EP1181988B1 - Piezoelectric ultrasound transducer - Google Patents

Piezoelectric ultrasound transducer Download PDF

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Publication number
EP1181988B1
EP1181988B1 EP01119332A EP01119332A EP1181988B1 EP 1181988 B1 EP1181988 B1 EP 1181988B1 EP 01119332 A EP01119332 A EP 01119332A EP 01119332 A EP01119332 A EP 01119332A EP 1181988 B1 EP1181988 B1 EP 1181988B1
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EP
European Patent Office
Prior art keywords
ultrasonic transducer
accordance
clamping
clamping spring
peripheral cut
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EP01119332A
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German (de)
French (fr)
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EP1181988A3 (en
EP1181988A2 (en
Inventor
Volker Dr. Herrmann
Günther Pfeifer
Michael Kochan
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Sick AG
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Sick AG
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0611Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
    • B06B1/0618Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile of piezo- and non-piezoelectric elements, e.g. 'Tonpilz'

Definitions

  • the invention relates to an ultrasonic transducer, in particular of the longitudinal oscillator type, according to the preamble of claim 1.
  • US 3,351,787 describes an acceleration measuring device with a stack of piezoelectric crystals, for which a resilient biasing means is provided.
  • Such ultrasonic transducers are also referred to as composite longitudinal oscillator or ⁇ / 2 oscillator.
  • the piezoelectric element provided with electrode surfaces is polarized and contacted in such a way that upon application of an AC voltage of suitable frequency, the entire structure comes into resonance with respect to the axial direction.
  • the piezoelectric element arranged between the clamping sections is in a range of maximum mechanical stress and minimum mechanical vibration speed.
  • the ultrasound is emitted from the free end face of one of the clamping sections acting as a waveguide.
  • the piezoelectric element is biased via the clamping sections by means of a clamping member.
  • the object of the invention is to provide an ultrasonic transducer of the type mentioned with the smallest possible size, in which a the greatest possible bias of the piezoelectric element can be achieved without adversely affecting the vibration characteristics of the ultrasonic transducer.
  • the tension spring according to the invention is screwed to the two clamping sections by being screwed with the interposition of the piezoelectric element from opposite sides in the annular tension spring.
  • minimum axial length is avoided that the tension spring with the clamping portions on axially far from the piezoelectric element remote threaded areas of strong vibration activity cooperates. Disturbing damping effects in the threaded areas are avoided in this way.
  • the tension spring can be adapted by suitable dimensioning of the circumferential recess specifically to the respective ultrasonic transducer.
  • the circumferential recess can be dimensioned such that at the respective desired target bias for the piezoelectric element on the one hand a sufficient spring travel is present and on the other hand, the maximum allowable stress or load capacity of the tension spring forming material is not exceeded.
  • the circumferential recess can be specifically dimensioned-in particular also depending on the dimensions of the tension spring itself-such that no natural vibration modes of the tension spring occur in the working frequency range of the ultrasonic transducer.
  • the operation of broadband longitudinal oscillators is not affected by the tension spring in the main transmission frequency range or operating frequency range.
  • the tension spring can be formed by appropriate design of the circumferential recess such that even natural modes of the tension spring are avoided, which are indeed outside the working frequency range of the ultrasonic transducer, but can still lead to adverse disturbances of its operation.
  • the large spring travel possible due to the invention has the advantage that the influence of changes in the environmental parameters, e.g. the temperature on the operation of the ultrasonic transducer is minimal and aging processes in the spring material can be compensated. According to the invention, therefore, a high resistance to varying working or environmental conditions and to aging can be achieved.
  • the circumferential recess is preferably slot-shaped or gap-shaped. Furthermore, the circumferential recess preferably extends in the radial direction through the entire wall of the annular spring, i. Preferably, the wall of the annular spring is interrupted over the angular range of the circumferential recess in the axial direction.
  • the peripheral recess is at least partially filled with a vibration-damping material. Disturbing entrance and exit processes can be specifically damped by such a measure and made ineffective in this way.
  • a potting material is used, with which the peripheral recess is poured.
  • the tension spring has two axially spaced circumferential recesses.
  • the object underlying the invention is also satisfactorily solved by the provision of three or more circumferential recesses.
  • the circumvention or suppression of the disturbing natural modes is then associated with greater effort.
  • the ultrasonic transducer according to the invention comprises two cylindrical clamping sections 12, 14, one of which is made of a heavy metal, e.g. Steel and the other 14 is made of a lightweight metal, especially titanium, aluminum or magnesium. In principle, other materials are also suitable according to the invention.
  • the two clamping sections 12, 14 are each provided with an external thread 13, 15, via which they are screwed to the internal thread 19 of an annular tension spring 18.
  • the tension spring 18 serves as a tensioning element with which a piezoelectric element 16 can be compressed between the mutually facing end faces of the tensioning sections 12, 14 screwed to the tension spring 18.
  • the piezoelectric element 16 is preferably made of a piezoceramic and can - as it is indicated in the figure - be divided into several disks 16a, 16b.
  • the piezoelectric disks 16a, 16b are provided with flat electrodes 28, which can be controlled via terminals 32 with an AC voltage of predetermined frequency such that the axial length of the piezoelectric element 16, ie in each case the disk thickness, varies in time accordingly.
  • the piezoelectric element 16 thus forms an axial force source, with the at a suitable frequency of the applied AC voltage, the overall arrangement in axial vibrations or longitudinal vibrations and thereby can be excited to a longitudinal resonance.
  • the free end face of the tensioning section 14 made of the light material serves as transmitting and / or receiving surface 34, via which the ultrasonic signals are emitted or via which ultrasonic signals are received.
  • the piezoelectric element 16 is in the range of highest mechanical stress and lowest vibration speed of the entire structure, the vibration speed in the plane of the transmitting and / or receiving surface 34 is maximum.
  • This effect can be enhanced by the fact that the existing of the lightweight material clamping portion 14 is tapered in the direction of the transmitting and / or receiving surface 34, but before the free end of the diameter of the clamping portion 14 increases again so that the transmitting and / or receiving surface 34 is formed by a plate-shaped end portion 50. In this way, a weight minimization is achieved, wherein due to the area-increasing plate 50, the size of the transmitting or receiving surface 34 is not reduced. In the figure, such a configuration of the clamping portion 14 is indicated only schematically by dashed lines.
  • such a composite structure in which a one- or multi-part piezoelectric element 16 is clamped between two clamping sections 12, 14, also referred to as a longitudinal oscillator or ⁇ / 2 oscillator.
  • Such an ultrasonic transducer is used for example in industrial applications for distance measurement and flow measurement by sending and receiving short ultrasonic pulses.
  • a central channel 36 is provided, whose central axis coincides with the longitudinal axis 27 of the overall arrangement.
  • the channel 36 and central openings 17a, 17b in the piezoelectric disks 16a, 16b are used to receive connection lines 38 for controlling the electrodes 28 via the terminals 32, this being indicated only schematically in the figure.
  • the tension spring 18 for biasing the piezoelectric element 16 has a small axial length and is in a central, arranged in the region of the piezoelectric element 16 section with respect to frontal edge portions in which the tension spring 18 is screwed to the clamping portions 12, 14, radially outwardly expanded.
  • two circumferential recesses 22, 24 are formed with identical rectangular cross-section in the wall of the tension spring.
  • the wall of the tension spring 18 is completely severed, i. the wall of the tension spring 18 is interrupted by the recesses 22, 24 in the corresponding peripheral region in the axial direction.
  • the circumferential recesses 22, 24 extend over a larger or smaller depending on the particular application angle range, ie greater or lesser part of the circumference of the tension spring 18. It is preferred if the remaining peripheral portions, the two each of the recesses 22, 24 axially separated regions 18a, 18b, 18c of the tension spring 18 connect to each other, are arranged offset from one another in the circumferential direction.
  • the two recesses 22, 24 each form such that they are interrupted in the circumferential direction only by a comparatively short web, wherein the two webs are offset by 180 ° from each other in the circumferential direction.
  • the circumferential recesses 22, 24 are dimensioned and arranged in dependence on the dimensions, in particular the axial length, of the tension spring 18 such that no natural oscillations of the tension spring 18 occur in the working frequency range or main transmission frequency range of the ultrasonic transducer.
  • the tension spring 18 can thus be adapted by suitable design of the circumferential recesses 22, 24 in a particularly simple manner to the respective ultrasonic transducer or to its required operating parameters.
  • the peripheral recesses 22, 24 are further filled with a damping mass 26, whereby-disturbing inputs and Ausschwing bine be damped.
  • a damping mass 26 whereby-disturbing inputs and Ausschwing bine be damped.
  • Such input and release processes can be excited by lying outside the working frequency range of the ultrasonic transducer natural oscillations of the tension spring 18. in principle is a satisfactory operation of the ultrasonic transducer according to the invention without pouring the recesses 22, 24 possible. Without the vibration-damping material in the circumferential recesses 22, 24, however, under certain constellations it may happen that the operation of the ultrasonic transducer is impaired by the natural vibrations of the annular spring 18. This is safely avoided by the material in the recesses 22, 24.
  • the tension spring 18 can be adapted specifically to the particular circumstances.
  • the tension spring 18 may also be provided with only a single circumferential recess or, alternatively, with three or an even greater number of circumferential recesses.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Surgical Instruments (AREA)

