EP0954008B1 - Decaborane vaporizer for ion source - Google Patents
Decaborane vaporizer for ion source Download PDFInfo
- Publication number
- EP0954008B1 EP0954008B1 EP99302874A EP99302874A EP0954008B1 EP 0954008 B1 EP0954008 B1 EP 0954008B1 EP 99302874 A EP99302874 A EP 99302874A EP 99302874 A EP99302874 A EP 99302874A EP 0954008 B1 EP0954008 B1 EP 0954008B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- vapourizer
- heating medium
- feed tube
- ionization chamber
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000006200 vaporizer Substances 0.000 title description 6
- 238000010438 heat treatment Methods 0.000 claims description 34
- 239000000463 material Substances 0.000 claims description 25
- 239000007787 solid Substances 0.000 claims description 9
- 238000000859 sublimation Methods 0.000 claims description 6
- 230000008022 sublimation Effects 0.000 claims description 6
- 230000007246 mechanism Effects 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 239000002480 mineral oil Substances 0.000 claims description 2
- 235000010446 mineral oil Nutrition 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 description 36
- 229910052796 boron Inorganic materials 0.000 description 15
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 14
- 238000010884 ion-beam technique Methods 0.000 description 14
- 239000007943 implant Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 229910015900 BF3 Inorganic materials 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 150000001793 charged compounds Chemical class 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 239000007790 solid phase Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000009834 vaporization Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- -1 boron ions Chemical class 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008713 feedback mechanism Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- APHGZSBLRQFRCA-UHFFFAOYSA-M indium(1+);chloride Chemical compound [In]Cl APHGZSBLRQFRCA-UHFFFAOYSA-M 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/2658—Bombardment with radiation with high-energy radiation producing ion implantation of a molecular ion, e.g. decaborane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/08—Ion sources; Ion guns using arc discharge
Definitions
- the present invention relates generally to ion sources for ion implantation equipment and more specifically to a decaborane vaporizer for an ion source.
- Ion implantation has become a standard accepted technology of industry to dope workpieces such as silicon wafers or glass substrates with impurities in the large scale manufacture of items such as integrated circuits and flat panel displays.
- Conventional ion implantation systems include an ion source that ionizes a desired dopant element which is then accelerated to form an ion beam of prescribed energy.
- the ion beam is directed at the surface of the workpiece to implant the workpiece with the dopant element.
- the energetic ions of the ion beam penetrate the surface of the workpiece so that they are embedded into the crystalline lattice of the workpiece material to form a region of desired conductivity.
- the implantation process is typically performed in a high vacuum process chamber which prevents dispersion of the ion beam by collisions with residual gas molecules and which minimizes the risk of contamination of the workpiece by airborne particulates.
- Ion dose and energy are the two most important variables used to define an implant step.
- Ion dose relates to the concentration of implanted ions for a given semiconductor material.
- high current implanters generally greater than 10 milliamps (mA) ion beam current are used for high dose implants, while medium current implanters (generally capable up to about 1 mA beam current) are used for lower dose applications.
- Ion energy is used to control junction depth in semiconductor devices. The energy levels of the ions which make up the ion beam determine the degree of depth of the implanted ions.
- High energy processes such as those used to form retrograde wells in semiconductor devices require implants of up to a few million electron volts (MeV), while shallow junctions may only demand energies below 1 thousand electron volts (KeV).
- CMOS complementary metal-oxide-semiconductor
- a typical ion source 10 for obtaining atoms for ionization from a solid form is shown in Figure 1 .
- the ion source comprises a pair of vaporizers 12 and 14 and an ionization chamber 16.
- Each of the vaporizers is provided with a crucible 18 in which a solid element or compound is placed and which is heated by a heater coil 20 to vaporize the solid source material.
- Heater coil leads 22 conduct electrical current to the heater coils and thermocouples 24 provide a temperature feedback mechanism.
- Air cooling conduit 26 and water-cooling conduit 28 is also provided.
- Vaporized source material passes through a nozzle 30, which is secured to the crucible 18 by a graphite nozzle retainer 32, and through vaporizer inlets 34 to the interior of the ionization chamber 16.
- compressed gas may be fed directly into the ionization chamber by means of a gas inlet 36 via a gas line 38.
- the gaseous/vaporized source material is ionized by an arc chamber filament 40 that is heated to thermionically emit electrons.
- ion sources utilize an ionizable dopant gas which is obtained either directly from a source of a compressed gas or indirectly from a solid from which has been vaporized.
