EP0924737A1 - Array of diamond and hydrogen containing electrodes - Google Patents
Array of diamond and hydrogen containing electrodes Download PDFInfo
- Publication number
- EP0924737A1 EP0924737A1 EP98204254A EP98204254A EP0924737A1 EP 0924737 A1 EP0924737 A1 EP 0924737A1 EP 98204254 A EP98204254 A EP 98204254A EP 98204254 A EP98204254 A EP 98204254A EP 0924737 A1 EP0924737 A1 EP 0924737A1
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- diamond
- hydrogen
- electron
- coating
- containing material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/308—Semiconductor cathodes, e.g. cathodes with PN junction layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30446—Field emission cathodes characterised by the emitter material
- H01J2201/30453—Carbon types
- H01J2201/30457—Diamond
Definitions
- the invention relates to an electron-emitting component with an arrangement (Array) of one or more electron-emitting electrodes that form a Have substrate and a coating with a diamond-containing material.
- a such component is for use in screens, for light generation, in Electron microscopes and for other areas of application in which electron emitting Electrodes are used.
- Diamond-containing material are used as electron-emitting cover layers of electrodes very suitable because diamond has a negative electron affinity and therefore emits electrons even at low field strengths.
- Diamond is chemically inert, hard and changes under the manufacturing conditions not for screens. Despite these advantages of diamond as an electron emitter
- electrode material As such, diamond is electrical non-conductive. To be able to use it as a material for pixel electrodes, you can increase its conductivity by doping or you can use it in a Use material combination with another electrically conductive material.
- a field emission cathode which consists of a layer contains a conductive material and a layer of an amorphous diamond film, which is deposited over the conductive material to cover emission areas form, and in which the amorphous diamond as a material with lower effective Work function works.
- Each emission area contains at least two sub-regions with different electron affinity.
- the object of the present invention is to use an electron-emitting component an array of one or more field-emitting electrodes that have a substrate and a coating with a diamond-containing material, to provide its electron emission evenly over the entire Electrode area is distributed and the work function of the electrons is low and is constant.
- the object is achieved by an electron-emitting component with an arrangement (array) of one or more electron-emitting Electrodes that have a substrate and a coating containing a diamond Have material, the coating with a diamond-containing material has hydrogen-saturated top layer.
- Such a component emits electrons at lower voltages than components with coatings made of diamond not saturated with hydrogen. At a voltage of less than 10V / ⁇ m, emission currents of 1 nA / 0.25 cm 2 or 4 nA / cm 2 are obtained .
- the component according to the invention is therefore suitable, for example, for flat screens which require a current density of 0.1A / mm 2 at a voltage below 25 V.
- the coating on the substrate is printed.
- the coating can be done by standard printing processes, e.g. Inkjet printing, cliché printing etc. are produced and distinguished by a very good liability.
- the diamond-containing material contains diamond particles contains a diameter of 5 to 100 nm. These layers are thin and even. They are resistant to wear from ion bombardment by residual gas ions, because the coating has no emitter tips or similar exhibits by ion bombardment could be removed.
- the invention also relates to a method for producing an arrangement of one or more electron-emitting electrodes, in which a substrate with a coating is provided with a diamond-containing material and their Surface with a hydrogen or carbon / hydrogen plasma up to Saturation with hydrogen to form a hydrogen-saturated top layer is treated.
- the coating is preferably coated with a diamond Material printed on a substrate. This process makes it inexpensive Large-area electrode arrays with a large number of electrodes are obtained show homogeneous behavior, i.e. where the properties of an electrode on the other hand shows no deviations.
- the method is also particularly suitable for coating temperature-sensitive substrates.
- Fig. 1 Electron-emitting component with an electrode array.
- An electron-emitting device contains a single or an array of electrodes, i.e. a variety of similar electrodes that are different from each other divided or separated, arranged in a line or a plane and thereby form a linear or planar electron source.
- a Such an array can be, for example, ⁇ 1,000 or even several hundred thousand include individual electrodes.
- the coating 1 made of a diamond-containing material with a hydrogen-saturated cover layer is arranged on the substrate.
- the component further comprises means for making electrical contact or for applying an extraction field.
