EP0531996A1 - Attachment for screens or similar - Google Patents
Attachment for screens or similar Download PDFInfo
- Publication number
- EP0531996A1 EP0531996A1 EP92115501A EP92115501A EP0531996A1 EP 0531996 A1 EP0531996 A1 EP 0531996A1 EP 92115501 A EP92115501 A EP 92115501A EP 92115501 A EP92115501 A EP 92115501A EP 0531996 A1 EP0531996 A1 EP 0531996A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- layer
- attachment unit
- unit according
- glass pane
- gold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000576 coating method Methods 0.000 claims abstract description 25
- 239000011248 coating agent Substances 0.000 claims abstract description 23
- 239000011521 glass Substances 0.000 claims abstract description 22
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 22
- 229910052737 gold Inorganic materials 0.000 claims abstract description 22
- 239000010931 gold Substances 0.000 claims abstract description 22
- 229910052751 metal Inorganic materials 0.000 claims abstract description 18
- 239000002184 metal Substances 0.000 claims abstract description 18
- 230000003595 spectral effect Effects 0.000 claims abstract description 5
- 239000003989 dielectric material Substances 0.000 claims abstract description 4
- 229910001092 metal group alloy Inorganic materials 0.000 claims abstract description 3
- 239000010410 layer Substances 0.000 claims description 53
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 14
- 239000012790 adhesive layer Substances 0.000 claims description 14
- 229910052681 coesite Inorganic materials 0.000 claims description 7
- 229910052906 cristobalite Inorganic materials 0.000 claims description 7
- 239000000377 silicon dioxide Substances 0.000 claims description 7
- 235000012239 silicon dioxide Nutrition 0.000 claims description 7
- 229910052682 stishovite Inorganic materials 0.000 claims description 7
- 229910052905 tridymite Inorganic materials 0.000 claims description 7
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims description 6
- 229910001120 nichrome Inorganic materials 0.000 claims description 6
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 5
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000006117 anti-reflective coating Substances 0.000 claims description 3
- 229910003437 indium oxide Inorganic materials 0.000 claims description 3
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 2
- 230000003667 anti-reflective effect Effects 0.000 abstract description 7
- 238000010521 absorption reaction Methods 0.000 abstract description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000005329 float glass Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 3
- 239000005368 silicate glass Substances 0.000 description 3
- VVTSZOCINPYFDP-UHFFFAOYSA-N [O].[Ar] Chemical compound [O].[Ar] VVTSZOCINPYFDP-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000012300 argon atmosphere Substances 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000005546 reactive sputtering Methods 0.000 description 2
- 229910052703 rhodium Inorganic materials 0.000 description 2
- 239000010948 rhodium Substances 0.000 description 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000001429 visible spectrum Methods 0.000 description 2
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000005336 safety glass Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/86—Vessels; Containers; Vacuum locks
- H01J29/89—Optical or photographic arrangements structurally combined or co-operating with the vessel
- H01J29/896—Anti-reflection means, e.g. eliminating glare due to ambient light
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2229/00—Details of cathode ray tubes or electron beam tubes
- H01J2229/89—Optical components associated with the vessel
- H01J2229/8913—Anti-reflection, anti-glare, viewing angle and contrast improving treatments or devices
- H01J2229/8916—Anti-reflection, anti-glare, viewing angle and contrast improving treatments or devices inside the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2229/00—Details of cathode ray tubes or electron beam tubes
- H01J2229/89—Optical components associated with the vessel
- H01J2229/8913—Anti-reflection, anti-glare, viewing angle and contrast improving treatments or devices
- H01J2229/8918—Anti-reflection, anti-glare, viewing angle and contrast improving treatments or devices by using interference effects
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
- Y10T428/24975—No layer or component greater than 5 mils thick
Definitions
- the invention relates to an attachment for screens or the like, such as cathode ray tubes of monitors, television sets or the like, with a glass pane which has a multilayer antireflection coating on its front facing away from the screen or the like and optionally a reflection-reducing, in particular on its rear facing the screen or the like has an absorbent coating (or the like).
- screens or the like such as cathode ray tubes of monitors, television sets or the like
- a glass pane which has a multilayer antireflection coating on its front facing away from the screen or the like and optionally a reflection-reducing, in particular on its rear facing the screen or the like has an absorbent coating (or the like).
- the coating used for such attachment units should have a low surface resistance in order to be able to shield electromagnetic radiation. This usually requires an electrical sheet resistance of less than 100 ohms.
- Double-layer systems for front units of the type mentioned at the outset, with which a good anti-reflective effect could be achieved over wide areas of the visible spectrum, are not known, rather the use of such simple layer systems is always associated with an intense color impression. Multi-layer systems are therefore used to reduce the color cast, but these require a much higher production effort.
