EP0460255A1 - Measuring head for a quadrupole mass spectrometer - Google Patents

Measuring head for a quadrupole mass spectrometer Download PDF

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Publication number
EP0460255A1
EP0460255A1 EP90110681A EP90110681A EP0460255A1 EP 0460255 A1 EP0460255 A1 EP 0460255A1 EP 90110681 A EP90110681 A EP 90110681A EP 90110681 A EP90110681 A EP 90110681A EP 0460255 A1 EP0460255 A1 EP 0460255A1
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EP
European Patent Office
Prior art keywords
measuring head
separation system
head according
components
flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP90110681A
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German (de)
French (fr)
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EP0460255B1 (en
Inventor
Ulrich Dr. Döbler
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Balzers und Leybold Deutschland Holding AG
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Leybold AG
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Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to AT90110681T priority Critical patent/ATE118925T1/en
Priority to DE59008540T priority patent/DE59008540D1/en
Priority to EP90110681A priority patent/EP0460255B1/en
Priority to US07/707,575 priority patent/US5132536A/en
Priority to JP13390091A priority patent/JP3179130B2/en
Publication of EP0460255A1 publication Critical patent/EP0460255A1/en
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Publication of EP0460255B1 publication Critical patent/EP0460255B1/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components

Definitions

  • the invention relates to a measuring head for a quadrupole mass spectrometer with an ion source, a one-piece quadrupole separation system, a detector, a flange for attaching the measuring head to a recipient and supporting means for these components.
  • a measuring head of this type is known from the document "Fundamentals of Vacuum Technology, Calculations and Tables" by Leybold-Heraeus GmbH, edition 11/82, pages 58, 59.
  • the quadrupole separation system consists of a one-piece, cylindrical ceramic part with an axis-parallel opening. In cross section, this opening is in the form of four central loads arranged symmetrically around the cylinder axis.
  • the hyperbolic surfaces are provided with metal coatings, which form four electrodes with a hyperbolic cross section. A high-frequency voltage and a superimposed DC voltage are applied to these electrodes. It depends on the value of these voltages whether or not an ion with the mass number M can pass through the separation system.
  • Quadrupole separation systems of this type are known from DE-OS'sen 22 15 763, 23 47 544 and 26 25 660.
  • a central, metallic support part with a multiplicity of current feedthroughs is provided.
  • the flange is fastened to this supporting part, with the aid of which the measuring head is connected to a corresponding counter flange of a recipient.
  • the cables that pass through the support part open into plug-in systems to which the supply voltages and the signal-processing components are connected.
  • the detector and the quadrupole separation system are mounted on the inside of the flange on the central support part.
  • a tube comprising the separation system is provided on the support part, which carries the ion source upstream of the separation system.
  • the construction of the known quadrupole measuring head is complex and complicated. Because of the large number of components that adjust to each other, the mounting of the measuring head is time-consuming.
  • the known measuring head is very sensitive to shocks and vibrations. The number of its components and thus the surface of these components located in the recipient is large, as a result of which the generation of the vacuum required for the operation of the mass spectrometer is impaired.
  • the present invention has for its object to provide a Quadrupolmeßkopf of the type mentioned, the structure is much simpler.
  • this object is achieved in that the one-piece quadrupole separation system itself is the carrier of the ion source, the detector and / or the mounting flange.
  • This measure results in a surprisingly simple and stable construction of the measuring head, which is thereby considerably more robust.
  • Another advantage is that fewer components have to be accommodated in the vacuum, so that the size of the after-gassing surfaces which impair the generation of the vacuum is significantly reduced.
  • the mass spectrometer designed according to the invention is therefore ready for operation much earlier after being switched on.
  • a particularly advantageous measure within the scope of the invention is that the detector is part of a cover with which the ion outlet opening of the separation system is closed in a vacuum-tight manner. This measure makes it possible to use the separation system itself as the vessel wall of the vacuum system. In addition, as a result of such a completely vibration-free arrangement of the detector, microphonic effects which impair the sensitivity of the measurements no longer occur.
  • connections between the quadrupole separation system and the components are adhesive connections. This results in a stable structure with simple assembly. If the adhesive used is a non-conductor, there is also the possibility of passing voltage and current-carrying connecting lines through the adhesive points in the form of conductor tracks applied to the quadrupole separation system. The large number of current feedthroughs through the metallic flange itself can thus be eliminated.
  • Figures 1 to 6 each show measuring heads 1 according to the invention (or parts thereof), in which the quadrupole separation system itself with 2, the ion source with 3 and the detector with 4 are designated.
  • the separation system consists of a one-piece, cylindrical ceramic part with an axially parallel opening 5, which in cross section preferably has the shape of 4 central branches arranged symmetrically around the cylinder axis 6. These surfaces are provided with metal coatings which form four electrodes, not shown in detail.
  • the separation system can be a one-piece ceramic part; however, it can also consist of several parts which are joined together (glued together) (cf. DE-OS 26 25 660).
  • an electron impact ion source is shown, which comprises an annular cathode 7 and a basket anode 8.
  • the carrier of these components is preferably the separation system 2 itself.
  • the flange 11 is arranged in the vicinity of the ion source 3, so that the surface of the measuring head 1 which is in a vacuum is as small as possible.