- the coating with a diamond-containing material and a hydrogen-saturated one usually has a nominal one, measured by means of ellipsometry Layer thickness from 5 nm to 700 nm. The by differential light scattering or mechanical scanning of the layers measured average roughness (rms) 5 nm to 500 nm.
- the diamond-containing material has a negative electron affinity using UV photoelectron spectroscopy can be measured. It can humiliate the electrical resistance with one or more of the elements boron, nitrogen, Phosphorus, lithium, sodium or arsenic can be doped. Boron is preferred as the dopant.
- the diamond-containing material contains not only sp 3 -bonded carbon but also sp 2 -bonded carbon, which also contributes to the reduction in resistance.
- the coating is made from a fine crystalline diamond Starting material, which is produced by the known methods.
- the starting material containing diamond can e.g. using microwave plasma CVD a gas mixture of a carbon-containing gas that contains hydrogen, oxygen, Contains halogens and / or an inert gas.
- a gas mixture of a carbon-containing gas that contains hydrogen, oxygen, Contains halogens and / or an inert gas For the separation of doped nanocrystalline diamond layers becomes the gas phase for on-board doping Boron chloride or diborane, for nitrogen doping nitrogen or ammonia, for the phosphorus doping phosphorus chloride or an organophosphorus compound, for the doping with lithium and sodium the corresponding metal vapors or organic lithium or sodium compounds and arsenic chloride for arsenic doping or added an arsenic organic compound.
- a diamond one Material created by laser ablation of graphite or by explosion synthesis is obtained is suitable. It can contain diamond-containing particles with a particle size from 5 to 100 nm can be used. The use of is preferred Particles with a size of ⁇ 60 nm.
- a printing paste is made from the fine-crystalline, diamond-containing starting material manufactured.
- the diamond-containing starting powder is in an aqueous or suspended organic solvents and with binders, dispersants, Suspension stabilizers, liquefiers, pressure oils, etc. processed into a printing paste.
- the printing paste is made using a conventional printing technique, e.g. Screen printing process, flexographic process or an inkjet printing process printed on the substrate in a structured electrode pattern.
- a structured electrode pattern can consist, for example, of individual strips, a grid pattern or from individual round, rectangular or square Points on a lower electrode.
- the printed layer is dried and burned in if necessary.
- the coating prepared in this way is then subjected to a hydrogen treatment subjected until the surface of the layer is hydrogen saturated.
- This treatment can be a plasma-activated CVD method, for example and carried out in a PECVD apparatus.
- Another possibility is to carry out the hydrogen treatment in a thermal CVD process, e.g. in a hot wire CVD reactor.
- a first process step fine diamond-containing particles were combined in one organic solvents with a high vacuum resistant resin as a binder stirred a suspension.
- the suspension is on a Printed metal surface and then dried at 80 ° C. Subsequently there is a hydrogen plasma treatment in a microwave reactor at 4 kW Power, 200 mbar pressure and a temperature of 600 ° C.
- the current-voltage curve can be measured and the emission can be observed with the aid of a luminescent layer.
- the current-voltage curve of this arrangement was measured. At a voltage of 6V / ⁇ m an emission current of 4 nA / cm 2 was achieved.
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Abstract
Description
Die Erfindung betrifft ein elektronenemittierendes Bauteil mit einer Anordnung (Array) von einer oder mehreren elektronenemittierenden Elektroden, die ein Substrat und eine Beschichtung mit einem diamanthaltigen Material aufweisen. Ein derartiges Bauteil ist für eine Anwendung in Bildschirmen, zur Lichterzeugung, in Elektronenmikroskopen und für andere Anwendungsgebiete, in denen elektronenemittierende Elektroden eingesetzt werden, geeignet.The invention relates to an electron-emitting component with an arrangement (Array) of one or more electron-emitting electrodes that form a Have substrate and a coating with a diamond-containing material. A such component is for use in screens, for light generation, in Electron microscopes and for other areas of application in which electron emitting Electrodes are used.
