EP0637402A1 - Method of making a dual-poly non-volatile memory device using a third polysilicon layer - Google Patents
Method of making a dual-poly non-volatile memory device using a third polysilicon layerInfo
- Publication number
- EP0637402A1 EP0637402A1 EP94910657A EP94910657A EP0637402A1 EP 0637402 A1 EP0637402 A1 EP 0637402A1 EP 94910657 A EP94910657 A EP 94910657A EP 94910657 A EP94910657 A EP 94910657A EP 0637402 A1 EP0637402 A1 EP 0637402A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- forming
- transistor
- polysilicon
- volatile memory
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/105—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including field-effect components
Abstract
Description
Claims
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/020,291 US5340764A (en) | 1993-02-19 | 1993-02-19 | Integration of high performance submicron CMOS and dual-poly non-volatile memory devices using a third polysilicon layer |
PCT/US1994/000890 WO1994019823A1 (en) | 1993-02-19 | 1994-01-26 | Method of making a dual-poly non-volatile memory device using a third polysilicon layer |
US20291 | 2001-12-14 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0637402A1 true EP0637402A1 (en) | 1995-02-08 |
EP0637402A4 EP0637402A4 (en) | 1995-07-19 |
EP0637402B1 EP0637402B1 (en) | 2000-09-06 |
Family
ID=21797787
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP94910657A Expired - Lifetime EP0637402B1 (en) | 1993-02-19 | 1994-01-26 | Method of making a dual-poly non-volatile memory device using a third polysilicon layer |
Country Status (6)
Country | Link |
---|---|
US (2) | US5340764A (en) |
EP (1) | EP0637402B1 (en) |
JP (1) | JP3563403B2 (en) |
KR (1) | KR100284107B1 (en) |
DE (1) | DE69425797T2 (en) |
WO (1) | WO1994019823A1 (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE69528971D1 (en) * | 1995-06-30 | 2003-01-09 | St Microelectronics Srl | Method of manufacturing a circuit containing non-volatile memory cells and edge transistors of at least two different types, and corresponding IC |
DE19614010C2 (en) * | 1996-04-09 | 2002-09-19 | Infineon Technologies Ag | Semiconductor component with adjustable current amplification based on a tunnel current controlled avalanche breakdown and method for its production |
US5937310A (en) * | 1996-04-29 | 1999-08-10 | Advanced Micro Devices, Inc. | Reduced bird's beak field oxidation process using nitrogen implanted into active region |
US5882993A (en) * | 1996-08-19 | 1999-03-16 | Advanced Micro Devices, Inc. | Integrated circuit with differing gate oxide thickness and process for making same |
US6033943A (en) * | 1996-08-23 | 2000-03-07 | Advanced Micro Devices, Inc. | Dual gate oxide thickness integrated circuit and process for making same |
JPH10247725A (en) * | 1997-03-05 | 1998-09-14 | Mitsubishi Electric Corp | Semiconductor device and its manufacturing method |
US5872376A (en) * | 1997-03-06 | 1999-02-16 | Advanced Micro Devices, Inc. | Oxide formation technique using thin film silicon deposition |
US5962914A (en) * | 1998-01-14 | 1999-10-05 | Advanced Micro Devices, Inc. | Reduced bird's beak field oxidation process using nitrogen implanted into active region |
KR100258881B1 (en) * | 1998-02-27 | 2000-06-15 | 김영환 | Method for manufacturing semiconductor device |
US6531364B1 (en) | 1998-08-05 | 2003-03-11 | Advanced Micro Devices, Inc. | Advanced fabrication technique to form ultra thin gate dielectric using a sacrificial polysilicon seed layer |
TW449919B (en) | 1998-12-18 | 2001-08-11 | Koninkl Philips Electronics Nv | A method of manufacturing a semiconductor device |
EP1107309B1 (en) * | 1999-12-06 | 2010-10-13 | STMicroelectronics Srl | Manufacturing process for non-volatile floating gate memory cells and control circuitry |
