EP1135667A1 - Dünnschichtdeformationssensoren für interferometrisch-optischen messungen - Google Patents
Dünnschichtdeformationssensoren für interferometrisch-optischen messungenInfo
- Publication number
- EP1135667A1 EP1135667A1 EP99943961A EP99943961A EP1135667A1 EP 1135667 A1 EP1135667 A1 EP 1135667A1 EP 99943961 A EP99943961 A EP 99943961A EP 99943961 A EP99943961 A EP 99943961A EP 1135667 A1 EP1135667 A1 EP 1135667A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- sensor
- layer
- strain
- refractive index
- light energy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000010409 thin film Substances 0.000 title abstract description 12
- 230000003287 optical effect Effects 0.000 title description 8
- 238000005259 measurement Methods 0.000 title description 4
- -1 polysiloxane Polymers 0.000 claims abstract description 24
- 229920001296 polysiloxane Polymers 0.000 claims abstract description 16
- 239000004642 Polyimide Substances 0.000 claims abstract description 14
- 229920001721 polyimide Polymers 0.000 claims abstract description 14
- 239000000463 material Substances 0.000 claims description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- 239000004698 Polyethylene Substances 0.000 claims description 4
- 239000004743 Polypropylene Substances 0.000 claims description 4
- 239000004809 Teflon Substances 0.000 claims description 4
- 229920006362 Teflon® Polymers 0.000 claims description 4
- 239000004417 polycarbonate Substances 0.000 claims description 4
- 229920000515 polycarbonate Polymers 0.000 claims description 4
- 229920000728 polyester Polymers 0.000 claims description 4
- 229920000573 polyethylene Polymers 0.000 claims description 4
- 229920001155 polypropylene Polymers 0.000 claims description 4
- 230000008859 change Effects 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- 239000002033 PVDF binder Substances 0.000 claims 3
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims 3
- 239000002245 particle Substances 0.000 abstract description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 5
- 239000000758 substrate Substances 0.000 abstract description 5
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 238000010276 construction Methods 0.000 abstract description 2
- 239000011521 glass Substances 0.000 abstract description 2
- 230000004044 response Effects 0.000 description 14
- 238000002835 absorbance Methods 0.000 description 6
- 229920000642 polymer Polymers 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 230000002441 reversible effect Effects 0.000 description 4
- 230000006870 function Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- 230000006399 behavior Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000006355 external stress Effects 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 229920002100 high-refractive-index polymer Polymers 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000003446 memory effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000013001 point bending Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 230000001932 seasonal effect Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
Definitions
- the invention relates to polymeric/semiconductor thin film strain gauges
- the sensor system disclosed herein can monitor the integrity of structures for the purpose of public safety and maintenance. Specific applications include building, road, and bridge integrity.
- the system employs, as the sensing component, multiple optical strain gages that are inexpensive, inert to natural environments, and physically robust.
- such sensors and their optical fiber data links can be placed on the superstructures and footings of bridges, in the support components of buildings, or embedded into the surfaces of roads and pedestrian sky walks.
- the 'health' of such structures and surfaces can be automatically monitored and assessed with a minimum of human time allocation. Detailed use information would also be valuable in assessing the need for routine maintenance or for the need for repair after a potential catastrophic loading.
- the sensitivity and the passivity behavior of the sensors distinguishes from the prior art.
- Current resistive strain sensors have gage factors (the measure of sensitivity) of about 2-3.
- the disclosed sensors have gage factors on the order of 200-800. It is not believed the prior art discloses any passive sensors that have a memory that does not rely on a power source.
- Thin films of semiconductors or polymers are used to measure strain.
- the thin films are layered with each layer consisting of materials with different refractive indices. Because each layer has a different refractive index, light that is introduced into the composite structure can either be reflected or pass through at each interface. This allows interference of the incident light that passes through with light that is reflected resulting in a measurable absorption change.
- the degree of interference is sensitive to the refractive index and thickness of each layer.
