EP0541400A3 - Anti-stick electrostatic chuck for a low pressure environment - Google Patents
Anti-stick electrostatic chuck for a low pressure environment Download PDFInfo
- Publication number
- EP0541400A3 EP0541400A3 EP19920310212 EP92310212A EP0541400A3 EP 0541400 A3 EP0541400 A3 EP 0541400A3 EP 19920310212 EP19920310212 EP 19920310212 EP 92310212 A EP92310212 A EP 92310212A EP 0541400 A3 EP0541400 A3 EP 0541400A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- stick
- low pressure
- electrostatic chuck
- pressure environment
- environment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S269/00—Work holders
- Y10S269/903—Work holder for electrical circuit assemblages or wiring systems
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T279/00—Chucks or sockets
- Y10T279/23—Chucks or sockets with magnetic or electrostatic means
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Jigs For Machine Tools (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP96107414A EP0734055B1 (en) | 1991-11-07 | 1992-11-09 | Method of manufacturing an electrostatic chuck |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US78922291A | 1991-11-07 | 1991-11-07 | |
US789222 | 1991-11-07 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP96107414A Division EP0734055B1 (en) | 1991-11-07 | 1992-11-09 | Method of manufacturing an electrostatic chuck |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0541400A2 EP0541400A2 (en) | 1993-05-12 |
EP0541400A3 true EP0541400A3 (en) | 1993-06-30 |
EP0541400B1 EP0541400B1 (en) | 1998-03-18 |
Family
ID=25146963
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP92310212A Expired - Lifetime EP0541400B1 (en) | 1991-11-07 | 1992-11-09 | Anti-stick electrostatic chuck for a low pressure environment |
EP96107414A Expired - Lifetime EP0734055B1 (en) | 1991-11-07 | 1992-11-09 | Method of manufacturing an electrostatic chuck |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP96107414A Expired - Lifetime EP0734055B1 (en) | 1991-11-07 | 1992-11-09 | Method of manufacturing an electrostatic chuck |
Country Status (4)
Country | Link |
---|---|
US (1) | US5426558A (en) |
EP (2) | EP0541400B1 (en) |
JP (1) | JP3332251B2 (en) |
DE (2) | DE69224791T2 (en) |
Families Citing this family (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5600530A (en) * | 1992-08-04 | 1997-02-04 | The Morgan Crucible Company Plc | Electrostatic chuck |
US5631803A (en) * | 1995-01-06 | 1997-05-20 | Applied Materials, Inc. | Erosion resistant electrostatic chuck with improved cooling system |
US5883778A (en) * | 1994-02-28 | 1999-03-16 | Applied Materials, Inc. | Electrostatic chuck with fluid flow regulator |
EP0669644B1 (en) * | 1994-02-28 | 1997-08-20 | Applied Materials, Inc. | Electrostatic chuck |
US5535090A (en) * | 1994-03-03 | 1996-07-09 | Sherman; Arthur | Electrostatic chuck |
JPH09213777A (en) * | 1996-01-31 | 1997-08-15 | Kyocera Corp | Electrostatic chuck |
US5754391A (en) * | 1996-05-17 | 1998-05-19 | Saphikon Inc. | Electrostatic chuck |
JP3455026B2 (en) * | 1996-09-30 | 2003-10-06 | 京セラ株式会社 | Electrostatic chuck |
US6529362B2 (en) * | 1997-03-06 | 2003-03-04 | Applied Materials Inc. | Monocrystalline ceramic electrostatic chuck |
US5833073A (en) * | 1997-06-02 | 1998-11-10 | Fluoroware, Inc. | Tacky film frame for electronic device |
US5978202A (en) * | 1997-06-27 | 1999-11-02 | Applied Materials, Inc. | Electrostatic chuck having a thermal transfer regulator pad |
JPH11157953A (en) * | 1997-12-02 | 1999-06-15 | Nhk Spring Co Ltd | Structure composed of ceramic and metal and electrostatic chuck device produced by using the structure |
JP3356115B2 (en) * | 1999-05-20 | 2002-12-09 | ウシオ電機株式会社 | Resist curing equipment |
US6248642B1 (en) | 1999-06-24 | 2001-06-19 | Ibis Technology Corporation | SIMOX using controlled water vapor for oxygen implants |
US6452195B1 (en) | 1999-08-18 | 2002-09-17 | Ibis Technology Corporation | Wafer holding pin |
US6155436A (en) * | 1999-08-18 | 2000-12-05 | Ibis Technology Corporation | Arc inhibiting wafer holder assembly |
US6433342B1 (en) | 1999-08-18 | 2002-08-13 | Ibis Technology Corporation | Coated wafer holding pin |
US6423975B1 (en) | 1999-08-18 | 2002-07-23 | Ibis Technology, Inc. | Wafer holder for simox processing |
JP3492325B2 (en) * | 2000-03-06 | 2004-02-03 | キヤノン株式会社 | Method of manufacturing image display device |
JP3851489B2 (en) * | 2000-04-27 | 2006-11-29 | 日本発条株式会社 | Electrostatic chuck |
TWI254403B (en) * | 2000-05-19 | 2006-05-01 | Ngk Insulators Ltd | Electrostatic clamper, and electrostatic attracting structures |
US6583980B1 (en) * | 2000-08-18 | 2003-06-24 | Applied Materials Inc. | Substrate support tolerant to thermal expansion stresses |
DE10330901B4 (en) * | 2002-07-08 | 2010-02-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Electrostatic fixing element and method for its production |