  • the flange 11 encompasses the separating system 2 in a central opening 13.
  • a stable and vacuum-tight connection of the flange 11 and separating system is possible with the aid of a compression fitting or a suitable metal / ceramic adhesive. In the illustrated embodiments, adhesive connections are provided.
  • the respective adhesive layer is designated 14.
  • the detector 4 which is designed differently in the illustrated exemplary embodiments, is in each case part of a cover 16, with which the opening 5 of the separation system 2 is closed in the region of the end face located outside the vacuum. A stable and vacuum-tight connection between the separation system 2 and cover 16 is expediently ensured again with the aid of a suitable adhesive.
  • the adhesive layer is designated 17.
  • an ion catcher is provided as the detector 4, which is arranged on the bottom of the pot-shaped cover 16 made of ceramic.
  • the signal line 21 is led out through a hole in the cover 16.
  • the lid 16 itself is the carrier of electronic components 22, for. B. a preamplifier.
  • the electronic components 22 are only shown as a dashed block. Of course, there is also the possibility of using the separation system 2 itself as a carrier for electronic components.
  • the basket anode 8 of the ion source 3 located within the recipient 12 is carried by the end of the separation system 2 protruding into the recipient 12.
  • a metallic support ring 23 is glued to this end.
  • An extraction electrode 25 and a carrier plate 26 for the basket anode 8 are fastened to this via spacers 24 made of electrically insulating material (expediently ceramic).
  • the voltage is supplied via lines 27, 28 which are insulated and passed through the flange 11.
  • the line 27 is connected to the basket anode 8.
  • a separate voltage supply for the extraction electrode 25 is not shown.
  • the line 28 is connected to the cathode 7 and at the same time serves as its carrier.
  • a separate heating voltage supply is also not shown.
  • the voltage supply to the components located in the vacuum takes place via conductor tracks 35, 36 which are applied to the ceramic separation system 2.
  • an adhesive layer 14 consisting of an electrically insulating material, a bushing insulated from the flange 11 is ensured.
  • the signals emitted by the detector 4 designed as a Faraday beaker are also routed to the outside with the aid of a conductor track 37.
  • the conductor track 37 passes through the adhesive point 17.
  • Figure 3 shows the detector area of a mass spectrometer according to the invention.
  • a channeltron is provided as detector 4. This is offset from the axis 6 of the separation system 2. With the aid of the deflection electrode 38, the ions emerging from the separation system 2 are deflected onto the input of the channeltron 4.
  • a duct plate can also be used.
  • the detector 4 comprises two ion catchers 41 and 42.
  • the catcher 41 has the shape of a disk.
  • the catcher 42 is ring-shaped and concentrically surrounds the catcher 41.
  • the detector 4 thus has a spatially resolving effect.
  • the signal line 21 adjoining the capture electrode 41 is again led out to the electronics 22 through a hole in the cover 16.
  • the signal emitted by the ring-shaped catcher 42 is fed with the aid of a conductor track 43 to a preamplifier 44 arranged inside the cover 16.
  • the amplified signal is led out of the cover 16 via the conductor track 45 which passes through the adhesive point 17 and is supplied to the electronics 22 on the outside of the cover 16, for example.
  • Figure 5 shows an embodiment with an outer housing 51 which is attached to the flange 11.
  • Printed circuit boards 52, 53, 54 are held within the housing 51 in a manner not shown in detail.
  • Electronic components for supplying the ion source 3 are located on the printed circuit board 52.
  • the lines 55, 56 emanating from the printed circuit board 52 are connected to the direct supply lines 27, 28 via plugs 57, 58.
  • the lines 27, 28 are again insulated by the Flange 11 passed through and designed so stable that they are able to carry the ring cathode 7 and the basket anode 8.
  • the components located on the circuit board 53 are used to generate the supply voltages for the electrodes of the separation system 2 the interconnects 61, 62 passed through the adhesive point 17 and metal tongues 63, 64 abutting these interconnects, the electrodes located in the separation system 2 are connected to the circuit board 53.
  • the electronic components located on the printed circuit board 54 are used for signal processing.
  • the line 21 is connected to the printed circuit board 54 via the plug 65.
  • the present invention makes it possible in a simple manner to equip the separation system 2 with a pre-filter and / or with a post-filter.
  • a pre-filter causes the desired and undesired masses to be separated for the first time and thus serves to better focus the ions into the separation system.
  • a post-filter improves the transfer of the ions to the detector. Overall, the use of pre- and post-filters improves resolution and sensitivity.
  • the pre-filter 71 and the post-filter 72 are assigned to the separation system 2. They are also designed as quadrupole systems and connected to the separation system 2 via the adhesive points 73, 74.
  • the electronics for the voltage supply is not shown in detail. The voltage supply can again take place via conductor tracks which are led through the adhesive points 73, 74. If the pre-filter and after-filter 71, 72 are operated only with AC voltage, specifically with the AC voltage of the separation system 2, there is the possibility of designing the adhesive points 73, 74 as capacitors and, via these capacitors, the voltage applied to the AC voltage electrodes of the separation system 2 to be transferred to the electrodes of the pre- and post-filter 71, 72. Pre- and post-filters are then isolated from the DC potential of the separation system 2.
  • the capacitors are expediently formed by metallized surface sections 75 to 78 located on the respective end faces.
  • the capacitance of the respective capacitors depends on the size and spacing of these surfaces and on the type of adhesive used, that is to say on the sizes that the dielectric of the Form capacitors.
  • the size and arrangement, in particular of the metallized sections 76, 77 is to be selected so that the supply of direct voltages to the electrodes of the separation system 2 via the interconnects 73, 74 penetrating through conductor tracks remains possible.
  • the appropriate glue metal-ceramic or ceramic-ceramic glue