- the thickness of the each layer changes with application of an external stress. The consequence of this is that the light absorption changes as a function of strain so that the absorption change can be used to measure the strain.
- An active sensor responds to the strain reversibly, i.e. as the strain changes the absorption changes in a reversible and predictable fashion. This type of sensor is used to measure the existing strain on a structure.
- a passive sensor has a memory of the maximum strain experienced by the structure. For example, if a structure experiences a large deformation ( a large strain) but then relaxes to a small rest value, the large deformation is not reversible. An active sensor will measure the strain events only if continuously monitored while the passive sensor will measure only the maximum strain experienced. If the active sensor is not being monitored while the maximum strain is occurring, the large strain excursion will not be observed. The passive sensor overcomes this problem.
- the invention comprises both active and passive sensors which preferably are used in the same structure.
- Both sensors are constructed by layering materials, either semiconductors or polymers having different refractive indices.
- the sensitivity is increased when the difference in refractive index is maximized and also as the number of layers is increased.
- the passive sensors are constructed by adding small particulates to one set of layers.
- FIG. 1 is an illustration of a passive sensor
- Figs. 2a and 2b are illustrations of an alternative embodiment of Fig. 1;
- Fig. 3 is a graph of the optical response of an active sensor;
- Fig. 4 is a graph of the optical response of an passive sensor;
- Fig. 5 is a graph of the optical response of a passive sensor;
- a spectrometer such as Perkin Elmer Lambda 2
- the sensor 12 comprises a transparent glass substrate 14 and a laminated construction in succession from the substrate 14, of a polyimide layer 18a, a polysiloxane layer 16a filled with alumina particles, a polyimide layer 18b and a polysiloxane layer 16b filled with alumina particles.
- the incident light beam is normal to the sensor surface.
- the light is collected along the incidence beam path in a photomultiplier tube detector 20 in the spectrometer 10.
- the layers can range in thickness from 1-20 microns.
- the passive sensor is prepared by mixing 50 nm particles of aluminum oxide in with the polysiloxane layer in an amount of 0.5 to 10% by weight based on the total weight of the polysiloxane layer. During preparation, the small particles aggregate to some (currently unknown) degree. Under strain, some of the particles in the aggregate separate and the polymer fills in between the newly separated alumina particles. When the strain is removed, the particles cannot reaggregate because of the intervening polymer. This is detected optically because the size of the aggregates determines the amount of light scattered off of the sample: as the aggregate size changes because of the strain, the amount of light directed toward the detector changes since the detector only samples a small volume of space. The passive sensor requires no power to achieve its memory effect.
- a capillary tube 30 e.g. i.d. 0.5 mm; o.d 0.7 mm, is used as a light conduit.
- Thin films 32 e.g. polysiloxane/polyimide, are deposited onto the outside walls of the capillary tube 30 and then these films are coated with aluminum 34.
- the aluminum 34 serves as a mirror to keep all the light confined in the tube 30 and to protect the entire structure from the surrounding environment.
- a fiber optic source 36 inputs light in a wavelength range of 500 to 1,000 Angstroms into one end of the capillary tube 30 parallel to the longitudinal axis of the tube and a detector 38 collects the light at the other end.
- the tube 30 acts as both a waveguide and a sensor. Under no strain, most of the light passes down the tube without interacting with the walls. With application of a strain the capillary tube 30 bends, Fig. 2b, so that a significant amount of light is introduced into the thin film coatings along the tube walls.
- Two effects cause a modulation of the output light intensity. First, the path length is changed so any absorption that occurs is increased, depending upon the absorptivity of the wall materials and the number of bounces the light undergoes. Second, the interference effect observed as light passes through the thin film layers still is operative, also causing intensity modulation by constructive or destructive interference, depending on the refractive index and thickness of each layer and the wavelength of light used.
- the film thicknesses 32 are on the order of 1 to 20 microns, thinner being a bit better.
