EP0512082A1 - Power-supply circuit for pulse-operated vacuum-arc devices - Google Patents

Power-supply circuit for pulse-operated vacuum-arc devices

Info

Publication number
EP0512082A1
EP0512082A1 EP19910918974 EP91918974A EP0512082A1 EP 0512082 A1 EP0512082 A1 EP 0512082A1 EP 19910918974 EP19910918974 EP 19910918974 EP 91918974 A EP91918974 A EP 91918974A EP 0512082 A1 EP0512082 A1 EP 0512082A1
Authority
EP
European Patent Office
Prior art keywords
diode
arc
discharge
pulse
anode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19910918974
Other languages
German (de)
French (fr)
Other versions
EP0512082B1 (en
Inventor
Peter Dr. Siemroth
Hans-Joachim Dr. Scheibe
Hans-Jörg Dr. Uhlemann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
UHLEMANN HANS JOERG
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UHLEMANN HANS JOERG, Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical UHLEMANN HANS JOERG
Publication of EP0512082A1 publication Critical patent/EP0512082A1/en
Application granted granted Critical
Publication of EP0512082B1 publication Critical patent/EP0512082B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055—Arc discharge
    • H01J37/32064—Circuits specially adapted for controlling the arc discharge

Definitions

  • the invention relates to a circuit arrangement for the power supply of pulsed vacuum arches, as e.g. can be used as a plasma source in coating technology and for mass spectroscopic analysis of conductive samples.
  • Arc discharges in vacuum are widely used as plasma sources for coating purposes.
  • the use of pulsed arc discharges has proven itself for a number of applications, or is proposed. These include those applications in which the intention is to achieve very high coating rates for a short time in order to deposit relatively thick layers in a limited area with a single discharge.
  • Such arrangements are described by Boxmann (RL Boxmann, S. Goldsmith, "Fast deposition of metallurgical coatings vaeuum arc", Thin Solid Films, Vol. 139 (1986) pp. 41-52; and Maslov (AI Maslov, GK Dmitriev, Yu. D.
  • Chistyakov "Impulsnyi istochnik uglerodnoj plazmy dlya tekhnologicheskikn tselej", Pribory i tekhnika eksperimenta, Issue 3, 1985, pp. 146-149).
  • pulsed arc discharges of a defined short duration with a relatively high subsequent frequency proposed to evaporate only a precisely defined environment of the ignition location with each individual discharge.
  • the individual discharges can be ignited both by focused laser radiation (DD 277 178 A3) and by trigger discharges (DD 280 338 A1).
  • the aim of the invention is to propose a circuit arrangement for the power supply of pulsed vacuum arches, by means of which an improvement in the overall energy efficiency is achieved compared to conventional arrangements.
  • a diode is arranged parallel to the discharge path in the circuit arrangement for the power supply for pulsed vacuum arches, such that the cathode of the diode is connected to the arc anode and the anode of the diode is connected to the arc cathode.
  • the diode is arranged in such a way that in addition to the discharge path, part of the inductance of the discharge circuit is also bridged.
  • the discharge path is also bridged by an inductive conductor arrangement, which is connected in series with the diode, in addition to the diode.
  • Another advantage of the circuit arrangement according to the invention is that a higher pulse sequence is possible due to the lower energy requirement during the charging process.
  • Fig. 1 shows a conventional vacuum arc evaporator.
  • the ignition takes place by means of a highly focused, intensive laser pulse 6 of short duration.
  • This capacitor 2 has a capacitance of 50 uF and is connected directly to anode 4 and cathode 5 of the arc discharge via a coil 3 of 10 uH.
  • the arc discharge ignites. Because of the low resistance of the electrical supply lines (symbolized in FIG.
  • the resonant circuit formed by the capacitor 2, the coil 3 and the line resistor 7 has a high quality and the time course of the discharge current and Voltage drops correspond almost to that of an undamped oscillating circuit. Only the slight voltage drop across the arc discharge leads to certain deviations. The vacuum arc discharge extinguishes shortly before the discharge current becomes zero.
  • the diode 8 connected in parallel with the discharge path according to the invention means that the current can continue to flow.
  • the discharge profile corresponds in a first approximation to the second half-wave of a sine wave. It has been shown that 5 in this way almost all of the energy that was originally stored in the capacitor 2 (reduced by the part that was converted into the arc discharge) can be recovered.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Lasers (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Generation Of Surge Voltage And Current (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)

