EP0851712A2 - Oven four high temperature heat treatment - Google Patents

Oven four high temperature heat treatment Download PDF

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Publication number
EP0851712A2
EP0851712A2 EP97119140A EP97119140A EP0851712A2 EP 0851712 A2 EP0851712 A2 EP 0851712A2 EP 97119140 A EP97119140 A EP 97119140A EP 97119140 A EP97119140 A EP 97119140A EP 0851712 A2 EP0851712 A2 EP 0851712A2
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EP
European Patent Office
Prior art keywords
microwave
oven
oven according
furnace
waveguide
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Granted
Application number
EP97119140A
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German (de)
French (fr)
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EP0851712A3 (en
EP0851712B1 (en
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Erfindernennung liegt noch nicht vor Die
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Industrie-Ofenbau Rudolf Brands GmbH
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Industrie-Ofenbau Rudolf Brands GmbH
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D99/00Subject matter not provided for in other groups of this subclass
    • F27D99/0001Heating elements or systems
    • F27D99/0006Electric heating elements or system
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00Furnaces of a kind not covered by any preceding group
    • F27B17/0016Chamber type furnaces
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00Heating by electric, magnetic or electromagnetic fields
    • H05B6/64Heating using microwaves
    • H05B6/80Apparatus for specific applications
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D99/00Subject matter not provided for in other groups of this subclass
    • F27D99/0001Heating elements or systems
    • F27D99/0006Electric heating elements or system
    • F27D2099/0028Microwave heating
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2206/00Aspects relating to heating by electric, magnetic, or electromagnetic fields covered by group H05B6/00
    • H05B2206/04Heating using microwaves
    • H05B2206/046Microwave drying of wood, ink, food, ceramic, sintering of ceramic, clothes, hair