- the wavelengths of maximum response depends upon the layer thicknesses, but that wavelength can be chosen arbitrarily to match the thin film structure.
- the aluminum coating has a thickness of between 400 to 800 nm.
- the alternating layers must have a different refractive index and the larger the difference, the better the sensor response.
- Other commonly available transparent polymers polyethylene, polypropylene, Teflon ® , polyvylidene flouride, polyester, etc. have refractive indices around 1.4 and could substitute for the polysiloxane layer.
- High refractive index polymers such as polycarbonates have refractive indices approximately the same as polyimide.
- a preferred sensor system requires both a passive and an active sensor in close proximity.
- the passive sensor measures the maximum strain excursion experienced but not a temporal history, i.e. the measured strain may be current or previous.
- the role of the active sensor is to measure the existing strain at the time of measurement.
- the sensors can be applied to a structure by currently known bonding techniques used for the current generation of strain sensors. Because the sensors are small, they will measure the strain of the substrate material reliably.
- the optical source and detector need not be embedded with the sensor. With the appropriate fiber optic connections, the optical measurement can be made periodically by connecting a handheld spectrometer to the input and output of the sensor.
- the maximum strain experienced by each structural element in a building could be determined well after the event (days or weeks) to establish the safety of the building since the passive sensor retains this information even with (the likely) loss of power.
- a fiber optic network connected to each sensor in a building that remotely senses the strain automatically. However, during a catastrophic event the fiber network is likely to break and prevent this mode of operation.
- the materials used in the sensor are both inexpensive and robust.
- the polysiloxane is a commercially available gasket sealer.
- the capillary configuration is especially attractive for long term applications because, if necessary, the entire sensor can be enclosed. Then, for example, if the sensor is to be used in a harsh environment such as a bridge, the entire sensor can be isolated from wind, rain, salt spray, etc. because any coatings applied outside of the aluminum layer have no affect on the sensor performance.
- the light source was a tungsten lamp, and strain was applied by four point bending, see ASTM C-1341-97.
- Figure 3 shows the response of two different active strain sensors, one with 12 layers (6 alternating layers of polysiloxane and polyimide) and one with 26 alternating layers. Layer thickness was about 10 microns. The absorbance was monitored at 600 nm as a function of applied strain with the results shown. The gage factor is a function of the number of layers indicating the interferometric nature of the response. Further, the gage factors are large, more than two orders of magnitude larger than found in typical resistance strain gages. Finally, the response is linear and reversible over the entire range up to about 2000 ⁇ strain (this is the typical limit required for structural applications since most materials exceed their plastic deformation limits at about 2000 ⁇ strain).
- Figure 4 shows the response of a passive strain gage having 26 alternating layers. The layer thickness was about 10 microns. As strain is applied, the response is similar to an active gage. The absorbance was monitored at 600 nm. However, when the strain is released the response is no longer reversible, i.e., the 0-strain absorbance depends upon the history of the sample. This is demonstrated in Figure 4 for several different strain excursions.
- the increments between successive strain excursions decreases with increasing strain (i.e., the passive response is nonlinear) and this is demonstrated in Figure 5.
- the 12 layer gage has a small gage factor but a larger, nearly linear response range.