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

The invention relates to a measuring head (1) for a quadrupole mass spectrometer having an ion source (3), an integral quadrupole isolation system (2), a detector (4), a flange (11) for attachment of the measuring head (1) to a container (12), and supporting means for these components; in order to effect a simpler and smaller design, it is proposed that the integral quadrupole isolation system (2) is itself the support for the ion source (3), the detector (4) and/or the attachment flange (11). <IMAGE>

Description

Die Erfindung bezieht sich auf einen Meßkopf für ein Quadrupolmassenspektrometer mit einer lonenquelle, einem einstückigen Quadrupol-Trennsystem, einem Detektor, einem Flansch zur Befestigung des Meßkopfes an einem Rezipienten und Tragmitteln für diese Bauteile.The invention relates to a measuring head for a quadrupole mass spectrometer with an ion source, a one-piece quadrupole separation system, a detector, a flange for attaching the measuring head to a recipient and supporting means for these components.

Aus der Schrift "Grundlagen der Vakuumtechnik, Berechnungen und Tabellen" der Leybold-Heraeus GmbH, Auflage 11/82, Seiten 58, 59 ist ein Meßkopf dieser Art bekannt. Das Quadrupol-Trennsystem besteht aus einem einteiligen, zylindrischen Keramikteil mit einer achsparallelen Öffnung. Im Querschnitt hat diese Öffnung die Form von vier zentralsymmetrisch um die Zylinderachse herum angeordneten Hyperbelästen. Die hyperbelförmigen Flächen sind mit Metallbeschichtungen versehen, welche vier Elektroden mit hyperbolischem Querschnitt bilden. An diese Elektroden wird eine Hochfrequenzspannung und eine überlagerte Gleichspannung angelegt. Vom Wert dieser Spannungen hängt es ab, ob ein Ion mit der Massenzahl M das Trennsystem passieren kann oder nicht. Quadrupol-Trennsysteme dieser Art sind aus den DE-OS'sen 22 15 763, 23 47 544 und 26 25 660 bekannt.A measuring head of this type is known from the document "Fundamentals of Vacuum Technology, Calculations and Tables" by Leybold-Heraeus GmbH, edition 11/82, pages 58, 59. The quadrupole separation system consists of a one-piece, cylindrical ceramic part with an axis-parallel opening. In cross section, this opening is in the form of four central loads arranged symmetrically around the cylinder axis. The hyperbolic surfaces are provided with metal coatings, which form four electrodes with a hyperbolic cross section. A high-frequency voltage and a superimposed DC voltage are applied to these electrodes. It depends on the value of these voltages whether or not an ion with the mass number M can pass through the separation system. Quadrupole separation systems of this type are known from DE-OS'sen 22 15 763, 23 47 544 and 26 25 660.