Definitions

  • the present invention relates to a furnace for high temperature heat treatment of inorganic materials, in particular ceramic materials, with a furnace housing to hold the material to be treated, a door, a microwave energy generating device and one Device for radiating the microwave energy into the Inside the oven.
  • EP 0 457 948 B1 includes a microwave device one acting as a resonator with several metallic ones Chamber walls formed multi-mode chamber into which a to be heated Workpiece can be used and in the microwave energy is known.
  • the chamber hereby points out at least one movable chamber wall, and there are means which cause the mobile Chamber wall during operation of the microwave device can be set in a repetitive movement. Furthermore are Means for high-frequency sealing of the movable chamber wall opposite the solid chamber walls, so that a change in the movement of the movable chamber wall Resonator volume is given.
  • DE-B 11 86 570 shows a microwave device, which do not have a multimode resonator to accommodate a Has workpiece, but a slot radiator on which a workpiece to be heated is passed.
  • a slot radiator On which a workpiece to be heated is passed.
  • the Slot radiator is the exit opening of a waveguide, into which a magnetron feeds.
  • the present invention is based on the object to create an oven of the type described above with with a simple structure, simple maintenance and safe operation, particularly high temperatures achieve with a homogeneous energy density to let.
  • This object is inventively in a furnace of the beginning described type solved in that the furnace housing a microwave-proof metallic lining and inside of which a built-in microwave permeable Has thermal insulation layer and that the microwave energy radiation device by at least one Microwave slot waveguide is formed, the associated one Opening of the metallic lining comprehensively on the other Outside with the slotted surface facing the inside of the furnace is arranged.
  • the microwave density metallic lining and the microwave energy input via slotted waveguides in the range of Openings of the metallic lining are arranged with simple means achieved that inside the furnace homogeneous energy density distribution is achieved for the High temperature heat treatment of inorganic, in particular ceramic materials, especially the sintering of ceramic Materials, is of particular importance.
  • the in Built-in microwave-permeable interior of the metallic lining thermal insulation layer ensures that inside the furnace with very high temperatures can be worked. So is the trained according to the invention Oven suitable for maximum temperatures up to approximately 1,800 ° C. You can work with air or inert gas inside the furnace will.
  • the solution according to the invention enables the arrangement of a Variety of microwave slot waveguides on all furnace walls, so that the desired homogeneous energy density distribution can be achieved.
  • the thermal insulation layer preferably consists of ceramic fiber materials. It is expediently made up of plates or long fiber modules.
  • a special embodiment of the invention is characterized in that the ceramic material for the insulation layer consists of aluminum oxide (Al 2 O 3 ) which contains mullite, ie an aluminum silicate which consists approximately of 80% aluminum oxide and 20% silicon dioxide. This material has a bulk density of around 300-700 kg / m 3 .
  • Vacuum-formed plates are preferably used, which have a thickness of 40mm.
  • the furnace walls can be covered with a A large number of microwave slot waveguides can be provided.
  • the oven preferably faces at least one wall several parallel to each other and spaced from each other Microwave slot waveguide. Conveniently there are several perpendicular to at least one side wall arranged microwave slot waveguide available.
  • Each furnace wall can have one or more microwave slot waveguides be provided.
  • the microwave slot waveguide arranged on opposite walls are expediently offset from one another arranged. This creates a mutual influence avoided by opposite slotted waveguides.
  • the opening assigned to the microwave slot waveguide the metallic liner is preferably with a dielectric Material closed. This makes it possible Make the interior of the furnace gas-tight.
  • the microwave energy introduction into the microwave slot waveguide takes place in a known manner via a magnetron, which is arranged at one end of the microwave slot waveguide is.
  • the opposite end of the microwave slot waveguide preferably has a short-circuit slide on.
  • the microwave slot waveguide itself can be of a conventional type Be a construction.
  • the slots can be, for example parallel to the longitudinal axis of the waveguide to both Sides of the central axis of the same are arranged offset from one another be.
  • the Slots are arranged at an angle to the longitudinal central axis.
  • the slots are along the central longitudinal axis at a distance and point a small hole adjacent to each.
  • the slots are in a wall of the waveguide, which is approximately rectangular in cross section. It understands yourself that this wall assigned to the inside of the furnace is.
  • the intended thermal insulation layer is included relatively short distance from the microwave slot waveguides arranged so that between the slot surface of the Waveguide or the metallic lining and the outside the thermal insulation layer is only a relatively narrow one Gap remains.
  • the microwave slot waveguide attached to the outside of the metallic lining are that there is a microwave-tight connection.
  • the gas tightness is ensured by the above Layer of dielectric material, preferably quartz glass, achieved that towards the middle of the furnace in front of the slot surface the waveguide is arranged.
  • a chamber furnace 1 In the furnace for high-temperature heat treatment shown in the figures it is about ceramic materials is a chamber furnace 1, the one on its front Door 2 has.
  • the furnace is roughly box-shaped and stands on four legs 3.
  • On its two opposite Side walls 5 are three perpendicular and parallel mutually arranged microwave slot waveguide 7, the waveguide being offset from the opposite sides are arranged to each other.
  • the exact structure of the furnace is based on of Figures 2-5 explained.
  • the chamber furnace 1 shown here is for a maximum temperature of 1,800 ° C and designed for operation in Suitable in air or natural gas.
  • the useful dimensions of the furnace amount to 500x500x500mm, and it comes with a microwave frequency of 2.45 GHz worked.
  • Figure 2 shows that three Microwave slot waveguide 7 parallel to each other in the vertical direction arranged on a side surface 5 of the furnace are. Are on the opposite side surface another three microwave slot waveguides that are offset too the waveguides are arranged on the other side.
  • a short-circuit slide is provided at the end of the waveguide.
  • FIG. 5 shows a horizontal section through the chamber furnace 1 to 4.
  • the furnace has an outer frame 14, which stores the actual furnace housing.
  • the furnace housing has a metallic liner 12 and one inside of this permanently installed thermal insulation layer 11 on, which consists of mullite.
  • the metallic lining is microwave-proof, while the thermal insulation layer 11 is essentially microwave transparent.
  • each of a microwave slot waveguide 7 are included, the outside of the metallic Lining 12 is arranged and with its slot surface points to the inside of the oven. So there are three openings 13 side by side and parallel to each other on each side surface 5 of the oven provided, each of which has a microwave slot waveguide 7 is assigned.
  • the attachment of the Waveguide 7 on the metallic lining 12 is microwave-proof Way is done.

Abstract

The oven has an oven housing for accepting the material to be heat treated, a door, a microwave power source and a device for radiating the microwave energy into the interior of the oven. The oven housing has a microwave proof metal coating (12) with a microwave transmissive thermal insulation layer (11) inside it. The device for radiating the microwave energy contains at least one microwave slotted hollow conductor (7,8) in a corresp. opening (13) in the metal coating (12) with the slotted surface facing the interior of the oven.

