EP0850750A2 - Process for producing a microstructured body, a casting frame and an integrated optical object - Google Patents

Abstract

A method for producing a microstructured body (100) is proposed. A casting mold (20) is formed from a casting frame and a base plate (10) and filled with reaction casting compound (27). After curing, the casting frame is part of the component, while the base plate can be reused. Since both the base plate and the frame were manufactured using microstructure technology, this method results in a highly precise, yet inexpensive component that can be manufactured in large quantities. <IMAGE>

Description

State of the art

The invention is based on a method of manufacture of a microstructured body, a microstructured one Body, a method of manufacturing a casting frame, a casting frame, a method for producing a integrated-optical component and an integrated-optical Component according to the preamble of the independent claims.

WO 94/08236 describes a process for the production microstructured body in the form of a lid for an integrated optical circuit known. In doing so, a optical component inserted in a stamp, which Has adjustment elements. When inserting the optical Component by means of the adjustment elements on the form stamp adjusted. By pouring a curable liquid around it optical component around becomes a lid, which the contains optical component, manufactured. In the casting process is it an injection molding or injection molding process, in which the curable liquid under pressure and / or Influenced temperature into a desired shape and is cured. The curable liquid exhibits this process has a high viscosity, which is relative exact outer dimensions of the resulting optical Component allows, but limits on the moldability puts.

DE-P 44 34 832.0 describes a process for the production of a micro-structured body as an integrated optical Cover component described, in which a prefabricated, trough-shaped container as an outer border for the resulting Lid component acts by placing this container on a Form stamp is placed and a reaction casting compound in the container is poured. The container is there preferably made of a plastic, such as Polycarbonate, and can be manufactured as an injection molded part.

DE-P 19 517 087.3 describes a cast frame which as an outer border for one to be manufactured microstructured body and serves when putting on a form stamp with at least one locking element in the Form stamp snaps into place. By this snapping one happens Adjustment of the casting frame on the form stamp, which at the advantage of producing the microstructured body offers that the microstructuring of the microstructured Body with respect to the position of the casting frame in a always constant position is arranged. That one The casting frame described is also in the injection molding process producible.

Advantages of the invention

The inventive method for producing a microstructured body and a cast frame with the In contrast, features of the independent claims Advantage that a precisely defined outer contour for the further use of the microstructured body for Is available because both for the production of the Cast frame as well as for the manufacture of the microstructured body itself on methods of Microstructure technology is used. Due to the low viscosity of many curable, flowable Masses, especially of reaction casting masses and the like associated good creep ability is extremely precise Impression of one with elevations with almost any complicated arrangement of cavities Form stamps available. In addition, the so produced microstructured body has a high level of planarity Bottom on. In addition, a reaction casting compound is considered curable, flowable mass in development and Manufacture for small series cheaper than comparable Injection molding compounds. It also has the use of a Reaction casting technology has the advantage that no high mechanical forces on the microstructured body or the curable, flowable mass at Manufacturing process act, causing a shift in Casting frame relative to the second base plate due to the mechanical forces is almost impossible. Likewise thus the risk of shifting from insertable electrical, optical or electro-optical components decreased.

By those listed in the dependent claims Measures are advantageous further developments in the Process specified independent claims possible.

Heating the second bottom mold plate to initiate the The reaction process is advantageous because the as Reaction casting compound designed curable, flowable This heats the mass from the die, which is why polymerizing the curable, flowable mass done first. This gives a precise structure exactly where the greatest accuracy is required.

Heating the second bottom mold plate from hers The bottom side in a large area brings the advantage that an approximately flat temperature curve in about generated parallel to the surface of the second base plate is, whereby an extremely homogeneous reaction process on the Surface of the second bottom mold plate is created, which the Accuracy and planarity of the lid component increased.

The selection of one ferromagnetic material for the second Bottom form plate and placing it on a support plate where the first base plate by means of a magnetic field is held, proves to be advantageous because for Holding the first base plate then no additional mechanical holding elements must be provided.

Wells on the bottom of the microstructured Bodies can advantageously be used in the following process steps Adjustment can be used. You can also go to Serve inclusion of a polymer adhesive, so that in the Depressions optical waveguides arise.

The adjustment of the contour frame for the production of the Cast frame on at least one frame adjustment element on the first bottom mold plate has the advantage that an active No adjustment, for example by optical methods is necessary, and that a high adjustment accuracy is guaranteed.

The mistake of the insert element for the production of the Cast frame with at least one hole in which at least one Carrier element arises offers the particular advantage that a cast frame with a carrier element can be produced, which for holding electrical, optical or can serve electro-optical components. It also increases the support element the stability of the cast frame.

The application of at least one electrical, optical or electro-optical component opened on the carrier element that made with the help of the cast frame microstructured body the area of application of the integrated optics, the carrier element holding the bracket of electrical, optical or electro-optical Component takes over.

Placing at least one continuous notch on the Top of the insert is an advantageous one Design, as by pouring out the notch corresponding Struts for the cast frame arise, its stability increase.

The creation of grooves in the casting frame has the advantage that the grooves for versatile applications, such as can be used as adjusting elements.

Likewise, the functional reliability of the manufactured microstructured body increases when the risk of a Slipping of a hardened curable flowable Mass to the bottom of the casting frame through an auxiliary structure is reduced.

It is also particularly advantageous to deepen the first bottom mold plate together with a roughly identical recess in the second bottom plate manufacture that in the manufacture of the microstructured body serves as a form stamp, because thus the same masks for the two wells can be used. In addition, the precision of the resulting microstructured body advantageously increased, since the associated process parameters are the same have affected the dimensions of both recesses and the casting frame then particularly precisely in the trough-shaped Deepening can intervene.

drawing

Embodiments of the invention are in the drawing shown and in the following description explained.