Beispielsweise in Flachbildschirmen wird gegenüber herkömmlichen Fernsehröhren Bautiefe dadurch eingespart, daß nicht eine einzige Elektrode für die Erzeugung vieler bzw. aller Bildpunkte verantwortlich ist, sondern eine Vielzahl von Elektroden (Emittern) nur jeweils wenige Bildpunkte erzeugt. In einigem Abstand von den elektronenemittierenden Elektroden sind ein oder mehrere Gegenelektroden angeordnet; zwischen beiden wird beispielsweise ein elektrisches Feld angelegt, um die Elektronen mittels Feldemission aus den Elektroden zu emittieren. Der Elektronenstrom kann durch eine Steuervorrichtung angesteuert werden. Um eine Feldemission ohne zusätzliche Heizung der elektronenemittierenden Elektroden zu erreichen, ist es notwendig, entweder sehr hohe Feldspannungen zwischen Elektroden und Gegenelektroden anzulegen oder die Oberfläche der elektronenemittierenden Elektroden so zu gestalten, daß die Elektronen eine niedrige Austrittsarbeit haben.For example, in flat screens, compared to conventional television tubes Construction depth saved by not having a single electrode for generation many or all pixels is responsible, but a large number of electrodes (Emitters) only generated a few pixels. At some distance from the electron-emitting electrodes one or more counter electrodes are arranged; an electric field is applied between the two, for example, around the To emit electrons from the electrodes by means of field emission. The electron current can be controlled by a control device. A field emission It can be achieved without additional heating of the electron-emitting electrodes necessary, either very high field voltages between electrodes and counter electrodes apply or the surface of the electron-emitting electrodes so to make the electrons have a low work function.
Schichten aus diamanthaltigem Material sind als elektronenemittierende Deckschichten von Elektroden sehr gut geeignet, weil Diamant eine negative Elektronenaffinität hat und deshalb bereits bei niedrigen Feldstärken Elektronen emittiert. Außerdem ist Diamant chemisch inert, hart und verändert sich unter den Herstellungsbedingungen für Bildschirme nicht. Trotz dieser Vorteile des Diamant als elektronenemittierendes Elektrodenmaterial gibt es verschiedene Probleme. Diamant ist als solcher elektrisch nichtleitend. Um ihn als Material für Bildpunktelektroden verwenden zu können, kann man seine Leitfähigkeit durch Dotierung erhöhen oder man kann ihn in einer Materialkombination mit einem anderen elektrisch leitenden Material verwenden.Layers of diamond-containing material are used as electron-emitting cover layers of electrodes very suitable because diamond has a negative electron affinity and therefore emits electrons even at low field strengths. Besides, is Diamond is chemically inert, hard and changes under the manufacturing conditions not for screens. Despite these advantages of diamond as an electron emitter There are several problems with electrode material. As such, diamond is electrical non-conductive. To be able to use it as a material for pixel electrodes, you can increase its conductivity by doping or you can use it in a Use material combination with another electrically conductive material.
Aus der WO 94/28571 ist eine Feldemissionskathode bekannt, die eine Schicht aus einem leitfähigen Material enthält und eine Schicht aus einem amorphen Diamant-film, die über dem leitfähigen Material abgeschieden ist, um Emissionsgebiete zu bilden, und in der der amorphe Diamant als ein Material mit niedriger effektiver Austrittsarbeit funktioniert. Jedes Emissionsgebiet enthält wenigstens zwei Unter-regionen mit unterschiedlicher Elektronenaffinität. Dadurch sind jedoch die elektrischen Eigenschaften der Kathode gemäß WO 94/28571 diskontinuierlich.From WO 94/28571 a field emission cathode is known which consists of a layer contains a conductive material and a layer of an amorphous diamond film, which is deposited over the conductive material to cover emission areas form, and in which the amorphous diamond as a material with lower effective Work function works. Each emission area contains at least two sub-regions with different electron affinity. However, this makes the electrical Properties of the cathode according to WO 94/28571 discontinuous.
Aufgabe der vorliegenden Erfindung ist es, ein elektronenemittierendes Bauteil mit einer Anordnung (Array) von einer oder mehreren feldemittierenden Elektroden, die ein Substrat und eine Beschichtung mit einem diamanthaltigem Material aufweisen, zur Verfügung zu stellen, dessen Elektronenemission gleichmäßig über die gesamte Elektrodenfläche verteilt ist und bei dem die Austrittsarbeit der Elektronen niedrig und konstant ist.The object of the present invention is to use an electron-emitting component an array of one or more field-emitting electrodes that have a substrate and a coating with a diamond-containing material, to provide its electron emission evenly over the entire Electrode area is distributed and the work function of the electrons is low and is constant.