- Typical source elements are boron (B), phosphorous (P), gallium (Ga), indium (In), antimony (Sb), and arsenic (As).
- Most of these source elements are provided in solid form, except boron, which is typically provided in gaseous form, e.g., as boron trifluoride (BF 3 ).
- boron trifluoride In the case of implanting boron trifluoride, a plasma is created which includes singly charged boron (B+) ions. Creating and implanting a sufficiently high dose of boron into a substrate is usually not problematic if the energy level of the beam is not a factor. In low energy applications, however, the beam of boron ions will suffer from a condition known as "beam blow-up", which refers to the tendency for like-charged ions within the ion beam to mutually repel each other. Such mutual repulsion causes the ion beam to expand in diameter during transport, resulting in vignetting of the beam by multiple apertures in the beamline. This severely reduces beam transmission as beam energy is reduced.
- Decaborane (B 10 H 14 ) is a compound which has not heretofore been used as a source of boron for boron implants.
- the vaporization of decaborane cannot be suitably controlled in the crucible of the ion source of Figure 1 because decaborane in the solid state has a melting point of about 100° C. Heat generated within the arc chamber 16 will cause the crucible to achieve such a temperature even if the vaporizer heaters are not energized, because the proximity of the solid phase material to the arc chamber results in radiative heating of the material.
- Decaborane is an excellent source of feed material for boron implants because each decaborane molecule (B 10 H 14 ) when vaporized and ionized can provide a molecular ion comprised of ten boron atoms.
- Such a source is especially suitable for high dose/low energy implant processes used to create shallow junctions, because a molecular decaborane ion beam can implant ten times the boron dose per unit of current as can a monotomic boron ion beam.
- the decaborane molecule breaks up into individual boron atoms of roughly one-tenth the original beam energy at the workpiece surface, the beam can be transported at ten times the energy of a dose-equivalent monotomic boron ion beam. This feature enables the molecular ion beam to avoid the transmission losses which are typically brought about by low energy ion beam transport.
- an object of the present invention to provide an ion source for an ion implanter which can accurately and controllably vaporize decaborane, or other suitable implant material, to overcome the deficiencies of known ion sources.
- US 3,700,892 A discloses an ion source provided with a vaporising oven, which is connected by feed tubes to an ionising chamber.
- a plurality of tubes, through which hot water of constant temperature is circulated, is mounted to the exterior of the vaporising oven, such as to vaporise the mercury contained therein.
- a vaporizer for an ion source comprising: (i) a sublimator having a cavity for receiving a source material to be sublimated and for sublimating the source material; (ii) a feed tube for connecting said sublimator to a remotely located ionization chamber in which sublimated source material may be ionized; (iii) a heating medium for heating said sublimator and said feed tube; and (iv) a control mechanism for controlling the temperature of said heating medium.
- the temperature within the sublimator is thermally isolated, providing a thermally stable environment unaffected by the temperature in the ionization chamber.
- the temperature of the sublimator, in which the process of decaborane sublimation occurs may be controlled independently of the operating temperature of the ionization chamber to a high degree of accuracy (within 1°C).
- the ion source 50 comprises a non-reactive, thermally conductive sublimator or crucible 52, a heating medium reservoir 54, a heating medium pump 55, a temperature controller 56, an ionization chamber 58, and (in this first embodiment) a mass flow controller 60.
- the crucible 52 is located remotely from the ionization chamber 58 and connected thereto by a feed tube 62, constructed of quartz or stainless steel.
- the feed tube 62 is surrounded by an outer single-chamber annular sheath 90 along substantially the entire length thereof.
- the crucible 52 provides a container 64 enclosing a cavity 66 for containing a source material 68.
- the container is preferably made of a suitable non-reactive (inert) material such as stainless steel, graphite, quartz or boron nitride and which is capable of holding a sufficient amount of source material such as decaborane (B 10 H 14 ).
- decaborane B 10 H 14
- the principles of the present invention may be used for other molecular solid source materials, such as indium chloride (InCl), which are characterized as having both low melting points (i.e. sublimation temperatures of between 20° C and 150° C) and significant vapor pressures (i.e. 1.3 Pa and 1.3 x 10 5 Pa (between 10 -2 Torr and 10 3 Torr)).
- the decaborane is vaporized through a process of sublimation by heating the walls of the container 64 with a heating medium 70 contained in reservoir 54.
