EP0469718A3 - Laser interferometry length measuring apparatus - Google Patents

Laser interferometry length measuring apparatus Download PDF

Info

Publication number
EP0469718A3
EP0469718A3 EP19910305917 EP91305917A EP0469718A3 EP 0469718 A3 EP0469718 A3 EP 0469718A3 EP 19910305917 EP19910305917 EP 19910305917 EP 91305917 A EP91305917 A EP 91305917A EP 0469718 A3 EP0469718 A3 EP 0469718A3
Authority
EP
European Patent Office
Prior art keywords
measuring apparatus
length measuring
laser interferometry
interferometry length
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP19910305917
Other versions
EP0469718A2 (en
EP0469718B1 (en
Inventor
Shigeru Konica Corporation Hosoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP17443290A external-priority patent/JPH0463305A/en
Priority claimed from JP2225165A external-priority patent/JPH04109129A/en
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Publication of EP0469718A2 publication Critical patent/EP0469718A2/en
Publication of EP0469718A3 publication Critical patent/EP0469718A3/en
Application granted granted Critical
Publication of EP0469718B1 publication Critical patent/EP0469718B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
    • G01B9/02018—Multipass interferometers, e.g. double-pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G01B9/02079—Quadrature detection, i.e. detecting relatively phase-shifted signals
    • G01B9/02081—Quadrature detection, i.e. detecting relatively phase-shifted signals simultaneous quadrature detection, e.g. by spatial phase shifting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
EP91305917A 1990-07-03 1991-06-28 Laser interferometry length measuring apparatus Expired - Lifetime EP0469718B1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP17443290A JPH0463305A (en) 1990-07-03 1990-07-03 Polarizing beam splitter and laser interference measuring meter
JP174432/90 1990-07-03
JP225165/90 1990-08-29
JP2225165A JPH04109129A (en) 1990-08-29 1990-08-29 Polarization detection optical system

Publications (3)

Publication Number Publication Date
EP0469718A2 EP0469718A2 (en) 1992-02-05
EP0469718A3 true EP0469718A3 (en) 1993-10-13
EP0469718B1 EP0469718B1 (en) 1996-01-17

Family

ID=26496044

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91305917A Expired - Lifetime EP0469718B1 (en) 1990-07-03 1991-06-28 Laser interferometry length measuring apparatus

Country Status (3)

Country Link
US (1) US5172186A (en)
EP (1) EP0469718B1 (en)
DE (1) DE69116464T2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109799601A (en) * 2017-11-17 2019-05-24 财团法人金属工业研究发展中心 Light secondary process construction