Abstract

The invention is applicable to pulse-operated vacuum arcs, as used for instance as plasma sources in the production of coatings and for the mass-spectroscopic analysis of electrically conducting materials. The invention calls for a diode (8) to be connected in parallel with the discharge gap so that the cathode of the diode is connected to the arc anode (4) and the anode of the diode to the arc cathode (5).

Description

Schaltungsanordnung zur Stromversorgung für gepulst betriebene Vakuumbögen  Circuit arrangement for the power supply for pulsed vacuum arches
Die Erfindung bezieht sich auf eine Schaltungsanordnung zur Stromversorgung von gepulst betriebenen Vakuumbögen, wie sie z.B. als Plasmaquelle in der Beschichtungstechnik und zur massenspektroskopischen Untersuchung von leitfähigen Proben genutzt werden. The invention relates to a circuit arrangement for the power supply of pulsed vacuum arches, as e.g. can be used as a plasma source in coating technology and for mass spectroscopic analysis of conductive samples.
Bogenentladungen im Vakuum werden als Plasmaquellen für Beschichtungszwecke breit angewendet. Für eine Reihe von Anwendungen hat sich die Verwendung gepulster Bogenentladungen bewährt, bzw. wird eine solche vorgeschlagen. Darunter gibt es solche Anwendungen, bei denen die Absicht besteht, kurzzeitig sehr hohe Beschichtungsraten zu erreichen, um verhältnismäßig dicke Schichten auf begrenzter Fläche mit einer einzigen Entladung abzuscheiden. Solche Anordnungen sind von Boxmann (R. L. Boxmann, S. Goldsmith, "Fast deposition of metallurgical coatings vaeuum arc", Thin Solid Films, Bd. 139 (1986) S. 41-52; und Maslov (A. I. Maslov, G. K. Dmitriev, Yu. D. Chistyakov, "Impulsnyi istochnik uglerodnoj plazmy dlya tekhnologicheskikn tselej" , Pribory i tekhnika eksperimenta, Heft 3, 1985, S. 146 - 149) beschrieben worden. Arc discharges in vacuum are widely used as plasma sources for coating purposes. The use of pulsed arc discharges has proven itself for a number of applications, or is proposed. These include those applications in which the intention is to achieve very high coating rates for a short time in order to deposit relatively thick layers in a limited area with a single discharge. Such arrangements are described by Boxmann (RL Boxmann, S. Goldsmith, "Fast deposition of metallurgical coatings vaeuum arc", Thin Solid Films, Vol. 139 (1986) pp. 41-52; and Maslov (AI Maslov, GK Dmitriev, Yu. D. Chistyakov, "Impulsnyi istochnik uglerodnoj plazmy dlya tekhnologicheskikn tselej", Pribory i tekhnika eksperimenta, Issue 3, 1985, pp. 146-149).
Andererseits wurden gepulste Bogenentladungen definierter kurzer Dauer mit relativ hoher Folgefreguenz (größer 100 Hz) vorgeschlagen, um bei jeder einzelnen Entladung nur eine genau definierte Umgebung des Zündorts zu verdampfen. Dabei können die Einzelentladungen sowohl fokussierter Laserbestrahlung (DD 277 178 A3) als auch durch Triggerentladungen (DD 280 338 A1) gezündet werden. On the other hand, pulsed arc discharges of a defined short duration with a relatively high subsequent frequency (greater than 100 Hz) proposed to evaporate only a precisely defined environment of the ignition location with each individual discharge. The individual discharges can be ignited both by focused laser radiation (DD 277 178 A3) and by trigger discharges (DD 280 338 A1).