Figur 1 a-d eine Übersicht über das Fertigungsverfahren für den mikrostrukturierten Körper,

Figur 2 eine perspektivische Ansicht einer ersten Bodenformplatte,

Figur 3a eine perspektivische Ansicht eines Einsatzelements,

Figur 3b eine perspektivische Ansicht eines Konturenrahmens,

Figur 4a eine Draufsicht auf eine Anordnung mit einer ersten Bodenformplatte, einem Konturenrahmen und einem eingelegten Einsatzelement,

Figur 4b eine perspektivische Ansicht derselben Anordnung,

Figur 5a eine perspektivische Ansicht eines Gußrahmens,

Figur 5b eine Draufsicht auf die Unterseite eines Gußrahmens mit einem Heizelement,

Figur 5c eine aufgeschnittene Seitenansicht desselben Gußrahmens,

Figur 6 eine perspektivische Ansicht der zweiten Bodenformplatte,

Figur 7 eine aufgeschnittene Seitenansicht auf einen Gußrahmen, der im Formstempel eingelegt ist,

Figuren 8 a-d ein Verfahren zur Herstellung einer ersten oder einer zweiten Bodenformplatte,

Figur 9 einen Schnitt durch eine Gußvorrichtung mit einem auf einem Formstempel aufgesetzten Gußrahmen und mit einem elektrooptischen Bauelement,

Figur 10a eine perspektivische Ansicht eines mikrostrukturierten Körpers,

Figur 10b eine Draufsicht auf die Unterseite eines mikrostrukturierten Körpers,

Figur 11 eine perspektivische Ansicht eines Einsatzelements zur Herstellung eines taperförmigen, optischen Polarisators,

Figur 12 eine aufgeschnittene Seitenansicht auf einen Gußrahmen mit einem Trägerelement mit variablem Dickenverlauf.

Show it:

FIG. 1 ad shows an overview of the manufacturing process for the microstructured body,

FIG. 2 shows a perspective view of a first base plate,

FIG. 3a shows a perspective view of an insert element,

FIG. 3b shows a perspective view of a contour frame,

FIG. 4a shows a plan view of an arrangement with a first base plate, a contour frame and an inserted insert element,

FIG. 4b shows a perspective view of the same arrangement,

FIG. 5a shows a perspective view of a cast frame,

FIG. 5b shows a top view of the underside of a cast frame with a heating element,

FIG. 5c shows a cut-away side view of the same casting frame,

FIG. 6 shows a perspective view of the second base plate,

FIG. 7 shows a cut-away side view of a cast frame which is inserted in the die.

8 a shows a method for producing a first or a second base plate,

FIG. 9 shows a section through a casting device with a casting frame placed on a die and with an electro-optical component,

FIG. 10a shows a perspective view of a microstructured body,

FIG. 10b shows a top view of the underside of a microstructured body,

FIG. 11 shows a perspective view of an insert element for producing a taper-shaped, optical polarizer,

Figure 12 is a cut side view of a cast frame with a support element with a variable thickness profile.

Description of the embodiments

A method for producing a microstructured body is shown in FIGS. 1a to 1d.
FIG. 1 a shows the cross section through a form stamp 10, which is also referred to as the second bottom form plate in the following description. The shaped stamp has a structure on its surface, which will be discussed in more detail in the description of the following figures, in particular Figures 6-8.

In a second step, a stamp 10 is used Cast frame 20 placed. The form stamp 10 forms together with the cast frame 20 an upwardly open container, such as it shows Figure 1b.

This container from the die 10 and casting frame 20 is in a further step with a curable, flowable Mass 27 filled. After filling, the curable, flowable mass 27 from. Figure 1c shows the container the completed filling.

The curing is followed by the demolding, whereby the Microstructure is released from the stamp 10. The cast frame 20, which was initially part of the used as a mold was open to the top, has with the cured curable, flowable mass 27 connected and is now part of the microstructured body 100. This microstructured body is shown in Figure 1d. Through the Manufacture of both the casting frame 20 and the Form stamp 10 with microstructural methods a particularly precise shape both on the Bottom as well as on the side surfaces of the reach microstructured body 100.

Microstructural engineering methods in the sense used here are processes for machining and shaping Materials in which at least one for shaping Lithography step is provided, the lithography also with X-rays, lasers or ultraviolet light can be carried out.

In the following, this is shown in FIGS. 1a to 1c presented methods using exemplary embodiments explained in more detail. This is based on Figures 2 to 5 Production of the casting frame 20 shown, Figures 6 to 9 give the manufacture of the microstructured body 100 again.

FIG. 2 shows a first base plate 53, in a process for the production of the casting frame 20 Application. The first bottom mold plate 53 is as flat, approximately cuboid plate formed in the a recess 55 is arranged with a wall 111. she has a rectangular basic shape, on the narrow Adjoin two rectangular attachment fittings on the end faces form the narrow sides of the recess 55. In the recess 55, a plurality of elevations 47, 50 are also arranged. From that are two ridge-shaped placeholder elevations 50 in Aligned with each other approximately along the longitudinal axis the recess 55 arranged. There are also three Roof ridge-shaped embossing elevations 47 are provided, of which two in their ridge line, and the third roof ridge-shaped embossment 47 to the other two roof ridge-shaped embossing elevations 47 offset and approximately centered on the space between the other two roof ridge-shaped embossing elevations 47 is arranged. The Ridge lines of all three embossing elevations 47 run parallel to the ridge line of the ridge-shaped Placeholder surveys 50.

The first base plate 53 also has Frame adjustment element 69, which in the form of a cylindrical recess next to the recess 55 in the first bottom mold plate 53 is formed. All Elevations 47, 50 can only be seen as examples. It is also provided other arrangements and shapes to use.

For the production of the casting frame 20 is in addition to the first Bottom mold plate 53 requires an insert element 60 which is shown in Figure 3a. The insert element 60 has in the essentially a cuboid shape with a longer and one shorter side. There are two on the shorter sides Extensions with a roughly square plan attached. Runs approximately parallel to the longer side on the Top one also in its cross section cuboidal longitudinal notch 58 and approximately parallel to shorter side of the insert member 60 at the top one in cross section cuboid cross notch 54. Approximately perpendicular to the two notches 54, 58 is in the Insert element 60 arranged a U-shaped hole 67, which the insert element 60 from the top to the bottom penetrates. As a result, a tongue 59 projects into the interior of the Insert element 60.