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2821817B2 (en) * 1991-03-11 1998-11-05 コニカ株式会社 Differential interference prism
US5325175A (en) * 1992-05-08 1994-06-28 Honeywell Inc. Solid-block homodyne interferometer
AT399222B (en) * 1992-10-19 1995-04-25 Tabarelli Werner INTERFEROMETRIC DEVICE FOR MEASURING THE POSITION OF A REFLECTIVE OBJECT
JPH06229922A (en) * 1993-02-02 1994-08-19 Agency Of Ind Science & Technol Very accurate air refractometer
US5404222A (en) * 1994-01-14 1995-04-04 Sparta, Inc. Interferametric measuring system with air turbulence compensation
US5585913A (en) * 1994-04-01 1996-12-17 Imra America Inc. Ultrashort pulsewidth laser ranging system employing a time gate producing an autocorrelation and method therefore
US5778016A (en) * 1994-04-01 1998-07-07 Imra America, Inc. Scanning temporal ultrafast delay methods and apparatuses therefor
GB9409064D0 (en) * 1994-05-06 1994-06-22 Perkin Elmer Ltd Improvements in or relating to optical interferometers
US6020963A (en) * 1996-06-04 2000-02-01 Northeastern University Optical quadrature Interferometer
US5991033A (en) * 1996-09-20 1999-11-23 Sparta, Inc. Interferometer with air turbulence compensation
US6498680B1 (en) * 1996-10-29 2002-12-24 Chorum Technologies Lp Compact tunable optical wavelength interleaver
EP1031868B1 (en) 1999-02-26 2003-05-14 Dr. Johannes Heidenhain GmbH Compensated parallel beam splitter with two plates and interferometer
JP4365927B2 (en) * 1999-03-12 2009-11-18 キヤノン株式会社 Interference measuring device and grating interference encoder
FR2795877B1 (en) * 1999-06-30 2001-10-05 Photonetics PARTIALLY REFLECTIVE OPTICAL COMPONENT AND LASER SOURCE INCORPORATING SUCH COMPONENT
US6738143B2 (en) * 2001-11-13 2004-05-18 Agilent Technologies, Inc System and method for interferometer non-linearity compensation
US7224466B2 (en) 2003-02-05 2007-05-29 Agilent Technologies, Inc. Compact multi-axis interferometer
US7230754B2 (en) * 2003-08-15 2007-06-12 Meade Instruments Corp. Neutral white-light filter device
JP4939765B2 (en) 2005-03-28 2012-05-30 株式会社日立製作所 Displacement measuring method and apparatus
US7359057B2 (en) * 2005-08-26 2008-04-15 Ball Aerospace & Technologies Corp. Method and apparatus for measuring small shifts in optical wavelengths
JP4264667B2 (en) * 2007-02-16 2009-05-20 ソニー株式会社 Vibration detector
JP5523664B2 (en) * 2007-11-06 2014-06-18 株式会社ミツトヨ Interferometer
US8307822B2 (en) * 2008-10-06 2012-11-13 Hewlett-Packard Development Company, L.P. High efficiency solar energy devices and methods
EP2182387A1 (en) 2008-10-30 2010-05-05 EADS Construcciones Aeronauticas, S.A. Indication system and method for refuelling operations.
CN102128588B (en) * 2010-01-19 2013-03-06 上海微电子装备有限公司 Integral double-frequency laser interferometer
US8174699B2 (en) 2010-07-22 2012-05-08 Siemens Energy, Inc. Fluid detection in turbine engine components
US8760786B2 (en) * 2012-06-25 2014-06-24 Oracle International Corporation Lateral tape motion detector
CN113899305B (en) * 2021-09-30 2023-08-22 广东技术师范大学 Improved phase shift phase measurement method and system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3510198A (en) * 1967-05-17 1970-05-05 North American Rockwell Polarizing beam-splitter having improved contrast ratio
EP0220691A2 (en) * 1985-10-28 1987-05-06 GTE Laboratories Incorporated Birefringent optical multiplexer with flattened bandpass
EP0222293A2 (en) * 1985-11-12 1987-05-20 GTE Laboratories Incorporated Optical beam splitter prism

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1168161A (en) * 1967-01-30 1969-10-22 Mullard Ltd Improvements in or relating to Light Beam Deflector Systems
FR2375577A1 (en) * 1976-12-23 1978-07-21 Soro Electro Optics Interferometer for measurement of displacement - utilises circular polarisation in opposing directions of luminous measurement and reference beams
US4702603A (en) * 1985-07-23 1987-10-27 Cmx Systems, Inc. Optical phase decoder for interferometers
US4717250A (en) * 1986-03-28 1988-01-05 Zygo Corporation Angle measuring interferometer
CA2059553A1 (en) * 1989-05-30 1990-12-01 Raymond Hesline Birefringent polarizing device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3510198A (en) * 1967-05-17 1970-05-05 North American Rockwell Polarizing beam-splitter having improved contrast ratio
EP0220691A2 (en) * 1985-10-28 1987-05-06 GTE Laboratories Incorporated Birefringent optical multiplexer with flattened bandpass
EP0222293A2 (en) * 1985-11-12 1987-05-20 GTE Laboratories Incorporated Optical beam splitter prism

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109799601A (en) * 2017-11-17 2019-05-24 财团法人金属工业研究发展中心 Light secondary process construction

Also Published As

Publication number Publication date
DE69116464T2 (en) 1996-08-22
DE69116464D1 (en) 1996-02-29
US5172186A (en) 1992-12-15
EP0469718A2 (en) 1992-02-05
EP0469718B1 (en) 1996-01-17

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