- the process of sublimation comprises the transformation of the decaborane from a solid state to a vapor state without entering an intermediate liquid state.
- a wire mesh 71 prevents non-vaporized decaborane from escaping the crucible 52.
- Completely vaporized decaborane exits the crucible 52 via feed tube 62 and enters mass flow controller 60, which controls the flow of vapor, and thus meters the amount of vaporized decaborane which is provided to the ionization chamber, as is known in the art.
- the ionization chamber 58 ionizes the vaporized decaborane that is provided by the mass flow controller 60 or, alternatively, a gas inlet feed 72 from a compressed gas source.
- An RF exciter 74 such as an antenna is energized to emit an RF signal which ionizes the vaporized decaborane molecules to create a plasma.
- a magnetic filter 76 filters the plasma, and extractor electrodes (not shown) located outside an exit aperture 78 of the ionization chamber 58 extract the plasma through the aperture as is known in the art. This extracted plasma forms an ion beam that is conditioned and directed toward a target workpiece.
- An example of such an ionization chamber 58 is shown in U.S. Patent No. 5,661,308 , assigned to the assignee of the present invention.
- the inventive ion source 50 provides a control mechanism for controlling the operating temperature of the crucible 52, as well as that of the feed tube 62 through which vaporized decaborane passes on its way to the ionization chamber 58.
- the heating medium 70 is heated within the reservoir 54 by a resistive or similar heating element 80.
- the temperature control means comprises a temperature controller 56 which obtains as an input temperature feedback from the reservoir 54 via thermocouple 92, and outputs a control signal to heating element 80, as further described below, so that the heating medium 70 in the reservoir is heated to a suitable temperature.
- the heating medium 70 comprises mineral oil or other suitable medium (e.g. water) that provides a high heat capacity.
- the oil is heated to a temperature within the 20° C to 150° C range by the heating element 80 and circulated by pump 55 around the crucible 52 and the feed tube 62 through sheath 90.
- the pump 55 is provided with an inlet and an outlet 82 and 84, respectively, and the reservoir 54 is similarly provided with an inlet 86 and an outlet 88, respectively.
- the flow pattern of the heating medium about the crucible 52 and the feed tube 62 although shown in a unidirectional clockwise pattern in Figure 2 , may be any pattern that provides reasonable circulation of the medium about the crucible 52 and the feed tube 62.
- the feed tube 62 is provided in the form of a capillary tube and sheath 90 is provided in the form of a coaxial dual-chamber sheath, comprising an inner sheath 90A surrounded by an outer sheath 90B (see Figure 3 ).
- the heating medium may be pumped into the inner sheath 90A (located adjacent the capillary tube 62) and pumped out of the outer sheath 90B (located radially outward from the inner sheath 90A).
- the mass flow controller 60 is replaced with a heated shut-off valve (not shown) located at the feed tube/ionization chamber interface, and mass flow is increased or decreased by directly changing the temperature of the reservoir 54.
- the arrangement of the coaxial sheath surrounding the capillary tube has the advantage of providing an insulating sheath surrounding the inner diameter of the capillary tube, thereby resulting in a more uniform temperature.
- the crucible cavity 66 is pressurized in order to facilitate material transfer of the vaporized (sublimated) decaborane from the crucible 52 to the ionization chamber 58 through the feed tube 62.
- the ionization chamber operates at a near vacuum (about 1 millitorr or 133 milli-Pascal), and thus, a pressure gradient exists along the entire length of the feed tube 62, from the crucible 52 to the ionization chamber 58.
- the pressure of the crucible is typically on the order of 133 Pa (1 torr).
- Figure 4A shows a graphical representation of this pressure gradient along the length of the feed tube 62 for the first embodiment of the invention ( Figure 2 ), as measured by the distance d between the crucible and the ionization chamber.
- the pressure profile drops along the feed tube linearly up to the mass flow controller 60, then is modified by the mass flow controller, then continues to drop linearly for the remainder of the distance d up to the ionization chamber 58.
- the distance d is approximately up to about 60cm (24 inches). Such a distance, however, is provided merely for exemplary purposes.
- the invention covers a sublimator/vaporizer remotely located from an ionization chamber, and is not limited to any particular distance representing this remote location.
- Figure 4B shows a graphical representation of this pressure gradient along the length of the feed tube 62 for the second embodiment of the invention ( Figure 3 ), as measured by the distance d between the crucible and the ionization chamber/shut-off valve interface.