Beim Quadrupolmeßkopf nach dem Stand der Technik ist ein zentrales, metallisches Tragteil mit einer Vielzahl von Stromdurchführungen vorgesehen. An diesem Tragteil ist der Flansch befestigt, mit dessen Hilfe der Meßkopf an einen korrespondierenden Gegenflansch eines Rezipienten angeschlossen wird. Auf der Außenseite des Flansches münden die durch das Tragteil hindurchgeführten Leitungen in Stecksystemen, an die die Versorgungsspannungen und die signalverarbeitenden Bauteile angeschlossen werden. Auf der Innenseite des Flansches sind am zentralen Tragteil der Detektor und das Quadrupol-Trennsystem gehaltert. Weiterhin ist am Tragteil ein das Trennsystem umfassendes Rohr vorgesehen, das die dem Trennsystem vorgelagerte lonenquelle trägt.In the quadrupole measuring head according to the prior art, a central, metallic support part with a multiplicity of current feedthroughs is provided. The flange is fastened to this supporting part, with the aid of which the measuring head is connected to a corresponding counter flange of a recipient. On the outside of the flange, the cables that pass through the support part open into plug-in systems to which the supply voltages and the signal-processing components are connected. The detector and the quadrupole separation system are mounted on the inside of the flange on the central support part. Furthermore, a tube comprising the separation system is provided on the support part, which carries the ion source upstream of the separation system.

Der Aufbau des vorbekannten Quadrupolmeßkopfes ist aufwendig und kompliziert. Wegen der Vielzahl der zueinander justierenden Bauteile ist die Montage des Meßkopfes zeitaufwendig. Gegen Erschütterungen und Vibrationen ist der vorbekannte Meßkopf sehr empfindlich. Die Zahl seiner Bauteile und damit die im Rezipienten befindliche Oberfläche dieser Bauteile ist groß, wodurch die Erzeugung des für den Betrieb des Massenspektrometers erforderlichen Vakuums beeinträchtigt ist.The construction of the known quadrupole measuring head is complex and complicated. Because of the large number of components that adjust to each other, the mounting of the measuring head is time-consuming. The known measuring head is very sensitive to shocks and vibrations. The number of its components and thus the surface of these components located in the recipient is large, as a result of which the generation of the vacuum required for the operation of the mass spectrometer is impaired.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde einen Quadrupolmeßkopf der eingangs genannten Art zu schaffen, dessen Aufbau wesentlich einfacher ist.The present invention has for its object to provide a Quadrupolmeßkopf of the type mentioned, the structure is much simpler.

Erfindungsgemäß wird diese Aufgabe dadurch gelöst, daß das einstückige Quadrupol-Trennsystem selbst der Träger der lonenquelle, des Detektors und/oder des Befestigungsflansches ist. Durch diese Maßnahme ergibt sich ein überraschend einfacher und stabiler Aufbau des Meßkopfes, der dadurch wesentlich robuster ist. Ein weiterer Vorteil besteht darin, daß weniger Bauteile im Vakuum untergebracht werden müssen, so daß die Größe nachgasender, die Erzeugung des Vakuums beeinträchtigender Oberflächen maßgeblich reduziert ist. Das erfindungsgemäß gestaltete Massenspektrometer ist deshalb nach dem Einschalten wesentlich früher betriebsbereit.According to the invention, this object is achieved in that the one-piece quadrupole separation system itself is the carrier of the ion source, the detector and / or the mounting flange. This measure results in a surprisingly simple and stable construction of the measuring head, which is thereby considerably more robust. Another advantage is that fewer components have to be accommodated in the vacuum, so that the size of the after-gassing surfaces which impair the generation of the vacuum is significantly reduced. The mass spectrometer designed according to the invention is therefore ready for operation much earlier after being switched on.

