usually for a light colored - 21 - particle, pigments such as, for example, rutile (titania), anatase (titania), barium sulfate, kaolin,
  • Some typical particles have high refractive indices, high scattering coefficients, and low absorption coefficients.
  • Other particles are absorptive, such as carbon
  • the pigment should also be insoluble in the suspending fluid. Yellow pigments such as diarylide yellow, hansa yellow, and benzidin yellow
  • colored particle including non-pigment materials, such as metallic particles.
  • Useful neat pigments include, but are not limited to, PbCrO 4 , Cyan blue GT 55-3295
  • Cibacron Black BG Ciba Company, Inc.
  • GAF Basic Black KMPA
  • GAF Benzofix Black CW-CF
  • Particles may also include laked, or dyed, pigments.
  • Laked pigments are particles that have a dye precipitated on them or which are stained. Lakes are metal salts of readily soluble
  • anionic dyes These are dyes of azo, triphenylmethane or anthraquinone structure containing one
  • Typical examples are peacock blue lake (Cl Pigment Blue 24) and Persian orange (lake of Cl Acid Orange 7), Black M Toner (GAF) (a mixture of
  • a dark particle of the dyed type may be constructed from any light absorbing material
  • the dark material may also be selectively selected from organic black, such as carbon black, or inorganic black materials.
  • the dark material may also be selectively selected from organic black, such as carbon black, or inorganic black materials.
  • the dark material may also be selectively selected from organic black, such as carbon black, or inorganic black materials.
  • the dark material may also be selectively selected from organic black, such as carbon black, or inorganic black materials.
  • a dark green pigment may be used. Black particles may also be formed
  • Black particles may also be formed WO 00/67327 PCT/USOO/l 2193
  • the pigments and polymers may form
  • a central pigment core may be surrounded
  • the pigment, polymer, or both can contain a dye.
  • the optical purpose of the particle may be to scatter light, absorb light, or both. Useful sizes may range from 1 nm up to
  • the density of the electrophoretic particle may be substantially matched to that of
  • suspending fluid i.e., electrophoretic
  • Useful polymers for the particles include, but are not limited to: polystyrene,
  • polyesters polyacrylates, polymethacrylates, ethylene acrylic acid or methacrylic
  • pigment phase separation in high shear melt include, but are not limited to, polyethylene,
  • polypropylene polymethylmethacrylate, polyisobutylmethacrylate, polystyrene, polybutadiene,
  • polyisoprene polyisobutylene, polylauryl methacrylate, polystearyl methacrylate, polyisobornyl methacrylate, poly-t-butyl methacrylate, polyethyl methacrylate, polymethyl acrylate, polyethyl acrylate, polyacrylonitrile, and copolymers of two or more of these materials.
  • pigment/polymer complexes that are commercially available include, but are not limited to, WO 00/67327 PCT/USOO/l 2193
  • the pigment-polymer composite may be formed by a physical process, (e.g., attrition or
  • electrophoretic inks are similar, in that the pigment or dye must be easily incorporated therein,
  • electrophoretic inks is that the toner must be capable of "fixing" the image, i.e., heat fusing
  • Typical manufacturing techniques for particles are drawn from the liquid toner and other
  • Another manufacturing technique for particles drawn from the liquid toner field is to add the polymer, pigment, and suspending fluid to a media mill. The mill is started and
  • This temperature is typically near 100°C. In this state, the pigment is easily encapsulated into the
  • the milling may be continued for some time to achieve a
  • the charging agents may be added at this time.
  • more suspending fluid may be added.
  • microencapsulation may be used.
  • a typical process of this type is a phase
  • processes include chemical means for staining polymeric latices, for example with metal oxides
  • the suspending fluid containing the particles can be chosen based on properties such as
  • a preferred suspending fluid has a low dielectric
  • suspending fluid may be based on concerns of chemical inertness, density
  • the viscosity of the fluid should be low when you want the
  • the refractive index of the suspending fluid may also be substantially
  • the refractive index of a suspending fluid is matched to that of the particles.
  • indices is between about zero and about 0.3, and is preferably between about 0.05 and about 0.2.