- the shut-off valve When the shut-off valve is open, the pressure profile drops along the feed tube linearly from the crucible up to the ionization chamber/shut-off valve interface. When the valve is closed, no pressure gradient exists. As explained above, in this second embodiment, no mass flow controller is used.
- the temperature within crucible cavity 66 is thermally isolated, thereby providing a thermally stable environment unaffected by the temperature in the ionization chamber 58.
- the temperature of the crucible cavity 66 in which the process of decaborane sublimation occurs, may be controlled independently of the operating temperature of the ionization chamber 58 to a high degree of accuracy (within 1° C). Also, by maintaining a constant temperature of the vaporized decaborane during transport to the ionization chamber 58 via the heated feed tube 62, no condensation or thermal decomposition of the vapor occurs.
- the temperature controller 56 controls the temperature of the crucible 52 and the feed tube 62 by controlling the operation of the heating element 80 for the heating medium reservoir 70.
- Thermocouple 92 senses the temperature of the reservoir 70 and sends temperature feedback signal 93 to the temperature controller 56.
- the temperature controller responds to this input feedback signal in a known manner by outputting control signal 94 to the reservoir heating element 80. In this manner, a uniform temperature is provided for all surfaces to which the solid phase decaborane and vaporized decaborane are exposed, up to the location of the ionization chamber.
- the ion source 50 can be controlled to an operating temperature of on the order of 20° C to 150° C (+/- 1° C). Precise temperature control is more critical at the crucible, as compared to the end of the feed tube nearest the ionization chamber, to control the pressure of the crucible and thus the vapor flow rates out of the crucible.
- an entire molecule (ten boron atoms) is implanted into the workpiece.
- the molecule breaks up at the workpiece surface such that the energy of each boron atom is roughly one-tenth the energy of the ten-boron cluster (in the case of B 10 H 14 ).
- the beam can be transported at ten times the desired boron implantation energy, enabling very shallow implants without significant beam transmission losses.
- each unit of current delivers ten times the dose to the workpiece.
- workpiece charging problems are much less severe for a given dose rate.
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Description
- The present invention relates generally to ion sources for ion implantation equipment and more specifically to a decaborane vaporizer for an ion source.
- Ion implantation has become a standard accepted technology of industry to dope workpieces such as silicon wafers or glass substrates with impurities in the large scale manufacture of items such as integrated circuits and flat panel displays. Conventional ion implantation systems include an ion source that ionizes a desired dopant element which is then accelerated to form an ion beam of prescribed energy. The ion beam is directed at the surface of the workpiece to implant the workpiece with the dopant element. The energetic ions of the ion beam penetrate the surface of the workpiece so that they are embedded into the crystalline lattice of the workpiece material to form a region of desired conductivity. The implantation process is typically performed in a high vacuum process chamber which prevents dispersion of the ion beam by collisions with residual gas molecules and which minimizes the risk of contamination of the workpiece by airborne particulates.
- Ion dose and energy are the two most important variables used to define an implant step. Ion dose relates to the concentration of implanted ions for a given semiconductor material. Typically, high current implanters (generally greater than 10 milliamps (mA) ion beam current are used for high dose implants, while medium current implanters (generally capable up to about 1 mA beam current) are used for lower dose applications. Ion energy is used to control junction depth in semiconductor devices. The energy levels of the ions which make up the ion beam determine the degree of depth of the implanted ions. High energy processes such as those used to form retrograde wells in semiconductor devices require implants of up to a few million electron volts (MeV), while shallow junctions may only demand energies below 1 thousand electron volts (KeV).
- The continuing trend to smaller and smaller semiconductor devices requires implanters with ion sources that serve to deliver high beam currents at low energies. The high beam current provides the necessary dosage levels, while the low energy levels permit shallow implants. Source/drain junctions in complementary metal-oxide-semiconductor (CMOS) devices, for example, require such a high current, low energy application.