Eine besonders vorteilhafte Maßnahme im Rahmen der Erfindung besteht darin, daß der Detektor Bestandteil eines Deckels ist, mit dem die lonenaustrittsöffnung des Trennsystemes vakuumdicht verschlossen ist. Diese Maßnahme ermöglicht es, das Trennsystem selbst als Gefäßwand des Vakuumsystems zu verwenden. Außerdem treten infolge einer derartigen, völlig vibrationsfreien Anordnung des Detektors Mikrofonie-Effekte, welche die Empfindlichkeit der Messungen beeinträchtigen, nicht mehr auf.A particularly advantageous measure within the scope of the invention is that the detector is part of a cover with which the ion outlet opening of the separation system is closed in a vacuum-tight manner. This measure makes it possible to use the separation system itself as the vessel wall of the vacuum system. In addition, as a result of such a completely vibration-free arrangement of the detector, microphonic effects which impair the sensitivity of the measurements no longer occur.

Zweckmäßig ist weiterhin, wenn die Verbindungen zwischen dem Quadrupol-Trennsystem und den Bauteilen Klebeverbindungen sind. Dadurch ergibt sich ein stabiler Aufbau bei einfacher Montage. Ist der verwendete Kleber ein Nichtleiter, dann besteht außerdem die Möglichkeit, spannungs- und stromführende Verbindungsleitungen in Form von auf das Quadrupol-Trennsystem aufgebrachten Leiterbahnen durch die Klebestellen hindurchzuführen. Die Vielzahl der bisher nötigen Stromdurchführungen durch den metallischen Flansch selbst kann dadurch entfallen.It is also expedient if the connections between the quadrupole separation system and the components are adhesive connections. This results in a stable structure with simple assembly. If the adhesive used is a non-conductor, there is also the possibility of passing voltage and current-carrying connecting lines through the adhesive points in the form of conductor tracks applied to the quadrupole separation system. The large number of current feedthroughs through the metallic flange itself can thus be eliminated.

Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von in den Figuren 1 bis 6 dargestellten Ausführungsbeispielen erläutert werden.Further advantages and details of the invention will be explained on the basis of the exemplary embodiments shown in FIGS. 1 to 6.

Die Figuren 1 bis 6 zeigen jeweils Meßköpfe 1 nach der Erfindung (oder Teile davon), bei welchen das Quadrupol-Trennsystem selbst mit 2, die lonenquelle mit 3 und der Detektor mit 4 bezeichnet sind. Das Trennsystem besteht aus einem einteiligen, zylindrischen Keramikteil mit einer achsparallelen Öffnung 5, die im Querschnitt vorzugsweise die Form von 4 zentralsymmetrisch um die Zylinderachse 6 herum angeordneten Hyberbelästen hat. Diese Flächen sind mit Metallbeschichtungen versehen, welche vier im einzelnen nicht dargestellte Elektroden bilden. Das Trennsystem kann ein einstückiges Keramikteil sein; es kann aber auch aus mehreren, zu einer Einheit zusammengefügten (zusammengeklebten) Teilen bestehen (vgl. DE-OS 26 25 660).Figures 1 to 6 each show measuring heads 1 according to the invention (or parts thereof), in which the quadrupole separation system itself with 2, the ion source with 3 and the detector with 4 are designated. The separation system consists of a one-piece, cylindrical ceramic part with an axially parallel opening 5, which in cross section preferably has the shape of 4 central branches arranged symmetrically around the cylinder axis 6. These surfaces are provided with metal coatings which form four electrodes, not shown in detail. The separation system can be a one-piece ceramic part; however, it can also consist of several parts which are joined together (glued together) (cf. DE-OS 26 25 660).

Als Ausführungsbeispiel für eine lonenquelle 3 ist jeweils eine Elektronenstoßionenquelle dargestellt, welche eine ringförmige Kathode 7 und eine Korbanode 8 umfaßt. Der Träger dieser Bauteile ist vorzugsweise das Trennsystem 2 selbst.As an exemplary embodiment of an ion source 3, an electron impact ion source is shown, which comprises an annular cathode 7 and a basket anode 8. The carrier of these components is preferably the separation system 2 itself.