Abstract

The device has at least one piezoelectric element (16) between two clamp sections (12,14) and at least one clamp element (18) with which the piezoelectric element is biased by the clamp sections. The clamp element is in the form of an annular clamping spring with at least one peripheral recess (22,24) in its wall. Independent claims are also included for the following: a clamp element for an ultrasonic transducer.

Description

Die Erfindung betrifft einen Ultraschallwandler, insbesondere vom Längsschwinger-Typ, gemäß Oberbegriff des Anspruchs 1.The invention relates to an ultrasonic transducer, in particular of the longitudinal oscillator type, according to the preamble of claim 1.

US 3,351,787 beschreibt eine Beschleunigungsmesseinrichtung mit einem Stapel piezoelektrischen Kristalle, für den eine elastische Vorspann mittel vorgesehen ist.US 3,351,787 describes an acceleration measuring device with a stack of piezoelectric crystals, for which a resilient biasing means is provided.

Derartige Ultraschallwandler werden auch als zusammengesetzte Längsschwinger oder λ/2-Schwinger bezeichnet. Das mit Elektrodenflächen versehene piezoelektrische Element wird derart polarisiert und kontaktiert, daß beim Anlegen einer Wechselspannung geeigneter Frequenz die Gesamtstruktur in Resonanz bezüglich der axialen Richtung gelangt. Das zwischen den Spannabschnitten angeordnete Piezoelement befindet sich dabei in einem Bereich maximaler mechanischer Spannung und minimaler mechanischer Schwingungsgeschwindigkeit. Die Abstrahlung des Ultraschalls erfolgt von der freien Stirnseite eines der als Wellenleiter wirkenden Spannabschnitte. Um eine möglichst hohe Sendeleistung bei ausreichender Stabilität der Anordnung zu erreichen, wird das piezoelektrische Element über die Spannabschnitte mittels eines Spannorgans vorgespannt.Such ultrasonic transducers are also referred to as composite longitudinal oscillator or λ / 2 oscillator. The piezoelectric element provided with electrode surfaces is polarized and contacted in such a way that upon application of an AC voltage of suitable frequency, the entire structure comes into resonance with respect to the axial direction. The piezoelectric element arranged between the clamping sections is in a range of maximum mechanical stress and minimum mechanical vibration speed. The ultrasound is emitted from the free end face of one of the clamping sections acting as a waveguide. In order to achieve the highest possible transmission power with sufficient stability of the arrangement, the piezoelectric element is biased via the clamping sections by means of a clamping member.

