EP0920920A3 - Spin-coating apparatus for preparing optical discs - Google Patents
Spin-coating apparatus for preparing optical discs Download PDFInfo
- Publication number
- EP0920920A3 EP0920920A3 EP98309940A EP98309940A EP0920920A3 EP 0920920 A3 EP0920920 A3 EP 0920920A3 EP 98309940 A EP98309940 A EP 98309940A EP 98309940 A EP98309940 A EP 98309940A EP 0920920 A3 EP0920920 A3 EP 0920920A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- spin
- optical discs
- coating apparatus
- pointed end
- preparing optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
- B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting
Landscapes
- Manufacturing Optical Record Carriers (AREA)
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Thermal Transfer Or Thermal Recording In General (AREA)
Abstract
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP35240697 | 1997-12-04 | ||
JP35240697A JPH11165115A (en) | 1997-12-04 | 1997-12-04 | Spin-coating device for manufacture optical disc |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0920920A2 EP0920920A2 (en) | 1999-06-09 |
EP0920920A3 true EP0920920A3 (en) | 2000-12-27 |
EP0920920B1 EP0920920B1 (en) | 2003-05-07 |
Family
ID=18423859
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19980309940 Expired - Lifetime EP0920920B1 (en) | 1997-12-04 | 1998-12-04 | Spin-coating apparatus for preparing optical discs |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0920920B1 (en) |
JP (1) | JPH11165115A (en) |
DE (1) | DE69814315T2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005261996A (en) * | 2004-03-16 | 2005-09-29 | Toppan Printing Co Ltd | Coating apparatus for photosensitive colored resin composition and method for manufacturing color filter for display device |
JP4989370B2 (en) | 2006-10-13 | 2012-08-01 | 大日本スクリーン製造株式会社 | Nozzle and substrate processing apparatus having the same |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2088748A (en) * | 1980-12-10 | 1982-06-16 | Gusmer Corp | Replaceable nozzle for a spray gun |
US5002008A (en) * | 1988-05-27 | 1991-03-26 | Tokyo Electron Limited | Coating apparatus and method for applying a liquid to a semiconductor wafer, including selecting a nozzle in a stand-by state |
US5143552A (en) * | 1988-03-09 | 1992-09-01 | Tokyo Electron Limited | Coating equipment |
JPH06182274A (en) * | 1992-12-16 | 1994-07-05 | Shin Etsu Chem Co Ltd | Discharging nozzle for light beam-curing type material |
WO1995026237A1 (en) * | 1994-03-29 | 1995-10-05 | Siemens Aktiengesellschaft | Nozzle for the metered application of drops of adhesive |
-
1997
- 1997-12-04 JP JP35240697A patent/JPH11165115A/en active Pending
-
1998
- 1998-12-04 EP EP19980309940 patent/EP0920920B1/en not_active Expired - Lifetime
- 1998-12-04 DE DE69814315T patent/DE69814315T2/en not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2088748A (en) * | 1980-12-10 | 1982-06-16 | Gusmer Corp | Replaceable nozzle for a spray gun |
US5143552A (en) * | 1988-03-09 | 1992-09-01 | Tokyo Electron Limited | Coating equipment |
US5002008A (en) * | 1988-05-27 | 1991-03-26 | Tokyo Electron Limited | Coating apparatus and method for applying a liquid to a semiconductor wafer, including selecting a nozzle in a stand-by state |
JPH06182274A (en) * | 1992-12-16 | 1994-07-05 | Shin Etsu Chem Co Ltd | Discharging nozzle for light beam-curing type material |
WO1995026237A1 (en) * | 1994-03-29 | 1995-10-05 | Siemens Aktiengesellschaft | Nozzle for the metered application of drops of adhesive |
Non-Patent Citations (1)
Title |
---|
PATENT ABSTRACTS OF JAPAN vol. 018, no. 525 (C - 1257) 5 October 1994 (1994-10-05) * |
Also Published As
Publication number | Publication date |
---|---|
JPH11165115A (en) | 1999-06-22 |
DE69814315D1 (en) | 2003-06-12 |
DE69814315T2 (en) | 2004-01-22 |
EP0920920A2 (en) | 1999-06-09 |
EP0920920B1 (en) | 2003-05-07 |
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Inventor name: SUGIYAMA, TADASHI Inventor name: KATAGIRI, YOSHINOBU Inventor name: ISHIZUKA, SEIJI |
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