Description

Die vorliegende Erfindung betrifft einen Ofen zur Hochtemperatur-Wärmebehandlung von anorganischen Werkstoffen, insbesondere keramischen Werkstoffen, mit einem Ofengehäuse zur Aufnahme des zu behandelnden Werkstoffes, einer Tür, einer Mikrowellenenergieerzeugungseinrichtung und einer Einrichtung zur Abstrahlung der Mikrowellenenergie in das Ofeninnere.The present invention relates to a furnace for high temperature heat treatment of inorganic materials, in particular ceramic materials, with a furnace housing to hold the material to be treated, a door, a microwave energy generating device and one Device for radiating the microwave energy into the Inside the oven.

Aus der EP 0 457 948 B1 ist eine Mikrowelleneinrichtung mit einer als Resonator wirkenden, mit mehreren metallischen Kammerwänden gebildeten Mehrmodenkammer, in die ein zu erwärmendes Werkstück einsetzbar ist und in die Mikrowellenenergie einspeisbar ist, bekannt. Die Kammer weist hierbei wenigstens eine beweglich ausgeführte Kammerwand auf, und es sind Mittel vorhanden, die bewirken, daß die bewegliche Kammerwand während des Betriebes der Mikrowelleneinrichtung in eine repetierende Bewegung versetzbar ist. Ferner sind Mittel zur Hochfrequenzabdichtung der beweglichen Kammerwand gegenüber den festen Kammerwänden vorhanden, so daß bei Bewegung der beweglichen Kammerwand eine Änderung des Resonatorvolumens gegeben ist.EP 0 457 948 B1 includes a microwave device one acting as a resonator with several metallic ones Chamber walls formed multi-mode chamber into which a to be heated Workpiece can be used and in the microwave energy is known. The chamber hereby points out at least one movable chamber wall, and there are means which cause the mobile Chamber wall during operation of the microwave device can be set in a repetitive movement. Furthermore are Means for high-frequency sealing of the movable chamber wall opposite the solid chamber walls, so that a change in the movement of the movable chamber wall Resonator volume is given.

Der DE-B 11 86 570 ist eine Mikrowelleneinrichtung zu entnehmen, die keinen Mehrmoden-Resonator zur Aufnahme eines Werkstückes aufweist, sondern einen Schlitzstrahler, an dem ein zu erwärmendes Werkstuck vorbeigeführt wird. Der Schlitzstrahler ist die Austrittsöffnung eines Hohlleiters, in den ein Magnetron einspeist. Im Hohlleiter ist ein beweglicher Kurzschlußschieber vorgesehen.DE-B 11 86 570 shows a microwave device, which do not have a multimode resonator to accommodate a Has workpiece, but a slot radiator on which a workpiece to be heated is passed. Of the Slot radiator is the exit opening of a waveguide, into which a magnetron feeds. There is a movable one in the waveguide Short-circuit slide provided.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, einen Ofen der eingangs beschriebenen Art zu schaffen, mit dem sich bei einem einfachen Aufbau, einer einfachen Wartung und einer sicheren Funktionsweise besonders hohe Temperaturen bei einer möglichst homogenen Energiedichte erzielen lassen.The present invention is based on the object to create an oven of the type described above with with a simple structure, simple maintenance and safe operation, particularly high temperatures achieve with a homogeneous energy density to let.

Diese Aufgabe wird erfindungsgemäß bei einem Ofen der eingangs beschriebenen Art dadurch gelöst, daß das Ofengehäuse eine mikrowellendichte metallische Auskleidung und im Inneren hiervon eine fest eingebaute mikrowellendurchlässige thermische Isolationsschicht aufweist und daß die Mikrowellenenergieabstrahlungseinrichtung durch mindestens einen Mikrowellenschlitzhohlleiter gebildet ist, der eine zugehörige Öffnung der metallischen Auskleidung umfassend an deren Außenseite mit der Schlitzfläche zum Ofeninneren weisend angeordnet ist.This object is inventively in a furnace of the beginning described type solved in that the furnace housing a microwave-proof metallic lining and inside of which a built-in microwave permeable Has thermal insulation layer and that the microwave energy radiation device by at least one Microwave slot waveguide is formed, the associated one Opening of the metallic lining comprehensively on the other Outside with the slotted surface facing the inside of the furnace is arranged.