- the glass pane which there as well as in the invention can consist either of inorganic glass, in particular tempered safety glass, or also of plastic, ie organic glass, has an absorption coating made of, for example, chrome on the back and an anti-reflection coating made of two or three layers with a different refractive index on the front, with the neutrality of the color impression and the manufacturing effort leave a wish.
- an anti-reflection coating for glass panes in which a successive metal layer made of a material with a high degree of reflection but low absorption and a dielectric interference layer made of SiO2, for example, are applied to the glass panes, with copper, Silver, rhodium, aluminum or other similarly stable metals with the aforementioned properties are specified.
- the use of such an antireflection coating in front-mounted units of the generic type leads to an undesirably intense color impression when metals other than copper are selected, while the use of copper is prohibited because of its lack of resistance for front-side coatings of front-mounted units of the type in question here.
- GB-PS 826 754 electrically conductive coatings are described on glass panes, which can alternatively contain a gold, silver, nickel or iron layer as well as part of an outer anti-reflective layer, for example SiO2, with the exception of the use of gold intense color impression can be accepted in the field of application specified there and no indication is given to produce a neutral color impression by appropriate choice of material for the metal layer.
- an outer anti-reflective layer for example SiO2
- DE-PS 21 38 517 relates to a heat shield with a coating of gold and high-index dielectric material, the use of such a coating would not allow the desired reflection reduction in an attachment of the generic type.
- the invention has for its object to provide a front unit of the generic type, the anti-reflective coating allows economical reduction of the light reflectance of the front of the glass pane from about 4% to less than 0.5%, is largely neutral in color and a surface resistance of less than 100 ohms.
- the antireflection coating comprises a metal layer of gold or a metal alloy with a gold content of more than 50% with a thickness of 4 to 10 nm and an essentially absorption-free layer on the side facing away from the glass pane, as an anti-reflective layer for has the visible spectral range interference layer made of dielectric material with a refractive index of n ⁇ 1.8.
- the thickness of the metal layer is 5 to 7 nm.
- the invention further proposes that the optical thickness of the interference layer is 60 to 140 nm.
- the interference layer consists of at least one metal or semimetal oxide.
- the interference layer consists of SiO2.
- Another embodiment of the invention is characterized in that between the glass sheet and the metal layer and / or an adhesive layer is arranged between the metal layer and the interference layer (in each case).
- NiCr, silicon, indium oxide and / or indium tin oxide is used as the material for the adhesive layer (s).
- the invention also proposes that at least some of the layers of the anti-reflective coating be produced by magnetron sputtering.
- the invention is based on the surprising finding that the interaction of the metal and the interference layer according to the invention can achieve an antireflective color-neutral effect for a double-layer system. Hence, this effect is due to the unusual course of gold's complex refractive index, which is distinguished by the fact that its real part falls monotonously significantly in the visible spectrum.
- DE-PS 21 38 517 describes the use of gold in conjunction with a high-index antireflection coating, while the object on which the invention is based can only be achieved by a combination of the gold layer and the low-index interference layer in the sense of the claimed antireflection coating is.
- a gold layer 12 with a thickness of 5 nm and an im are successively on a transparent glass pane 10, in the exemplary embodiment shown consisting of a float glass pane made of soda-lime-silicate glass of 6 mm thickness, by magnetron sputtering essential absorption-free interference layer 14 made of SiO2 applied with a thickness of 7 nm.
- the glass pane 10 again consists of a float glass pane made of soda-lime-silicate glass with a thickness of 4 mm
- a NiCr adhesive layer 16 with a thickness of 0.5 nm is successively applied to the glass pane 10
- a gold layer 12 with a thickness of 6 nm is successively applied to the glass pane 10
- the attachment unit according to FIG. 2 was manufactured as follows: In a vacuum coating system, which was equipped with coating devices for magnetron sputtering, the following layers were applied in succession to the glass pane 10, a float glass pane made of soda-lime-silicate glass of 4 mm thickness in the format 40 cm x 40 cm: the adhesive layer 16 as NiCr adhesive layer of 0.5 nm thickness by sputtering a NiCr (80/20) target in an argon atmosphere at a pressure of 1.5 ⁇ 10 ⁇ 1 Pa, the gold layer 12 of 6 nm thickness by sputtering a gold target in argon Atmosphere at a pressure of 1.5 ⁇ 10 ⁇ 1 Pa, the adhesive layer 18 as a SnO2-doped In2O3 adhesive layer in a thickness of 4 nm by reactive sputtering of the In90 / Sn10 target in an argon-oxygen atmosphere at a pressure of 3.5 ⁇ 10 ⁇ 1 Pa and finally the interference layer 14 as
- Fig. 4 shows that the real part of the complex refractive index of gold drops significantly monotonically over the visible spectral region, whereupon the surprising effect of the attachment unit according to the invention, in combination with the low-refractive interference layer used, should be essentially attributable.