Aufgabe der Erfindung ist es, einen Ultraschallwandler der eingangs genannten Art mit möglichst geringer Baugröße zu schaffen, bei dem eine möglichst große Vorspannung des piezoelektrischen Elementes erzielt werden kann, ohne daß die Schwingungseigenschaften des Ultraschallwandlers nachteilig beeinträchtigt werden.The object of the invention is to provide an ultrasonic transducer of the type mentioned with the smallest possible size, in which a the greatest possible bias of the piezoelectric element can be achieved without adversely affecting the vibration characteristics of the ultrasonic transducer.

Die Lösung dieser Aufgabe erfolgt durch die im kennzeichnenden Teil des Anspruchs 1 angegebenen Merkmale.The solution of this problem is achieved by the features stated in the characterizing part of claim 1.

Durch das Vorsehen einer Umfangsaussparung in einem ringförmigen Spannorgan wird bei minimaler axialer Baulänge ein maximaler Federweg erzielt. Durch den im Vergleich zur Baulänge großen Federweg können hohe Vorspannungen des piezoelektrischen Elementes realisiert werden, ohne dabei die zulässige Belastbarkeit der Spannfeder zu überschreiten. Daher ist die Spannfeder auch bei hohen Vorspannungen zu Schwingungen in der Lage, die den Betrieb des Ultraschallwandlers nicht beeinträchtigen.By providing a circumferential recess in an annular clamping member maximum axial travel is achieved with minimal axial length. Due to the great compared to the length of travel spring bias of the piezoelectric element can be realized without exceeding the allowable load capacity of the tension spring. Therefore, the tension spring is able to oscillate even at high bias voltages, which does not affect the operation of the ultrasonic transducer.

Durch die geringe axiale Baulänge der erfindungsgemäßen Spannfeder wirkt diese lediglich mit den unmittelbar an das piezoelektrische Element angrenzenden Bereichen der Spannabschnitte zusammen. In diesen Bereichen sind die Schwingungsamplituden und Schwingungsgeschwindigkeiten klein. Vorzugsweise wird die erfindungsgemäße Spannfeder mit den beiden Spannabschnitten verschraubt, indem diese unter Zwischenlage des piezoelektrischen Elementes von entgegengesetzten Seiten in die ringförmige Spannfeder eingeschraubt werden. Durch die erfindungsgemäß ermöglichte minimale axiale Baulänge wird vermieden, daß die Spannfeder mit den Spannabschnitten an axial weit vom piezoelektrischen Element entfernten Gewindebereichen starker Schwingungsaktivität zusammenwirkt. Störende Dämpfungswirkungen in den Gewindebereichen werden auf diese Weise vermieden.Due to the small axial length of the tension spring according to the invention this only cooperates with the immediately adjacent to the piezoelectric element areas of the clamping sections. In these areas, the vibration amplitudes and vibration speeds are small. Preferably, the tension spring according to the invention is screwed to the two clamping sections by being screwed with the interposition of the piezoelectric element from opposite sides in the annular tension spring. By inventively enabled minimum axial length is avoided that the tension spring with the clamping portions on axially far from the piezoelectric element remote threaded areas of strong vibration activity cooperates. Disturbing damping effects in the threaded areas are avoided in this way.

Ein weiterer Vorteil der Erfindung ist, daß die Spannfeder durch geeignete Dimensionierung der Umfangsaussparung gezielt an den jeweiligen Ultraschallwandler angepaßt werden kann. In vorteilhafter Weise kann die Umfangsaussparung derart dimensioniert werden, daß bei der jeweils gewünschten Sollvorspannung für das piezoelektrische Element-einerseits ein ausreichender Federweg vorhanden ist und andererseits die maximal zulässige Spannung oder Belastbarkeit des die Spannfeder bildenden Materials nicht überschritten ist.Another advantage of the invention is that the tension spring can be adapted by suitable dimensioning of the circumferential recess specifically to the respective ultrasonic transducer. Advantageously, the circumferential recess can be dimensioned such that at the respective desired target bias for the piezoelectric element on the one hand a sufficient spring travel is present and on the other hand, the maximum allowable stress or load capacity of the tension spring forming material is not exceeded.