- A
typical ion source 10 for obtaining atoms for ionization from a solid form is shown inFigure 1 . The ion source comprises a pair ofvaporizers ionization chamber 16. Each of the vaporizers is provided with acrucible 18 in which a solid element or compound is placed and which is heated by aheater coil 20 to vaporize the solid source material. Heater coil leads 22 conduct electrical current to the heater coils andthermocouples 24 provide a temperature feedback mechanism.Air cooling conduit 26 and water-cooling conduit 28 is also provided. - Vaporized source material passes through a
nozzle 30, which is secured to thecrucible 18 by agraphite nozzle retainer 32, and through vaporizer inlets 34 to the interior of theionization chamber 16. Alternatively, compressed gas may be fed directly into the ionization chamber by means of agas inlet 36 via agas line 38. In either case, the gaseous/vaporized source material is ionized by anarc chamber filament 40 that is heated to thermionically emit electrons. - Conventional ion sources utilize an ionizable dopant gas which is obtained either directly from a source of a compressed gas or indirectly from a solid from which has been vaporized. Typical source elements are boron (B), phosphorous (P), gallium (Ga), indium (In), antimony (Sb), and arsenic (As). Most of these source elements are provided in solid form, except boron, which is typically provided in gaseous form, e.g., as boron trifluoride (BF3).
- In the case of implanting boron trifluoride, a plasma is created which includes singly charged boron (B+) ions. Creating and implanting a sufficiently high dose of boron into a substrate is usually not problematic if the energy level of the beam is not a factor. In low energy applications, however, the beam of boron ions will suffer from a condition known as "beam blow-up", which refers to the tendency for like-charged ions within the ion beam to mutually repel each other. Such mutual repulsion causes the ion beam to expand in diameter during transport, resulting in vignetting of the beam by multiple apertures in the beamline. This severely reduces beam transmission as beam energy is reduced.
- Decaborane (B10H14) is a compound which has not heretofore been used as a source of boron for boron implants. The vaporization of decaborane cannot be suitably controlled in the crucible of the ion source of
Figure 1 because decaborane in the solid state has a melting point of about 100° C. Heat generated within thearc chamber 16 will cause the crucible to achieve such a temperature even if the vaporizer heaters are not energized, because the proximity of the solid phase material to the arc chamber results in radiative heating of the material. (The vaporization of phosphorous, on the other hand, can be accurately controlled in the crucible of the ion source ofFigure 1 because it has a melting point of about 400° C.) This prevents the establishment of a moderate temperature (less than 200° C) thermal equilibrium within the local environment of the source material. - Decaborane, however, is an excellent source of feed material for boron implants because each decaborane molecule (B10H14) when vaporized and ionized can provide a molecular ion comprised of ten boron atoms. Such a source is especially suitable for high dose/low energy implant processes used to create shallow junctions, because a molecular decaborane ion beam can implant ten times the boron dose per unit of current as can a monotomic boron ion beam. In addition, because the decaborane molecule breaks up into individual boron atoms of roughly one-tenth the original beam energy at the workpiece surface, the beam can be transported at ten times the energy of a dose-equivalent monotomic boron ion beam. This feature enables the molecular ion beam to avoid the transmission losses which are typically brought about by low energy ion beam transport.
- Accordingly, it is an object of the present invention to provide an ion source for an ion implanter which can accurately and controllably vaporize decaborane, or other suitable implant material, to overcome the deficiencies of known ion sources.
-
US 3,700,892 A discloses an ion source provided with a vaporising oven, which is connected by feed tubes to an ionising chamber. A plurality of tubes, through which hot water of constant temperature is circulated, is mounted to the exterior of the vaporising oven, such as to vaporise the mercury contained therein. - According to the present invention there is provided a vaporizer for an ion source, comprising: (i) a sublimator having a cavity for receiving a source material to be sublimated and for sublimating the source material; (ii) a feed tube for connecting said sublimator to a remotely located ionization chamber in which sublimated source material may be ionized; (iii) a heating medium for heating said sublimator and said feed tube; and (iv) a control mechanism for controlling the temperature of said heating medium.
- Because the sublimator is located remotely from the ionization chamber, the temperature within the sublimator is thermally isolated, providing a thermally stable environment unaffected by the temperature in the ionization chamber. In this manner, the temperature of the sublimator, in which the process of decaborane sublimation occurs, may be controlled independently of the operating temperature of the ionization chamber to a high degree of accuracy (within 1°C).
- In order that the present invention be more readily understood, specific embodiments thereof will now be described.