Erfindungsgemäß wird die Aufgabe gelöst durch ein elektronenemittierendes Bauteil mit einer Anordnung (Array) von einer oder mehreren elektronenemittierenden Elektroden, die ein Substrat und eine Beschichtung mit einem diamanthaltigen Material aufweisen, wobei die Beschichtung mit einem diamanthaltigen Material eine wasserstoffgesättigte Deckschicht hat.According to the invention, the object is achieved by an electron-emitting component with an arrangement (array) of one or more electron-emitting Electrodes that have a substrate and a coating containing a diamond Have material, the coating with a diamond-containing material has hydrogen-saturated top layer.
Ein derartiges Bauteil emittiert Elektronen bei niedrigeren Spannungen als Bauteile mit Beschichtungen aus nicht mit Wasserstoff abgesättigtem Diamant. Bereits bei einer Spannung von weniger als 10V/µm erhält man Emissionsströme von 1 nA/0.25 cm2 bzw. 4 nA/cm2. Das erfindungsgemäße Bauteil ist deshalb beispielsweise für Flachbildschirme geeignet, die eine Stromdichte von 0.1A/mm2 bei einer Spannung unterhalb von 25 V erfordern.Such a component emits electrons at lower voltages than components with coatings made of diamond not saturated with hydrogen. At a voltage of less than 10V / µm, emission currents of 1 nA / 0.25 cm 2 or 4 nA / cm 2 are obtained . The component according to the invention is therefore suitable, for example, for flat screens which require a current density of 0.1A / mm 2 at a voltage below 25 V.
Im Rahmen der vorliegenden Erfindung ist es bevorzugt, daß die Beschichtung auf das Substrat aufgedruckt ist. Die Beschichtung kann durch Standard-Druckverfahren, z.B. Tintenstrahldrucken, Klischeedrucken etc. hergestellt werden und zeichnet sich durch eine sehr gute Haftung aus.In the context of the present invention, it is preferred that the coating on the substrate is printed. The coating can be done by standard printing processes, e.g. Inkjet printing, cliché printing etc. are produced and distinguished by a very good liability.
Es ist weiterhin bevorzugt, daß das diamanthaltige Material Diamantpartikel mit einem Durchmesser von 5 bis 100 nm enthält. Diese Schichten sind dünn und eben. Sie sind resistent gegen Verschleiß durch Ionenbombardment durch Restgasionen, weil die Beschichtung keine Emitterspitzen o.ä. aufweist, die durch das Ionenbombardment abgetragen werden könnten.It is further preferred that the diamond-containing material contains diamond particles contains a diameter of 5 to 100 nm. These layers are thin and even. They are resistant to wear from ion bombardment by residual gas ions, because the coating has no emitter tips or similar exhibits by ion bombardment could be removed.
Die Erfindung betrifft auch ein Verfahren zur Herstellung einer Anordnung von einer oder mehreren elektronenemittierenden Elektroden, bei dem ein Substrat mit einer Beschichtung mit einem diamanthaltigen Material versehen wird und deren Oberfläche mit einem Wasserstoff- oder Kohlenstoff/Wasserstoff-Plasma bis zur Sättigung mit Wasserstoff zur Bildung einer wasserstoffgesättigten Deckschicht behandelt wird. Vorzugsweise wird die Beschichtung mit einem diamanthaltigen Material auf ein Substrat aufgedruckt. Durch dieses Verfahren werden kostengünstig großflächige Elektrodenarrays mit einer Vielzahl von Elektroden erhalten, die ein homogenes Verhalten zeigen, d.h. bei denen die Eigenschaften von einer Elektrode zur anderen keine Abweichungen zeigt. Das Verfahren eignet sich auch besonders zur Beschichtung von temperaturempfindlichen Substraten.The invention also relates to a method for producing an arrangement of one or more electron-emitting electrodes, in which a substrate with a coating is provided with a diamond-containing material and their Surface with a hydrogen or carbon / hydrogen plasma up to Saturation with hydrogen to form a hydrogen-saturated top layer is treated. The coating is preferably coated with a diamond Material printed on a substrate. This process makes it inexpensive Large-area electrode arrays with a large number of electrodes are obtained show homogeneous behavior, i.e. where the properties of an electrode on the other hand shows no deviations. The method is also particularly suitable for coating temperature-sensitive substrates.