Bei der erfindungsgemäßen Lösung wird durch die mikrowellendichte metallische Auskleidung und die Mikrowellenenergieeinbringung über Schlitzhohlleiter, die im Bereich von Öffnungen der metallischen Auskleidung angeordnet sind, mit einfachen Mitteln erreicht, daß im Inneren des Ofens eine homogene Energiedichteverteilung erzielt wird, die für die Hochtemperatur-Wärmebehandlung von anorganischen, insbesondere keramischen Werkstoffen, speziell das Sintern von keramischen Werkstoffen, von besonderer Bedeutung ist. Die im Inneren der metallischen Auskleidung fest eingebaute mikrowellendurchlässige thermische Isolationsschicht stellt sicher, daß im Ofeninneren mit sehr hohen Temperaturen gearbeitet werden kann. So ist der erfindungsgemäß ausgebildete Ofen für Maximaltemperaturen bis etwa 1.800°C geeignet. Im Ofeninneren kann mit Luft oder Inertgas gearbeitet werden.In the solution according to the invention, the microwave density metallic lining and the microwave energy input via slotted waveguides in the range of Openings of the metallic lining are arranged with simple means achieved that inside the furnace homogeneous energy density distribution is achieved for the High temperature heat treatment of inorganic, in particular ceramic materials, especially the sintering of ceramic Materials, is of particular importance. The in Built-in microwave-permeable interior of the metallic lining thermal insulation layer ensures that inside the furnace with very high temperatures can be worked. So is the trained according to the invention Oven suitable for maximum temperatures up to approximately 1,800 ° C. You can work with air or inert gas inside the furnace will.

Die erfindungsgemäße Lösung ermöglicht die Anordnung einer Vielzahl von Mikrowellenschlitzhohlleitern an allen Ofenwandungen, so daß die gewünschte homogene Energiedichteverteilung erzielt werden kann.The solution according to the invention enables the arrangement of a Variety of microwave slot waveguides on all furnace walls, so that the desired homogeneous energy density distribution can be achieved.

Wesentlich ist, daß die mikrowellendurchlässige thermische Isolationsschicht bei der vorliegenden Erfindung fest im Ofen eingebaut ist und sich nicht am zu behandelnden Werkstoff selbst befindet.It is essential that the microwave-permeable thermal Insulation layer firmly in the present invention Furnace is installed and not on the material to be treated yourself.

Vorzugsweise besteht die thermische Isolationsschicht aus keramischen Faserwerkstoffen. Sie ist zweckmäßigerweise aus Platten oder Langfasermodulen aufgebaut. Eine spezielle Ausführungsform der Erfindung zeichnet sich dadurch aus, daß der keramische Werkstoff für die Isolationsschicht aus Aluminiumoxid (Al2O3) besteht, das Mullit enthält, d. h. ein Aluminiumsilikat, das etwa aus 80% Aluminiumoxid und 20% Siliciumdioxid besteht. Dieses Material hat eine Rohdichte von etwa 300-700 kg/m3.The thermal insulation layer preferably consists of ceramic fiber materials. It is expediently made up of plates or long fiber modules. A special embodiment of the invention is characterized in that the ceramic material for the insulation layer consists of aluminum oxide (Al 2 O 3 ) which contains mullite, ie an aluminum silicate which consists approximately of 80% aluminum oxide and 20% silicon dioxide. This material has a bulk density of around 300-700 kg / m 3 .

Es kommen vorzugsweise vakuumgeformte Platten zum Einsatz, die eine Dicke von 40mm besitzen.Vacuum-formed plates are preferably used, which have a thickness of 40mm.

Wie bereits erwähnt, können die Ofenwandungen mit einer Vielzahl von Mikrowellenschlitzhohlleitern versehen sein. So weist der Ofen vorzugsweise an mindestens einer Wand mehrere parallel zueinander und im Abstand voneinander angeordnete Mikrowellenschlitzhohlleiter auf. Zweckmäßigerweise sind an mindestens einer Seitenwand mehrere senkrecht angeordnete Mikrowellenschlitzhohlleiter vorhanden. As already mentioned, the furnace walls can be covered with a A large number of microwave slot waveguides can be provided. For example, the oven preferably faces at least one wall several parallel to each other and spaced from each other Microwave slot waveguide. Conveniently there are several perpendicular to at least one side wall arranged microwave slot waveguide available.