Des weiteren kann die Umfangsaussparung gezielt - insbesondere auch in Abhängigkeit von den Abmessungen der Spannfeder selbst - derart bemessen werden, daß im Arbeitsfrequenzbereich des Ultraschallwandlers keine Eigenschwingungsmoden der Spannfeder auftreten. Insbesondere der Betrieb von breitbandigen Längsschwingern wird dadurch im Hauptübertragungsfrequenzbereich oder Arbeitsfrequenzbereich durch die Spannfeder nicht beeinträchtigt. Außerdem kann die Spannfeder durch entsprechende Ausgestaltung der Umfangsaussparung derart ausgebildet werden, daß auch solche Eigenschwingungsmoden der Spannfeder vermieden werden, die zwar außerhalb des Arbeitsfrequenzbereiches des Ultraschallwandlers liegen, aber dennoch zu nachteiligen Störungen von dessen Betrieb führen können.Furthermore, the circumferential recess can be specifically dimensioned-in particular also depending on the dimensions of the tension spring itself-such that no natural vibration modes of the tension spring occur in the working frequency range of the ultrasonic transducer. In particular, the operation of broadband longitudinal oscillators is not affected by the tension spring in the main transmission frequency range or operating frequency range. In addition, the tension spring can be formed by appropriate design of the circumferential recess such that even natural modes of the tension spring are avoided, which are indeed outside the working frequency range of the ultrasonic transducer, but can still lead to adverse disturbances of its operation.

Erfindungsgemäß kann daher auf einfache Weise eine Optimierung des Eigenschwingungsspektrums der Spannfeder in Abhängigkeit von den Eigenschaften oder dem Betriebsverhalten des jeweiligen Ultraschallwandlers erfolgen.According to the invention, therefore, a simple way to optimize the natural vibration spectrum of the tension spring in dependence on the properties or the operating behavior of the respective ultrasonic transducer.

Die aufgrund der Erfindung möglichen großen Federwege haben den Vorteil, daß der Einfluß von Änderungen der Umgebungsparameter wie z.B. der Temperatur auf den Betrieb des Ultraschallwandlers minimal ist und Alterungsvorgänge im Federwerkstoff kompensiert werden. Erfindungsgemäß läßt sich also eine hohe Resistenz gegen variierende Arbeits- bzw. Umgebungsbedingungen und gegen Alterung erzielen.The large spring travel possible due to the invention has the advantage that the influence of changes in the environmental parameters, e.g. the temperature on the operation of the ultrasonic transducer is minimal and aging processes in the spring material can be compensated. According to the invention, therefore, a high resistance to varying working or environmental conditions and to aging can be achieved.

Die Umfangsaussparung ist vorzugsweise schlitz- oder spaltförmig ausgebildet. Des weiteren erstreckt sich die Umfangsaussparung in radialer Richtung bevorzugt durch die ganze Wandung der Ringfeder, d.h. vorzugsweise ist die Wandung der Ringfeder über den Winkelbereich der Umfangsaussparung in axialer Richtung unterbrochen.The circumferential recess is preferably slot-shaped or gap-shaped. Furthermore, the circumferential recess preferably extends in the radial direction through the entire wall of the annular spring, i. Preferably, the wall of the annular spring is interrupted over the angular range of the circumferential recess in the axial direction.

Gemäß einer besonders bevorzugten Ausführungsform ist vorgesehen, daß die Umfangsaussparung zumindest teilweise mit einem schwingungsdämpfenden Material gefüllt ist. Störende Ein- und Ausschwingvorgänge können durch eine derartige Maßnahme gezielt gedämpft und auf diese Weise unwirksam gemacht werden.According to a particularly preferred embodiment, it is provided that the peripheral recess is at least partially filled with a vibration-damping material. Disturbing entrance and exit processes can be specifically damped by such a measure and made ineffective in this way.

Bevorzugt wird ein Vergußmaterial eingesetzt, mit dem die Umfangsaussparung ausgegossen wird.Preferably, a potting material is used, with which the peripheral recess is poured.

Von besonderem Vorteil ist das Vorsehen einer die Umfangsaussparung zumindest teilweise ausfüllenden Dämpfungsmasse in Anwendungen, bei denen mit dem Ultraschallwandler kurze Ultraschallimpulse ausgesendet bzw. empfangen werden sollen, da hierbei der Ein- und Ausschwingfunktion des Ultraschallwandlers in meßtechnischer Hinsicht eine große Bedeutung zukommt.Of particular advantage is the provision of a circumferential recess at least partially filling damping mass in applications in which emitted with the ultrasonic transducer short ultrasonic pulses or are to be received, since in this case the input and Ausschwingfunktion of the ultrasonic transducer in metrological terms of great importance.

Eine besonders gute Anpassung der Spannfeder an die jeweiligen Anforderungen ist dann möglich, wenn gemäß einer weiteren bevorzugten Ausführung die Spannfeder zwei axial beabstandete Umfangsaussparungen aufweist.A particularly good adaptation of the tension spring to the respective requirements is possible if according to a further preferred embodiment, the tension spring has two axially spaced circumferential recesses.

Mit einer derartigen zweistufigen Konstruktion können hohe Vorspannungen bei gleichzeitig großen Federwegen erzielt werden, ohne die axiale Baulänge wesentlich zu erhöhen und ohne die Vermeidung von störenden Eigenschwingungsmoden wesentlich zu erschweren.With such a two-stage construction high bias voltages can be achieved with a large spring travel, without significantly increasing the axial length and without significantly complicating the avoidance of disturbing Eigenschwingungsmoden.

Grundsätzlich wird die der Erfindung zugrundeliegende Aufgabe auch durch das Vorsehen von drei oder mehr Umfangsaussparungen zufriedenstellend gelöst. Die Umgehung bzw. Unterdrückung der störenden Eigenschwingungsmoden ist dann allerdings mit größerem Aufwand verbunden. In derartigen Fällen kann es vorteilhaft sein und ist es erfindungsgemäß möglich, die Bauteile des Ultraschallwandlers in Abhängigkeit von den optimierten Eigenschaften der Spannfeder zu dimensionieren, anstatt die Spannfeder an den Ultraschallwandler anzupassen.In principle, the object underlying the invention is also satisfactorily solved by the provision of three or more circumferential recesses. The circumvention or suppression of the disturbing natural modes is then associated with greater effort. In such cases, it may be advantageous and it is possible according to the invention to dimension the components of the ultrasonic transducer in response to the optimized properties of the tension spring, instead of adapting the tension spring to the ultrasonic transducer.

