EP1131659A4 - Tapered quasi-planar germanium waveguides for mid-ir sensing - Google Patents

Tapered quasi-planar germanium waveguides for mid-ir sensing

Info

Publication number
EP1131659A4
EP1131659A4 EP99958669A EP99958669A EP1131659A4 EP 1131659 A4 EP1131659 A4 EP 1131659A4 EP 99958669 A EP99958669 A EP 99958669A EP 99958669 A EP99958669 A EP 99958669A EP 1131659 A4 EP1131659 A4 EP 1131659A4
Authority
EP
European Patent Office
Prior art keywords
mid
sensing
planar germanium
quasi
tapered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99958669A
Other languages
German (de)
French (fr)
Other versions
EP1131659A1 (en
Inventor
Mark Stephen Braiman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of EP1131659A1 publication Critical patent/EP1131659A1/en
Publication of EP1131659A4 publication Critical patent/EP1131659A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12195—Tapering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
EP99958669A 1998-10-29 1999-10-25 Tapered quasi-planar germanium waveguides for mid-ir sensing Withdrawn EP1131659A4 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10613298P 1998-10-29 1998-10-29
US106132P 1998-10-29
PCT/US1999/024974 WO2000036442A1 (en) 1998-10-29 1999-10-25 Tapered quasi-planar germanium waveguides for mid-ir sensing

Publications (2)

Publication Number Publication Date
EP1131659A1 EP1131659A1 (en) 2001-09-12
EP1131659A4 true EP1131659A4 (en) 2005-02-02

Family

ID=22309667

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99958669A Withdrawn EP1131659A4 (en) 1998-10-29 1999-10-25 Tapered quasi-planar germanium waveguides for mid-ir sensing

Country Status (2)

Country Link
EP (1) EP1131659A4 (en)
WO (1) WO2000036442A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6813432B2 (en) 2002-05-31 2004-11-02 Intel Corporation Method for producing vertical tapers in optical waveguides by over polishing
US6956983B2 (en) 2002-05-31 2005-10-18 Intel Corporation Epitaxial growth for waveguide tapering
US6989284B2 (en) 2002-05-31 2006-01-24 Intel Corporation Fabrication of a waveguide taper through ion implantation
CN115061239B (en) * 2022-06-24 2023-11-03 之江实验室 Polarization rotating beam splitter based on multistage conical waveguide structure

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58117510A (en) * 1982-01-05 1983-07-13 Toshiba Corp Optical waveguide and its manufacture
EP0209489A1 (en) * 1985-07-01 1987-01-21 Prutec Limited Waveguide to be used as optical probe in multiple internal reflection spectroscopic analysis
US5332690A (en) * 1992-05-08 1994-07-26 At&T Bell Laboratories Method of making an integrated optical package for coupling optical fibers to devices with asymmetric light beams
US5446534A (en) * 1993-03-05 1995-08-29 Optical Solutions, Inc. Broad band waveguide spectrometer
US5585634A (en) * 1994-09-29 1996-12-17 Foster-Miller, Inc. Attenuated total reflectance sensing
FR2737571A1 (en) * 1995-08-04 1997-02-07 Telecommunications Sa Optical probe for spectroscopic analysis of materials - using a rod formed of transparent material connected to an inlet-outlet coupling
DE19638999A1 (en) * 1995-09-22 1997-03-27 Sharp Kk Photodetector-waveguide combination
WO1998022799A2 (en) * 1996-11-18 1998-05-28 Novartis Ag Measurement device and its use

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5980831A (en) * 1996-06-17 1999-11-09 Braiman; Mark S. Support planar germanium waveguides for infrared evanescent-wave sensing
US5949942A (en) * 1997-09-12 1999-09-07 Intel Corporation Planar waveguide and method of forming the same

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58117510A (en) * 1982-01-05 1983-07-13 Toshiba Corp Optical waveguide and its manufacture
EP0209489A1 (en) * 1985-07-01 1987-01-21 Prutec Limited Waveguide to be used as optical probe in multiple internal reflection spectroscopic analysis
US5332690A (en) * 1992-05-08 1994-07-26 At&T Bell Laboratories Method of making an integrated optical package for coupling optical fibers to devices with asymmetric light beams
US5446534A (en) * 1993-03-05 1995-08-29 Optical Solutions, Inc. Broad band waveguide spectrometer
US5585634A (en) * 1994-09-29 1996-12-17 Foster-Miller, Inc. Attenuated total reflectance sensing
FR2737571A1 (en) * 1995-08-04 1997-02-07 Telecommunications Sa Optical probe for spectroscopic analysis of materials - using a rod formed of transparent material connected to an inlet-outlet coupling
DE19638999A1 (en) * 1995-09-22 1997-03-27 Sharp Kk Photodetector-waveguide combination
WO1998022799A2 (en) * 1996-11-18 1998-05-28 Novartis Ag Measurement device and its use

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 0072, no. 28 (P - 228) 8 October 1983 (1983-10-08) *
PLUNKETT S E ET AL: "SUPPORTED PLANAR GERMANIUM WAVEGUIDES FOR INFRARED EVANESCENT-WAVE SENSING", APPLIED OPTICS, OPTICAL SOCIETY OF AMERICA,WASHINGTON, US, vol. 36, no. 18, 20 June 1997 (1997-06-20), pages 4055 - 4061, XP000658679, ISSN: 0003-6935 *
See also references of WO0036442A1 *

Also Published As

Publication number Publication date
EP1131659A1 (en) 2001-09-12
WO2000036442A1 (en) 2000-06-22
WO2000036442A9 (en) 2000-11-02

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