Furthermore, in addition to the manufacture of the casting frame 20 first bottom plate 53 and the insert member 60 Contour frame 70 required, which is shown in Figure 3 b is. The contour frame 70 is in the form of a flat disc formed in which an opening 68 is arranged. Of the Breakthrough 68 has the same shape as that Recess 55 in the first bottom mold plate 53. However the lateral dimensions of the opening 68 in this Example chosen larger than that of the recess 55. The Contour frame 70 has two on the underside cylindrical raster elevations 99, which in the Perspective representation in Figure 3 b not visible are. They have 68 relative to the axes of the opening the same distance as the frame adjustment members 69 relative to the axes of the recess 55 of the first Bottom mold plate 53.

The insert element 60 designed in this way is inserted into the Indentation 55 of the first base plate 53 inserted and fixed by spot welding, screwing as in the Figures 4 a and b is shown. The numbering from the Figures 1 to 3 were retained. Furthermore Insert element 60 is on the first bottom mold plate 53 Contour frame 70 placed and fixed, as above described and shown in Figure 3 b, in the form of a flat disc with an opening 68 is formed. Of the Breakthrough 68 has the same shape as that Indentation 55 in the first bottom mold plate 53, but with larger dimensions of the opening 68 than that of the Indentation 55, so that after placing the contour frame 70 on the first bottom plate 53 in the opening 68 a extending along the inner wall of the opening 68 Stage has arisen. The contour frame 70 snaps by means of the raster elevation 99, preferably secured against rotation, in the Frame adjustment element 69 of the first base plate 53. The insert element 60 is in turn dimensioned such that its outer walls to lie within the recess 55 come in such a way that between the outer walls of the insert element 60 and the inner wall of the recess 55 a gap extending around the insert element 60 remains. The tongue 59 of the insert element 60 comes here between the three ridge-shaped embossing elevations 47 to lie. The longitudinal notch 58 is approximately aligned with the Ridge line of the ridge-shaped placeholder elevations 50.

As shown in Figure 4 b, in this arrangement filled curable, flowable cast frame compound 56, the in all recesses, especially in hole 67, penetrates. The fill level is chosen so that the hole 67 and the notches 58, 59 are still filled, but the Surface of the insert element 60 is no longer wetted. This is followed by a curing process in which the curable, flowable cast frame mass 56 to a solid Structures solidified. After demolding the solidified structure of contour frame 70, first base plate 53 and Insert element 60 is a cast frame 20 as a structure emerged. The resulting cast frame 20 shows how already described, the carrier element 80.

In Figures 5 a-c, a cast frame 20 is shown as he by the one described in the previous FIGS. 2-4 Casting process is generated. Figure 5a shows a perspective Illustration of the casting frame 20. FIG. 5b shows a view from below, i.e. to the side, which is made by molding the Indentation 55 of the first base plate 53 has arisen. Figure 5c shows a cut side view along the dashed line shown in Figure 5b. On the Cast frame shown in Figures 5b and 5c was also shown in applied a conductor structure in a further step, which will be described in more detail below.

The cast frame 20 has the shape of a cuboid, elongated frame on each of its narrow sides merges into a cuboid-shaped attachment frame piece. In the Transverse direction to the longer sides of the cuboid, elongated frame extending sides of the cuboid Neck frame pieces are slightly shorter than in this example the narrow sides of the cuboid, elongated frame.

Other configurations of the outer contour of the casting frame 20 are also possible and provided. The casting frame 20 is hollow in its interior, so that it is only one along the outline of the cuboid, elongated Frame and the cuboid extension frame pieces extending wall 74. The wall 74 instructs an all-round on its top on its inner edge Paragraph on, which serves as a locking element 75. Only on the End faces of the rectangular extension pieces of the cast frame 20, the locking element 75 has one in the form of a inverse roof ridge-shaped notch shaped lip groove 72. The locking element 75 is also referred to as a lip designated. Inside the cast frame 20 are for Improve stability along the length of the casting frame 20 extending longitudinal strut 73 and two transversely transverse struts 71 arranged for this purpose. The Place gaps between the struts 71, 73 Fill openings 21. At one of the two crossing points between one of the cross struts 71 and the longitudinal strut 73 a U-shaped support element 80 is arranged. The Carrier element 80 has an approximately rectangular cross section. The two legs of the U-shaped support element 80 are here, for example, arranged parallel to the struts 71, 73.

The carrier element 80 is formed as a casting of the hole 67. At the manufacture of the microstructured body achieves it Importance because it is used to hold an electrical, optical or electro-optical component is used. In figure 5b and c are views of the mold frame 20 in which already after casting onto the carrier element 80 electro-optical component in the form of a heating element 85 was applied. For this purpose, the heating element 85 has one meandering heating loop 84, at the two ends of each a connection contact 82 is arranged.

It can be seen that the Carrier element 80 to be applied thereon later electrical, optical or electro-optical component 85 was adjusted to a minimum of cast frame mass 56 too consume and at the same time good curability and Ensure mold release for the carrier element 80. The In principle, however, the design of the carrier element 80 is free selectable. In addition, 80 are inverted roof ridges in the carrier element Carrier element grooves 45 to recognize the by molding the ridge-shaped embossed elevations 47 have arisen. The inverse roof ridge-shaped lip grooves 72 are also by molding the ridge-shaped Placeholder surveys 50 were created. The struts 71, 73 originated from the notches 54, 58. The lip 75 is due the size difference between the recess 68 in Contour frame 70 and the recess 55 were created.

The one provided with the electro-optical component 85 Casting frame 20 is used in the following to produce a microstructured body can be used. The so far Cast frame 20 described forms a component of this required mold.