Jede Ofenwand kann mit einem oder mehreren Mikrowellenschlitzhohlleitern versehen sein. Eine Ausführungsform hat sich jedoch als besonders zweckmäßig erwiesen, bei der die Deckwand und die beiden Seitenwände des Ofens mit Mikrowellenschlitzhohlleitern versehen sind. Bei dieser Ausführungsform weisen die Vorder- und Rückseite sowie Unterseite des Ofens keine Mikrowellenschlitzhohlleiter auf.Each furnace wall can have one or more microwave slot waveguides be provided. Has one embodiment proved to be particularly useful, however, in which the Top wall and the two side walls of the oven with microwave slot waveguides are provided. In this embodiment have the front, back and bottom no microwave slot waveguide on the oven.

Die an gegenüberliegenden Wänden angeordneten Mikrowellenschlitzhohlleiter sind zweckmäßigerweise versetzt zueinander angeordnet. Hierdurch wird eine gegenseitige Beeinflussung von gegenüberliegenden Schlitzhohlleitern vermieden.The microwave slot waveguide arranged on opposite walls are expediently offset from one another arranged. This creates a mutual influence avoided by opposite slotted waveguides.

Die dem Mikrowellenschlitzhohlleiter zugeordnete Öffnung der metallischen Auskleidung ist vorzugsweise mit einem dielektrischen Material verschlossen. Hierdurch läßt sich das Ofeninnere gasdicht ausgestalten.The opening assigned to the microwave slot waveguide the metallic liner is preferably with a dielectric Material closed. This makes it possible Make the interior of the furnace gas-tight.

Die Mikrowellenenergieeinführung in den Mikrowellenschlitzhohlleiter erfolgt in bekannte Weise über ein Magnetron, das an einem Ende des Mikrowellenschlitzhohlleiters angeordnet ist. Das gegenüber liegende Ende des Mikrowellenschlitzhohlleiters weist vorzugsweise einen Kurzschlußschieber auf.The microwave energy introduction into the microwave slot waveguide takes place in a known manner via a magnetron, which is arranged at one end of the microwave slot waveguide is. The opposite end of the microwave slot waveguide preferably has a short-circuit slide on.

Die Mikrowellenschlitzhohlleiter selbst können von herkömmlicher Bauart sein. Hierbei können die Schlitze beispielsweise parallel zur Längsachse des Hohlleiters zu beiden Seiten der Mittelachse desselben versetzt zueinander angeordnet sein. Bei einer anderen Ausführungsform können die Schlitze winklig zur Längsmittelachse angeordnet sein. Bei noch einer anderen Ausführungsform sind die Schlitze entlang der Mittellängsachse auf Abstand angeordnet und weisen benachbart hierzu jeweils ein kleines Loch auf. The microwave slot waveguide itself can be of a conventional type Be a construction. The slots can be, for example parallel to the longitudinal axis of the waveguide to both Sides of the central axis of the same are arranged offset from one another be. In another embodiment, the Slots are arranged at an angle to the longitudinal central axis. At yet another embodiment the slots are along the central longitudinal axis at a distance and point a small hole adjacent to each.

Die Schlitze befinden sich in einer Wandung des Hohlleiters, der im Querschnitt etwa Rechteckform besitzt. Es versteht sich, daß diese Wandung dem Ofeninneren zugeordnet ist. Die vorgesehene thermische Isolationsschicht ist mit relativ geringem Abstand von den Mikrowellenschlitzhohlleitern angeordnet, so daß zwischen der Schlitzfläche der Hohlleiter bzw. der metallischen Auskleidung und der Außenseite der thermischen Isolationsschicht nur ein relativ enger Spalt verbleibt.The slots are in a wall of the waveguide, which is approximately rectangular in cross section. It understands yourself that this wall assigned to the inside of the furnace is. The intended thermal insulation layer is included relatively short distance from the microwave slot waveguides arranged so that between the slot surface of the Waveguide or the metallic lining and the outside the thermal insulation layer is only a relatively narrow one Gap remains.

Es versteht sich, daß die Mikrowellenschlitzhohlleiter so an der Außenseite der metallischen Auskleidung angebracht sind, daß sich eine mikrowellendichte Verbindung ergibt. Die Gasdichtigkeit wird durch die vorstehend erwähnte Schicht aus dielektrischem Material, vorzugsweise Quarzglas, erzielt, die zur Ofenmitte hin vor der Schlitzfläche der Hohlleiter angeordnet ist.It is understood that the microwave slot waveguide attached to the outside of the metallic lining are that there is a microwave-tight connection. The gas tightness is ensured by the above Layer of dielectric material, preferably quartz glass, achieved that towards the middle of the furnace in front of the slot surface the waveguide is arranged.