US20070139855A1 (en) * | 2005-12-21 | 2007-06-21 | Asml Netherlands B.V. | Lithographic apparatus and method of manufacturing an electrostatic clamp for a lithographic apparatus |
CN101221893B (en) * | 2007-01-12 | 2010-05-19 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Method for promoting electrostatic charge dissipation on semiconductor chip |
US7667944B2 (en) * | 2007-06-29 | 2010-02-23 | Praxair Technology, Inc. | Polyceramic e-chuck |
US20090075012A1 (en) * | 2007-09-13 | 2009-03-19 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US9194189B2 (en) | 2011-09-19 | 2015-11-24 | Baker Hughes Incorporated | Methods of forming a cutting element for an earth-boring tool, a related cutting element, and an earth-boring tool including such a cutting element |
US9556074B2 (en) * | 2011-11-30 | 2017-01-31 | Component Re-Engineering Company, Inc. | Method for manufacture of a multi-layer plate device |
US9105492B2 (en) | 2012-05-08 | 2015-08-11 | LuxVue Technology Corporation | Compliant micro device transfer head |
US9034754B2 (en) | 2012-05-25 | 2015-05-19 | LuxVue Technology Corporation | Method of forming a micro device transfer head with silicon electrode |
US8569115B1 (en) | 2012-07-06 | 2013-10-29 | LuxVue Technology Corporation | Method of forming a compliant bipolar micro device transfer head with silicon electrodes |
CN103578899B (en) * | 2012-08-06 | 2016-08-24 | 中微半导体设备(上海)有限公司 | Apparatus for processing plasma and electrostatic chuck thereof |
US9236815B2 (en) * | 2012-12-10 | 2016-01-12 | LuxVue Technology Corporation | Compliant micro device transfer head array with metal electrodes |
US9255001B2 (en) | 2012-12-10 | 2016-02-09 | LuxVue Technology Corporation | Micro device transfer head array with metal electrodes |
ES2952036T3 (en) | 2013-06-12 | 2023-10-26 | Rohinni Inc | Backlit keyboard with deposited light generating sources |
KR102298484B1 (en) | 2016-01-15 | 2021-09-03 | 로히니, 엘엘씨. | Apparatus and method for backlighting through a cover on the device |
JP6924618B2 (en) * | 2017-05-30 | 2021-08-25 | 東京エレクトロン株式会社 | Electrostatic chuck and plasma processing equipment |
JP7059064B2 (en) * | 2018-03-26 | 2022-04-25 | 株式会社日立ハイテク | Plasma processing equipment |
JP6583897B1 (en) * | 2018-05-25 | 2019-10-02 | ▲らん▼海精研股▲ふん▼有限公司 | Method for manufacturing ceramic electrostatic chuck |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1991003833A1 (en) * | 1989-09-06 | 1991-03-21 | Mcnc | Electrostatic handling device |
EP0452222A1 (en) * | 1990-04-12 | 1991-10-16 | Commissariat A L'energie Atomique | Electrostatic substrat holder |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6059104B2 (en) * | 1982-02-03 | 1985-12-23 | 株式会社東芝 | electrostatic chuck board |
JPS59124140A (en) * | 1982-12-29 | 1984-07-18 | Fujitsu Ltd | Electrostatic adsorbing device |
JPS61192435A (en) * | 1985-02-21 | 1986-08-27 | Canon Inc | Electrostatic adsorbing holder |
WO1988009054A1 (en) * | 1987-05-06 | 1988-11-17 | Labtam Limited | Electrostatic chuck using ac field excitation |
JP2665242B2 (en) * | 1988-09-19 | 1997-10-22 | 東陶機器株式会社 | Electrostatic chuck |
EP0439000B1 (en) * | 1990-01-25 | 1994-09-14 | Applied Materials, Inc. | Electrostatic clamp and method |
US5166856A (en) * | 1991-01-31 | 1992-11-24 | International Business Machines Corporation | Electrostatic chuck with diamond coating |
US5155652A (en) * | 1991-05-02 | 1992-10-13 | International Business Machines Corporation | Temperature cycling ceramic electrostatic chuck |
-
1992
- 1992-11-09 DE DE69224791T patent/DE69224791T2/en not_active Expired - Fee Related
- 1992-11-09 JP JP32221892A patent/JP3332251B2/en not_active Expired - Fee Related
- 1992-11-09 EP EP92310212A patent/EP0541400B1/en not_active Expired - Lifetime
- 1992-11-09 DE DE69231299T patent/DE69231299T2/en not_active Expired - Fee Related
- 1992-11-09 EP EP96107414A patent/EP0734055B1/en not_active Expired - Lifetime
-
1994
- 1994-03-14 US US08/213,459 patent/US5426558A/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1991003833A1 (en) * | 1989-09-06 | 1991-03-21 | Mcnc | Electrostatic handling device |
EP0452222A1 (en) * | 1990-04-12 | 1991-10-16 | Commissariat A L'energie Atomique | Electrostatic substrat holder |
Also Published As
Publication number | Publication date |
---|---|
DE69231299T2 (en) | 2001-01-18 |
DE69224791T2 (en) | 1998-07-09 |
EP0541400A2 (en) | 1993-05-12 |
JPH05245734A (en) | 1993-09-24 |
EP0734055A3 (en) | 1996-11-27 |
JP3332251B2 (en) | 2002-10-07 |
US5426558A (en) | 1995-06-20 |
DE69231299D1 (en) | 2000-08-31 |
EP0541400B1 (en) | 1998-03-18 |
DE69224791D1 (en) | 1998-04-23 |
EP0734055A2 (en) | 1996-09-25 |
EP0734055B1 (en) | 2000-07-26 |
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