Another part of the mold for making the microstructured component is shown in Figure 6. This is a second base plate 93, which forms a stamp 10. The second bottom mold plate 93 has a trough-shaped depression 61, the outer one Floor plan and its lateral dimensions are identical to the outer shape and the lateral dimensions of the Indentation 55 of the first bottom mold plate 53 trough-shaped depression 61 has a wall 64 which serves as a counter-locking element. Inside the tub-shaped Recess 61 are along their longitudinal axis, each at the end the trough-shaped recess 61 two ridge-shaped Fiber adjustment bumps 62 arranged, of which, because of the perspective view, only one to see in Figure 6 is. In addition, three are ridge-shaped Frame adjustment bumps 46 are provided, two of which are in align their ridge line, the ridge lines of all three Frame adjustment bumps 46 parallel to the ridge line of the Roof ridge-shaped placeholder elevations 50 run. The third ridge-shaped frame adjustment elevation 46 is one of the two other ridge-shaped frame adjustment elevations 46 offset and is approximately in the middle of the space between the other two ridge-shaped frame adjustment bumps 46 arranged. The three ridge-shaped Frame adjustment elevations 46 and the two ridge-shaped Fiber adjustment bumps 62 correspond in position to the three roof ridge-shaped embossing elevations 47 and the two ridge-shaped placeholder elevations 50 in the recess 55 of the first bottom mold plate. 62 and 50 have roughly the same dimensions, but 46 must be defined be higher than 47 by the amount that will be finished later Component the distance of the electrical optical component from Waveguide / top edge determined.

Between the two ridge-shaped fiber adjustment bumps 62 runs a cuboid elevation 63 cuboid elevation 63 consists of a main arm, which is a straight line connection between the two roof ridge-shaped fiber adjustment bumps 62, and one Bypass arm, which is from the main arm when it is connected with a ridge-shaped fiber adjustment bump 62 branches parallel to the main arm between the two aligned roof ridge-shaped frame adjustment elevations 46 one side and the individually standing ridge-shaped Frame adjustment bump 46 on the other side passes, and when connecting the main arm with the other ridge-shaped fiber adjustment elevation 62 again united with the main arm. Left and right of each one standing ridge-shaped frame adjustment elevation 46, in the extension of the ridge line, one more each cube-shaped elevation 81 arranged. The second Bottom mold plate 93 faces, for reasons that are still disclosed unlike the first bottom mold plate 53 no frame adjustment element 69. Furthermore, the Representation in Figure 6 a line AA ', which as Section line for the sectional drawing in Figure 7 is used.

The casting frame 20 is now placed on the die 10, so that the two parts combine to form a mold. This is exemplified in the cross-sectional representation in Figure 7 shown. Here, the casting frame 20, as in 5a and 5b was shown, to which in FIG. 6 second bottom mold plate 93 shown. The Arrangement was made along a plane that was perpendicular to the main arm of the cuboid elevation 63, and the Includes line AA 'of Figure 6, cut open.

The casting frame 20 is with the lip 75 down on the Form stamp 10 placed, the lip 75 sealing engages within the counter-locking element 64. When hanging up of the casting frame 20 onto the trough-shaped depression 61 reach the inverse roof ridge-shaped carrier element grooves 45 in engagement with the roof-shaped frame adjustment elevations 46, so that a highly precise adjustment of the support member 80 and an electrical, optical or electro-optical component with respect to the trough-shaped Deepening 61 takes place. In the embodiment shown here the support element is fixed so that the attached heating loop 84 over the main arm of the cuboid elevation 63, but not above the bypass arm comes to rest. The cross strut 71 and the longitudinal struts 73 of the casting frame 20 support the seal between the lip 75 and counter-locking element 64 by kinking the Prevent cast frame 20.

It is possible that pressure on the casting frame 10 of this bends slightly outside so that the lip 75 snaps a little deeper into the counter-locking element 64.

The device shown in Figure 7 provides a mold to manufacture a microstructured body As in connection with FIG. 9a, casting is carried out more precisely will be described, a curable liquid, preferably a reaction casting compound, in the interior of this Cast mold and cured there. After curing and demolding from the die 10 thus arises microstructured body, on the underside of which Negative impression of the surface in the tub-shaped Well 61 of the die 10 is present, and its has now become an integral part of the previous mold frame 20 is.

It is useful at this point, before describing the Making the microstructured body a way to Manufacture of the first bottom mold plate 53 and the second Describe bottom form plate 93. This is done using the Figures 8 a-d

An original microstructure, which will also be called Master in the following a single-crystal silicon substrate 200. However, other materials are also provided. Roof-shaped structures 201 can, for example, by anisotropic etching and structures approximately perpendicular to the Walls 202 arranged on the substrate surface can be generated, for example, by ion etching. A exemplary structure can be seen in FIG. 8a.

In Figure 8b, the structure of Figure 8a is with a Protective layer 203 covered.

The arrangement from Figure 8b is in turn etched so that the protected part is raised after removing the protective layer and has a mesa wall 204, as shown in FIG. 8c. In the Figure 8c structure shown is the master structure.

The first is created by molding the master 205 Negative impression 206 of the master, which is shown in FIG. 8d is. In particular, an impression wall 207 is created as Impression of the mesa wall 204 Usually the master structure is lost. The first negative impression 206 can, however, by molding the first two times Negative impression 206 can be reproduced.

In the manufacture of the first bottom mold plate 53 and the second bottom plate 93 by means of this method is before everything to ensure that the recess 55 and the trough-shaped depression 61 in its lateral dimensions are as identical as possible. For example, this is guaranteed if the two master structures with one common photolithography process with one for both Recesses 55, 61 mask as identical as possible were, or at least the masks for the two Wells were made in the same step. With These measures ensure that the casting frame 20 and the die 10 laterally form-fitting to a Let the mold connect. The lithography step does that described method for a microstructural Process in the sense of the above definition.

A particularly simple assembly between the casting frame 20th and second bottom mold plate 93 results if the Manufacturing of the masks precautions are taken that the position of the ridge lines of the roof-shaped embossing elevations 47 in the first base plate and the position of the ridge lines of the roof-shaped frame adjustment bumps 46 in the second Bottom plate match with the highest precision, just like the roof angles. If doing so the amount of roof-shaped embossing elevations 47 in the first Bottom form plate is slightly less than that of the ridge-shaped frame adjustment bumps 46 in the second Bottom form plate, results between the electrical or optical ... element on with tolerances of <1 µm defined, vertical distance to the surface, that is to the optical waveguide, the ... structuring Body. The lateral distance is also through Locking precisely determined. In the shown here Embodiment should be at least the height difference a few microns larger than the height of the cuboid elevations 48. The mesa walls 204 of the master specimens for the first and the second base plate are then preferably chosen the same.