Die Erfindung wird nachfolgend anhand eines Ausführungsbeispieles in Verbindung mit der Zeichnung im einzelnen erläutert. Es zeigen:

Figur 1
eine räumliche schematische Ansicht eines Ofens zur Hochtemperatur-Wärmebehandlung;
Figur 2
eine Seitenansicht des Ofens der Figur 1, wobei die Energieerzeugungseinrichtungen dargestellt sind;
Figur 3
eine Vorderansicht des Ofens der Figur 1 mit dargestellten Energieerzeugungseinrichtungen;
Figur 4
eine Draufsicht auf den Ofen der Figur 1 mit dargestellten Energieerzeugungseinrichtungen; und
Figur 5
einen schematischen Horizontalschnitt durch den Ofen der Figur 1.
The invention is explained in detail below using an exemplary embodiment in conjunction with the drawing. Show it:
Figure 1
a three-dimensional schematic view of a furnace for high-temperature heat treatment;
Figure 2
a side view of the furnace of Figure 1, wherein the energy generating devices are shown;
Figure 3
a front view of the furnace of Figure 1 with energy generation devices shown;
Figure 4
a plan view of the furnace of Figure 1 with energy generation devices shown; and
Figure 5
2 shows a schematic horizontal section through the furnace of FIG. 1.

Bei dem in den Figuren dargestellten Ofen zur Hochtemperatur-Wärmbehandlung von keramischen Werkstoffen handelt es sich um einen Kammerofen 1, der an seiner Vorderseite eine Tür 2 aufweist. Der Ofen ist etwa kastenförmig ausgebildet und steht auf vier Beinen 3. An seinen beiden gegenüberliegenden Seitenwänden 5 befinden sich drei senkrecht und parallel zueinander angeordnete Mikrowellenschlitzhohlleiter 7, wobei die Hohlleiter der gegenüberliegenden Seiten versetzt zueinander angeordnet sind. Auf der Oberseite 4 des Ofens befinden sich zwei Mikrowellenschlitzhohlleiter 8, die parallel zur Längsachse des Ofens und parallel zueinander angeordnet sind. In der Tür 2 befindet sich eine Isolationsschicht 6. Der genauere Aufbau des Ofens wird anhand der Figuren 2 - 5 erläutert.In the furnace for high-temperature heat treatment shown in the figures it is about ceramic materials is a chamber furnace 1, the one on its front Door 2 has. The furnace is roughly box-shaped and stands on four legs 3. On its two opposite Side walls 5 are three perpendicular and parallel mutually arranged microwave slot waveguide 7, the waveguide being offset from the opposite sides are arranged to each other. On the top 4 of the There are two microwave slot waveguides 8, which are parallel to the longitudinal axis of the furnace and parallel to each other are arranged. There is an insulation layer in door 2 6. The exact structure of the furnace is based on of Figures 2-5 explained.

Der hier dargestellte Kammerofen 1 ist für eine Maximaltemperatur von 1.800°C konzipiert und für einen Betrieb in Luft oder in Erdgas geeignet. Die Nutzabmessungen des Ofens betragen 500x500x500mm, und es wird mit einer Mikrowellenfrequenz von 2,45 GHz gearbeitet. Figur 2 zeigt, daß drei Mikrowellenschlitzhohlleiter 7 parallel zueinander in Vertikalrichtung an einer Seitenfläche 5 des Ofens angeordnet sind. An der gegenüberliegenden Seitenfläche befinden sich weitere drei Mikrowellenschlitzhohlleiter, die versetzt zu den Hohlleitern der anderen Seite angeordnet sind. An den oberen Enden der Hohlleiter befindet sich jeweils ein Magnetron 10, das Mikrowellenenergie erzeugt und in den zugehörigen Hohlleiter endseitig einspeist. Am gegenüberliegenden Ende des Hohlleiters ist ein Kurzschlußschieber vorgesehen. The chamber furnace 1 shown here is for a maximum temperature of 1,800 ° C and designed for operation in Suitable in air or natural gas. The useful dimensions of the furnace amount to 500x500x500mm, and it comes with a microwave frequency of 2.45 GHz worked. Figure 2 shows that three Microwave slot waveguide 7 parallel to each other in the vertical direction arranged on a side surface 5 of the furnace are. Are on the opposite side surface another three microwave slot waveguides that are offset too the waveguides are arranged on the other side. To the There is a magnetron at each end of the waveguide 10, which generates microwave energy and in the associated Feeds the waveguide at the end. On the opposite A short-circuit slide is provided at the end of the waveguide.