Nachteilig ist bei allen genannten Anordnungen, daß der Gesamtwirkungsgrad sehr niedrig ist (zwischen 20 - 40 %). Die Ursache dafür ist die im Kondensator gespeicherte Restenergie. Das Ziel der Erfindung besteht darin, eine Schaltungsanorάnung zur Stromversorgung gepulst betriebener Vakuumbögen vorzuschlagen, durch die gegenüber herkömmlichen Anordnungen eine Verbesserung des energetischen Gesamtwirkungsgrades erreicht wird. Erfindungsgemäß ist bei der Schaltungsanordnung zur Stromversorgung für gepulst betriebene Vakuumbögen parallel zur Entladungsstrecke eine Diode angeordnet, derart, daß die Katode der Diode mit der Bogenanode und die Anode der Diode mit der Bogenkatode verbunden ist. A disadvantage of all the arrangements mentioned is that the overall efficiency is very low (between 20-40%). The reason for this is the residual energy stored in the capacitor. The aim of the invention is to propose a circuit arrangement for the power supply of pulsed vacuum arches, by means of which an improvement in the overall energy efficiency is achieved compared to conventional arrangements. According to the invention, a diode is arranged parallel to the discharge path in the circuit arrangement for the power supply for pulsed vacuum arches, such that the cathode of the diode is connected to the arc anode and the anode of the diode is connected to the arc cathode.
Es ist dabei vorteilhaft, wenn die Diode so angeordnet ist, daß neben der Entladungsstrecke auch ein Teil der Induktivität des Entladungskreises überbrückt wird. It is advantageous if the diode is arranged in such a way that in addition to the discharge path, part of the inductance of the discharge circuit is also bridged.
Es ist weiterhin günstig, wenn die Entladungsstrecke außer von der Diode zusätzlich auch von einer induktiven Leiteranordnung, die zur Diode in Reihe geschaltet ist, überbrückt wird. Mit der erfindungsgemäßen Schaltungsanordnung wird erreicht, daß die während einer Entladung nicht dissipierte Energie zur nächsten Entladung wieder zur Verfügung steht und nur eine geringe Energie zum Nachladen des Kondensators benötigt wird und somit der Gesamtwirkungsgrad steigt. It is furthermore favorable if the discharge path is also bridged by an inductive conductor arrangement, which is connected in series with the diode, in addition to the diode. With the circuit arrangement according to the invention it is achieved that the energy not dissipated during a discharge is available again for the next discharge and only a small amount of energy is required for recharging the capacitor and the overall efficiency thus increases.
Ein weiterer Vorteil der erfindungsgemäßen Schaltungsanordnung besteht darin, daß durch den geringeren Energiebedarf beim Ladevorgang eine höhere Pulsfolge möglich wird.  Another advantage of the circuit arrangement according to the invention is that a higher pulse sequence is possible due to the lower energy requirement during the charging process.
Anhand eines Ausführungsbeispiels soll die erfindungsgemäßoUsing an exemplary embodiment, the invention
Schaltungsanordnung näher erläutert werden. Circuit arrangement are explained in more detail.
Fig. 1 zeigt einen Vakuumbogenverdampfer üblicher Bauform. Die Zündung erfolgt durch einen hochfokussierten intensiven Laserimpuls 6 kurzer Dauer. Die Stromversorgung erfolgt aus einer leistungsstarken Gleichsspannungsquelle 1 (mit einstellbarer Stromergiebigkeit und entkoppeltem Ausgang) üblicher Bauart (u = 400 V), Kioo A) welche einen Kondensator 2 auflädt. Dieser Kondensator 2 hat eine Kapazität von 50 uF und ist über eine Spule 3 von 10 uH direkt mit Anode 4 und Katode 5 der Bogenentladung verbunden. Nach Auftreffen des Laserimpulses 6 (Dauer t = 100 ns, Energie 10 mJ, Leistungsdichte >100 MW/cm2) zündet die Bogenentladung. Wegen des geringen Widerstandes der elektrischen Zuleitungen (in der Fig. 1 