This ensures that when placing the cast frame 20 on the second bottom mold plate 93 the first with the Locking element 75 in the trough-shaped recess 61 of the second bottom mold plate 93 is laterally fixed. At Further lowering of the casting frame 20 then the inverted roof-shaped Carrier element grooves 45 form-fitting on the ridge-shaped frame adjustment bumps 46 in the second Bottom mold plate before other parts of the casting frame 20th the bottom of the trough-shaped depression 61 of the second Touch bottom plate 93. This ensures that the lateral and vertical positioning of the support element 80 with a component possibly attached to it relative to the cuboid elevations 48 automatically becomes particularly precise. In addition, is under the cast frame 20 still enough ground clearance for the cuboid Surveys. For illustration, at this point the description of Figure 7 referenced.

The etching depth for V-grooves is easiest at through anisotropic etching produced inverse roof-shaped Determine deepenings because here the depth determination a determination of a lateral dimension is traceable, which is particularly easy. The specialist are also still further manufacturing processes for the first and the second Base plate using the with the help of Figure 13 Process steps described a-d obviously.

The following is the process for making the microstructured body using the example of an integrated optical Cover component described. Here comes one Casting mold with a stamp 10, which of the second Bottom mold plate 93 is formed, and a cast frame 20 for Use which is described by way of example in FIG. 7 Mold resembles, as well as a casting device, as shown in figure 9 can be seen and is described below. Of the The cast frame 20 used has one in this example overhead floor in which only one Filling opening 21 is arranged.

FIG. 9 shows a flat base plate 18 which two roughly parallel to each other and vertical to Base plate 18 has aligned guide rods 13. Furthermore, a flat base plate 14 is provided, which has two holes through which the guide rods 13 of the Protrude base plate 18. The base plate 14 lies with her The bottom is flush with the top of the base plate 18. Furthermore, a flat intermediate plate 11 is provided, which also has two holes through which the Guide rods 13 protrude. The intermediate plate 11 lies with its underside on the top of the base plate 14. The Base plate 14 has approximately parallel to its flat Top several cylindrical ones lying side by side Recesses 15, each being cylindrical Recess 15 a sleeve 16 with an arranged therein Wire helix 17 is arranged. When flowing through electrical current through the wire coils 17 give this a heat radiation 36 from. The intermediate plate 11 has in Area between the two guide rods 13 on their Top of an approximately circular recess 35 in the an approximately circular disk-shaped, flat carrier plate 12 is insertable. The carrier plate 12 is approximately a perfect fit in the recess 35, with several in the Carrier plate 12 arranged blind holes 34 with their opening point down to the intermediate plate 11. In the blind holes 34 there are several permanent magnets 33. On the The top of the carrier plate 12 is a flat die 10 arranged that several on its top ridge-shaped elevations 19 and also several cuboid elevations 48. On the cuboid Elevations 48 are supported by an electro-optical component 26 from, the outer flanks of the ridge-shaped Surveys 19 concern. The cast frame is also provided 20, the open side down, towards the stamp 10 shows. The cast frame 20 lies with its through End face of its side walls formed on the border Form stamp 10 and is with the locking element 75 in the Counter-locking element 64 of the die 10 snapped into place so that the form stamp 10 a floor for the interior of the Cast frame 20 forms. The carrier element 80 protrudes from the Top of the casting frame 20 to the bottom of the casting frame. The mechanical pressure from the bottom of the cast frame must be so be large that 45 in 46 ??. The casting frame 20 is in his Interior above the surface of the die 10 at least partially with a curable, flowable Mass 27 filled. As a curable, flowable mass 27 serves, for example, a reaction casting compound. The Reaction casting compound 27 encloses the electro-optical Component 26. The casting frame 20 is partly in one Bracket recess 22 in a flat cover plate 24 supported. The cast frame 20 has in its overhead Bottom the fill opening 21, which with a recess 23, which is arranged in the cover plate 24, is aligned.

The cover plate 24 is also by means of two Bores through which the guide rods 13 protrude through the Guide rods 13 guided and is over two coil springs 30, which are arranged around the guide rods 13, pressed down. The spiral springs are supported upwards 30 from a stop plate 29, each with one Pressure screw 28 are fastened on the guide rod 13. A pipette 31 is also provided, by means of which the Reaction casting compound 27 through the recess 23 and the Filling opening 21 can be filled into the casting frame 20. Of the Cast frame 20 also has near the border in its Interior of an auxiliary structure 32 in the form of a Sidewalls on the inside of the continuous heel,

The cast frame 20 with the support member 80 and the electro-optical component 26 is first in the Cover plate 24 inserted so that its bottom in the Bracket recess 22 comes to rest. Preferably the bracket recess 22 formed so that a light Clamping the cast frame 20 is done. The casting frame 20 is made preferably made of a plastic, such as Polyamide (PA) or polyoxymethylene (POM), which is not must be optically transparent. Are POM or PA particularly suitable because of the negative Surface tension compared to the reaction casting compound (e.g. MMA) high planarity of the impression area and a relative Mobility between cast frame 20 and solidified Reaction casting compound 27 results. Next is the one described Arrangement first completed so far that the Base plate 18, base plate 14 and intermediate plate 11 lie on top of each other. Likewise, the carrier plate 12 with the in the blind holes 34 inserted permanent magnets 33 in the Well 35 of the intermediate plate 11 inserted.

The stamp 10 is then placed on the carrier plate 12 hung up. Through the permanent magnets 33 Form stamp 10 fixed in its position. The form stamp 10 is aligned so that it has a defined position in with respect to the cast frame 20 to be fitted later. Then the cover plate 24 with the inserted casting frame 20 with the opening of the casting frame 20 down on the Arrangement plugged in, the guide rods 13 the mechanical rough guidance of the cover plate 24 take over. The Locking element 75 and the counter-locking element 64 provide for Meeting for the adjustment between the stamp 10 and cast frame 20. For this purpose, it can also be provided perform slight lateral movement or shaking until a It snaps into place and is detected if necessary. At the Placing the cast frame 20 is the electro-optical Component 26 between the ridge-shaped elevations 19 and the cuboid elevations 48, making it easy Print an automatic passive fine adjustment of the electro-optical component 26 with respect to the die 10 is effected. By attaching the coil springs 30 together with the stop plates 29 and the pressure screws 28 is the cover plate 24 with the trough-shaped container 20th in the locked position on the surface of the Form stamp 10 pressed. Then through the recess 23rd and the filling opening 21 by means of the pipette 31 liquid reaction casting compound 27 in the interior of the Cast frame 20 filled. When the liquid flows in Reaction casting compound 27 in the casting frame 20 is everyone accessible space within the mold frame 20 from the Reaction casting compound 27 filled. The reaction casting compound 27 preferably has a low viscosity. It is not necessary, the casting frame 20 entirely with the Reaction casting compound 27 to fill.

