EP0848823A3 - Acceleration detection device - Google Patents

Acceleration detection device

Info

Publication number
EP0848823A3
EP0848823A3 EP97923288A EP97923288A EP0848823A3 EP 0848823 A3 EP0848823 A3 EP 0848823A3 EP 97923288 A EP97923288 A EP 97923288A EP 97923288 A EP97923288 A EP 97923288A EP 0848823 A3 EP0848823 A3 EP 0848823A3
Authority
EP
European Patent Office
Prior art keywords
detection device
acceleration detection
acceleration
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP97923288A
Other languages
German (de)
French (fr)
Other versions
EP0848823A2 (en
Inventor
Mark André DE SAMBER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of EP0848823A2 publication Critical patent/EP0848823A2/en
Publication of EP0848823A3 publication Critical patent/EP0848823A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P1/00—Details of instruments
    • G01P1/02—Housings
    • G01P1/023—Housings for acceleration measuring devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
EP97923288A 1996-07-08 1997-06-10 Acceleration detection device Withdrawn EP0848823A3 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP96201900 1996-07-08
EP96201900 1996-07-08
PCT/IB1997/000671 WO1998001761A2 (en) 1996-07-08 1997-06-10 Acceleration detection device

Publications (2)

Publication Number Publication Date
EP0848823A2 EP0848823A2 (en) 1998-06-24
EP0848823A3 true EP0848823A3 (en) 1999-05-06

Family

ID=8224154

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97923288A Withdrawn EP0848823A3 (en) 1996-07-08 1997-06-10 Acceleration detection device

Country Status (4)

Country Link
EP (1) EP0848823A3 (en)
JP (1) JPH11513118A (en)
KR (1) KR19990044488A (en)
WO (1) WO1998001761A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2403052A1 (en) * 2001-01-24 2002-08-01 The Regents Of The University Of Michigan High-q micromechanical device and method of tuning same
FR2817050A1 (en) * 2001-03-07 2002-05-24 Commissariat Energie Atomique High transmission rate optical telecommunication switching network manufacture method having optical guide channel row/columns with optical switch each intersection manufactured metallisation /multilayered etching
US7137300B2 (en) * 2003-03-19 2006-11-21 California Institute Of Technology Parylene capacitive accelerometer utilizing electrical fringing field sensing and method of making

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4676103A (en) * 1985-12-12 1987-06-30 Diesel Kiki Co., Ltd. Acceleration or inclination sensors
DE3919190A1 (en) * 1989-06-13 1990-12-20 Vdo Schindling ACCELERATION SENSOR
DE4222472C2 (en) * 1992-07-09 1998-07-02 Bosch Gmbh Robert Acceleration sensor

Also Published As

Publication number Publication date
JPH11513118A (en) 1999-11-09
WO1998001761A2 (en) 1998-01-15
KR19990044488A (en) 1999-06-25
WO1998001761A3 (en) 1998-04-09
EP0848823A2 (en) 1998-06-24

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Legal Events

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