Man erkennt ferner in Figur 2, daß an der Oberseite 4 des Kammerofens drei Mikrowellenschlitzhohlleiter 8 parallel zueinander und parallel zur Längsachse des Ofens angeordnet sind. An den in der Figur linken Enden der Hohlleiter befinden sich ebenfalls Magnetrons 10, und zwar rechtwinklig zur Längsachse der Hohlleiter. Es wird darauf hingewiesen, daß in Figur 1 nur zwei Hohlleiter 8 dargestellt sind.It can also be seen in Figure 2 that on the top 4 of the Chamber oven three microwave slot waveguide 8 in parallel arranged to each other and parallel to the longitudinal axis of the furnace are. The waveguide is located at the left ends in the figure Magnetrons 10 are also rectangular to the longitudinal axis of the waveguide. It should be noted that only two waveguides 8 are shown in Figure 1.

Durch die gewählte Hohlleiteranordnung: 3 an der Oberseite, 4 und jeweils 3 an den gegenüberliegenden Seitenflächen 5, wird innerhalb des Ofenraumes eine homogene Energiedichteverteilung erzielt.Due to the selected waveguide arrangement: 3 on the top, 4 and 3 each on the opposite side faces 5, becomes a homogeneous energy density distribution within the furnace chamber achieved.

Figur 5 zeigt einen Horizontalschnitt durch den Kammerofen der Figuren 1 - 4. Der Ofen besitzt einen Außenrahmen 14, der das eigentliche Ofengehäuse lagert. Das Ofengehäuse weist eine metallische Auskleidung 12 und eine innerhalb von dieser fest eingebaute thermische Isolationsschicht 11 auf, die aus Mullit besteht. Die metallische Auskleidung ist mikrowellendicht, während die thermische Isolationsschicht 11 im wesentlichen mikrowellendurchlässig ist.Figure 5 shows a horizontal section through the chamber furnace 1 to 4. The furnace has an outer frame 14, which stores the actual furnace housing. The furnace housing has a metallic liner 12 and one inside of this permanently installed thermal insulation layer 11 on, which consists of mullite. The metallic lining is microwave-proof, while the thermal insulation layer 11 is essentially microwave transparent.

In der metallischen Auskleidung 12 befinden sich längliche Öffnungen 13, die jeweils von einem Mikrowellenschlitzhohlleiter 7 umfaßt werden, der an der Außenseite der metallischen Auskleidung 12 angeordnet ist und mit seiner Schlitzfläche zum Ofeninneren weist. Es sind somit drei Öffnungen 13 nebeneinander und parallel zueinander auf jeder Seitenfläche 5 des Ofens vorgesehen, denen jeweils ein Mikrowellenschlitzhohlleiter 7 zugeordnet ist. Die Befestigung der Hohlleiter 7 an der metallischen Auskleidung 12 ist in mikrowellendichter Weise erfolgt.In the metallic lining 12 are elongated Openings 13, each of a microwave slot waveguide 7 are included, the outside of the metallic Lining 12 is arranged and with its slot surface points to the inside of the oven. So there are three openings 13 side by side and parallel to each other on each side surface 5 of the oven provided, each of which has a microwave slot waveguide 7 is assigned. The attachment of the Waveguide 7 on the metallic lining 12 is microwave-proof Way is done.