-
-
Figure 1 is a perspective, partially cross sectional view of a conventional ion source for an ion implanter; -
Figure 2 is a schematic, partially cross sectional view of a first embodiment of an ion source for an ion implanter constructed according to the principles of the present invention; -
Figure 3 is a cross sectional view of a connecting tube of an alternative embodiment of the ion source ofFigure 2 , taken along the lines 3-3; -
Figure 4A is a graphical representation of the pressure gradient that exists along the length of a first embodiment of the connecting tube, as shown inFigure 2 ; and -
Figure 4B is a graphical representation of the pressure gradient that exists along the length of a second embodiment of the connecting tube, as shown inFigure 3 . - Referring now to
Figure 2 of the drawings, a first embodiment of an ionimplanter ion source 50 which has been constructed according to the present invention is shown. Theion source 50 comprises a non-reactive, thermally conductive sublimator orcrucible 52, aheating medium reservoir 54, a heating medium pump 55, atemperature controller 56, anionization chamber 58, and (in this first embodiment) amass flow controller 60. Thecrucible 52 is located remotely from theionization chamber 58 and connected thereto by afeed tube 62, constructed of quartz or stainless steel. In this first embodiment, thefeed tube 62 is surrounded by an outer single-chamberannular sheath 90 along substantially the entire length thereof. - The
crucible 52 provides acontainer 64 enclosing acavity 66 for containing asource material 68. The container is preferably made of a suitable non-reactive (inert) material such as stainless steel, graphite, quartz or boron nitride and which is capable of holding a sufficient amount of source material such as decaborane (B10H14). Although the invention is described further below only in terms of decaborane, it is contemplated that the principles of the present invention may be used for other molecular solid source materials, such as indium chloride (InCl), which are characterized as having both low melting points (i.e. sublimation temperatures of between 20° C and 150° C) and significant vapor pressures (i.e. 1.3 Pa and 1.3 x 105 Pa (between 10-2 Torr and 103 Torr)). - The decaborane is vaporized through a process of sublimation by heating the walls of the
container 64 with aheating medium 70 contained inreservoir 54. The process of sublimation comprises the transformation of the decaborane from a solid state to a vapor state without entering an intermediate liquid state. Awire mesh 71 prevents non-vaporized decaborane from escaping thecrucible 52. Completely vaporized decaborane exits thecrucible 52 viafeed tube 62 and entersmass flow controller 60, which controls the flow of vapor, and thus meters the amount of vaporized decaborane which is provided to the ionization chamber, as is known in the art. - The
ionization chamber 58 ionizes the vaporized decaborane that is provided by themass flow controller 60 or, alternatively, a gas inlet feed 72 from a compressed gas source. An RF exciter 74 such as an antenna is energized to emit an RF signal which ionizes the vaporized decaborane molecules to create a plasma. Amagnetic filter 76 filters the plasma, and extractor electrodes (not shown) located outside an exit aperture 78 of theionization chamber 58 extract the plasma through the aperture as is known in the art. This extracted plasma forms an ion beam that is conditioned and directed toward a target workpiece. An example of such anionization chamber 58 is shown inU.S. Patent No. 5,661,308 , assigned to the assignee of the present invention. - The
inventive ion source 50 provides a control mechanism for controlling the operating temperature of thecrucible 52, as well as that of thefeed tube 62 through which vaporized decaborane passes on its way to theionization chamber 58. Theheating medium 70 is heated within thereservoir 54 by a resistive orsimilar heating element 80. The temperature control means comprises atemperature controller 56 which obtains as an input temperature feedback from thereservoir 54 viathermocouple 92, and outputs a control signal toheating element 80, as further described below, so that theheating medium 70 in the reservoir is heated to a suitable temperature. - The
heating medium 70 comprises mineral oil or other suitable medium (e.g. water) that provides a high heat capacity. The oil is heated to a temperature within the 20° C to 150° C range by theheating element 80 and circulated by pump 55 around thecrucible 52 and thefeed tube 62 throughsheath 90. The pump 55 is provided with an inlet and anoutlet reservoir 54 is similarly provided with aninlet 86 and anoutlet 88, respectively. The flow pattern of the heating medium about thecrucible 52 and thefeed tube 62, although shown in a unidirectional clockwise pattern inFigure 2 , may be any pattern that provides reasonable circulation of the medium about thecrucible 52 and thefeed tube 62. - Alternatively, in a second embodiment of the invention, the
