EP0807965A3 - Method of manufacturing layered ferroelectric Bi containing film - Google Patents

Method of manufacturing layered ferroelectric Bi containing film Download PDF

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Publication number
EP0807965A3
EP0807965A3 EP97107761A EP97107761A EP0807965A3 EP 0807965 A3 EP0807965 A3 EP 0807965A3 EP 97107761 A EP97107761 A EP 97107761A EP 97107761 A EP97107761 A EP 97107761A EP 0807965 A3 EP0807965 A3 EP 0807965A3
Authority
EP
European Patent Office
Prior art keywords
containing film
layered ferroelectric
manufacturing layered
ferroelectric
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP97107761A
Other languages
German (de)
French (fr)
Other versions
EP0807965A2 (en
EP0807965B1 (en
Inventor
Yukoh Hochido
Hidekimi Kadokura
Masamichi Matsumoto
Koji Arita
Masamichi Azuma
Tatsuo Otsuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kojundo Kagaku Kenkyusho KK
Panasonic Holdings Corp
Symetrix Corp
Original Assignee
Kojundo Kagaku Kenkyusho KK
Matsushita Electronics Corp
Symetrix Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP11935096A external-priority patent/JP3503790B2/en
Priority claimed from JP12201496A external-priority patent/JP3503791B2/en
Application filed by Kojundo Kagaku Kenkyusho KK, Matsushita Electronics Corp, Symetrix Corp filed Critical Kojundo Kagaku Kenkyusho KK
Publication of EP0807965A2 publication Critical patent/EP0807965A2/en
Publication of EP0807965A3 publication Critical patent/EP0807965A3/en
Application granted granted Critical
Publication of EP0807965B1 publication Critical patent/EP0807965B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C23C18/1208—Oxides, e.g. ceramics
    • C23C18/1216—Metal oxides
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/69—Inorganic materials
    • H10P14/692—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses
    • H10P14/6938—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses the material containing at least one metal element, e.g. metal oxides, metal oxynitrides or metal oxycarbides
    • H10P14/69398—Inorganic materials composed of oxides, glassy oxides or oxide-based glasses the material containing at least one metal element, e.g. metal oxides, metal oxynitrides or metal oxycarbides the material having a perovskite structure, e.g. BaTiO3
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/125—Process of deposition of the inorganic material
    • C23C18/1279—Process of deposition of the inorganic material performed under reactive atmosphere, e.g. oxidising or reducing atmospheres
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/68—Capacitors having no potential barriers
    • H10D1/682—Capacitors having no potential barriers having dielectrics comprising perovskite structures
    • H10D1/684—Capacitors having no potential barriers having dielectrics comprising perovskite structures the dielectrics comprising multiple layers, e.g. comprising buffer layers, seed layers or gradient layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6326—Deposition processes
    • H10P14/6328—Deposition from the gas or vapour phase
    • H10P14/6334—Deposition from the gas or vapour phase using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
    • H10P14/6336—Deposition from the gas or vapour phase using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6326—Deposition processes
    • H10P14/6328—Deposition from the gas or vapour phase
    • H10P14/6334—Deposition from the gas or vapour phase using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
    • H10P14/6338—Deposition from the gas or vapour phase using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition the reactions being activated by other means than plasma or thermal, e.g. photo-CVD
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/68—Capacitors having no potential barriers
    • H10D1/682—Capacitors having no potential barriers having dielectrics comprising perovskite structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6326—Deposition processes
    • H10P14/6328—Deposition from the gas or vapour phase
    • H10P14/6334—Deposition from the gas or vapour phase using decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/63—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the formation processes
    • H10P14/6326—Deposition processes
    • H10P14/6342—Liquid deposition, e.g. spin-coating, sol-gel techniques or spray coating
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/66—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the type of materials
    • H10P14/668—Formation of materials, e.g. in the shape of layers or pillars of insulating materials characterised by the type of materials the materials being characterised by the deposition precursor materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
  • Semiconductor Memories (AREA)
  • Inorganic Insulating Materials (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)

