EP0931624A3 - Oberflächenpoliervorrichtung mit Oberseiteplatte Anhebmechanismus - Google Patents
Oberflächenpoliervorrichtung mit Oberseiteplatte Anhebmechanismus Download PDFInfo
- Publication number
- EP0931624A3 EP0931624A3 EP99300410A EP99300410A EP0931624A3 EP 0931624 A3 EP0931624 A3 EP 0931624A3 EP 99300410 A EP99300410 A EP 99300410A EP 99300410 A EP99300410 A EP 99300410A EP 0931624 A3 EP0931624 A3 EP 0931624A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- surface plate
- elevating mechanism
- polishing apparatus
- plate elevating
- stop
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
- B24B37/345—Feeding, loading or unloading work specially adapted to lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/10—Single-purpose machines or devices
- B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
- B24B7/17—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings for simultaneously grinding opposite and parallel end faces, e.g. double disc grinders
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2509498A JPH11207608A (ja) | 1998-01-22 | 1998-01-22 | 平面研磨装置における上定盤昇降機構 |
JP2509498 | 1998-01-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0931624A2 EP0931624A2 (de) | 1999-07-28 |
EP0931624A3 true EP0931624A3 (de) | 2000-11-08 |
Family
ID=12156351
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP99300410A Withdrawn EP0931624A3 (de) | 1998-01-22 | 1999-01-20 | Oberflächenpoliervorrichtung mit Oberseiteplatte Anhebmechanismus |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0931624A3 (de) |
JP (1) | JPH11207608A (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106406032A (zh) * | 2015-07-29 | 2017-02-15 | 上海微电子装备有限公司 | 一种重载基板台的六自由度调整装置 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101572103B1 (ko) | 2014-09-11 | 2015-12-04 | 주식회사 엘지실트론 | 웨이퍼 연마 장치 |
CN111037385A (zh) * | 2019-12-26 | 2020-04-21 | 涡阳县幸福门业有限公司 | 一种木门砂光吹灰装置 |
CN114888717A (zh) * | 2022-04-17 | 2022-08-12 | 北京特思迪设备制造有限公司 | 一种研磨机外环的升降支撑装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2603041A (en) * | 1945-09-27 | 1952-07-15 | Alfred J Bowen | Surface grinder |
US5036625A (en) * | 1988-12-07 | 1991-08-06 | Anatoly Gosis | Lapping plate for a lapping and polishing machine |
US5317837A (en) * | 1988-04-07 | 1994-06-07 | Staehli Arthur W | Device on a double disk lapping machine |
-
1998
- 1998-01-22 JP JP2509498A patent/JPH11207608A/ja active Pending
-
1999
- 1999-01-20 EP EP99300410A patent/EP0931624A3/de not_active Withdrawn
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2603041A (en) * | 1945-09-27 | 1952-07-15 | Alfred J Bowen | Surface grinder |
US5317837A (en) * | 1988-04-07 | 1994-06-07 | Staehli Arthur W | Device on a double disk lapping machine |
US5036625A (en) * | 1988-12-07 | 1991-08-06 | Anatoly Gosis | Lapping plate for a lapping and polishing machine |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106406032A (zh) * | 2015-07-29 | 2017-02-15 | 上海微电子装备有限公司 | 一种重载基板台的六自由度调整装置 |
CN106406032B (zh) * | 2015-07-29 | 2018-03-30 | 上海微电子装备(集团)股份有限公司 | 一种重载基板台的六自由度调整装置 |
Also Published As
Publication number | Publication date |
---|---|
EP0931624A2 (de) | 1999-07-28 |
JPH11207608A (ja) | 1999-08-03 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 19990201 |
|
AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): DE FR GB NL |
|
AX | Request for extension of the european patent |
Free format text: AL;LT;LV;MK;RO;SI |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: CHUJO,KICHIHIRO Inventor name: FURUSAWA, SHIRO |
|
PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: CHUJO, KICHIHIRO Inventor name: FURUSAWA, SHIRO |
|
AK | Designated contracting states |
Kind code of ref document: A3 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE |
|
AX | Request for extension of the european patent |
Free format text: AL;LT;LV;MK;RO;SI |
|
RIC1 | Information provided on ipc code assigned before grant |
Free format text: 7B 24B 37/04 A, 7B 24B 47/20 B, 7B 24B 27/00 B, 7B 24B 41/00 B, 7B 23Q 1/25 B, 7H 01L 21/304 - |
|
AKX | Designation fees paid |
Free format text: DE FR GB NL |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20010509 |