feed tube 62 is provided in the form of a capillary tube andsheath 90 is provided in the form of a coaxial dual-chamber sheath, comprising aninner sheath 90A surrounded by an outer sheath 90B (seeFigure 3 ). The heating medium may be pumped into theinner sheath 90A (located adjacent the capillary tube 62) and pumped out of the outer sheath 90B (located radially outward from theinner sheath 90A). In this second embodiment, themass flow controller 60 is replaced with a heated shut-off valve (not shown) located at the feed tube/ionization chamber interface, and mass flow is increased or decreased by directly changing the temperature of thereservoir 54. The arrangement of the coaxial sheath surrounding the capillary tube has the advantage of providing an insulating sheath surrounding the inner diameter of the capillary tube, thereby resulting in a more uniform temperature. - Referring back to
Figure 2 , thecrucible cavity 66 is pressurized in order to facilitate material transfer of the vaporized (sublimated) decaborane from thecrucible 52 to theionization chamber 58 through thefeed tube 62. As the pressure withincavity 66 is raised, the rate of material transfer correspondingly increases. The ionization chamber operates at a near vacuum (about 1 millitorr or 133 milli-Pascal), and thus, a pressure gradient exists along the entire length of thefeed tube 62, from thecrucible 52 to theionization chamber 58. The pressure of the crucible is typically on the order of 133 Pa (1 torr). -
Figure 4A shows a graphical representation of this pressure gradient along the length of thefeed tube 62 for the first embodiment of the invention (Figure 2 ), as measured by the distance d between the crucible and the ionization chamber. The pressure profile drops along the feed tube linearly up to themass flow controller 60, then is modified by the mass flow controller, then continues to drop linearly for the remainder of the distance d up to theionization chamber 58. In the preferred embodiment, the distance d is approximately up to about 60cm (24 inches). Such a distance, however, is provided merely for exemplary purposes. The invention covers a sublimator/vaporizer remotely located from an ionization chamber, and is not limited to any particular distance representing this remote location. -
Figure 4B shows a graphical representation of this pressure gradient along the length of thefeed tube 62 for the second embodiment of the invention (Figure 3 ), as measured by the distance d between the crucible and the ionization chamber/shut-off valve interface. When the shut-off valve is open, the pressure profile drops along the feed tube linearly from the crucible up to the ionization chamber/shut-off valve interface. When the valve is closed, no pressure gradient exists. As explained above, in this second embodiment, no mass flow controller is used. - By locating the
crucible 52 remotely from theionization chamber 58, the temperature withincrucible cavity 66 is thermally isolated, thereby providing a thermally stable environment unaffected by the temperature in theionization chamber 58. As such, the temperature of thecrucible cavity 66, in which the process of decaborane sublimation occurs, may be controlled independently of the operating temperature of theionization chamber 58 to a high degree of accuracy (within 1° C). Also, by maintaining a constant temperature of the vaporized decaborane during transport to theionization chamber 58 via theheated feed tube 62, no condensation or thermal decomposition of the vapor occurs. - The
temperature controller 56 controls the temperature of thecrucible 52 and thefeed tube 62 by controlling the operation of theheating element 80 for theheating medium reservoir 70.Thermocouple 92 senses the temperature of thereservoir 70 and sendstemperature feedback signal 93 to thetemperature controller 56. The temperature controller responds to this input feedback signal in a known manner by outputting control signal 94 to thereservoir heating element 80. In this manner, a uniform temperature is provided for all surfaces to which the solid phase decaborane and vaporized decaborane are exposed, up to the location of the ionization chamber. - By controlling the circulation of the heating medium in the system (via pump 55) and the temperature of the heating medium (via heating element 80), the
ion source 50 can be controlled to an operating temperature of on the order of 20° C to 150° C (+/- 1° C). Precise temperature control is more critical at the crucible, as compared to the end of the feed tube nearest the ionization chamber, to control the pressure of the crucible and thus the vapor flow rates out of the crucible. - Using either embodiment of the
source 50 ofFigure 2 in an ion implanter, an entire molecule (ten boron atoms) is implanted into the workpiece. The molecule breaks up at the workpiece surface such that the energy of each boron atom is roughly one-tenth the energy of the ten-boron cluster (in the case of B10H14). Thus, the beam can be transported at ten times the desired boron implantation energy, enabling very shallow implants without significant beam transmission losses. In addition, at a given beam current, each unit of current delivers ten times the dose to the workpiece. Finally, because the charge per unit dose is one-tenth that of a monatomic beam implant, workpiece charging problems are much less severe for a given dose rate. - Accordingly, a preferred embodiment of an improved ion source for an ion implanter has been described. With the foregoing description in mind, however, it is understood that this description is made only by way of example, that the invention is not limited to the particular embodiments described herein, and that various rearrangements, modifications, and substitutions may be implemented with respect to the foregoing description without departing from the scope of the invention as defined by the following claims.