Abstract
Vorsatzaggregat für Bildschirme oder dergleichen, wie Kathodenstrahlröhren von Monitoren, Fernsehapparaten oder dergleichen, mit einer Glasscheibe (10), welche an ihrer dem Bildschirm oder dergleichen abgewandten Vorderseite eine mehrschichtige Antireflexionsbeschichtung und ggf. an ihrer dem Bildschirm oder dergleichen zugewandten Rückseite eine Absorptionsbeschichtung oder dergleichen aufweist, wobei die Antireflexionsbeschichtung eine Metallschicht (12) aus Gold oder einer Metallegierung mit einem Goldanteil von mehr als 50% mit einer Dicke von 4 bis 10 nm und eine an deren der Glasscheibe (10) abgewandten Seite angeordnete im wesentlichen absorptionsfreie, als Entspiegelungsschicht für den sichtbaren Spektralbereich ausgebildete Interferenzschicht (14) aus dielektrischem Material mit einem Brechwert von n < 1,8 aufweist. <IMAGE>Attachment unit for screens or the like, such as cathode ray tubes of monitors, television sets or the like, with a glass pane (10) which has a multilayer anti-reflection coating on its front side facing away from the screen or the like and optionally an absorption coating or the like on its rear side facing the screen or the like The antireflection coating comprises a metal layer (12) made of gold or a metal alloy with a gold content of more than 50% with a thickness of 4 to 10 nm and an essentially absorption-free layer on the side facing away from the glass pane (10) as an anti-reflective layer for the Interference layer (14) made of dielectric material with a refractive index of n <1.8 has a visible spectral range. <IMAGE>
Description
Die Erfindung betrifft ein Vorsatzaggregat für Bildschirme oder dergleichen, wie Kathodenstrahlröhren von Monitoren, Fernsehapparaten oder dergleichen, mit einer Glasscheibe, welche an ihrer dem Bildschirm oder dergleichen abgewandten Vorderseite eine mehrschichtige Antireflexionsbeschichtung und ggf. an ihrer dem Bildschirm oder dergleichen zugewandten Rückseite eine reflexionsmindernde, insbesondere eine absorbierende Beschichtung (oder dergleichen) aufweist.The invention relates to an attachment for screens or the like, such as cathode ray tubes of monitors, television sets or the like, with a glass pane which has a multilayer antireflection coating on its front facing away from the screen or the like and optionally a reflection-reducing, in particular on its rear facing the screen or the like has an absorbent coating (or the like).
Bei Computer-Monitoren, Fernsehern und dergleichen besteht häufig ein Bedürfnis nach einer Reflexionsminderung der eingesetzten Kathodenstrahlröhren. Dieses Ziel läßt sich beispielsweise durch Anätzen der Oberfläche, Beschichtung der Röhre oder auch durch entspiegelte Vorsatzaggregate erzielen.In computer monitors, televisions and the like, there is often a need for a reduction in reflection of the cathode ray tubes used. This goal can be achieved, for example, by etching the surface, coating the tube or using anti-reflective attachments.
Die verwendete Beschichtung für derartige Vorsatzaggregate soll einen niedrigen Flächenwiderstand haben, um elektromagnetische Strahlung abschirmen zu können. Hierzu ist in der Regel ein elektrischer Flächenwiderstand von weniger als 100 Ohm notwendig.The coating used for such attachment units should have a low surface resistance in order to be able to shield electromagnetic radiation. This usually requires an electrical sheet resistance of less than 100 ohms.
Bislang sind als Entspiegelungsschichten für Vorsatzaggregate Einfachschichten, mit dem Nachteil hoher Restreflexion, eines intensiven Farbeindruckes sowie mangelnder elektrischer Leitfähigkeit, Zweifachschichten mit den Nachteilen eines intensiven Farbeindruckes und geringer Leitfähigkeit, dielektrische Vielfachschichtsysteme mit den Nachteilen eines hohen Fertigungsaufwandes sowie eines hohen elektrischen Widerstandes sowie leitfähige Vielfachschichtsysteme verwendet worden, die in der Fertigung besonders aufwendig und damit teuer sind.So far, single layers with the disadvantage of high residual reflection, an intense color impression and a lack of electrical conductivity, double layers with the disadvantages of an intensive color impression and low conductivity, dielectric multi-layer systems with the disadvantages of a high manufacturing effort and a high electrical resistance as well as conductive multi-layer systems have been used as anti-reflective layers for front units that are particularly complex and therefore expensive to manufacture.