Auch der Flansch 11, mit dem der Meßkopf 1 an einem Rezipienten 12 (angedeutet nur in Figur 1) befestigt wird, wird vom Trennsystem 2 selbst getragen. Der Flansch 11 ist in der Nähe der lonenquelle 3 angeordnet, so daß die sich im Vakuum befindende Oberfläche des Meßkopfes 1 möglichst klein ist. Der Flansch 11 umfaßt in einer zentralen Öffnung 13 das Trennsystem 2. Mit Hilfe einer Quetschverschraubung oder eines geeigneten Metall-/ Keramikklebers ist eine stabile und vakuumdichte Verbindung von Flansch 11 und Trennsystem möglich. Bei den dargestellten Ausführungsbeispielen sind Klebeverbindungen vorgesehen. Die jeweilige Klebeschicht ist mit 14 bezeichnet.The flange 11, with which the measuring head 1 is attached to a recipient 12 (indicated only in FIG. 1), is also carried by the separation system 2 itself. The flange 11 is arranged in the vicinity of the ion source 3, so that the surface of the measuring head 1 which is in a vacuum is as small as possible. The flange 11 encompasses the separating system 2 in a central opening 13. A stable and vacuum-tight connection of the flange 11 and separating system is possible with the aid of a compression fitting or a suitable metal / ceramic adhesive. In the illustrated embodiments, adhesive connections are provided. The respective adhesive layer is designated 14.

Der bei den dargestellten Ausführungsbeispielen verschieden gestaltete Detektor 4 ist jeweils Bestandteil eines Deckels 16, mit dem die Öffnung 5 des Trennsystems 2 im Bereich der außerhalb des Vakuums gelegenen Stirnseite verschlossen ist. Eine stabile und vakuumdichte Verbindung zwischen Trennsystem 2 und Deckel 16 wird zweckmäßig wieder mit Hilfe eines geeigneten Klebers sichergestellt. Die Klebeschicht ist mit 17 bezeichnet.The detector 4, which is designed differently in the illustrated exemplary embodiments, is in each case part of a cover 16, with which the opening 5 of the separation system 2 is closed in the region of the end face located outside the vacuum. A stable and vacuum-tight connection between the separation system 2 and cover 16 is expediently ensured again with the aid of a suitable adhesive. The adhesive layer is designated 17.

Beim Ausführungsbeispiel nach Figur 1 ist als Detektor 4 ein lonenfänger vorgesehen, der am Boden des topfförmigen, aus Keramik bestehenden Deckels 16 angeordnet ist. Die Signalleitung 21 ist durch eine Bohrung im Deckel 16 herausgeführt. Der Deckel 16 selbst ist der Träger von elektronischen Bauteilen 22, z. B. eines Vorverstärkers. Die elektronischen Bauteile 22 sind lediglich als gestrichelter Block dargestellt. Natürlich besteht auch die Möglichkeit, das Trennsystem 2 selbst als Träger für elektronische Bauteile zu verwenden.In the exemplary embodiment according to FIG. 1, an ion catcher is provided as the detector 4, which is arranged on the bottom of the pot-shaped cover 16 made of ceramic. The signal line 21 is led out through a hole in the cover 16. The lid 16 itself is the carrier of electronic components 22, for. B. a preamplifier. The electronic components 22 are only shown as a dashed block. Of course, there is also the possibility of using the separation system 2 itself as a carrier for electronic components.

Die innerhalb des Rezipienten 12 befindliche Korbanode 8 der lonenquelle 3 wird vom stirnseitigen, in den Rezipienten 12 hineinragenden Ende des Trennsystems 2 getragen. Dazu ist auf dieses stirnseitige Ende ein metallischer Tragring 23 aufgeklebt. An diesem sind über Abstandshalter 24 aus elektrisch isolierendem Werkstoff (zweckmäßig Keramik) eine Extraktionselektrode 25 und eine Trägerplatte 26 für die Korbanode 8 befestigt. Die Spannungsversorgung erfolgt über isoliert durch den Flansch 11 hindurchgeführte Leitungen 27, 28. Die Leitung 27 ist mit der Korbanode 8 verbunden. Eine gesonderte Spannungszuführung für die Extraktionselektrode 25 ist nicht dargestellt. Die Leitung 28 steht mit der Kathode 7 in Verbindung und dient gleichzeitig als deren Träger. Eine gesonderte Heizspannungsversorgung ist ebenfalls nicht dargestellt.The basket anode 8 of the ion source 3 located within the recipient 12 is carried by the end of the separation system 2 protruding into the recipient 12. For this purpose, a metallic support ring 23 is glued to this end. An extraction electrode 25 and a carrier plate 26 for the basket anode 8 are fastened to this via spacers 24 made of electrically insulating material (expediently ceramic). The voltage is supplied via lines 27, 28 which are insulated and passed through the flange 11. The line 27 is connected to the basket anode 8. A separate voltage supply for the extraction electrode 25 is not shown. The line 28 is connected to the cathode 7 and at the same time serves as its carrier. A separate heating voltage supply is also not shown.