Nachfolgend wird die Erfindung anhand einer Zeichnung weiter erläutert.The invention is explained in more detail below with the aid of a drawing.
Fig. 1: Elektronenemittierendes Bauteil mit einem Elektrodenarray. Fig. 1: Electron-emitting component with an electrode array.
Ein elektronenemittierendes Bauteil nach der Erfindung enthält eine einzelne oder ein Array von Elektroden, d.h. eine Vielzahl von gleichartigen Elektroden, die voneinander abgeteilt oder getrennt, in einer Linie oder einer Ebene angeordnet sind und dadurch eine lineare beziehungsweise flächige Elektronenquelle bilden. Ein derartiges Array kann beispielsweise < 1 000 oder auch mehrere hunderttausend einzelne Elektroden umfassen.An electron-emitting device according to the invention contains a single or an array of electrodes, i.e. a variety of similar electrodes that are different from each other divided or separated, arranged in a line or a plane and thereby form a linear or planar electron source. A Such an array can be, for example, <1,000 or even several hundred thousand include individual electrodes.
Fig. 1 zeigt ein erfindungsgemäßes Bauteil mit einem Substrat 2, das vorzugsweise
aus dotierten Siliziumschichten besteht. Das Substrat kann alternativ auch aus anderen
Materialien wie III-V-Halbleiter, Molybdän oder Glas bestehen. Auf dem Substrat
ist die Beschichtung 1 aus einem diamanthaltigen Material mit einer wasserstoffgesättigten
Deckschicht angeordnet. Das Bauteil umfaßt weiterhin Mittel zur
elektrischen Kontaktierung oder zum Anlegen eines Extraktionsfeldes. 1 shows a component according to the invention with a
Die Beschichtung mit einem diamanthaltigen Material und einer wasserstoffgesättigten Deckschicht hat üblicherweise eine nominale, mittels Ellipsometrie gemessene Schichtdicke von 5 nm bis 700 nm. Die durch differentielle Lichtstreuung oder mechanisches Abtasten der Schichten gemessene mittlere Rauhigkeit (rms) beträgt 5 nm bis 500 nm.The coating with a diamond-containing material and a hydrogen-saturated one The top layer usually has a nominal one, measured by means of ellipsometry Layer thickness from 5 nm to 700 nm. The by differential light scattering or mechanical scanning of the layers measured average roughness (rms) 5 nm to 500 nm.
Das diamanthaltige Material hat eine negative Elektronenaffinität, die mittels UV-Photoelektronenspektroskopie gemessen werden kann. Es kann zur Erniedrigung des elektrischen Widerstandes mit einem oder mehreren der Elemente Bor, Stickstoff, Phosphor, Lithium, Natrium oder Arsen dotiert sein. Bor ist als Dotiermittel bevorzugt.The diamond-containing material has a negative electron affinity using UV photoelectron spectroscopy can be measured. It can humiliate the electrical resistance with one or more of the elements boron, nitrogen, Phosphorus, lithium, sodium or arsenic can be doped. Boron is preferred as the dopant.
In der wasserstoffgesättigten Deckschicht enthält das diamanthaltige Material neben sp3-gebundenem Kohlenstoff auch sp2-gebundenen Kohlenstoff, der ebenfalls zur Widerstandsreduktion beiträgt. In the hydrogen-saturated top layer, the diamond-containing material contains not only sp 3 -bonded carbon but also sp 2 -bonded carbon, which also contributes to the reduction in resistance.