  • the fluid may be chosen to be a poor solvent for some polymers, which is
  • suspending fluids such as halogenated organic solvents, saturated linear or branched hydrocarbons, silicone oils, and low molecular weight halogen-containing polymers are some useful suspending fluids.
  • the suspending fluid may comprise a single fluid.
  • the fluid will, however, often be a blend of more
  • the fluid may be any fluid in order to tune its chemical and physical properties.
  • the fluid may be any fluid in order to tune its chemical and physical properties.
  • the fluid may be any fluid in order to tune its chemical and physical properties.
  • the fluid may be any fluid in order to tune its chemical and physical properties.
  • the fluid may be any fluid in order to tune its chemical and physical properties.
  • the fluid may be any fluid in order to tune its chemical and physical properties.
  • the fluid may be any fluid in order to tune its chemical and physical properties.
  • Charge control agents can also be added to the suspending fluid.
  • Useful organic solvents include, but are not limited to, epoxides, such as, for example,
  • decane epoxide and dodecane epoxide vinyl ethers, such as, for example, cyclohexyl vinyl ether
  • hydrocarbons such as, for example, toluene and naphthalene.
  • Useful halogenated organic solvents include, but are not limited to, tetrafluorodibromoethylene, tetrachloroethylene,
  • Useful hydrocarbons include, but are not limited to, dodecane, tetradecane, the
  • cyclosiloxane examples include, but are not limited to, octamethyl cyclosiloxane and higher molecular weight cyclic
  • siloxanes poly (methyl phenyl siloxane), hexamethyldisiloxane, and polydimethylsiloxane.
  • polymers include, but are not limited to, poly(chlorotrifluoroethylene) polymer (Halogenated hydrocarbon Inc., River Edge, NJ), Galden ® (a perfluorinated ether from Ausimont, Morristown,
  • this fluid is a poly(chlorotrifluoroethylene) polymer. In a particularly preferred embodiment, this
  • polymer has a degree of polymerization from about 2 to about 10. Many of the above materials are available in a range of viscosities, densities, and boiling points.
  • the fluid must be capable of being formed into small droplets prior to a capsule being P T/USOO/l 2193
  • Processes for forming small droplets include flow-through jets, membranes, nozzles, or
  • preferred surfactant for use in displays of the invention is sodium dodecylsulfate.
  • This dye must be soluble in the fluid, but will generally be insoluble in the other components of the capsule. There is much flexibility in the choice of dye material.
  • the dye can
  • the dyes may be a pure compound, or blends of dyes to achieve a particular color, including black.
  • the dyes can be fluorescent, which would produce a display in which the fluorescence properties depend on the position of the particles.
  • the dyes can be photoactive, changing to another color or
  • Dyes could also be polymerizable, forming a solid
  • Useful azo dyes include, but are not limited to: the Oil Red dyes, and the
  • Useful anthraquinone dyes include, but are not - 29 - limited to: the Oil Blue dyes, and the Macrolex Blue series of dyes.
  • dyes include, but are not limited to, Michler's hydrol, Malachite Green, Crystal Violet, and
  • Charge control agents are used to provide good electrophoretic mobility to the
  • Stabilizers are used to prevent agglomeration of the electrophoretic
  • either component can be constructed from materials across a wide range of
  • Suitable charge control agents are generally adapted from the liquid toner
  • the charge control agent used to modify and/or stabilize the particle surface charge is
  • charging species may be added to non-aqueous media in order to increase electrophoretic mobility or increase electrostatic
  • the materials can improve steric stabilization as well. Different theories of
  • charging are postulated, including selective ion adsorption, proton transfer, and contact
  • the charging properties of the pigment itself may be accounted for by taking into account the acidic or basic surface properties of the pigment, or the charging WO 00/67327 PCT/USOO/l 2193
  • - 30 - sites may take place on the carrier resin surface (if present), or a combination of the two.
  • Additional pigment properties which may be relevant are the particle size distribution, the chemical composition, and the lightfastness.
  • electrophoretic displays non-aqueous paint dispersions, and engine-oil additives. In all of these
  • charging species may be added to non-aqueous media in order to increase electrophoretic mobility or increase electrostatic stabilization.