Zweifachschichtsysteme für Vorsatzaggregate der eingangs genannten Art, mit denen eine gute Entspiegelungswirkung über weite Bereiche des sichtbaren Spektrums erzielt werden könnte, sind nicht bekannt, vielmehr ist die Verwendung derart einfacher Schichtsysteme stets mit einem intensiven Farbeindruck verbunden. Zur Reduzierung des Farbstiches werden daher Vielfachschichtsysteme eingesetzt, die aber einen sehr viel höheren Produktionsaufwand erfordern.Double-layer systems for front units of the type mentioned at the outset, with which a good anti-reflective effect could be achieved over wide areas of the visible spectrum, are not known, rather the use of such simple layer systems is always associated with an intense color impression. Multi-layer systems are therefore used to reduce the color cast, but these require a much higher production effort.
Aus der DE-OS 36 29 996 ist ein Vorsatzaggregat der gattungsgemäßen Art bekannt, bei dem die Glasscheibe, die dort wie auch bei der Erfindung entweder aus anorganischem Glas, insbesondere aus gehärtetem Sicherheitsglas, oder auch aus Kunststoff, d. h. organischem Glas, bestehen kann, rückseitig eine Absorptionsbeschichtung aus beispielsweise Chrom und an der Vorderseite eine Antireflexionsbeschichtung aus zwei oder drei Schichten mit unterschiedlichem Brechungsindex aufweist, wobei die Neutralität des Farbeindruckes sowie der Fertigungsaufwand zu wünschen übriglassen.From DE-OS 36 29 996 a front unit of the generic type is known, in which the glass pane, which there as well as in the invention can consist either of inorganic glass, in particular tempered safety glass, or also of plastic, ie organic glass, has an absorption coating made of, for example, chrome on the back and an anti-reflection coating made of two or three layers with a different refractive index on the front, with the neutrality of the color impression and the manufacturing effort leave a wish.
Aus der US-PS 2 366 687 ist eine Antireflexionsbeschichtung für Glasscheiben bekannt, bei der auf die Glasscheiben aufeinanderfolgend eine Metallschicht aus einem Material mit hohem Reflexions-, jedoch niedrigem Absorptionsgrad sowie eine dielektrische Interferenzschicht aus beispielsweise SiO₂ aufgebracht werden, wobei als verwendbare Metalle Kupfer, Silber, Rhodium, Aluminium oder andere ähnlich stabile Metalle mit den vorgenannten Eigenschaften angegeben sind. Die Verwendung einer derartigen Antireflexionsbeschichtung bei Vorsatzaggregaten der gattungsgemäßen Art führt dann, wenn andere Metalle als Kupfer gewählt werden, zu einem unerwünscht intensiven Farbeindruck, während sich die Verwendung von Kupfer wegen dessen mangelnder Beständigkeit für Vorderseitenbeschichtungen von Vorsatzaggregaten der hier in Rede stehenden Art verbietet.From US Pat. No. 2,366,687, an anti-reflection coating for glass panes is known, in which a successive metal layer made of a material with a high degree of reflection but low absorption and a dielectric interference layer made of SiO₂, for example, are applied to the glass panes, with copper, Silver, rhodium, aluminum or other similarly stable metals with the aforementioned properties are specified. The use of such an antireflection coating in front-mounted units of the generic type leads to an undesirably intense color impression when metals other than copper are selected, while the use of copper is prohibited because of its lack of resistance for front-side coatings of front-mounted units of the type in question here.
In der GB-PS 826 754 sind elektrisch leitende Beschichtungen auf Glasscheiben beschrieben, welche als Metallschicht alternativ eine Gold-, Silber-, Nickel- oder Eisenschicht sowie als Teil einer äußeren Entspiegelungsschicht beispielsweise SiO₂ enthalten können, wobei der außer bei der Verwendung von Gold entstehende intensive Farbeindruck bei dem dort angegebenen Anwendungsgebiet in Kauf genommen werden kann und kein Anhaltspunkt dafür gegeben wird, durch eine entsprechende Materialauswahl für die Metallschicht einen neutralen Farbeindruck hervorzurufen.In GB-PS 826 754 electrically conductive coatings are described on glass panes, which can alternatively contain a gold, silver, nickel or iron layer as well as part of an outer anti-reflective layer, for example SiO₂, with the exception of the use of gold intense color impression can be accepted in the field of application specified there and no indication is given to produce a neutral color impression by appropriate choice of material for the metal layer.
Ein ähnliches Vorsatzaggregat wie nach dem gattungsbildenden Stand der Technik ist in der DE-OS 39 41 797 beschrieben, mit den anhand der vorgenannten Druckschrift erläuterten Problemen. Die DE-PS 21 38 517 betrifft eine Wärmeschutzscheibe mit einer Beschichtung aus Gold und hochbrechendem dielektrischen Material, wobei die Verwendung einer derartigen Beschichtung bei einem Vorsatzaggregat der gattungsgemäßen Art nicht die gewünschte Reflexionsminderung ermöglichen würde.A similar front unit as in the generic state of the art is described in DE-OS 39 41 797, with the problems explained on the basis of the aforementioned document. DE-PS 21 38 517 relates to a heat shield with a coating of gold and high-index dielectric material, the use of such a coating would not allow the desired reflection reduction in an attachment of the generic type.