Zur Herstellung der Beschichtung geht man von einem feinkristallinen diamanthaltigen Ausgangsmaterial aus, das nach den bekannten Verfahren hergestellt wird. Das diamanthaltige Ausgangsmaterial kann z.B. mittels Mikrowellen-Plasma-CVD aus einem Gasgemisch aus einem kohlenstoffhaltigen Gas, das Wasserstoff, Sauerstoff, Halogene und/oder ein Inertgas enthält, hergestellt werden. Zur Abscheidung von dotierten nanokristallinen Diamantschichten wird der Gasphase für die Bordotierung Borchlorid oder Diboran, für die Stickstoffdotierung Stickstoff oder Ammoniak, für die Phosphordotierung Phosphorchlorid oder eine phosphororganische Verbindung, für die Dotierung mit Lithium und Natrium die entsprechenden Metalldämpfe oder lithium- bzw. natriumorganische Verbindungen und für die Arsendotierung Arsenchlorid oder eine arsenorganische Verbindung zugefügt. Auch ein diamanthaltiges Material, das durch Laser-Ablation von Graphit oder durch Explosionssynthese erhalten wird, ist geeignet. Es können diamanthaltige Partikel mit einer Partikelgröße von 5 bis 100 nm verwendet werden. Bevorzugt ist die Verwendung von Partikeln mit einer Größe von < 60 nm.The coating is made from a fine crystalline diamond Starting material, which is produced by the known methods. The starting material containing diamond can e.g. using microwave plasma CVD a gas mixture of a carbon-containing gas that contains hydrogen, oxygen, Contains halogens and / or an inert gas. For the separation of doped nanocrystalline diamond layers becomes the gas phase for on-board doping Boron chloride or diborane, for nitrogen doping nitrogen or ammonia, for the phosphorus doping phosphorus chloride or an organophosphorus compound, for the doping with lithium and sodium the corresponding metal vapors or organic lithium or sodium compounds and arsenic chloride for arsenic doping or added an arsenic organic compound. Also a diamond one Material created by laser ablation of graphite or by explosion synthesis is obtained is suitable. It can contain diamond-containing particles with a particle size from 5 to 100 nm can be used. The use of is preferred Particles with a size of <60 nm.
Aus dem feinkristallinen diamanthaltigen Ausgangsmaterial wird eine Druckpaste hergestellt. Dazu wird das diamanthaltige Ausgangspulver in einem wässerigen oder organischen Lösungsmittel suspendiert und mit Bindemittel, Dispergiermittel, Suspensionsstabilisatoren, Verflüssiger, Druckölen u.ä. zu einer Druckpaste verarbeitet. Die Druckpaste wird mit einer konventionellen Drucktechnik, z.B. Siebdruckverfahren, flexographischem Verfahren oder einem Tintenstrahldruckverfahren in einem strukturierten Elektrodenmuster auf das Substrat aufgedruckt. Ein derartiges strukturiertes Elektrodenmuster kann beispielsweise aus einzelnen Streifen, einem Gittermuster oder aus einzelnen runden, rechteckigen oder quadratischen Punkten auf einer Unterelektrode bestehen. Die gedruckte Schicht wird getrocknet und gegebenenfalls eingebrannt.A printing paste is made from the fine-crystalline, diamond-containing starting material manufactured. For this, the diamond-containing starting powder is in an aqueous or suspended organic solvents and with binders, dispersants, Suspension stabilizers, liquefiers, pressure oils, etc. processed into a printing paste. The printing paste is made using a conventional printing technique, e.g. Screen printing process, flexographic process or an inkjet printing process printed on the substrate in a structured electrode pattern. Such a thing structured electrode pattern can consist, for example, of individual strips, a grid pattern or from individual round, rectangular or square Points on a lower electrode. The printed layer is dried and burned in if necessary.
Anschließend wird die so vorbereitete Beschichtung einer Wasserstoff-Behandlung unterzogen, bis die Oberfläche der Schicht wasserstoffgesättigt ist. The coating prepared in this way is then subjected to a hydrogen treatment subjected until the surface of the layer is hydrogen saturated.
Diese Behandlung kann beispielsweise ein plasmaaktiviertes CVD-Verfahren sein und in einer PECVD-Apparatur durchgeführt werden. Eine andere Möglichkeit ist es, die Wasserstoffbehandlung in einem thermischen CVD-Prozeß durchzuführen, z.B. in einem Heißdraht-CVD-Reaktor.This treatment can be a plasma-activated CVD method, for example and carried out in a PECVD apparatus. Another possibility is to carry out the hydrogen treatment in a thermal CVD process, e.g. in a hot wire CVD reactor.
In einem ersten Verfahrensschritt wurden feine diamanthaltige Partikel in einem organischen Lösungsmittel mit einem hochvakuumfesten Harz als Bindemittel zu einer Suspension verrührt. In einem zweiten Schritt wird die Suspension auf eine Metalloberfläche gedruckt und anschließend bei 80°C getrocknet. Anschließend erfolgt eine Wasserstoff-Plasmabehandlung in einem Mikrowellenreaktor bei 4 kW Leistung, 200 mbar Druck und einer Temperatur von 600°C.In a first process step, fine diamond-containing particles were combined in one organic solvents with a high vacuum resistant resin as a binder stirred a suspension. In a second step, the suspension is on a Printed metal surface and then dried at 80 ° C. Subsequently there is a hydrogen plasma treatment in a microwave reactor at 4 kW Power, 200 mbar pressure and a temperature of 600 ° C.