symbolisiert durch den Widerstand 7) hat der vom Kondensator 2 , der Spule 3 und dem Leitungswiderstand 7 gebildete Schwingkreis eine hohe Güte und der zeitliche Verlauf von Entladungsstrom und den Spannungsabfällen entspricht nahezu dem eines ungedämpften 25 Schwingkreises. Lediglich der geringe Spannungsabfall über der Bogenentladung führt zu gewissen Abweichungen. Kurz bevor der Entladungsstrom Null wird, erlischt die Vakuumbogenentladung. Die erfindungsgemäß parallel zur Entladungsstrecke geschaltete Diode 8 führt dazu, daß der Strom weiterfließen kann. Der Entladungsverlauf entspricht dabei in erster Näherung der zweiten Halbwelle einer Sinusschwingung. Es hat sich gezeigt, 5 daß auf diese Art und Weise fast die gesamte Energie, die ursprünglich im Kondensator 2 gespeichert war (vermindert um jenen Teil, der in der Bogenentladung umgesetzt wurde) wieder zurückgewonnen werden kann. Von der Stromquelle 1 muß nur der Teil nachgeliefert werden, der wirklich nutzbar geworden ist. 10 Kurzzeitige Spitzen der Brennspannung haben auf die Energiebilanz nur einen geringen Anteil, entsprechend ihrer Dauer. Weiterhin wurde festgestellt, daß nach dem Einbau der Diode 8 Wiederzündungen nach Polaritätsumkehr, die zu schwerwiegenden Strörungen im Entladungsablauf führen können, 15 nicht mehr auftraten. Fig. 1 shows a conventional vacuum arc evaporator. The ignition takes place by means of a highly focused, intensive laser pulse 6 of short duration. The power supply comes from a powerful DC voltage source 1 (with adjustable current output and decoupled output) of the usual type (u = 400 V), Kioo A) which charges a capacitor 2. This capacitor 2 has a capacitance of 50 uF and is connected directly to anode 4 and cathode 5 of the arc discharge via a coil 3 of 10 uH. When the laser pulse 6 strikes (duration t = 100 ns, energy 10 mJ, power density> 100 MW / cm 2 ), the arc discharge ignites. Because of the low resistance of the electrical supply lines (symbolized in FIG. 1 by the resistor 7), the resonant circuit formed by the capacitor 2, the coil 3 and the line resistor 7 has a high quality and the time course of the discharge current and Voltage drops correspond almost to that of an undamped oscillating circuit. Only the slight voltage drop across the arc discharge leads to certain deviations. The vacuum arc discharge extinguishes shortly before the discharge current becomes zero. The diode 8 connected in parallel with the discharge path according to the invention means that the current can continue to flow. The discharge profile corresponds in a first approximation to the second half-wave of a sine wave. It has been shown that 5 in this way almost all of the energy that was originally stored in the capacitor 2 (reduced by the part that was converted into the arc discharge) can be recovered. Only the part that has really become usable has to be supplied from the current source 1. 10 Short-term peaks in the burning voltage have only a small share in the energy balance, depending on their duration. Furthermore, it was found that after the installation of the diode 8 re-ignitions after polarity reversal, which can lead to serious disturbances in the discharge process, 15 no longer occurred.
Aufstellung der verwendeten Bezugszeicben und Begriffe List of reference characters and terms used
1 - Gleichspannungsquelle 1 - DC voltage source
2 - Kondensator  2 - capacitor
3 - Spule 3 - coil
4 - Anode der Bogenentladung  4 - Anode of arc discharge
5 - Katode der Bogenentladung  5 - cathode of arc discharge
6 - Laserimpuls  6 - laser pulse
7 - Widerstand  7 - resistance
8 - Diode 8 - diode