  • the materials can improve steric stabilization as well. Different theories of charging are postulated, including selective ion adsorption, proton
  • Charge adjuvants may also be added. These materials increase the effectiveness of the charge control agents or charge directors.
  • the charge adjuvant may be a polyhydroxy compound
  • polyhydroxy compounds which contain at least two aminoalcohol compounds, which are preferably soluble in the suspending fluid in an amount of at least 2% by weight.
  • polyhydroxy compounds which contain at least two
  • hydroxyl groups include, but are not limited to, ethylene glycol, 2,4,7,9-tetramethyl-decyne-4,7-
  • diol poly(propylene glycol), pentaethylene glycol, tripropylene glycol, triethylene glycol,
  • glycerol pentaerythritol, glycerol tris(12 hydroxystearate), propylene glycerol
  • molecule include, but are not limited to, triisopropanolamine, triethanolamine, ethanolamine, 3-
  • the charge adjuvant is preferably present in the suspending fluid in an amount of about 1 to about 100 mg/g of the particle mass, and more preferably about 50 to about 200 mg/g.
  • the surface of the particle may also be chemically modified to aid dispersion, to improve surface charge, and to improve the stability of the dispersion, for example.
  • Surface modifiers are also be chemically modified to aid dispersion, to improve surface charge, and to improve the stability of the dispersion, for example.
  • organic siloxanes include organic siloxanes, organohalogen silanes and other functional silane coupling agents
  • hydrophobing agents such as
  • Useful metal soaps include, but are not limited to,
  • metal carboxylates such as aluminum tristearate, aluminum octoanate, lithium heptanoate, iron
  • Useful block or comb copolymers include, but are not limited to, AB
  • diblock copolymers of (A) polymers of 2-(N,N)-dimethylaminoethyl methacrylate quatemized with methyl-p-toluenesulfonate and (B) poly-2-ethylhexyl methacrylate, and comb graft copolymers with oil soluble tails of poly (12-hydroxystearic acid) and having a molecular weight
  • Useful organic amides include, but are not limited to, polyisobutylene succinimides such
  • Useful organic zwitterions include, but are not limited to, lecithin.
  • Useful organic phosphates and phosphonates include, but are not limited
  • Particle dispersion stabilizers may be added to prevent particle flocculation or attachment to the capsule walls.
  • nonaqueous surfactants may be used. These include, but are not limited
  • glycol ethers to, glycol ethers, acetylenic glycols, alkanolamides, sorbitol derivatives, alkyl amines, quaternary
  • Encapsulation of the internal phase may be
  • microencapsulation are detailed in both Microencapsulation, Processes and Applications, (I. E. Vandegaer, ed.), Plenum Press, New York, NY (1974) and Gutcho, Microcapsules and Mircroencapsulation Techniques, Nuyes Data Corp., Park Ridge, N.J. (1976). The processes fall WO 00/67327 PCT/USOO/l 2193
  • interfacial polymerization interfacial polymerization
  • in situ polymerization physical processes, such as coextrusion and other phase separation processes, in-liquid curing, and simple/complex coacervation.
  • gelatin polyvinyl alcohol, polyvinyl acetate, and cellulosic derivatives, such as, for
  • gelatin but are not limited to, gelatin, acacia, carageenan, carboxymethylcellulose, hydrolized styrene
  • anhydride copolymers agar, alginate, casein, albumin, methyl vinyl ether co-maleic anhydride,
  • phase separation processes include, but are not limited to, polystyrene, PMMA, polyethyl methacrylate, polybutyl methacrylate, ethyl cellulose,
  • polyhydroxyamides include, but are not limited to, polyhydroxyamides, with aldehydes, melamine, or urea and
  • useful materials for interfacial polymerization processes include, but are not limited to,
  • diacyl chlorides such as, for example, sebacoyl, adipoyl, and di- or poly- amines or alcohols, and
  • Useful emulsion polymerization materials may include, but are not limited to,
  • styrene vinyl acetate, acrylic acid, butyl acrylate, t-butyl acrylate, methyl methacrylate, and butyl methacrylate.
  • Capsules produced may be dispersed into a curable carrier, resulting in an ink which may
  • the capsule wall generally has a high electrical resistivity. Although it is possible to use
  • the capsule wall should also be mechanically strong (although if the finished capsule powder is to be dispersed in a curable polymeric binder for coating, mechanical
  • the capsule wall should generally not be porous. If, however, it is
  • a post-processing step i.e., a second encapsulation.