Der Erfindung liegt die Aufgabe zugrunde, ein Vorsatzaggregat der gattungsgemäßen Art zu schaffen, dessen Antireflexionsbeschichtung bei wirtschaftlicher Herstellung eine Minderung des Lichtreflexionsgrades der Vorderseite der Glasscheibe von etwa 4% auf weniger als 0,5% ermöglicht, farblich weitgehend neutral ist und einen Flächenwiderstand von weniger als 100 Ohm aufweist.The invention has for its object to provide a front unit of the generic type, the anti-reflective coating allows economical reduction of the light reflectance of the front of the glass pane from about 4% to less than 0.5%, is largely neutral in color and a surface resistance of less than 100 ohms.
Erfindungsgemäß wird diese Aufgabe dadurch gelöst, daß die Antireflexionsbeschichtung eine Metallschicht aus Gold oder einer Metallegierung mit einem Goldanteil von mehr als 50% mit einer Dicke von 4 bis 10 nm und eine an deren der Glasscheibe abgewandten Seite angeordnete, im wesentlichen absorptionsfreie, als Entspiegelungsschicht für den sichtbaren Spektralbereich ausgebildete Interferenzschicht aus dielektrischem Material mit einem Brechungsindex von n < 1,8 aufweist.According to the invention, this object is achieved in that the antireflection coating comprises a metal layer of gold or a metal alloy with a gold content of more than 50% with a thickness of 4 to 10 nm and an essentially absorption-free layer on the side facing away from the glass pane, as an anti-reflective layer for has the visible spectral range interference layer made of dielectric material with a refractive index of n <1.8.
Dabei kann vorgesehen sein, daß die Dicke der Metallschicht 5 bis 7 nm beträgt.It can be provided that the thickness of the metal layer is 5 to 7 nm.
Die Erfindung schlägt weiterhin vor, daß die optische Dicke der Interferenzschicht 60 bis 140 nm beträgt.The invention further proposes that the optical thickness of the interference layer is 60 to 140 nm.
Nach einer weiteren Ausführungsform der Erfindung kann vorgesehen sein, daß die Interferenzschicht aus mindestens einem Metall- oder Halbmetalloxid besteht.According to a further embodiment of the invention it can be provided that the interference layer consists of at least one metal or semimetal oxide.
Dabei kann vorgesehen sein, daß die Interferenzschicht aus SiO₂ besteht.It can be provided that the interference layer consists of SiO₂.
Eine weitere Ausführungsform der Erfindung ist dadurch gekennzeichnet, daß zwischen der Glasscheibe und der Metallschicht und/oder zwischen der Metallschicht und der Interferenzschicht (jeweils) eine Haftschicht angeordnet ist.Another embodiment of the invention is characterized in that between the glass sheet and the metal layer and / or an adhesive layer is arranged between the metal layer and the interference layer (in each case).
Dabei kann vorgesehen sein, daß als Material für die Haftschicht(en) NiCr, Silizium, Indiumoxid und/oder Indiumzinnoxid eingesetzt ist.It can be provided that NiCr, silicon, indium oxide and / or indium tin oxide is used as the material for the adhesive layer (s).
Die Erfindung schlägt auch vor, daß zumindest ein Teil der Schichten der Antireflexionsbeschichtung durch Magnetron-Kathodenzerstäubung hergestellt ist.The invention also proposes that at least some of the layers of the anti-reflective coating be produced by magnetron sputtering.
Der Erfindung liegt die überraschende Erkenntis zugrunde, daß durch das Zusammenspiel der Metall- und der Interferenzschicht nach der Erfindung eine für ein Zweifachschichtsystem unerwartet farbneutrale Entspiegelungswirkung erzielt werden kann. Offenbar beruht diese Wirkung auf dem für Metalle außergewöhnlichen Verlauf des komplexen Brechungsindexes von Gold, der dadurch ausgezeichnet ist, daß dessen Realteil im Bereich des sichtbaren Spektrums monoton deutlich fällt.The invention is based on the surprising finding that the interaction of the metal and the interference layer according to the invention can achieve an antireflective color-neutral effect for a double-layer system. Apparently, this effect is due to the unusual course of gold's complex refractive index, which is distinguished by the fact that its real part falls monotonously significantly in the visible spectrum.