Claims

Patentansprüche Claims
1. Schaltungsanordnung zur Stromversorgung für gepulst betriebene Vakuumbögen, dadurch gekennzeichnet, daß parallel zur Entladungsstrecke eine Diode (8) mit der Bogenanode (4) und die Anode der Diode (8) mit der Bogenkatode (5) verbunden ist. 1. Circuit arrangement for the power supply for pulsed vacuum arches, characterized in that a diode (8) with the arc anode (4) and the anode of the diode (8) with the arc cathode (5) is connected parallel to the discharge path.
2. Schaltungsanordnung nach Anspruch 1, dadurch gekennzeichnet, daß die Diode (8) so angeordnet ist, daß neben der Entladungsstrecke auch ein Teil der Induktivität des Entladungskreises überbrückt wird. 2. Circuit arrangement according to claim 1, characterized in that the diode (8) is arranged such that in addition to the discharge path, a part of the inductance of the discharge circuit is bridged.
3. Schaltungsanordnung nach Anspruch l, dadurch gekennzeichnet, daß die Entladungsstrecke außer von der Diode (8) zusätzlich auch von einer induktiven Leiteranordnung, die zur Diode (8) in Reihe geschaltet ist, überbrückt wird. 3. Circuit arrangement according to claim l, characterized in that the discharge gap is also bridged in addition to the diode (8) by an inductive conductor arrangement which is connected in series with the diode (8).
EP91918974A 1990-11-22 1991-11-11 Power-supply circuit for pulse-operated vacuum-arc devices Expired - Lifetime EP0512082B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4037388 1990-11-22
DE4037388A DE4037388A1 (en) 1990-11-22 1990-11-22 CIRCUIT ARRANGEMENT FOR THE POWER SUPPLY FOR PULSE-OPERATED VACUUM BOWS
PCT/DE1991/000870 WO1992009999A1 (en) 1990-11-22 1991-11-11 Power-supply circuit for pulse-operated vacuum-arc devices

Publications (2)

Publication Number Publication Date
EP0512082A1 true EP0512082A1 (en) 1992-11-11
EP0512082B1 EP0512082B1 (en) 2000-02-09

Family

ID=6418838

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91918974A Expired - Lifetime EP0512082B1 (en) 1990-11-22 1991-11-11 Power-supply circuit for pulse-operated vacuum-arc devices

Country Status (4)

Country Link
EP (1) EP0512082B1 (en)
AT (1) ATE189747T1 (en)
DE (2) DE4037388A1 (en)
WO (1) WO1992009999A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106872888A (en) * 2017-03-07 2017-06-20 西安交通大学 The vacuum interrupter ageing device and method of a kind of DC stacked high-voltage pulse

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6808607B2 (en) * 2002-09-25 2004-10-26 Advanced Energy Industries, Inc. High peak power plasma pulsed supply with arc handling

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
HU181323B (en) * 1981-05-08 1983-07-28 Egyesuelt Izzolampa High-frequency system of additional resistor for electric discharge lamp
DE3427520A1 (en) * 1984-07-26 1986-02-06 Thyssen Industrie Ag, 4300 Essen Circuit arrangement for supplying a two-pole network load
DE3538494A1 (en) * 1985-10-30 1987-05-07 Boehringer Andreas Electrical circuit arrangement, which is supplied from a DC voltage source, for supplying a load two-pole network with a direct current which is impressed but can be interrupted or a block-form alternating current which is impressed but can be interrupted, with adjustable limiting of the voltages on the load two-pole network and on the electronic one-way switches which are used
FI79351C (en) * 1988-01-18 1989-12-11 Asko Anttila FOERFARANDE OCH ANORDNING FOER YTBELAEGGNING AV MATERIAL.
DE3901401C2 (en) * 1988-03-01 1996-12-19 Fraunhofer Ges Forschung Process for controlling a vacuum arc discharge
JP2820722B2 (en) * 1989-06-29 1998-11-05 日立金属株式会社 High voltage pulse generation circuit, discharge pumped laser and accelerator using the same

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO9209999A1 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106872888A (en) * 2017-03-07 2017-06-20 西安交通大学 The vacuum interrupter ageing device and method of a kind of DC stacked high-voltage pulse
CN106872888B (en) * 2017-03-07 2019-10-11 西安交通大学 A kind of the vacuum interrupter ageing device and method of DC stacked high-voltage pulse

Also Published As

Publication number Publication date
EP0512082B1 (en) 2000-02-09
DE59109184D1 (en) 2000-03-16
WO1992009999A1 (en) 1992-06-11
DE4037388A1 (en) 1992-05-27
ATE189747T1 (en) 2000-02-15

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