- the 26 layer gage has a larger gage factor but becomes clearly nonlinear at significantly smaller maximum strains.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US9798998P | 1998-08-26 | 1998-08-26 | |
US97989P | 1998-08-26 | ||
PCT/US1999/019601 WO2000012960A1 (en) | 1998-08-26 | 1999-08-25 | Thin film strain sensors based on interferometric optical measurements |
Publications (1)
Publication Number | Publication Date |
---|---|
EP1135667A1 true EP1135667A1 (de) | 2001-09-26 |
Family
ID=22266087
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99943961A Withdrawn EP1135667A1 (de) | 1998-08-26 | 1999-08-25 | Dünnschichtdeformationssensoren für interferometrisch-optischen messungen |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP1135667A1 (de) |
JP (1) | JP2002523764A (de) |
KR (1) | KR20010072920A (de) |
CN (1) | CN1314990A (de) |
AU (1) | AU745103B2 (de) |
CA (1) | CA2341166A1 (de) |
WO (1) | WO2000012960A1 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003025035A2 (de) | 2001-09-14 | 2003-03-27 | Merck Patent Gmbh | Formkörper aus kern-mantel-partikeln |
DE10204339A1 (de) * | 2002-02-01 | 2003-08-07 | Merck Patent Gmbh | Dehnungs- und Stauchungssensor |
DE10227071A1 (de) | 2002-06-17 | 2003-12-24 | Merck Patent Gmbh | Verbundmaterial enthaltend Kern-Mantel-Partikel |
US7645422B2 (en) * | 2003-04-11 | 2010-01-12 | Therm-O-Disc, Incorporated | Vapor sensor and materials therefor |
CN100442007C (zh) * | 2003-08-21 | 2008-12-10 | 台达电子工业股份有限公司 | 量测薄膜应变的方法及其装置 |
CN101198851B (zh) * | 2005-05-25 | 2010-04-14 | 皇家墨尔本理工大学 | 聚合物应变传感器 |
ITBO20070587A1 (it) * | 2007-08-13 | 2009-02-14 | Portu Goffredo De | Metodo per misurare tensioni in una struttura o in un componente di una struttura in esercizio |
CN108271408B (zh) | 2015-04-01 | 2020-12-04 | 瓦亚视觉有限公司 | 使用被动和主动测量生成场景的三维地图 |
ITUA20162508A1 (it) * | 2016-04-12 | 2017-10-12 | Safecertifiedstructure Ingegneria S R L | Metodo e dispositivo d’indagine per la misurazione di tensioni in una struttura di agglomerato |
US10445928B2 (en) | 2017-02-11 | 2019-10-15 | Vayavision Ltd. | Method and system for generating multidimensional maps of a scene using a plurality of sensors of various types |
CN110307921B (zh) * | 2019-07-02 | 2021-01-22 | 运城学院 | 一种压力传感器 |
US11402510B2 (en) | 2020-07-21 | 2022-08-02 | Leddartech Inc. | Systems and methods for wide-angle LiDAR using non-uniform magnification optics |
CA3198326A1 (en) | 2020-07-21 | 2021-10-06 | Leddartech Inc. | Beam-steering device particularly for lidar systems |
EP4185888A1 (de) | 2020-07-21 | 2023-05-31 | Leddartech Inc. | Strahllenkungsvorrichtung, insbesondere für lidar-systeme |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0224502A (ja) * | 1988-07-12 | 1990-01-26 | Dainippon Screen Mfg Co Ltd | 膜厚測定方法 |
-
1999
- 1999-08-25 EP EP99943961A patent/EP1135667A1/de not_active Withdrawn
- 1999-08-25 AU AU56949/99A patent/AU745103B2/en not_active Ceased
- 1999-08-25 WO PCT/US1999/019601 patent/WO2000012960A1/en not_active Application Discontinuation
- 1999-08-25 KR KR1020017002341A patent/KR20010072920A/ko not_active Application Discontinuation
- 1999-08-25 CA CA002341166A patent/CA2341166A1/en not_active Abandoned
- 1999-08-25 CN CN99810062A patent/CN1314990A/zh active Pending
- 1999-08-25 JP JP2000567901A patent/JP2002523764A/ja active Pending
Non-Patent Citations (1)
Title |
---|
See references of WO0012960A1 * |
Also Published As
Publication number | Publication date |
---|---|
CN1314990A (zh) | 2001-09-26 |
WO2000012960A1 (en) | 2000-03-09 |
JP2002523764A (ja) | 2002-07-30 |
AU5694999A (en) | 2000-03-21 |
CA2341166A1 (en) | 2000-03-09 |
KR20010072920A (ko) | 2001-07-31 |
AU745103B2 (en) | 2002-03-14 |
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