Weitere bevorzugte Ausführungsformen der Erfindung sind auch in den Unteransprüchen, der Beschreibung sowie der Zeichnung angegeben.Further preferred embodiments of the invention are also specified in the subclaims, the description and the drawing.

Die Erfindung wird im folgenden beispielhaft unter Bezugnahme auf die Zeichnung beschrieben, deren einzige Figur eine geschnittene Seitenansicht eines erfindungsgemäßen Ultraschallwandlers zeigt.The invention is described below by way of example with reference to the drawing, the single figure shows a sectional side view of an ultrasonic transducer according to the invention.

Der erfindungsgemäße Ultraschallwandler umfaßt zwei zylindrische Spannabschnitte 12, 14, von denen der eine 12 aus einem schweren Metall wie z.B. Stahl und der andere 14 aus einem leichten Metall, insbesondere Titan, Aluminium oder Magnesium hergestellt ist. Erfindungsgemäß kommen prinzipiell auch andere Materialien in Frage.The ultrasonic transducer according to the invention comprises two cylindrical clamping sections 12, 14, one of which is made of a heavy metal, e.g. Steel and the other 14 is made of a lightweight metal, especially titanium, aluminum or magnesium. In principle, other materials are also suitable according to the invention.

Die beiden Spannabschnitte 12, 14 sind jeweils mit einem Außengewinde 13, 15 versehen, über die sie mit dem Innengewinde 19 einer ringförmigen Spannfeder 18 verschraubt sind. Die Spannfeder 18 dient als ein Spannorgan, mit dem ein piezoelektrisches Element 16 zwischen den einander zugewandten Stirnseiten der mit der Spannfeder 18 verschraubten Spannabschnitte 12, 14 zusammengedrückt werden kann. Durch die Einschraubtiefe der Spannabschnitte 12, 14 kann eine jeweils gewünschte Vorspannung des piezoelektrischen Elementes 16 eingestellt werden.The two clamping sections 12, 14 are each provided with an external thread 13, 15, via which they are screwed to the internal thread 19 of an annular tension spring 18. The tension spring 18 serves as a tensioning element with which a piezoelectric element 16 can be compressed between the mutually facing end faces of the tensioning sections 12, 14 screwed to the tension spring 18. By the depth of engagement of the clamping portions 12, 14, a respective desired bias of the piezoelectric element 16 can be adjusted.

Das piezoelektrische Element 16 ist bevorzugt aus einer Piezokeramik hergestellt und kann - wie es in der Figur angedeutet ist - in mehrere Scheiben 16a, 16b aufgeteilt sein.The piezoelectric element 16 is preferably made of a piezoceramic and can - as it is indicated in the figure - be divided into several disks 16a, 16b.

Die Piezoscheiben 16a, 16b sind mit flächigen Elektroden 28 versehen, die über Anschlüsse 32 mit einer Wechselspannung vorgegebener Frequenz derart angesteuert werden können, daß die axiale Länge des piezoelektrischen Elementes 16, d.h. jeweils die Scheibendicke, entsprechend zeitlich variiert. Das Piezoelement 16 bildet somit eine axiale Kraftquelle, mit der bei passender Frequenz der angelegten Wechselspannung die Gesamtanordnung in axiale Schwingungen oder Längsschwingungen versetzt und dabei zu einer Längsresonanz angeregt werden kann.The piezoelectric disks 16a, 16b are provided with flat electrodes 28, which can be controlled via terminals 32 with an AC voltage of predetermined frequency such that the axial length of the piezoelectric element 16, ie in each case the disk thickness, varies in time accordingly. The piezoelectric element 16 thus forms an axial force source, with the at a suitable frequency of the applied AC voltage, the overall arrangement in axial vibrations or longitudinal vibrations and thereby can be excited to a longitudinal resonance.

Die freie Stirnseite des aus dem leichten Material hergestellten (in der Figur rechten) Spannabschnitts 14 dient dabei als Sende- und/oder Empfangsfläche 34, über welche die Ultraschallsignale abgestrahlt bzw. über welche Ultraschallsignale empfangen werden.The free end face of the tensioning section 14 made of the light material (right in the figure) serves as transmitting and / or receiving surface 34, via which the ultrasonic signals are emitted or via which ultrasonic signals are received.

Während das piezoelektrische Element 16 im Bereich größter mechanischer Spannung und kleinster Schwingungsgeschwindigkeit der Gesamtstruktur liegt, ist die Schwingungsgeschwindigkeit in der Ebene der Sende- und/oder Empfangsfläche 34 maximal. Dieser Effekt kann dadurch verstärkt werden, daß der aus dem leichten Werkstoff bestehende Spannabschnitt 14 in Richtung der Sende- und/oder Empfangsfläche 34 verjüngend ausgebildet wird, wobei jedoch vor dem freien Ende der Durchmesser des Spannabschnitts 14 wieder derart zunimmt, daß die Sende- und/oder Empfangsfläche 34 von einem plattenförmigen Endabschnitt 50 gebildet wird. Auf diese Weise wird eine Gewichtsminimierung erzielt, wobei aufgrund der flächenvergrößernden Platte 50 die Größe der Sende- bzw. Empfangsfläche 34 nicht verringert wird. In der Figur ist eine derartige Ausgestaltung des Spannabschnitts 14 durch gestrichelte Linien lediglich schematisch angedeutet.While the piezoelectric element 16 is in the range of highest mechanical stress and lowest vibration speed of the entire structure, the vibration speed in the plane of the transmitting and / or receiving surface 34 is maximum. This effect can be enhanced by the fact that the existing of the lightweight material clamping portion 14 is tapered in the direction of the transmitting and / or receiving surface 34, but before the free end of the diameter of the clamping portion 14 increases again so that the transmitting and / or receiving surface 34 is formed by a plate-shaped end portion 50. In this way, a weight minimization is achieved, wherein due to the area-increasing plate 50, the size of the transmitting or receiving surface 34 is not reduced. In the figure, such a configuration of the clamping portion 14 is indicated only schematically by dashed lines.

