EP1037252A3 - Energy filter - Google Patents

Energy filter Download PDF

Info

Publication number
EP1037252A3
EP1037252A3 EP00302057A EP00302057A EP1037252A3 EP 1037252 A3 EP1037252 A3 EP 1037252A3 EP 00302057 A EP00302057 A EP 00302057A EP 00302057 A EP00302057 A EP 00302057A EP 1037252 A3 EP1037252 A3 EP 1037252A3
Authority
EP
European Patent Office
Prior art keywords
polepiece
bases
energy filter
grooves
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00302057A
Other languages
German (de)
French (fr)
Other versions
EP1037252B1 (en
EP1037252A2 (en
Inventor
Toshiktsu Kaneyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Publication of EP1037252A2 publication Critical patent/EP1037252A2/en
Publication of EP1037252A3 publication Critical patent/EP1037252A3/en
Application granted granted Critical
Publication of EP1037252B1 publication Critical patent/EP1037252B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/463—Static spectrometers using static magnetic fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

There is disclosed an energy filter for use in an electron microscope, the energy filter having an electron passage that can be evacuated more reliably than heretofore. The filter can be designed compactly without increasing the polepiece gaps or the spaces to accommodate coils. The energy filter has an electron-deflecting magnet assembly. This assembly comprises a pair of opposite polepiece bases, a pair of spacers interposed between the polepiece bases, and a yoke mounted to side surfaces of the polepiece bases. Magnetic polepieces and coil grooves of a given width are formed in the opposite surfaces of the polepiece bases. Bulges forming shunts are formed outside the coil grooves in the polepiece bases. O-ring grooves are formed in the spacers on the sides of the polepiece bases around the coil grooves. Electron passage grooves are formed in the opposite surfaces of the spacers to form the electron passage.
EP00302057A 1999-03-18 2000-03-14 Energy filter Expired - Lifetime EP1037252B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7345799 1999-03-18
JP7345799 1999-03-18

Publications (3)

Publication Number Publication Date
EP1037252A2 EP1037252A2 (en) 2000-09-20
EP1037252A3 true EP1037252A3 (en) 2001-05-09
EP1037252B1 EP1037252B1 (en) 2008-06-11

Family

ID=13518808

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00302057A Expired - Lifetime EP1037252B1 (en) 1999-03-18 2000-03-14 Energy filter

Country Status (3)

Country Link
US (1) US6483110B1 (en)
EP (1) EP1037252B1 (en)
DE (1) DE60039142D1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE602005023146D1 (en) * 2005-07-11 2010-10-07 Integrated Circuit Testing Apparatus for generating an electric-magnetic field and construction method thereof
DE102008062888B4 (en) * 2008-12-23 2010-12-16 Carl Zeiss Nts Gmbh Particle-optical device with magnet arrangement

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5177361A (en) * 1990-12-22 1993-01-05 Carl-Zeiss-Stiftung Electron energy filter
US5585630A (en) * 1994-07-25 1996-12-17 Hitachi, Ltd. Electron energy filter and transmission electron microscope provided with the same
JPH10199458A (en) * 1997-01-17 1998-07-31 Hitachi Ltd Energy filter and transmission type electron microscope having this

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4743756A (en) 1987-08-10 1988-05-10 Gatan Inc. Parallel-detection electron energy-loss spectrometer
JPH10125267A (en) * 1996-10-16 1998-05-15 Jeol Ltd Energy filter

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5177361A (en) * 1990-12-22 1993-01-05 Carl-Zeiss-Stiftung Electron energy filter
US5585630A (en) * 1994-07-25 1996-12-17 Hitachi, Ltd. Electron energy filter and transmission electron microscope provided with the same
JPH10199458A (en) * 1997-01-17 1998-07-31 Hitachi Ltd Energy filter and transmission type electron microscope having this

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 12 31 October 1998 (1998-10-31) *

Also Published As

Publication number Publication date
EP1037252B1 (en) 2008-06-11
EP1037252A2 (en) 2000-09-20
DE60039142D1 (en) 2008-07-24
US6483110B1 (en) 2002-11-19

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