In einer Diodenanordnung, in der das so hergestellte Elektrodenarray als Kathode
geschaltet wird, kann die Strom-Spannungskurve gemessen und die Emission mit
Hilfe einer Lumineszenzschicht flächig beobachtet werden.
Die Strom-Spannungskurve dieser Anordnung wurde gemessen. Bei einer Spannung
von 6V/µm wurde ein Emissionsstrom von 4 nA/cm2 erreicht.In a diode arrangement in which the electrode array produced in this way is switched as a cathode, the current-voltage curve can be measured and the emission can be observed with the aid of a luminescent layer.
The current-voltage curve of this arrangement was measured. At a voltage of 6V / µm an emission current of 4 nA / cm 2 was achieved.
Claims (5)
dadurch gekennzeichnet,
daß die Beschichtung mit einem diamanthaltigen Material eine wasserstoffgesättigte Deckschicht hat.Electron-emitting component with an arrangement (array) of one or more electron-emitting electrodes which have a substrate and a coating with a diamond-containing material,
characterized by
that the coating with a diamond-containing material has a hydrogen-saturated top layer.
dadurch gekennzeichnet,
daß die Beschichtung auf das Substrat aufgedruckt ist.Electron emitting device according to claim 1,
characterized by
that the coating is printed on the substrate.
dadurch gekennzeichnet,
daß das diamanthaltige Material Diamantpartikel mit einem Durchmesser von 5 bis 100 nm enthält.Electron emitting device according to claim 1,
characterized by
that the diamond-containing material contains diamond particles with a diameter of 5 to 100 nm.
dadurch gekennzeichnet,
daß ein Substrat mit einer Beschichtung mit einem diamanthaltigen Material bedruckt wird.Method according to claim 4,
characterized by
that a substrate with a coating is printed with a diamond-containing material.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19757141 | 1997-12-20 | ||
| DE1997157141 DE19757141A1 (en) | 1997-12-20 | 1997-12-20 | Array of diamond / hydrogen electrodes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP0924737A1 true EP0924737A1 (en) | 1999-06-23 |
Family
ID=7852922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP98204254A Withdrawn EP0924737A1 (en) | 1997-12-20 | 1998-12-15 | Array of diamond and hydrogen containing electrodes |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP0924737A1 (en) |
| JP (1) | JPH11265654A (en) |
| DE (1) | DE19757141A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2793603A1 (en) * | 1999-03-06 | 2000-11-17 | Smiths Industries Plc | ELECTRON-EMITTING DEVICE AND METHOD FOR MANUFACTURING SUCH A DEVICE |
| WO2005022579A1 (en) * | 2003-08-29 | 2005-03-10 | University Of Bristol | Field emitter device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT513190B9 (en) | 2012-08-08 | 2014-05-15 | Berndorf Hueck Band Und Pressblechtechnik Gmbh | Apparatus and method for plasma coating a substrate, in particular a press plate |
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| EP0609532A1 (en) * | 1993-02-01 | 1994-08-10 | Motorola, Inc. | Electron emitter |
| EP0709870A1 (en) * | 1994-10-31 | 1996-05-01 | AT&T Corp. | Methods and apparatus for making enhanced particulate field emitters and resulting products |
| EP0718864A1 (en) * | 1994-12-22 | 1996-06-26 | AT&T Corp. | Field emission devices employing ultra-fine diamond particle emitters |
| EP0725415A2 (en) * | 1995-01-31 | 1996-08-07 | AT&T Corp. | Field emission devices employing activated diamond particle emitters and methods for making same |
| WO1996033507A1 (en) * | 1995-04-21 | 1996-10-24 | The Regents Of The University Of California | Diamond thin film electron emitter |
