EP0875743A1 - A wavemeter and an arrangement for the adjustment of the wavelength of an optical source - Google Patents
A wavemeter and an arrangement for the adjustment of the wavelength of an optical source Download PDFInfo
- Publication number
- EP0875743A1 EP0875743A1 EP97107247A EP97107247A EP0875743A1 EP 0875743 A1 EP0875743 A1 EP 0875743A1 EP 97107247 A EP97107247 A EP 97107247A EP 97107247 A EP97107247 A EP 97107247A EP 0875743 A1 EP0875743 A1 EP 0875743A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- optical
- wavelength
- wavemeter
- power
- optical beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 189
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical compound CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 claims abstract description 44
- 238000005259 measurement Methods 0.000 claims abstract description 36
- 230000010287 polarization Effects 0.000 claims description 32
- 230000010363 phase shift Effects 0.000 claims description 11
- 230000005684 electric field Effects 0.000 claims description 3
- 230000000979 retarding effect Effects 0.000 claims 2
- 238000011088 calibration curve Methods 0.000 description 6
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- 229910000831 Steel Inorganic materials 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J9/0246—Measuring optical wavelength
Abstract
Description
- a first optical component which is arranged in said first optical beam or in a part of it and which generates a second optical beam with a first optical power,
- said first optical power of said second optical beam depends on the wavelength of said first optical beam,
- a first power detector detecting the optical power of said second optical beam and
- a first allocator allocating a wavelength to said detected first optical power based on the dependency of the optical power of said second optical beam which is generated by said first optical component on the wavelength of said first optical beam to be measured.
The invention further proposes an arrangement for the adjustment of the wavelength of a laser source which comprises a wavemeter according to the invention, a comparator and a tuning unit. The present wavelength of the signals of an optical source, such as a laser source, is measured by the wavemeter and compared by the comparator with a preadjusted or desired wavelength. If the wavelength deviation exceeds a certain amount, the comparator causes the tuning unit to change the adjustment of the laser source to generate an optical beam with the desired or the preadjusted wavelength.
- Fig. 1
- is a wavemeter according to the invention,
- Fig. 2
- is an arrangement for the control of the wavelength of the optical signals of a laser source,
- Fig. 3
- shows the principle of the invention, when using two physically separated
etalons E 1 andE 2, - Fig. 4
- is the principal of the invention, when using a single birefringent optical component as in the wavemeter shown in Fig. 1,
- Figs. 5, 6 and 7
- depict measurement data for the calibration of the wavemeter as shown in Fig. 1.
- d1
- is the geometric thickness of
etalon 1, - d2
- is the geometric thickness of
etalon 2 and - ë
- is the expected wavelength of the optical signals of the optical source.
- n 2
- is the refractive index of
etalon 2, - ë
- is the expected wavelength of the optical signals of the optical source and
- d2
- is the geometric thickness of
etalon 2.
Claims (10)
- A wavemeter for the measurement of the wavelength of a first optical beam, comprising:a first optical component (1; E 1) which is arranged in said first optical beam or in a part of it and which generates a second optical beam with a first optical power,said first optical power of said second optical beam depends on the wavelength of said first optical beam,a first power detector (3) detecting the optical power of said second optical beam anda first allocator allocating a wavelength to said detected first optical power based on the dependency of the optical power of said second optical beam which is generated by said first optical component (1; E 1) on the wavelength of said first optical beam to be measured.
- A wavemeter as defined in claim 1, wherein said first optical component is an etalon (E 1) or a birefringent optical component, such as a retardation plate or a waveplate (1).
- A wavemeter as defined in claim 1 or 2, wherein said optical power generated by said first optical component (1) oscillates periodically with increasing wavelength of said first optical beam.
- A wavemeter as defined in claim 1, wherein said first power detector detecting the optical power of said second optical beam is a photo detector, such as a photo diode (3).
- A wavemeter as defined in claim 1, wherein said first allocator is a data processor which compares the detected optical power of said second optical beam with the specific dependency of the optical power on the wavelength of said first optical component (1) and which allocates the wavelength corresponding to the detected optical power.