Claims (12)
- A vapourizer for an ion source (50), comprising:(i) a sublimator (52) having a cavity (66) for receiving a source material (68) to be sublimated and for sublimating the source material;(ii) a feed tube (62) for connecting said sublimator (52) to a remotely located ionization chamber (58) in which sublimated source material may be ionized;(iii) a heating medium (70) for heating said sublimator (52) and said feed tube (62); and(iv) a control mechanism (55, 56, 80, 92) for controlling the temperature of said heating medium (70).
- The vapourizer (50) of claim 1, wherein said control mechanism comprises a heating element (80) for heating the heating medium (70), a pump (55) for circulating said heating medium, at least one thermocouple (92) for providing temperature feedback from said heating medium (70), and a controller (56) responsive to said temperature feedback to output a first control signal (94) to said heating element.
- The vapourizer (50) of claim 1, wherein said heating medium (70) is water.
- The vapourizer (50) of claim 1, wherein said heating medium (70) is mineral oil.
- The vapourizer (50) of claim 1, wherein said source material is a molecular solid having a vapour pressure of between 1.3 Pa (10-2 Torr) and 1.3 x 105 Pa (103 Torr) and a sublimation temperature of between 20° C and 150° C.
- The vapourizer (50) of claim 1, wherein said source material is decaborane.
- The vapourizer (50) of claim 1, wherein said feed tube (62) is comprised of stainless steel.
- The vapourizer (50) of claim 1, wherein said feed tube (62) is comprised of quartz.
- The vapourizer (50) of claim 1, wherein said feed tube (62) is surrounded by a sheath (90) through which said heating medium (70) is circulated.
- The vapourizer (50) of claim 9, wherein said sheath (90) comprises an inner sheath (90A) surrounded by an outer sheath (90B).
- An ion source (50) for an ion implanter, comprising:a vapourizer according to any of claims 1 to 10; andan ionization chamber (58) for ionizing the sublimated source material, said ionization chamber located remotely from said sublimator and being connected to the vapourizer by said feed tube (62).
- The ion source (50) of claim 11, wherein said ionization chamber (58) includes an inlet (72) for receiving gas from a compressed gas source.
Applications Claiming Priority (2)
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US70685 | 1998-04-30 | ||
US09/070,685 US6107634A (en) | 1998-04-30 | 1998-04-30 | Decaborane vaporizer |
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EP0954008A2 EP0954008A2 (en) | 1999-11-03 |
EP0954008A3 EP0954008A3 (en) | 2002-07-10 |
EP0954008B1 true EP0954008B1 (en) | 2009-02-25 |
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EP99302874A Expired - Lifetime EP0954008B1 (en) | 1998-04-30 | 1999-04-13 | Decaborane vaporizer for ion source |
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US (1) | US6107634A (en) |
EP (1) | EP0954008B1 (en) |
JP (1) | JP4478841B2 (en) |
KR (1) | KR100419586B1 (en) |
CN (1) | CN1227709C (en) |
DE (1) | DE69940449D1 (en) |
TW (1) | TW424251B (en) |
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1998
- 1998-04-30 US US09/070,685 patent/US6107634A/en not_active Expired - Lifetime
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- 1999-04-06 TW TW088105424A patent/TW424251B/en not_active IP Right Cessation
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- 1999-04-20 JP JP11212499A patent/JP4478841B2/en not_active Expired - Fee Related
- 1999-04-29 KR KR10-1999-0015395A patent/KR100419586B1/en not_active IP Right Cessation
- 1999-04-30 CN CNB991053397A patent/CN1227709C/en not_active Expired - Fee Related
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US7875125B2 (en) | 2007-09-21 | 2011-01-25 | Semequip, Inc. | Method for extending equipment uptime in ion implantation |
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JP4478841B2 (en) | 2010-06-09 |
US6107634A (en) | 2000-08-22 |
JP2000030620A (en) | 2000-01-28 |
DE69940449D1 (en) | 2009-04-09 |
EP0954008A3 (en) | 2002-07-10 |
KR19990083598A (en) | 1999-11-25 |
CN1227709C (en) | 2005-11-16 |
KR100419586B1 (en) | 2004-02-19 |
TW424251B (en) | 2001-03-01 |
EP0954008A2 (en) | 1999-11-03 |
CN1236181A (en) | 1999-11-24 |
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