| US5619093A (en) * | 1995-03-31 | 1997-04-08 | The United States Of America As Represented By The Secretary Of The Navy | Electron field emission |
| EP0836217A1 (en) * | 1996-10-14 | 1998-04-15 | Hamamatsu Photonics K.K. | Electron tube |
| US5744195A (en) * | 1994-10-31 | 1998-04-28 | Lucent Technologies Inc. | Field emission devices employing enhanced diamond field emitters |
| WO1998027568A1 (en) * | 1996-12-18 | 1998-06-25 | Smiths Industries Public Limited Company | Diamond surfaces |
| WO1998044526A1 (en) * | 1997-03-27 | 1998-10-08 | Candescent Technologies Corporation | Fabrication and structure of electron emitters coated with material such as carbon |
-
1997
- 1997-12-20 DE DE1997157141 patent/DE19757141A1/en not_active Withdrawn
-
1998
- 1998-12-11 JP JP35200398A patent/JPH11265654A/en not_active Withdrawn
- 1998-12-15 EP EP98204254A patent/EP0924737A1/en not_active Withdrawn
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| EP0609532A1 (en) * | 1993-02-01 | 1994-08-10 | Motorola, Inc. | Electron emitter |
| EP0709870A1 (en) * | 1994-10-31 | 1996-05-01 | AT&T Corp. | Methods and apparatus for making enhanced particulate field emitters and resulting products |
| US5744195A (en) * | 1994-10-31 | 1998-04-28 | Lucent Technologies Inc. | Field emission devices employing enhanced diamond field emitters |
| EP0718864A1 (en) * | 1994-12-22 | 1996-06-26 | AT&T Corp. | Field emission devices employing ultra-fine diamond particle emitters |
| EP0725415A2 (en) * | 1995-01-31 | 1996-08-07 | AT&T Corp. | Field emission devices employing activated diamond particle emitters and methods for making same |
| US5619093A (en) * | 1995-03-31 | 1997-04-08 | The United States Of America As Represented By The Secretary Of The Navy | Electron field emission |
| WO1996033507A1 (en) * | 1995-04-21 | 1996-10-24 | The Regents Of The University Of California | Diamond thin film electron emitter |
| EP0836217A1 (en) * | 1996-10-14 | 1998-04-15 | Hamamatsu Photonics K.K. | Electron tube |
| WO1998027568A1 (en) * | 1996-12-18 | 1998-06-25 | Smiths Industries Public Limited Company | Diamond surfaces |
| WO1998044526A1 (en) * | 1997-03-27 | 1998-10-08 | Candescent Technologies Corporation | Fabrication and structure of electron emitters coated with material such as carbon |
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| Title |
|---|
| GEIS M W ET AL: "DIAMOND EMITTERS FABRICATION AND THEORY", May 1996, JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B, VOL. 14, NR. 3, PAGE(S) 2060 - 2067, XP000621834 * |
| HUANG Z -H ET AL: "MONTE CARLO SIMULATION OF HOT ELECTRON CHARGE TRANSPORT IN DIAMOND UNDER AN INTERNAL ELECTRIC FIELD", 28 August 1995, APPLIED PHYSICS LETTERS, VOL. 67, NR. 9, PAGE(S) 1235 - 1237, XP002036963 * |
| OKANO K ET AL: "FABRICATION OF A MINIATURE-SIZE PYRAMIDAL-SHAPE DIAMOND FIELD EMITTER ARRAY", 1 June 1995, IEEE ELECTRON DEVICE LETTERS, VOL. 16, NR. 6, PAGE(S) 239 - 241, XP000514716 * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2793603A1 (en) * | 1999-03-06 | 2000-11-17 | Smiths Industries Plc | ELECTRON-EMITTING DEVICE AND METHOD FOR MANUFACTURING SUCH A DEVICE |
| FR2797712A1 (en) * | 1999-03-06 | 2001-02-23 | Smiths Industries Plc | ELECTRON-EMITTING DEVICE AND METHOD FOR MANUFACTURING SUCH A DEVICE |
| US6538368B1 (en) | 1999-03-06 | 2003-03-25 | Smiths Group Plc | Electron-emitting devices |
| WO2005022579A1 (en) * | 2003-08-29 | 2005-03-10 | University Of Bristol | Field emitter device |
Also Published As
| Publication number | Publication date |
|---|---|
| DE19757141A1 (en) | 1999-06-24 |
| JPH11265654A (en) | 1999-09-28 |
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