Abstract

A method of forming a layered ferroelectric Bi-containing thin film on a substrate with good reproducibility, using a mixed composition of a Bi-containing organic compound and a metal polyalkoxide compound by at least one technique selected from the group consisting of molecular deposition such as CVD, and spincoat-sintering.
EP97107761A 1996-05-14 1997-05-13 Method of manufacturing layered ferroelectric Bi containing film Expired - Lifetime EP0807965B1 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP11935096A JP3503790B2 (en) 1996-05-14 1996-05-14 Method for producing Bi layer structure ferroelectric thin film
JP119350/96 1996-05-14
JP11935096 1996-05-14
JP12201496 1996-05-16
JP12201496A JP3503791B2 (en) 1996-05-16 1996-05-16 Method for producing Bi layer structure ferroelectric thin film
JP122014/96 1996-05-16

Publications (3)

Publication Number Publication Date
EP0807965A2 EP0807965A2 (en) 1997-11-19
EP0807965A3 true EP0807965A3 (en) 1998-02-04
EP0807965B1 EP0807965B1 (en) 2004-08-04

Family

ID=26457115

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97107761A Expired - Lifetime EP0807965B1 (en) 1996-05-14 1997-05-13 Method of manufacturing layered ferroelectric Bi containing film

Country Status (9)

Country Link
US (1) US5932281A (en)
EP (1) EP0807965B1 (en)
KR (1) KR100295870B1 (en)
CN (1) CN1113399C (en)
CA (1) CA2205189C (en)
DE (1) DE69730076T2 (en)
MY (1) MY119325A (en)
SG (1) SG55315A1 (en)
TW (1) TW346676B (en)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6500489B1 (en) 1996-11-27 2002-12-31 Advanced Technology Materials, Inc. Low temperature CVD processes for preparing ferroelectric films using Bi alcoxides
JP3195265B2 (en) * 1997-01-18 2001-08-06 東京応化工業株式会社 Coating solution for forming Bi-based ferroelectric thin film, ferroelectric thin film formed using the same, and ferroelectric memory
KR19980080718A (en) * 1997-03-27 1998-11-25 이데이노부유끼 Layered Crystal Structure Oxide, Manufacturing Method thereof, and Memory Device Using the Same
JPH10313097A (en) * 1997-05-13 1998-11-24 Sharp Corp Ferroelectric thin film, manufacturing method and device comprising ferroelectric thin film
AT407586B (en) * 1997-05-23 2001-04-25 Sez Semiconduct Equip Zubehoer ARRANGEMENT FOR TREATING DISC-SHAPED OBJECTS, ESPECIALLY SILICON WAFERS
GB9814048D0 (en) 1998-06-30 1998-08-26 Inorgtech Ltd Novel precursors for the growth of heterometal oxide films by MOCVD
US6495878B1 (en) 1999-08-02 2002-12-17 Symetrix Corporation Interlayer oxide containing thin films for high dielectric constant application
WO2000077832A2 (en) * 1999-06-10 2000-12-21 Symetrix Corporation Metal oxide thin films for high dielectric constant applications
JP3592218B2 (en) * 2000-09-06 2004-11-24 株式会社ヒューモラボラトリー Manufacturing method of crystal thin film
US6787181B2 (en) 2001-10-26 2004-09-07 Symetrix Corporation Chemical vapor deposition method of making layered superlattice materials using trimethylbismuth
KR20030042482A (en) * 2001-11-22 2003-06-02 (주) 디엔에프솔루션 Chemical solution of bismuth lanthanum titanate for ferroelectric thin film
EP1533835A1 (en) * 2002-05-29 2005-05-25 Kabushiki Kaisha Watanabe Shoko Vaporizer, various apparatuses including the same and method of vaporization
JP2004128195A (en) * 2002-10-02 2004-04-22 Oki Electric Ind Co Ltd Method for manufacturing protective film
JP4720969B2 (en) * 2003-03-28 2011-07-13 セイコーエプソン株式会社 Ferroelectric film, piezoelectric film, ferroelectric memory, and piezoelectric element
US7132300B2 (en) * 2003-06-30 2006-11-07 Matsushita Electric Industrial Co., Ltd. Method for forming ferroelectric film and semiconductor device
JP4029295B2 (en) * 2004-02-05 2008-01-09 セイコーエプソン株式会社 Ferroelectric memory
JP4632765B2 (en) * 2004-10-21 2011-02-16 株式会社Adeka Alkoxide compound, raw material for thin film formation, and method for producing thin film
CN100505169C (en) * 2006-01-26 2009-06-24 财团法人工业技术研究院 Dielectric layer and composition and method for forming the same
US20080220542A1 (en) * 2007-03-07 2008-09-11 Micheli Adolph L Low-fire ferroelectric material
KR101398884B1 (en) * 2013-12-31 2014-05-27 한국세라믹기술원 Suspension feeder for suspension plasma spraying device suitable for fabricating functionally graded coating layer

