EP1131659A4 - Tapered quasi-planar germanium waveguides for mid-ir sensing - Google Patents
Tapered quasi-planar germanium waveguides for mid-ir sensingInfo
- Publication number
- EP1131659A4 EP1131659A4 EP99958669A EP99958669A EP1131659A4 EP 1131659 A4 EP1131659 A4 EP 1131659A4 EP 99958669 A EP99958669 A EP 99958669A EP 99958669 A EP99958669 A EP 99958669A EP 1131659 A4 EP1131659 A4 EP 1131659A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- mid
- sensing
- planar germanium
- quasi
- tapered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12195—Tapering
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10613298P | 1998-10-29 | 1998-10-29 | |
US106132P | 1998-10-29 | ||
PCT/US1999/024974 WO2000036442A1 (en) | 1998-10-29 | 1999-10-25 | Tapered quasi-planar germanium waveguides for mid-ir sensing |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1131659A1 EP1131659A1 (en) | 2001-09-12 |
EP1131659A4 true EP1131659A4 (en) | 2005-02-02 |
Family
ID=22309667
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99958669A Withdrawn EP1131659A4 (en) | 1998-10-29 | 1999-10-25 | Tapered quasi-planar germanium waveguides for mid-ir sensing |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP1131659A4 (en) |
WO (1) | WO2000036442A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6956983B2 (en) | 2002-05-31 | 2005-10-18 | Intel Corporation | Epitaxial growth for waveguide tapering |
US6813432B2 (en) | 2002-05-31 | 2004-11-02 | Intel Corporation | Method for producing vertical tapers in optical waveguides by over polishing |
US6989284B2 (en) | 2002-05-31 | 2006-01-24 | Intel Corporation | Fabrication of a waveguide taper through ion implantation |
CN115061239B (en) * | 2022-06-24 | 2023-11-03 | 之江实验室 | Polarization rotating beam splitter based on multistage conical waveguide structure |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58117510A (en) * | 1982-01-05 | 1983-07-13 | Toshiba Corp | Optical waveguide and its manufacture |
EP0209489A1 (en) * | 1985-07-01 | 1987-01-21 | Prutec Limited | Waveguide to be used as optical probe in multiple internal reflection spectroscopic analysis |
US5332690A (en) * | 1992-05-08 | 1994-07-26 | At&T Bell Laboratories | Method of making an integrated optical package for coupling optical fibers to devices with asymmetric light beams |
US5446534A (en) * | 1993-03-05 | 1995-08-29 | Optical Solutions, Inc. | Broad band waveguide spectrometer |
US5585634A (en) * | 1994-09-29 | 1996-12-17 | Foster-Miller, Inc. | Attenuated total reflectance sensing |
FR2737571A1 (en) * | 1995-08-04 | 1997-02-07 | Telecommunications Sa | Optical probe for spectroscopic analysis of materials - using a rod formed of transparent material connected to an inlet-outlet coupling |
DE19638999A1 (en) * | 1995-09-22 | 1997-03-27 | Sharp Kk | Photodetector-waveguide combination |
WO1998022799A2 (en) * | 1996-11-18 | 1998-05-28 | Novartis Ag | Measurement device and its use |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5980831A (en) * | 1996-06-17 | 1999-11-09 | Braiman; Mark S. | Support planar germanium waveguides for infrared evanescent-wave sensing |
US5949942A (en) * | 1997-09-12 | 1999-09-07 | Intel Corporation | Planar waveguide and method of forming the same |
-
1999
- 1999-10-25 EP EP99958669A patent/EP1131659A4/en not_active Withdrawn
- 1999-10-25 WO PCT/US1999/024974 patent/WO2000036442A1/en not_active Application Discontinuation
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58117510A (en) * | 1982-01-05 | 1983-07-13 | Toshiba Corp | Optical waveguide and its manufacture |
EP0209489A1 (en) * | 1985-07-01 | 1987-01-21 | Prutec Limited | Waveguide to be used as optical probe in multiple internal reflection spectroscopic analysis |
US5332690A (en) * | 1992-05-08 | 1994-07-26 | At&T Bell Laboratories | Method of making an integrated optical package for coupling optical fibers to devices with asymmetric light beams |
US5446534A (en) * | 1993-03-05 | 1995-08-29 | Optical Solutions, Inc. | Broad band waveguide spectrometer |
US5585634A (en) * | 1994-09-29 | 1996-12-17 | Foster-Miller, Inc. | Attenuated total reflectance sensing |
FR2737571A1 (en) * | 1995-08-04 | 1997-02-07 | Telecommunications Sa | Optical probe for spectroscopic analysis of materials - using a rod formed of transparent material connected to an inlet-outlet coupling |
DE19638999A1 (en) * | 1995-09-22 | 1997-03-27 | Sharp Kk | Photodetector-waveguide combination |
WO1998022799A2 (en) * | 1996-11-18 | 1998-05-28 | Novartis Ag | Measurement device and its use |
Non-Patent Citations (3)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 0072, no. 28 (P - 228) 8 October 1983 (1983-10-08) * |
PLUNKETT S E ET AL: "SUPPORTED PLANAR GERMANIUM WAVEGUIDES FOR INFRARED EVANESCENT-WAVE SENSING", APPLIED OPTICS, OPTICAL SOCIETY OF AMERICA,WASHINGTON, US, vol. 36, no. 18, 20 June 1997 (1997-06-20), pages 4055 - 4061, XP000658679, ISSN: 0003-6935 * |
See also references of WO0036442A1 * |
Also Published As
Publication number | Publication date |
---|---|
EP1131659A1 (en) | 2001-09-12 |
WO2000036442A1 (en) | 2000-06-22 |
WO2000036442A9 (en) | 2000-11-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 20010528 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE |
|
RBV | Designated contracting states (corrected) |
Designated state(s): AT DE GB |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 20041222 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: 7G 01N 21/55 B Ipc: 7G 02B 6/28 B Ipc: 7G 01N 21/00 B Ipc: 7G 02B 6/10 A |
|
17Q | First examination report despatched |
Effective date: 20050314 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20050927 |