This arrangement is now heated from below by electrical current is sent through the wire helices 17. This heats the sleeves 16 and then the Entire base plate 14. The heat radiation 36 thus arrives from below through the base plate 14, the intermediate plate 11, the carrier plate 12 and the die 10 for the latter Top. The wire helices 17 are preferably so evenly distributed in the base plate 14 that a approximately flat heat radiation 36 from bottom to top in Direction to the die 10 results. The liquid Reaction casting compound 27 consists e.g. from a polymerizable monomer, which with Thermal initiators is mixed. Through the thermal initiators now begins with increasing temperature from a certain Threshold temperature a polymerization of the reaction casting compound 27. Since the heat radiation 36 from below to the die 10 is carried out, the polymerization begins first at the Surface of the die 10 closest surface of the Reaction casting compound 27.

The reaction casting compound 27 is preferably so composed that thermal initiators with at least two different temperature thresholds are included. Then heating the arrangement to the first is sufficient Temperature threshold to at least a partial Polymerize the reaction casting compound 27 to effect. The Eliminate the remaining monomer Heating to the second threshold temperature can then be done in one separate heater, regardless of the one shown here Arrangement. For use in integrated optics It makes sense to use one at least in the range around the optical wavelengths to be used optically transparent reaction casting compound 27 to choose low-loss guidance of the optical signals is achieved can be.

Likewise, for pressing the casting frame 20 to the Form stamp 10 each equivalent pressure generation (hydraulics, Pneumatics etc.). The heating can also be on any other way (combustion, induction etc.) respectively. Instead of the guide rods 13 can also other guiding or positioning devices or - step down. After the reaction casting compound has hardened 27 the arrangement is demolded again by the Casting frame 20 with the solidified reaction casting compound 27 and the electro-optical component 26 embedded therein existing, created integrated-optical cover component from the die 10 and from the mounting recess 22 Will get removed.

As a special feature, the reaction casting compound 27 is provided also to be heated from the casting frame 20 by one or several of the electrical or electro-optical components 26, 85, 87 is used for this. To do this, the electrical or electro-optical component 26, 85, 87 also in this way be trained that, for example, by energizing heat development takes place there. Especially the heating element 85 shown in FIG. 5a is suitable for this. To feed the current to the heating element 85 can corresponding supply lines, for example from Top of the casting frame 20, that is, through the filler openings 21 and / or the carrier element 80 extending therethrough Serve wires, or the like. Such heating elements 85 can can also be arranged in larger numbers. It is also provided that the same heating element 85 that for Heating the reaction casting compound 27 was used, also in resulting microstructured body has a function which does not necessarily have to be a heating function, like also heating elements 85 can be arranged, which according to the Completion of the microstructured body none at all Exercise more functions and count as lost structures.

A microstructured body 100 is shown in FIG shown using the in FIG. 9 shown casting device and that shown in Figure 7 Casting mold from casting frame 20 and die 10 was generated.

This is a perspective view of the Underside, that is, the side that has the imprint of the Has recess 61 of the second bottom mold plate 93. The perspective representation was however not strict adhered to; some elements inside are dashed of the microstructured body.

The basic shape of the microstructured body 100 is a rectangle with the shorter sides in the middle attached smaller rectangles. Located all around the edge a level 101, which is different from the level in the previous Cast frame 20 originates. The slightly offset part stage 101 is the former sealing lip 64 of Casting frame 20. On the surface facing the viewer there are three roof-shaped depressions 108, which Negative prints of the ridge-shaped Frame adjustment bumps 46 in the second bottom mold plate 93 represent. The footprints of the cube-shaped elevations 81 in the second bottom mold plate 93 the cubes are Wells, which represent contact guides 104. By the contact guides make it possible to make two cutouts the heating loop 84, which is located inside the microstructured body, but in Figure 9 was nevertheless shown in dashed lines to achieve and possibly also electrical contact with them to manufacture. Along the longitudinal axis of the microstructured Body 101 are two fiber guides 103, which as roof-shaped depressions are formed. You are the Negative prints of the former ridge-shaped Fiber adjustment bumps 62 in the second bottom mold plate 93. The fiber guides 103 are guided by a waveguide groove 105 connected. The waveguide groove 105 consists of a Main waveguide groove 106, which is a straight line connection between the two fiber guides 103 and one Waveguide bypass groove 107, which of the Main waveguide groove 106 when connected to one roof ridge-shaped fiber guide 103 branches parallel to the Main waveguide groove 106 between the two aligned ridge-shaped frame adjustment bumps 46 on one Side and the two contact guides 104 on the other Leads through, and the connection of the Main arm with the other ridge-shaped fiber guide 103 reunited with the main waveguide groove 106.

The microstructured body 100 can now become one integrated optical component can be completed by the Grooves 105,106, 107 with a hardening, optical transparent material. Here is too take into account that the refractive index of the material for Filling of the grooves must be larger than that of the curable, flowable mass 27. For insertion and Sealing of the hardening, optically transparent Material in the grooves 105, 106, 107 are several methods known. It is also provided by means of the above described method a cover as a second to produce microstructured component.