- A wavemeter as defined in claims 1 to 5, additionally comprising:a second optical component (1; E 2) which is arranged in said first optical beam or in a part of it and which generates a third optical beam with a second optical power,said second optical power of said third optical beam depends on the wavelength of said third optical beam,a second power detector (4) detecting said second optical power of said third optical beam,a second allocator allocating a wavelength to said detected second optical power based on the dependency of said second optical power of said third optical beam which is generated by said second optical component (1; E 2) on the wavelength of said first optical beam to be measured.
- A wavemeter as defined in claim 6, wherein said first optical component and said second optical component is realized with a single birefringent optical component, such as a retardation plate (1) or a waveplate, retarding said third optical beam with a second polarization relative to said second optical beam with a first polarization.
- A wavemeter as defined in claim 6, wherein said second optical component is a first etalon (E 1) and said second optical component is a second etalon (E 2), retarding said third optical beam relative to said second optical beam.
- A wavemeter as defined in claims 7 or 8, wherein said retardation corresponds to a phase shift of said second optical beam with regard to said third optical beam of π/4 of the electrical field.
- An arrangement for the adjustment of the wavelength of an optical source, comprising:a wavemeter as defined in one of the claims 1 to 9,a comparator (32) which compares the measured wavelength of said first optical beam with a predefined wavelength anda controller (33) controlling said optical source (30) to generate an optical beam with said predefined wavelength based on the result of the comparison carried out by said comparator (32).
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE69706827T DE69706827T2 (en) | 1997-05-02 | 1997-05-02 | Wavelength measuring device and a device for regulating the wavelength of a light source |
EP97107247A EP0875743B1 (en) | 1997-05-02 | 1997-05-02 | A wavemeter and an arrangement for the adjustment of the wavelength of an optical source |
US09/050,484 US6043883A (en) | 1997-05-02 | 1998-03-30 | Wavemeter and an arrangement for the adjustment of the wavelength of the signals of an optical source |
JP10108279A JPH10339668A (en) | 1997-05-02 | 1998-04-17 | Light wavemeter and light wavelength regulator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP97107247A EP0875743B1 (en) | 1997-05-02 | 1997-05-02 | A wavemeter and an arrangement for the adjustment of the wavelength of an optical source |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0875743A1 true EP0875743A1 (en) | 1998-11-04 |
EP0875743B1 EP0875743B1 (en) | 2001-09-19 |
Family
ID=8226759
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP97107247A Expired - Lifetime EP0875743B1 (en) | 1997-05-02 | 1997-05-02 | A wavemeter and an arrangement for the adjustment of the wavelength of an optical source |
Country Status (4)
Country | Link |
---|---|
US (1) | US6043883A (en) |
EP (1) | EP0875743B1 (en) |
JP (1) | JPH10339668A (en) |
DE (1) | DE69706827T2 (en) |
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US6608848B2 (en) | 1998-06-01 | 2003-08-19 | Lambda Physik Ag | Method and apparatus for wavelength calibration |
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US6683295B2 (en) | 2001-10-01 | 2004-01-27 | Digital Optics Corp. | Reduced noise wavelength locker module |
US6747741B1 (en) | 2000-10-12 | 2004-06-08 | Lambda Physik Ag | Multiple-pass interferometric device |
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US6807205B1 (en) | 2000-07-14 | 2004-10-19 | Lambda Physik Ag | Precise monitor etalon calibration technique |
US7006541B2 (en) | 1998-06-01 | 2006-02-28 | Lambda Physik Ag | Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp |
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- 1997-05-02 DE DE69706827T patent/DE69706827T2/en not_active Expired - Fee Related
- 1997-05-02 EP EP97107247A patent/EP0875743B1/en not_active Expired - Lifetime
-
1998
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Also Published As
Publication number | Publication date |
---|---|
EP0875743B1 (en) | 2001-09-19 |
US6043883A (en) | 2000-03-28 |
JPH10339668A (en) | 1998-12-22 |
DE69706827T2 (en) | 2002-03-28 |
DE69706827D1 (en) | 2001-10-25 |
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