Eine Anregung für eine derartige Materialauswahl war dem eingangs diskutierten Stand der Technik nicht zu entnehmen, weil die US-PS 2 366 687 zwar Kupfer nennt, welches einen ähnlichen Verlauf des Brechungsindexes wie Gold hat, jedoch in wirkungsmäßiger Gleichsetzung mit Silber, Rhodium und Aluminium, deren Brechungsindex gänzlich anders und in für die Erfindung unbrauchbarer Weise verläuft, während die GB-PS 826 754 Gold als gleichwirkend mit u. a. Silber, Nickel und Eisen beschreibt, deren Brechungsindexverlauf diese Metalle ebenfalls für den Zweck der Erfindung ungeeignet macht. Die DE-PS 21 38 517 hingegen beschreibt die Verwendung von Gold in Verbindung mit einer hochbrechenden Entspiegelungsschicht, während die der Erfindung zugrundeliegende Aufgabe nur durch eine Kombination der Goldschicht und der niedrigbrechenden Interferenzschicht im Sinne der beanspruchten Antireflexionsbeschichtung erzielbar ist.A suggestion for such a choice of material was not to be found in the prior art discussed at the outset, because US Pat. No. 2,366,687 mentions copper, which has a similar course of the refractive index as gold, but in effective equation with silver, rhodium and aluminum, whose refractive index is completely different and unusable for the invention, while GB-PS 826 754 describes gold as having the same effect as, inter alia, silver, nickel and iron, the refractive index course of which also makes these metals unsuitable for the purpose of the invention. DE-PS 21 38 517, on the other hand, describes the use of gold in conjunction with a high-index antireflection coating, while the object on which the invention is based can only be achieved by a combination of the gold layer and the low-index interference layer in the sense of the claimed antireflection coating is.
Es liegt im Rahmen der Erfindung, die Gold- bzw. Goldlegierungsschicht in an sich bekannter Weise beiderseits in dünne Haftschichten einzubetten. Bei der Herstellung des Schichtsystems mittels Magnetron-Kathodenzerstäubung, wie sie vorteilhafterweise vorgesehen ist, empfiehlt es sich, dünne Haftschichten aus NiCr, Silizium, Indiumoxid oder Indiumzinnoxid zu verwenden, da hierdurch die Haftung der Antireflexionsbeschichtung deutlich verbessert werden kann.It is within the scope of the invention to embed the gold or gold alloy layer on both sides in thin adhesive layers in a manner known per se. When producing the layer system by means of magnetron sputtering, as is advantageously provided, it is advisable to use thin adhesive layers made of NiCr, silicon, indium oxide or indium tin oxide, since this can significantly improve the adhesion of the antireflection coating.
Weitere Merkmale und Vorteile der Erfindung ergeben sich aus der nachfolgenden Beschreibung, in der Ausführungsbeispiele anhand der schematischen Zeichnung im einzelnen erläutert sind.Further features and advantages of the invention emerge from the following description, in which exemplary embodiments are explained in detail with reference to the schematic drawing.
Dabei zeigt:
- Fig. 1
- ein erstes Ausführungsbeispiel eines Vorsatzaggregates nach der Erfindung im Schnitt senkrecht zur Ebene der dabei verwendeten Glasscheibe;
- Fig. 2
- in Fig. 1 entsprechender Darstellung ein zweites Ausführungsbeispiel eines Vorsatzaggregates nach der Erfindung,
- Fig. 3
- den Lichtreflexionsgrad des Vorsatzaggregates gemäß Fig. 2 in Anhängigkeit von der Wellenlänge; und
- Fig. 4
- den Verlauf des Realteiles und des Imaginärteiles des Brechungsindexes von Gold in Abhängigkeit von der Wellenlänge.
- Fig. 1
- a first embodiment of an attachment according to the invention in section perpendicular to the plane of the glass sheet used therein;
- Fig. 2
- 1 corresponding representation a second embodiment of an attachment according to the invention,
- Fig. 3
- the light reflectance of the attachment according to Figure 2 depending on the wavelength. and
- Fig. 4
- the course of the real part and the imaginary part of the refractive index of gold as a function of the wavelength.