TW587314B (en) * | 2003-02-19 | 2004-05-11 | Winbond Electronics Corp | Method of fabricating flash memory |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58184768A (en) * | 1982-04-23 | 1983-10-28 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS62150781A (en) * | 1985-12-25 | 1987-07-04 | Hitachi Ltd | Manufacture of semiconductor integrated circuit device |
EP0435534A2 (en) * | 1989-12-14 | 1991-07-03 | STMicroelectronics S.r.l. | Method of manufacturing integrated circuit and integrated circuit made thereby |
JPH04348072A (en) * | 1990-07-13 | 1992-12-03 | Hitachi Ltd | Manufacture of nonvolatile semiconductor memory device |
US5175120A (en) * | 1991-10-11 | 1992-12-29 | Micron Technology, Inc. | Method of processing a semiconductor wafer to form an array of nonvolatile memory devices employing floating gate transistors and peripheral area having CMOS transistors |
US5194924A (en) * | 1984-05-23 | 1993-03-16 | Hitachi, Ltd. | Semiconductor device of an LDD structure having a floating gate |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5188976A (en) * | 1990-07-13 | 1993-02-23 | Hitachi, Ltd. | Manufacturing method of non-volatile semiconductor memory device |
-
1993
- 1993-02-19 US US08/020,291 patent/US5340764A/en not_active Ceased
-
1994
- 1994-01-26 EP EP94910657A patent/EP0637402B1/en not_active Expired - Lifetime
- 1994-01-26 WO PCT/US1994/000890 patent/WO1994019823A1/en active IP Right Grant
- 1994-01-26 JP JP51897994A patent/JP3563403B2/en not_active Expired - Fee Related
- 1994-01-26 KR KR1019940703676A patent/KR100284107B1/en not_active IP Right Cessation
- 1994-01-26 DE DE69425797T patent/DE69425797T2/en not_active Expired - Lifetime
-
1998
- 1998-10-07 US US09/167,919 patent/USRE36777E/en not_active Expired - Lifetime
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58184768A (en) * | 1982-04-23 | 1983-10-28 | Oki Electric Ind Co Ltd | Manufacture of semiconductor device |
US5194924A (en) * | 1984-05-23 | 1993-03-16 | Hitachi, Ltd. | Semiconductor device of an LDD structure having a floating gate |
JPS62150781A (en) * | 1985-12-25 | 1987-07-04 | Hitachi Ltd | Manufacture of semiconductor integrated circuit device |
EP0435534A2 (en) * | 1989-12-14 | 1991-07-03 | STMicroelectronics S.r.l. | Method of manufacturing integrated circuit and integrated circuit made thereby |
JPH04348072A (en) * | 1990-07-13 | 1992-12-03 | Hitachi Ltd | Manufacture of nonvolatile semiconductor memory device |
US5175120A (en) * | 1991-10-11 | 1992-12-29 | Micron Technology, Inc. | Method of processing a semiconductor wafer to form an array of nonvolatile memory devices employing floating gate transistors and peripheral area having CMOS transistors |
Non-Patent Citations (4)
Title |
---|
IEEE JOURNAL OF SOLID-STATE CIRCUITS, AUG. 1987, USA, vol. SC-22,no. 4, ISSN 0018-9200, pages 548-552, MASUOKA F ET AL 'A 256-kbit flash E/sup 2/PROM using triple-polysilicon technology' * |
PATENT ABSTRACTS OF JAPAN vol. 008 no. 021 (E-224) ,28 January 1984 & JP-A-58 184768 (OKI DENKI KOGYO KK) 28 October 1983, * |
PATENT ABSTRACTS OF JAPAN vol. 011 no. 384 (E-565) ,15 December 1987 & JP-A-62 150781 (HITACHI LTD) 4 July 1987, * |
See also references of WO9419823A1 * |
Also Published As
Publication number | Publication date |
---|---|
EP0637402B1 (en) | 2000-09-06 |
EP0637402A4 (en) | 1995-07-19 |
KR950701141A (en) | 1995-02-20 |
DE69425797D1 (en) | 2000-10-12 |
US5340764A (en) | 1994-08-23 |
DE69425797T2 (en) | 2001-04-05 |
JPH07506226A (en) | 1995-07-06 |
WO1994019823A1 (en) | 1994-09-01 |
USRE36777E (en) | 2000-07-11 |
JP3563403B2 (en) | 2004-09-08 |
KR100284107B1 (en) | 2001-04-02 |
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