In Figure 10b is another, after that described above Processed integrated optical component shown. Here again the numbering was removed Figures 1 to 9 retained. An example is here shown as in the viewer in the drawing facing bottom of the microstructured Body several depressions 65, 66 have arisen. From that are two than on the narrow side of the microstructured Body-lying recesses 66 by molding the Ridge-shaped elevations 62 arose and thus point an inverse roof ridge-shaped cross section. The others two recesses 65, however, are by molding the cuboid elevation 63 arose and thus have one cuboid cross-section. In addition, one Roof ridge-shaped depression 108 available, which for Positioning of the support member 80 was used, and after the microstructured body is finished was filled up. In this example, a different form stamp 10 than in the representations in the figure 6 each two cuboid depressions 65 and a total five inverted roof ridge-shaped depressions 66. In general, it is optional how many surveys 62, 63, 81, 108 and in what form they are on the stamp 10 are arranged. In the solidified reaction casting compound 27 the carrier element 80 is embedded with the heating element 85, which is adjacent to the cuboid depressions 65. Where the cube-shaped elevations 81 were located in the micro-structured body cube-shaped recesses 83 emerged through which the connection contacts 82 are visible. Thus, the contacts 82 are accessible to one electrical contacting.

A plug element 76 is also shown in FIG. 10b, which is the inverse shape of the front of the has microstructured body. This makes it possible Plug element 76, for example in the direction of the arrow on the Slide on the microstructured body. Preferably plus a particularly precise and play-free fit for the Plug element 76 and the corresponding part of microstructured body selected. In particular it is provided the plug element 76 with a roof tongue provided which in the roof-shaped recess 108 on Integrated optical component engages and thus a backlash-free fit and securing guaranteed. Likewise it is preferable if the outer contour of the microstructured Body particularly precise in relation to the location of the Wells 65, 66 was made. That’s it namely ensures that optical fibers 77, which in Plug element 76 are held during the plugging process with high precision over the inverse roof ridge-shaped Indentations 66 arrive where they pass through these indentations 66 then finally be fine-tuned automatically. At the Connecting to the optical fibers 77, it is advantageous first the plug element 76 in the direction of the arrow on the postponing microstructured body, the Optical fibers 77 still a predetermined distance from the Have surface of the microstructured body and then the optical fibers 77 with the plug-in element 76 on the To lower the surface of the microstructured body.

With this arrangement it is particularly possible to get an exact optical coupling of the optical fibers 77 to the to achieve cuboid depressions 65. Because it is provided, the microstructured body in one further processing step with a polymer adhesive coat the at least the cuboid depressions 65 fills and thus forms a waveguide there, this will ensure a good coupling between the Optical fibers 77 and the resulting Allows waveguides. Alternatively or simultaneously with the optical fibers 77 can also be electrical Contact elements can be provided in the plug element 76, the when plugging onto the microstructured body with corresponding contacts, for example one regarding the Precise outer contour of the integrated optical cover component positioned cast electrical, optical or electro-optical component, in particular one Thermal actuator, come into contact. The direction of attachment can also vary.

Both for the bottom mold plates and for that Alternative shapes are also conceivable and provided which a microstructured body with other functionality. The further education of the micro-structured body into an integrated-optical Component is provided here, but not mandatory.

Another embodiment for the insert element 60 shows Figure 11. For better clarity, a Part of the insert element broken out. The intended Insert element 60 is symmetrical with respect to a plane, which includes lines AA 'and CC'. Of the cuboid base body of the insert element 60 was with two roughly parallel to its shorter side Cross notches 54 provided. The longitudinal notch 67 is in this Example, however, not cuboid. Rather, you are on the Plane cross section of a parabola similar. The depth of the notch is such that it just touches the base of the insert element 60, and your cross-section projected onto a plane perpendicular to BB ' is rectangular.

With this insert element 60 it is possible with the otherwise the same arrangement as in the figures 4a, b shown to produce a further casting frame 20, at which the carrier element 80 corresponds to the shape of Longitudinal notch 67 also has a variable thickness profile.

The resulting with the insert element 60 from Figure 11 Cast frame 20 is in cross section along the plane of symmetry shown in Figure 12. Where the cross notches 54 are again the two cross struts 71 were created, which is not in the illustration chosen for FIG. 12 are visible, and were therefore only indicated by dashed lines. The carrier element 80 forms an approximately perpendicular to the Cross struts 71 extending web, which in the middle of the Casting frame 20 has its greatest thickness.

After removal from the mold, the carrier element 80 is initially applied a metal layer 78 and then a dielectric layer 79 upset. Its thickness has been exaggerated in Figure 12 shown. These two layers 78, 79 emulate Determining the microstructured body together optical component in the form of a tapered polarizer 87. In the subsequent manufacture of the microstructured Body with this cast frame 20 creates an arrangement in which the two layers 78, 79 continuously on the underside of the microstructured body back and forth. If there is an optical fiber there, it functions microstructured body with the taper element 87 as optical polarizer by light whose electrical Folarization vector lies parallel to the metal layer, is damped less than light with one orthogonal polarization. The dielectric layer 79 serves to adjust this effect, since one is too close Approach of the metal layer 78 to the optical waveguide Excessive damping also of the passable Folarization type would cause. To make the microstructured body with an optical polarizer is a cast frame 20 according to Figure 12 on a second Bottom mold plate, which is the second Base molding plate 93 from Figure 6 is similar and at least one has cuboid elevation 63 with a main arm, so that a mold is formed. Making one microstructured body 100 then occurs as above specified. By filling the waveguide groove with one optically transparent, with a higher refractive index Polymer adhesive then creates a waveguide that directly is coupled to the integrated optical taper element 87.

Claims (26)