Bei dem in Fig. 1 gezeigten Ausführungsbeispiel sind auf eine transparente Glasscheibe 10, beim gezeigten Ausführungsbeispiel aus einer Floatglasscheibe aus Natron-Kalk-Silikatglas von 6 mm Dicke bestehend, durch Magnetron-Kathodenzerstäubung aufeinanderfolgend eine Goldschicht 12 mit einer Dicke von 5 nm und eine im wesentlichen absorptionsfreie Interferenzschicht 14 aus SiO₂ mit einer Dicke von 7 nm aufgebracht.In the exemplary embodiment shown in FIG. 1, a
Beim Ausführungsbeispiel von Fig. 2, bei dem die Glasscheibe 10 wiederum aus einer Floatglasscheibe aus Natron-Kalk-Silikatglas mit einer Dicke von 4 mm besteht, sind auf die Glasscheibe 10 aufeinanderfolgend eine NiCr-Haftschicht 16 mit einer Dicke von 0,5 nm, eine Goldschicht 12 mit einer Dicke von 6 nm, eine mit SnO₂ dotierte In₂O₃-Haftschicht 18 mit einer Dicke von 4 nm und eine Interferenzschicht 14 aus SiO₂ mit einer Dicke von 60 nm aufgebracht.In the embodiment of FIG. 2, in which the
Im einzelnen erfolgte die Herstellung des Vorsatzaggregates gemäß Fig. 2 wie folgt:
In einer Vakuum-Beschichtungsanlage, welche mit Beschichtungseinrichtungen für Magnetron-Kathodenzerstäubung ausgerüstet war, wurden auf die Glasscheibe 10, eine Floatglasscheibe aus Natron-Kalk-Silikatglas von 4 mm Dicke im Format 40 cm x 40 cm, nacheinander folgende Schichten aufgebracht: Die Haftschicht 16 als NiCr-Haftschicht von 0,5 nm Dicke durch Zerstäubung eines NiCr(80/20)-Targets in Argon-Atmosphäre bei einem Druck von 1.5· 10⁻¹ Pa, die Goldschicht 12 von 6 nm Dicke durch Zerstäubung eines Goldtargets in Argon-Atmosphäre bei einem Druck von 1.5· 10⁻¹ Pa, die Haftschicht 18 als mit SnO₂ dotierte In₂O₃-Haftschicht in einer Dicke von 4 nm durch reaktive Zerstäubung des In90/Sn10-Targets in Argon-Sauerstoff-Atmosphäre bei einem Druck von 3.5· 10⁻¹ Pa und schließlich die Interferenzschicht 14 als SiO₂-Schicht von 60 nm Dicke durch reaktive Zerstäubung eines Si-Targets in Argon-Sauerstoff-Atmosphäre bei einem Druck von 1.5 Pa. Die Rückseite der Glasscheibe 10 wurde, in der Zeichnung nicht dargestellt, mit einer Cr-Schicht solcher Dicke beschichtet, daß die Transmission einer unbeschichteten Floatglasscheibe um etwa ein Drittel abgesenkt wurde.In detail, the attachment unit according to FIG. 2 was manufactured as follows:
In a vacuum coating system, which was equipped with coating devices for magnetron sputtering, the following layers were applied in succession to the
Die beschichtete Scheibe wies einen Lichtreflexionsgrad bei Normlichtart A von 0,21% auf. Die Transmission betrug 55%. Die Farborte in Reflexion, gemessen im L, a, b-Farbsystem (nach R.S. Hunter, Photoelectric Color Difference Meter, in J. Opt. Soc. Am. 48 (1958), S. 985 ff.) lagen bei a = 0.5 und b = -1.0. Der elektrische Flächenwiderstand der vorderseitigen Antireflexionsbeschichtung lag bei 30 Ω.The coated disc showed a light reflectance Standard illuminant A of 0.21%. The transmission was 55%. The color locations in reflection, measured in the L, a, b color system (according to RS Hunter, Photoelectric Color Difference Meter, in J. Opt. Soc. Am. 48 (1958), p. 985 ff.) Were a = 0.5 and b = -1.0. The electrical surface resistance of the front anti-reflection coating was 30 Ω.
In Fig. 3 ist zu erkennen, daß der Lichtreflexionsgrad der Scheibe über den gesamten sichtbaren Spektralbereich deutlich niedriger als derjenige einer unbeschichteten Scheibe liegt.In Fig. 3 it can be seen that the light reflectance of the disc over the entire visible spectral range is significantly lower than that of an uncoated disc.
Fig. 4 läßt erkennen, daß der Realteil des komplexen Brechungsindexes von Gold über das sichtbare Spektralgebiet deutlich monoton abfällt, worauf die überraschende Wirkung des Vorsatzaggregates nach der Erfindung, in Kombination mit der verwendeten niedrigbrechenden Interferenzschicht, wesentlich zurückzuführen sein dürfte.Fig. 4 shows that the real part of the complex refractive index of gold drops significantly monotonically over the visible spectral region, whereupon the surprising effect of the attachment unit according to the invention, in combination with the low-refractive interference layer used, should be essentially attributable.
Die in der vorstehenden Beschreibung, in der Zeichnung sowie in den Ansprüchen offenbarten Merkmale der Erfindung können sowohl einzeln als auch in beliebiger Kombination für die Verwirklichung der Erfindung in ihren verschiedenen Ausführungsformen wesentlich sein.