  • the binder will serve to close the pores.
  • the capsule walls should be optically clear.
  • the wall material may, however, be chosen to match the refractive index of the internal phase of the capsule (i.e., the suspending fluid) or a binder in which the capsules are
  • An encapsulation procedure involves a polymerization between urea and formaldehyde in
  • the resulting capsule wall is a
  • the related technique of in situ polymerization utilizes an oil/water emulsion, which is
  • the monomers polymerize to form a polymer with higher affinity for the internal phase than for the aqueous phase, thus
  • aqueous solution is deposited around microscopic oil droplets.
  • cross-linking agents include
  • aldehydes especially formaldehyde, glyoxal, or glutaraldehyde; alum; zirconium salts; and poly isocyanates.
  • the coacervation approach also utilizes an oil/water emulsion.
  • One or more colloids are
  • coacervated i.e., agglomerated
  • agglomerated out of the aqueous phase and deposited as shells around the oily droplets through control of temperature, pH and/or relative concentrations, thereby creating the
  • microcapsule Materials suitable for coacervation include gelatins and gum arabic.
  • Coating aids can be used to improve the uniformity and quality of the coated or printed
  • wetting agents are typically added to adjust the interfacial tension at the coating/substrate interface and to adjust the liquid/air surface tension. Wetting agents
  • anionic and cationic surfactants include, but are not limited to, anionic and cationic surfactants, and nonionic species, such as
  • Dispersing agents may be used to modify the
  • Surface tension modifiers can be added to adjust the air/ink interfacial tension.
  • Polysiloxanes are typically used in such an application to improve surface leveling while
  • Surface tension modifiers include, but are not
  • fluorinated surfactants such as, for example, the Zonyl ® series from DuPont
  • siloxanes such as, for example, Silwet ® from Union Carbide
  • Antifoams such as silicone and silicone-free polymeric materials, may be added to enhance the movement of air from within the
  • antifoams include, but are not limited to, glyceryl esters, polyhydric alcohols, compounded
  • antifoams such as oil solutions of alkyl benzenes, natural fats, fatty acids, and metallic soaps,
  • silicone antifoaming agents made from the combination of dimethyl siloxane polymers and
  • Stabilizers such as uv-absorbers and antioxidants may also be added to improve the
  • Stabilizers UV-absorbers, antioxidants
  • other additives which could be used in the coating fluid.
  • the binder is used as a non-conducting, adhesive medium supporting and protecting the
  • Binders are
  • water-soluble polymers available in many forms and chemical types. Among these are water-soluble polymers, water-
  • water-soluble polymers are the various polysaccharides, the polyvinyl
  • the water-dispersed or water-borne systems are generally latex compositions, typified by the Neorez ® and Neocryl ® resins (Zeneca Resins, Wilmington, MA), Acrysol ® (Rohm and Haas,
  • crosslinking reagent such as an aziridine, for example, which reacts with
  • a typical application of a water-borne resin and aqueous capsules follows. A volume of particles is centrifuged at low speed to separate excess water. After a given centrifugation process, for example 10 minutes at 60 x G, the capsules are found at the bottom of the centrifuge
  • the mass of resin is between one eighth and one tenth of the weight of the capsules.
  • the mixture is ready to be coated onto the appropriate substrate.
  • thermoset systems are exemplified by the family of epoxies. These binary systems can vary greatly in viscosity, and the reactivity of the pair determines the "pot life" of the
  • capsules may be coated in an ordered arrangement in a coating process prior to the resin curing and hardening.
  • Thermoplastic polymers which are often polyesters, are molten at high temperatures.
  • Oil or solvent-soluble polymers are often similar in composition to the water-borne
  • Radiation cure resins are generally found among the solvent-based systems. Capsules may be dispersed in such a medium and coated, and the resin may then be cured by a timed exposure to a threshold level of ultraviolet radiation, either long or short wavelength. As in all
  • capsules such as those made from a protein or polysaccharide material, for example, could be dispersed in such a medium and coated, provided the viscosity could be sufficiently lowered.