Allgemein wird eine derartige zusammengesetzte Struktur, bei der ein ein- oder mehrteiliges piezoelektrisches Element 16 zwischen zwei Spannabschnitten 12, 14 eingeklemmt ist, auch als Längsschwinger oder als λ/2-Schwinger bezeichnet.In general, such a composite structure, in which a one- or multi-part piezoelectric element 16 is clamped between two clamping sections 12, 14, also referred to as a longitudinal oscillator or λ / 2 oscillator.

Ein derartiger Ultraschallwandler wird beispielsweise in industriellen Anwendungen zur Abstandsmessung und Durchflußmessung eingesetzt, indem kurze Ultraschallimpulse abgesendet und empfangen werden.Such an ultrasonic transducer is used for example in industrial applications for distance measurement and flow measurement by sending and receiving short ultrasonic pulses.

Im in der Figur linken Spannabschnitt 12 ist ein zentraler Kanal 36 vorgesehen, dessen Mittelachse mit der Längsachse 27 der Gesamtanordnung zusammenfällt. Der Kanal 36 sowie zentrale Durchbrüche 17a, 17b in den Piezoscheiben 16a, 16b dienen zur Aufnahme von Anschlußleitungen 38 zur Ansteuerung der Elektroden 28 über die Anschlüsse 32, wobei dies in der Figur lediglich schematisch angedeutet ist.In the left clamping section 12 in the figure, a central channel 36 is provided, whose central axis coincides with the longitudinal axis 27 of the overall arrangement. The channel 36 and central openings 17a, 17b in the piezoelectric disks 16a, 16b are used to receive connection lines 38 for controlling the electrodes 28 via the terminals 32, this being indicated only schematically in the figure.

Die Spannfeder 18 zum Vorspannen des Piezoelementes 16 weist eine geringe axiale Baulänge auf und ist in einem mittleren, im Bereich des Piezoelementes 16 angeordneten Abschnitt bezüglich stirnseitiger Randabschnitte, in denen die Spannfeder 18 mit den Spannabschnitten 12, 14 verschraubt ist, radial nach außen erweitert.The tension spring 18 for biasing the piezoelectric element 16 has a small axial length and is in a central, arranged in the region of the piezoelectric element 16 section with respect to frontal edge portions in which the tension spring 18 is screwed to the clamping portions 12, 14, radially outwardly expanded.

In diesem mittleren Abschnitt sind in der Wandung der Spannfeder 18 zwei Umfangsaussparungen 22, 24 mit identischem rechteckigen Querschnitt ausgebildet. An den Umfangsaussparungen 22, 24 ist die Wandung der Spannfeder 18 vollständig durchtrennt, d.h. die Wandung der Spannfeder 18 ist durch die Aussparungen 22, 24 im entsprechenden Umfangsbereich in axialer Richtung unterbrochen.In this middle section 18, two circumferential recesses 22, 24 are formed with identical rectangular cross-section in the wall of the tension spring. At the circumferential recesses 22, 24, the wall of the tension spring 18 is completely severed, i. the wall of the tension spring 18 is interrupted by the recesses 22, 24 in the corresponding peripheral region in the axial direction.

Die Umfangsaussparungen 22, 24 erstrecken sich über einen in Abhängigkeit von der jeweiligen Anwendung größeren oder kleineren Winkelbereich, d.h. größeren oder kleineren Teil des Umfangs der Spannfeder 18. Dabei ist es bevorzugt, wenn die verbleibenden Umfangsabschnitte, die jeweils zwei der durch die Aussparungen 22, 24 axial getrennten Bereiche 18a, 18b, 18c der Spannfeder 18 miteinander verbinden, in Umfangsrichtung gegeneinander versetzt angeordnet sind. So ist es beispielsweise möglich, die beiden Aussparungen 22, 24 jeweils derart auszubilden, daß sie in Umfangsrichtung lediglich durch einen vergleichsweise kurzen Steg unterbrochen sind, wobei die beiden Stege um 180° gegeneinander in Umfangsrichtung versetzt angeordnet sind.The circumferential recesses 22, 24 extend over a larger or smaller depending on the particular application angle range, ie greater or lesser part of the circumference of the tension spring 18. It is preferred if the remaining peripheral portions, the two each of the recesses 22, 24 axially separated regions 18a, 18b, 18c of the tension spring 18 connect to each other, are arranged offset from one another in the circumferential direction. Thus, it is possible, for example, the two recesses 22, 24 each form such that they are interrupted in the circumferential direction only by a comparatively short web, wherein the two webs are offset by 180 ° from each other in the circumferential direction.