Process for making a microstructured Body, characterized in that a mold at least partially filled with a liquid reaction casting compound (27) is that the reaction casting compound (27) is cured that the mold has a mold frame (20) and a second one Base mold plate (93) that at least parts of the Casting mold, in particular the casting frame (20), part of the microstructured body, the casting frame (20) and the second bottom mold plate (93) with microstructural methods are produced. A method according to claim 1, characterized in that curing the reaction casting compound (27) by heating the same, preferably over a large area from the bottom, happens. Method according to one of claims 1 or 2, characterized characterized in that for the second bottom mold plate (93) ferromagnetic material is selected and that before Placing the cast frame (20) on the second base plate (93) the second bottom mold plate (93) on a carrier plate (12) is placed where it is by means of a magnetic field is held. Method according to one of the preceding claims, characterized in that in the recess (61) second base plate (93) at least one elevation is arranged, when casting with the reaction casting compound (27) at least one corresponding recess in the integrated optical component. Method according to one of the preceding claims, characterized in that the cast frame (20) with at least one inverted roof-shaped support structure (45) is provided that the second bottom plate (93) with at least one roof-shaped frame adjustment elevations (46) is provided and thus the lateral and vertical Adjustment of the cast frame on the base plate achieved becomes. Method according to one of the preceding claims, characterized in that the cast frame (20) with at least one support element (80) is provided which is at least one electrical, optical or electro-optical component (26, 85) on the carrier element (80) is applied before the casting frame (20) on the second bottom mold plate (93) to form the mold is launched. A method according to claim 6, characterized in that an electrical or electro-optical element with a Current is applied that it heats up, and that the reaction casting compound (27) is thereby cured. Process for the production of a casting frame (20), thereby characterized in that a first bottom mold plate (53) Contour frame (70) is placed, the breakthrough (68), whose lateral dimensions are at least the same are as large as the lateral dimensions of one in the first Bottom mold plate (53) arranged recess (55) and that at least one insert element (60) in the recess (55) is used so that at least laterally on all sides between the at least one insert element (60) and the Contour frame (70) remains a gap and that by casting a curable flowable casting frame mass (56) in the Gap and subsequent curing and demolding of the Cast frame (20) is produced. A method of manufacturing a casting frame according to claim 8, characterized in that the contour frame (70) over at least one frame adjustment element (69) on the first Bottom mold plate (53) is adjusted. A method of manufacturing a casting frame according to claim 8 or 9, characterized in that the insert element (60) with at least one carrier element recess (67) is provided, in which also the curable flowable casting frame mass (56) is poured so that at their hardening in the carrier element recess (67) at least one support element (80) as a firmly connected part of the resulting casting frame (20) is formed. Process for producing a casting frame according to a of claims 7 to 10, characterized in that on the the first bottom mold plate (53) facing away from the top Insert element (60) at least one approximately horizontally extending continuous notch (58, 54) is arranged in which is also the curable, pourable casting frame mass (56) is poured so that when they harden in the notch (58, 54) at least one strut (71, 73) as fixed connected part of the resulting casting frame (20) is formed becomes. Process for producing a casting frame according to a of claims 7 to 11, characterized in that in the Well (55) at least one elevation (50, 47) arranged is that when pouring with the curable flowable Cast frame mass (56) at least one corresponding recess (72, 45) in the resulting casting frame (20). Process for producing a casting frame according to a of claims 7 to 12, characterized in that in Cast frame (20) arranged at least one auxiliary structure (32) or is produced after the production of a microstructured body by means of the resulting Cast frame (20) the risk of slipping one solidified curable flowable mass (27) to the ground the cast frame (20) reduced. Process for producing a casting frame according to a of claims 7 to 13, characterized in that the Recess (55) in the first bottom mold plate (53) together with a roughly lateral dimension identical, trough-shaped recess 61 in a second Bottom mold plate (93) is produced, which at the Manufacturing a microstructured body under Use of that created by means of the depression (55) Cast frame (20) as a stamp (10) for placing the Cast frame (20) is used. Process for producing a first base plate (53) and a second bottom mold plate (93), the first Base plate for the production of a cast frame (20) is used, with the second bottom mold plate (93) for a mold Producing a microstructured body (100), the casting frame (20) after the casting process is completed integral part of the microstructured body (100) is characterized in that the first bottom mold plate (53) and the second bottom mold plate (93) each through Impression of a master (205) with a mesa wall (204), the floor plan of the mesa wall (204) of the master (205) for the first base plate (53) and the Floor plan of the mesa wall (204) of the master (205) for the second Base plate (93) identical lateral dimensions and wherein the protective layer (203) for the Production of the mesa wall (204) of the master (205) for the first bottom mold plate (53) and the protective layer (203) for the manufacture of the mesa wall (204) of the master (205) for the second bottom mold plate (93) preferably with the same or masks were made with identical masks. Microstructured body (100), thereby characterized in that it comprises a cast frame (20) which at least partially with one cured by reaction Reaction casting compound (27) is filled, during which Harden the cast frame (20) with a second one Bottom mold plate (93) formed a mold, and that the Cast frame (20) and the second bottom plate (93) with microstructural methods were produced. Microstructured body (100) according to claim 16, characterized in that the cast frame (20) at least has a carrier element (80) on which an optical, arranged electrical or electro-optical component is. Microstructured body according to claim 16 or 17, characterized in that in the solidified Reaction casting compound at least one recess (42.43) is arranged. Integrated optical component with one Microstructured body (100) according to claim 18, characterized characterized in that the recess (42,43) with a Filling compound (51) is filled, and that the filled Depression (42,43) serves as a waveguide. Cast frame for the manufacture of a microstructured Body (100), in which the casting frame (20) on a second Bottom mold plate (93) is placed and then a Filling a curable flowable mass (27) into the Cast frame (20) takes place, with at least one on the Underside of the casting frame (20) lying opening, thereby characterized in that the cast frame (20) with at least one Carrier element (80), which for holding at least one electrical, optical or electro-optical component (26, 85) and at least one opening for filling the curable flowable mass is provided. Cast frame according to claim 20, characterized in that at least one latching element (75) on its underside is arranged, when placing the cast frame (20) the second bottom mold plate (93) in the manufacture of the microstructured body into a corresponding one Counter-locking element (64) on the second base plate (93) snaps into place. Cast frame according to one of claims 20 or 21, characterized characterized in that it is capable of locking element (75) has a defined outer contour. Cast frame according to one of claims 20 to 22, characterized characterized in that the latching element (75) has a lip has the sealing in one in the second Bottom mold plate (93) arranged trough-shaped depression (61) engages. Cast frame according to one of claims 20 to 23, characterized characterized in that it has at least one filling opening (21) for the curable flowable mass (27). Cast frame according to one of claims 20 to 24, characterized characterized in that a plug element (76) can be plugged on, in which at least one optical fiber (77) is supported. Cast frame according to one of claims 20 to 25, characterized characterized in that it has at least one auxiliary structure (32) has after the manufacture of the microstructured Body the risk of slipping the solidified curable flowable mass (27) to the bottom of the Cast frame (20) reduced.

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