- 10
- Glasscheibe
- 12
- Metallschicht
- 14
- Interferenzschicht
- 16
- Haftschicht
- 18
- Haftschicht
- 10th
- Glass pane
- 12th
- Metal layer
- 14
- Interference layer
- 16
- Adhesive layer
- 18th
- Adhesive layer
Claims (8)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4130930 | 1991-09-13 | ||
DE4130930A DE4130930A1 (en) | 1991-09-13 | 1991-09-13 | ATTACHMENT UNIT FOR SCREENS OR THE LIKE |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0531996A1 true EP0531996A1 (en) | 1993-03-17 |
EP0531996B1 EP0531996B1 (en) | 1995-10-04 |
Family
ID=6440815
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP92115501A Expired - Lifetime EP0531996B1 (en) | 1991-09-13 | 1992-09-10 | Attachment for screens or similar |
Country Status (6)
Country | Link |
---|---|
US (1) | US5288558A (en) |
EP (1) | EP0531996B1 (en) |
AT (1) | ATE128789T1 (en) |
DE (2) | DE4130930A1 (en) |
DK (1) | DK0531996T3 (en) |
ES (1) | ES2079125T3 (en) |
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WO1998049707A1 (en) * | 1997-04-28 | 1998-11-05 | Koninklijke Philips Electronics N.V. | Display device comprising an anti-static, anti-reflection filter and a method of manufacturing an anti-reflection filter on a cathode ray tube |
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DE69232874T2 (en) * | 1991-09-20 | 2003-09-25 | Hitachi Ltd | Display with anti-reflective layer, cathode ray tube and liquid crystal display |
US5444329A (en) * | 1992-11-06 | 1995-08-22 | Kabushiki Kaisha Toshiba | Antireflection film and display apparatus comprising the same |
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DE4427215A1 (en) * | 1993-08-02 | 1995-02-23 | Agency Ind Science Techn | Transparent and conductive ultrathin films and process for the production thereof |
USH1396H (en) * | 1993-09-21 | 1995-01-03 | The United States Of America As Represented By The Secretary Of The Army | Oxide substrate with a strongly adherent gold film of 10 to 40 nm in thickness on the substrate |
US5441914A (en) * | 1994-05-02 | 1995-08-15 | Motorola Inc. | Method of forming conductive interconnect structure |
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JPH10223160A (en) * | 1997-02-12 | 1998-08-21 | Hitachi Ltd | Color cathode-ray tube |
JP3039437B2 (en) * | 1997-04-15 | 2000-05-08 | 日本電気株式会社 | Color plasma display panel |
DE69838762T2 (en) * | 1997-06-24 | 2008-04-30 | Bridgestone Corp. | Electromagnetic wave shielding translucent plate |
JP2001270740A (en) * | 2000-01-19 | 2001-10-02 | Nippon Sheet Glass Co Ltd | Glass article and glass substrate for display |
US7365408B2 (en) * | 2002-04-30 | 2008-04-29 | International Business Machines Corporation | Structure for photolithographic applications using a multi-layer anti-reflection coating |
US7097923B2 (en) | 2002-04-30 | 2006-08-29 | Hitachi Global Storage Technologies | Method for forming thin film heads using a tri-layer anti-reflection coating for photolithographic applications and a structure thereof |
CN101205060B (en) | 2006-12-20 | 2011-05-04 | 清华大学 | Preparation of nano-carbon tube array |
CN101206979B (en) * | 2006-12-22 | 2010-05-19 | 清华大学 | Method of preparing field-emission cathode |
CN101206980B (en) * | 2006-12-22 | 2010-04-14 | 清华大学 | Method of preparing field-emissive cathode |
JPWO2008081837A1 (en) * | 2006-12-27 | 2010-04-30 | 旭硝子株式会社 | Antireflection body and display device |
US20100307553A1 (en) * | 2008-08-26 | 2010-12-09 | Defries Anthony | Engineering light manipulation in structured films or coatings |
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- 1992-09-10 AT AT92115501T patent/ATE128789T1/en not_active IP Right Cessation
- 1992-09-10 DE DE59203892T patent/DE59203892D1/en not_active Expired - Fee Related
- 1992-09-10 EP EP92115501A patent/EP0531996B1/en not_active Expired - Lifetime
- 1992-09-10 ES ES92115501T patent/ES2079125T3/en not_active Expired - Lifetime
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Also Published As
Publication number | Publication date |
---|---|
DK0531996T3 (en) | 1995-11-27 |
US5288558A (en) | 1994-02-22 |
EP0531996B1 (en) | 1995-10-04 |
DE4130930C2 (en) | 1993-09-09 |
ES2079125T3 (en) | 1996-01-01 |
ATE128789T1 (en) | 1995-10-15 |
DE4130930A1 (en) | 1993-03-25 |
DE59203892D1 (en) | 1995-11-09 |
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