Claims (10)

Ofen zur Hochtemperatur-Wärmebehandlung von anorganischen Werkstoffen, insbesondere keramischen Werkstoffen, mit einem Ofengehäuse zur Aufnahme des zu behandelnden Werkstoffes, einer Tür, einer Mikrowellenenergieerzeugungseinrichtung und einer Einrichtung zur Abstrahlung der Mikrowellenenergie in das Ofeninnere, dadurch gekennzeichnet, daß das Ofengehäuse eine mikrowellendichte metallische Auskleidung (12) und im Inneren hiervon eine fest eingebaute mikrowellendurchlässige thermische Isolationsschicht (11) aufweist und daß die Mikrowellenenergieabstrahlungseinrichtung durch mindestens einen Mikrowellenschlitzhohlleiter (7, 8) gebildet ist, der eine zugehörige Öffnung (13) der metallischen Auskleidung (12) umfassend an deren Außenseite mit der Schlitzfläche zum Ofeninneren weisend angeordnet ist.Furnace for high temperature heat treatment of inorganic Materials, in particular ceramic materials, with a furnace housing to accommodate the to be treated Material, a door, a microwave energy generating device and a device for radiation the microwave energy inside the oven, characterized in that the oven housing has a microwave density metallic lining (12) and in Inside of it a built-in microwave-permeable has thermal insulation layer (11) and that the microwave energy radiation device by at least one microwave slot waveguide (7, 8) is formed, which has an associated opening (13) of the metallic lining (12) comprising other Outside with the slot surface to the inside of the furnace is arranged pointing. Ofen nach Anspruch 1, dadurch gekennzeichnet, daß die thermische Isolationsschicht (11) aus keramischen Faserwerkstoffen besteht.Oven according to claim 1, characterized in that the thermal insulation layer (11) made of ceramic fiber materials consists. Ofen nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß die thermische Isolationsschicht (11) aus Platten oder Langfasermodulen besteht.Oven according to claim 1 or 2, characterized in that that the thermal insulation layer (11) from plates or long fiber modules. Ofen nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, daß die thermische Isolationsschicht (11) aus aluminiumsilikathaltigem, insbesondere mullithaltigem Aluminiumoxid besteht.Oven according to one of the preceding claims, characterized characterized in that the thermal insulation layer (11) made of aluminum silicate, in particular aluminum oxide containing mullite. Ofen nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, daß er an mindestens einer Wand mehrere parallel zueinander und im Abstand voneinander angeordnete Mikrowellenschlitzhohlleiter (7, 8) aufweist.Oven according to one of the preceding claims, characterized characterized in that he had several on at least one wall parallel to and at a distance from each other arranged microwave slot waveguide (7, 8). Ofen nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, daß er an mindestens einer Seitenwand (5) mehrere senkrecht angeordnete Mikrowellenschlitzhohlleiter (7) aufweist.Oven according to one of the preceding claims, characterized characterized in that it is on at least one side wall (5) a plurality of vertically arranged microwave slot waveguides (7). Ofen nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, daß seine Deckwand (4) und seine beiden Seitenwände (5) mit Mikrowellenschlitzhohlleitern (7, 8) versehen sind.Oven according to one of the preceding claims, characterized characterized in that its top wall (4) and its two Side walls (5) with microwave slot waveguides (7, 8) are provided. Ofen nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, daß die dem Mikrowellenschlitzhohlleiter (7, 8) zugeordnete Öffnung (13) der metallischen Auskleidung (12) mit einem dielektrischen Material verschlossen ist.Oven according to one of the preceding claims, characterized characterized in that the microwave slot waveguide (7, 8) associated opening (13) of the metallic Lining (12) with a dielectric material is closed. Ofen nach einem der Ansprüche 5 -8, dadurch gekennzeichnet, daß die an gegenüberliegenden Wänden (5) angeordneten Mikrowellenschlitzhohlleiter (7) versetzt zueinander angeordnet sind.Oven according to one of claims 5 -8, characterized in that that arranged on opposite walls (5) Microwave slot waveguide (7) offset are arranged to each other. Ofen nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, daß jedem Mikrowellenschlitzhohlleiter (7, 8) an einem Ende ein in diesen einspeisendes Magnetron (10) zugeordnet ist.Oven according to one of the preceding claims, characterized characterized in that each microwave slot waveguide (7, 8) at one end a magnetron feeding into this (10) is assigned.
EP97119140A 1996-12-24 1997-11-03 Oven for high temperature heat treatment Expired - Lifetime EP0851712B1 (en)

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DE19654356A DE19654356C2 (en) 1996-12-24 1996-12-24 High-temperature heat treatment furnace
DE19654356 1996-12-24

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DE19654356C2 (en) 2002-06-13
ATE288181T1 (en) 2005-02-15
EP0851712A3 (en) 1998-09-16
DE59712184D1 (en) 2005-03-03
EP0851712B1 (en) 2005-01-26
DE19654356A1 (en) 1998-06-25

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