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05136471A (en) * 1991-11-14 1993-06-01 Rohm Co Ltd Method for forming fine pattern of ferroelectric thin film
EP0674019A1 (en) * 1994-03-14 1995-09-27 Texas Instruments Incorporated Semiconductor devices and their method of manufacture
US5478610A (en) * 1994-09-02 1995-12-26 Ceram Incorporated Metalorganic chemical vapor deposition of layered structure oxides
WO1996030938A2 (en) * 1995-03-17 1996-10-03 Symetrix Corporation Process for fabricating layered superlattice materials and making electronic devices including same

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Publication number Priority date Publication date Assignee Title
US5323035A (en) * 1992-10-13 1994-06-21 Glenn Leedy Interconnection structure for integrated circuits and method for making same
US5688565A (en) * 1988-12-27 1997-11-18 Symetrix Corporation Misted deposition method of fabricating layered superlattice materials
US5612082A (en) * 1991-12-13 1997-03-18 Symetrix Corporation Process for making metal oxides
US5527567A (en) * 1994-09-02 1996-06-18 Ceram Incorporated Metalorganic chemical vapor deposition of layered structure oxides

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05136471A (en) * 1991-11-14 1993-06-01 Rohm Co Ltd Method for forming fine pattern of ferroelectric thin film
EP0674019A1 (en) * 1994-03-14 1995-09-27 Texas Instruments Incorporated Semiconductor devices and their method of manufacture
US5478610A (en) * 1994-09-02 1995-12-26 Ceram Incorporated Metalorganic chemical vapor deposition of layered structure oxides
WO1996030938A2 (en) * 1995-03-17 1996-10-03 Symetrix Corporation Process for fabricating layered superlattice materials and making electronic devices including same

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 017, no. 518 (E - 1434) 17 September 1993 (1993-09-17) *
SESHU B DESU ET AL: "FATIGUE-FREE SRBI2(TAXNB1-X)2O9 FERROELECTRIC THIN FILMS", MATERIALS SCIENCE AND ENGINEERING B, vol. B34, no. 1, October 1995 (1995-10-01), pages L04 - L08, XP000620582 *
WANG H ET AL: "FERROELECTRIC THIN FILMS OF BISMUTH TITANATE PREPARED BY MOCVD", MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, vol. 243, 1992, pages 213 - 216, XP000677688 *

Also Published As

Publication number Publication date
EP0807965A2 (en) 1997-11-19
SG55315A1 (en) 1998-12-21
TW346676B (en) 1998-12-01
DE69730076T2 (en) 2005-01-27
CN1182286A (en) 1998-05-20
CN1113399C (en) 2003-07-02
DE69730076D1 (en) 2004-09-09
CA2205189C (en) 2005-06-21
KR100295870B1 (en) 2001-10-24
CA2205189A1 (en) 1997-11-14
EP0807965B1 (en) 2004-08-04
KR970077335A (en) 1997-12-12
MY119325A (en) 2005-05-31
US5932281A (en) 1999-08-03

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