  • Curing in such systems is generally by ultraviolet radiation.
  • an embodiment of an electrophoretic display that employs a thin-
  • Figure 11a shows a diagrammatic cross- section of an electrophoretic display 130 constructed using electronic ink.
  • the binder 132
  • At least one capsule 134 which is filled with a plurality of particles 136 and a dyed
  • the particles 136 are titania particles.
  • Figure 1 lb shows a cross-section of another electrophoretic display 140 constructed using
  • This display comprises a first set of particles 142 and a second set of particles 144 in a capsule 141.
  • the first set of particles 142 and the second set of particles 144 have WO 00/67327 PCT/USOO/l 2193
  • first set of particles 142 and the second set of particles 142 are compared to each other to provide a contrasting optical properties.
  • particles 144 can have differing electrophoretic mobilities.
  • the first set of particles can have differing electrophoretic mobilities.
  • the capsule 141 can be white, while the second set of particles 144 can be black.
  • the capsule 141 has electrodes 146 and 146' disposed
  • the electrodes 146, 146' are connected to a source of voltage 148, which may
  • the first set of particles 142 move rapidly toward electrode 146', while the second set of particles 144 move only slowly or not at
  • Figure l ie shows a diagrammatic cross-section of a suspended particle display 150.
  • suspended particle display 150 includes needle-like particles 152 in a transparent fluid 154.
  • the particles 152 change their orientation upon application of an AC field across the electrodes 156,
  • particles 152 are randomly oriented and the display 150 appears opaque.
  • electrophoretic and suspended particle displays provided in Figures 9a-9c are exemplary only, and other electrophoretic displays can be used in accordance with the present
  • the display medium 106 can comprise a plurality of
  • a bichromal sphere 160 typically comprises a
  • the sphere 160 rotates and displays the color of one of the
  • an array of transistors with reduced cross-talk is prepared
  • the semiconductor layer is an amorphous silicon that is slightly n-type
  • the semiconductor can be lightly doped with
  • semiconductor layer is doped with too much boron, the semiconductor layer will become p-type
  • the boron doping can be adjusted to provide the minimum required "on" current for the transistor to drive a pixel of a
  • transistors and the metal signal lines must be sufficiently large to suppress charge leakage
  • This minimum spacing can be
  • an array of active or passive elements can be - 42 - prepared in accordance with the present invention.
  • the array of elements can be used in devices

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Thin Film Transistor (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
EP00932073A 1999-05-05 2000-05-05 Minimal strukturiertes halbleiterbauelement für anzeigeanwendungen Withdrawn EP1186047A1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13264299P 1999-05-05 1999-05-05
US132642P 1999-05-05
PCT/US2000/012193 WO2000067327A1 (en) 1999-05-05 2000-05-05 Minimally-patterned semiconductor devices for display applications

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US7012600B2 (en) 1999-04-30 2006-03-14 E Ink Corporation Methods for driving bistable electro-optic displays, and apparatus for use therein
US20050156340A1 (en) 2004-01-20 2005-07-21 E Ink Corporation Preparation of capsules
JP4568477B2 (ja) 2001-04-02 2010-10-27 イー インク コーポレイション 画像安定性を改良した電気泳動媒体
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WO2002093246A1 (en) * 2001-05-15 2002-11-21 E Ink Corporation Electrophoretic particles
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CN101676980B (zh) 2001-11-20 2014-06-04 伊英克公司 驱动双稳态电光显示器的方法
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US7190008B2 (en) 2002-04-24 2007-03-13 E Ink Corporation Electro-optic displays, and components for use therein
US8363299B2 (en) 2002-06-10 2013-01-29 E Ink Corporation Electro-optic displays, and processes for the production thereof
CN104238227B (zh) 2002-06-13 2019-03-22 伊英克公司 用于寻址双稳电光媒质的方法
AU2003265922A1 (en) 2002-09-03 2004-03-29 E Ink Corporation Electro-optic displays
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JP5904690B2 (ja) 2003-06-30 2016-04-20 イー インク コーポレイション 電気光学ディスプレイを駆動するための方法
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JP2002543625A (ja) 2002-12-17
WO2000067327A1 (en) 2000-11-09

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