Durch das Vorsehen der Aussparungen oder Schlitze oder Spalte 22, 24 werden in der Wandung der Spannfeder 18 Biegespannungszonen gebildet, die als Federelemente wirken. Dadurch wird der insgesamt zur Verfügung stehende axiale Federweg der Spannfeder 18 vergrößert, ohne daß hierzu eine Vergrößerung von deren axialer Baulänge erforderlich ist.By providing the recesses or slots or gaps 22, 24 18 bending stress zones are formed in the wall of the tension spring, which act as spring elements. As a result, the total available axial travel of the tension spring 18 is increased without requiring an increase of the axial length is required.

Die Umfangsaussparungen 22, 24 sind in Abhängigkeit von den Abmessungen, insbesondere der axialen Länge, der Spannfeder 18 derart bemessen und angeordnet, daß im Arbeitsfrequenzbereich oder Hauptübertragungsfrequenzbereich des Ultraschallwandlers keine Eigenschwingungen der Spannfeder 18 entstehen. Die Spannfeder 18 kann somit durch passende Ausgestaltung der Umfangsaussparungen 22, 24 in besonders einfacher Weise an den jeweiligen Ultraschallwandler bzw. an dessen geforderten Betriebsparameter angepaßt werden.The circumferential recesses 22, 24 are dimensioned and arranged in dependence on the dimensions, in particular the axial length, of the tension spring 18 such that no natural oscillations of the tension spring 18 occur in the working frequency range or main transmission frequency range of the ultrasonic transducer. The tension spring 18 can thus be adapted by suitable design of the circumferential recesses 22, 24 in a particularly simple manner to the respective ultrasonic transducer or to its required operating parameters.

Die Umfangsaussparungen 22, 24 sind des weiteren mit einer Dämpfungsmasse 26 ausgegossen, wodurch-störende Ein- und Ausschwingeffekte gedämpft werden. Derartige Ein- und Ausschwingvorgänge können durch außerhalb des Arbeitsfrequenzbereiches des Ultraschallwandlers liegende Eigenschwingungen der Spannfeder 18 angeregt werden. Prinzipiell ist ein zufriedenstellender Betrieb des erfindungsgemäßen Ultraschallwandlers auch ohne Ausgießen der Aussparungen 22, 24 möglich. Ohne das schwingungsdämpfende Material in den Umfangsaussparungen 22, 24 kann es allerdings unter bestimmten Konstellationen passieren, daß der Betrieb des Ultraschallwandlers durch die Eigenschwingungen der Ringfeder 18 beeinträchtigt wird. Dies wird durch das Material in den Aussparungen 22, 24 sicher vermieden.The peripheral recesses 22, 24 are further filled with a damping mass 26, whereby-disturbing inputs and Ausschwingeffekte be damped. Such input and release processes can be excited by lying outside the working frequency range of the ultrasonic transducer natural oscillations of the tension spring 18. in principle is a satisfactory operation of the ultrasonic transducer according to the invention without pouring the recesses 22, 24 possible. Without the vibration-damping material in the circumferential recesses 22, 24, however, under certain constellations it may happen that the operation of the ultrasonic transducer is impaired by the natural vibrations of the annular spring 18. This is safely avoided by the material in the recesses 22, 24.

Durch die Wahl eines passenden Dämpfungsmaterials 26, z.B. einer elastischen Vergußmasse, kann die Spannfeder 18 gezielt an die jeweiligen Gegebenheiten angepaßt werden.By choosing an appropriate damping material 26, e.g. an elastic potting compound, the tension spring 18 can be adapted specifically to the particular circumstances.

Abweichend von der vorstehend beschriebenen Ausführungsform der Erfindung mit einer zweistufigen Aussparungs-, Schlitz- oder Spaltkonstruktion kann die Spannfeder 18 auch lediglich mit einer einzigen Umfangsaussparung oder alternativ auch mit drei oder einer noch größeren Anzahl von Umfangsaussparungen versehen sein.Notwithstanding the above-described embodiment of the invention with a two-step recess, slit or split construction, the tension spring 18 may also be provided with only a single circumferential recess or, alternatively, with three or an even greater number of circumferential recesses.

BezugszeichenlisteLIST OF REFERENCE NUMBERS

1212
Spannabschnittclamping section
1313
Außengewindeexternal thread
1414
Spannabschnittclamping section
1515
Außengewindeexternal thread
1616
piezoelektrisches Elementpiezoelectric element
16a16a
Scheibedisc
16b16b
Scheibedisc
17a17a
Durchbruchbreakthrough
17b17b
Durchbruchbreakthrough
1818
Spannorgan, SpannfederClamping organ, tension spring
18a18a
Bereiche der SpannfederAreas of the tension spring
18b18b
Bereiche der SpannfederAreas of the tension spring
18c18c
Bereiche der SpannfederAreas of the tension spring
1919
Innengewindeinner thread
2222
Umfangsaussparungperipheral recess
2424
Umfangsaussparungperipheral recess
2525
Dämpfungsmaterialdamping material
2626
Vergußmassesealing compound
2727
Längsachselongitudinal axis
2828
Elektrodeelectrode
3232
AnschlußConnection
3434
Sende- und/oder EmpfangsflächeTransmitting and / or receiving area
3636
Kanalchannel
3838
Anschlußleitungenleads
5050
plattenförmiger Endabschnittplate-shaped end portion

Claims (11)

  1. An ultrasonic transducer, in particular of the longitudinal oscillation type, comprising at least one piezoelectric element (16) arranged between two clamping sections (12, 14),
    wherein at least one clamping member (18) is provided which cooperates with the clamping sections (12, 14) such that the piezoelectric element (16) is pre-stressed by the clamping sections (12, 14),
    wherein the clamping member (18) is made as a ring-shaped clamping spring and has a wall,
    characterised in that
    at least one peripheral cut-out (22, 24) is formed in the wall which gives the wall a resilient effect in the axial direction.
  2. An ultrasonic transducer in accordance with claim 1, characterised in that two peripheral cut-outs (22, 24) are provided which are spaced apart axially.
  3. An ultrasonic transducer in accordance with claim 1 or claim 2, characterised in that the natural oscillation spectrum of the clamping spring (18) is optimised in dependence on the respective ultrasonic transducer, in particular on its working frequency range.
  4. An ultrasonic transducer in accordance with any one of the preceding claims, characterised in that the clamping spring (18) is made such that natural oscillations of the clamping spring (18) are avoided in the working frequency range of the ultrasonic converter.
  5. An ultrasonic transducer in accordance with any one of the preceding claims, characterised in that the clamping spring (18) is made such that transient oscillation and/or decay oscillation processes are suppressed which are caused by natural oscillations of the clamping spring (18) outside the working frequency range of the ultrasonic transducer.
  6. An ultrasonic transducer in accordance with any one of the preceding claims, characterised in that the peripheral cut-out (22, 24) is filled at least partly with an oscillation damping material, in particular with grout (26).
  7. An ultrasonic transducer in accordance with any one of the preceding claims, characterised in that the peripheral cut-out (22, 24) is slit-shaped or gap-shaped.
  8. An ultrasonic transducer in accordance with any one of the preceding claims, characterised in that the peripheral cut-out (22, 24) has a rectangular cross-section.
  9. An ultrasonic transducer in accordance with any one of the preceding claims, characterised in that the axial bounding surfaces of the peripheral cut-out (22, 24) extend perpendicular to the longitudinal axis (27) of the clamping spring.
  10. An ultrasonic transducer in accordance with any one of the preceding claims, characterised in that the wall of the clamping spring (18) is completely severed at the peripheral cut-out (22, 24).
  11. An ultrasonic transducer in accordance with any one of the preceding claims, characterised in that the clamping spring (18) is radially outwardly expanded in the region of the peripheral cut-out (22, 24) with respect to its end-face marginal sections.
EP01119332A 2000-08-17 2001-08-10 Piezoelectric ultrasound transducer Expired - Lifetime EP1181988B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10040344A DE10040344A1 (en) 2000-08-17 2000-08-17 ultrasound transducer
DE10040344 2000-08-17

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EP1181988A2 EP1181988A2 (en) 2002-02-27
EP1181988A3 EP1181988A3 (en) 2004-10-20
EP1181988B1 true EP1181988B1 (en) 2007-03-28

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EP01119332A Expired - Lifetime EP1181988B1 (en) 2000-08-17 2001-08-10 Piezoelectric ultrasound transducer

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US (1) US6570295B2 (en)
EP (1) EP1181988B1 (en)
AT (1) ATE357980T1 (en)
DE (2) DE10040344A1 (en)
ES (1) ES2280287T3 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10229925A1 (en) 2002-07-04 2004-01-15 Sick Engineering Gmbh Device for measuring the flow rate and / or the flow of a fluid
DE10341422A1 (en) * 2003-09-09 2005-03-31 Sick Engineering Gmbh Ultrasound transducer assembly
US8087297B2 (en) * 2004-03-04 2012-01-03 Ludwiczak Damian R Vibrating debris remover
WO2006127870A2 (en) * 2005-05-25 2006-11-30 Nsk Corporation Monitoring device and method
KR101496668B1 (en) * 2007-06-01 2015-02-27 악센소르 아베 Transducer device and method of assembling the same
DE102008031679A1 (en) * 2008-07-04 2010-01-07 Krones Ag Test device for containers
AT509922B1 (en) 2011-06-24 2013-10-15 Avl List Gmbh CAPACITIVE ULTRASOUND TRANSFORMER
DE102022107092B4 (en) 2022-03-25 2023-12-07 Krohne Ag Ultrasonic transducer

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2352311A (en) * 1941-02-07 1944-06-27 Edison Inc Thomas A Oscillation translating device
US2411401A (en) * 1942-07-28 1946-11-19 Westinghouse Electric Corp Accelerometer
US3351787A (en) * 1965-01-11 1967-11-07 Kistler Instr Corp Accelerometer
US3393331A (en) * 1966-02-28 1968-07-16 Continental Oil Co High-temperature probe
CA933276A (en) * 1971-02-05 1973-09-04 J. Last Anthony Ultrasonic motor
GB1430227A (en) * 1973-03-07 1976-03-31 Taga Electric Co Ltd Transducers
US3860901A (en) * 1973-06-01 1975-01-14 Raytheon Co Wide band transducer
US4193009A (en) * 1976-01-26 1980-03-11 Durley Benton A Iii Ultrasonic piezoelectric transducer using a rubber mounting
US4757227A (en) * 1986-03-24 1988-07-12 Intersonics Incorporated Transducer for producing sound of very high intensity
JP2538033B2 (en) * 1989-02-28 1996-09-25 松下電器産業株式会社 Planar ultrasonic actuator
US5319278A (en) * 1992-06-05 1994-06-07 Nec Corporation Longitudinal-torsional resonance ultrasonic motor with improved support structure
JP3138973B2 (en) * 1992-12-24 2001-02-26 株式会社新川 Bonding equipment

Also Published As

Publication number Publication date
US20020041130A1 (en) 2002-04-11
EP1181988A3 (en) 2004-10-20
US6570295B2 (en) 2003-05-27
ATE357980T1 (en) 2007-04-15
EP1181988A2 (en) 2002-02-27
DE50112259D1 (en) 2007-05-10
DE10040344A1 (en) 2002-02-28
ES2280287T3 (en) 2007-09-16

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