Beim Ausführungsbeispiel nach Figur 2 trägt die im Vakuum befindliche Stirnseite des Trennsystems 2 vier Ringe, welche im einzelnen die folgende Funktion haben:

  • 31 Isolationsring
  • 32 Trägerring für eine lonenlinse
  • 33 Isolationsring
  • 34 Anodengrundplatte
In the exemplary embodiment according to FIG. 2, the end face of the separation system 2, which is in a vacuum, carries four rings, each of which has the following function:
  • 31 insulation ring
  • 32 carrier ring for an ion lens
  • 33 insulation ring
  • 34 anode base plate

Die Spannungsversorgung der im Vakuum befindlichen Bauteile erfolgt über Leiterbahnen 35, 36, welche auf das Keramik-Trennsystem 2 aufgebracht sind. Infolge einer aus elektrisch isolierendem Werkstoff bestehenden Kleberschicht 14 ist eine gegenüber dem Flansch 11 isolierte Durchführung sichergestellt.The voltage supply to the components located in the vacuum takes place via conductor tracks 35, 36 which are applied to the ceramic separation system 2. As a result of an adhesive layer 14 consisting of an electrically insulating material, a bushing insulated from the flange 11 is ensured.

Auch die vom als Faraday-Becher ausgebildeten Detektor 4 abgegebenen Signale werden mit Hilfe einer Leiterbahn 37 nach außen geführt. Die Leiterbahn 37 durchsetzt die Klebestelle 17.The signals emitted by the detector 4 designed as a Faraday beaker are also routed to the outside with the aid of a conductor track 37. The conductor track 37 passes through the adhesive point 17.

Figur 3 zeigt den Detektorbereich eines Massenspektrometers nach der Erfindung. Als Detektor 4 ist ein Channeltron vorgesehen. Dieses ist gegenüber der Achse 6 des Trennsystem 2 versetzt angeordnet. Mit Hilfe der Ablenkelektrode 38 werden die aus dem Trennsystem 2 austretenden lonen auf den Eingang des Channeltrons 4 abgelenkt. Alternativ kann auch eine Kanalplatte verwendet werden.Figure 3 shows the detector area of a mass spectrometer according to the invention. A channeltron is provided as detector 4. This is offset from the axis 6 of the separation system 2. With the aid of the deflection electrode 38, the ions emerging from the separation system 2 are deflected onto the input of the channeltron 4. Alternatively, a duct plate can also be used.

Beim Massenspektrometer nach Figur 4 umfaßt der Detektor 4 zwei lonenfänger 41 und 42. Der Fänger 41 hat die Form einer Scheibe. Der Fänger 42 ist ringförmig gestaltet und umgibt den Fänger 41 konzentrisch. Der Detektor 4 hat dadurch eine ortsauflösende Wirkung.In the mass spectrometer according to FIG. 4, the detector 4 comprises two ion catchers 41 and 42. The catcher 41 has the shape of a disk. The catcher 42 is ring-shaped and concentrically surrounds the catcher 41. The detector 4 thus has a spatially resolving effect.

Die sich an die Fängerelektrode 41 anschließende Signalleitung 21 ist wieder durch eine Bohrung im Deckel 16 zur Elektronik 22 herausgeführt. Das vom ringförmigen Fänger 42 abgegebene Signal wird mit Hilfe einer Leiterbahn 43 einem innerhalb des Deckels 16 angeordneten Vorverstärker 44 zugeführt. Das verstärkte Signal wird über die Leiterbahn 45, die die Klebestelle 17 durchsetzt, aus dem Deckel 16 herausgeführt und auf der Außenseite des Deckels 16 beispielsweise der Elektronik 22 zugeführt.The signal line 21 adjoining the capture electrode 41 is again led out to the electronics 22 through a hole in the cover 16. The signal emitted by the ring-shaped catcher 42 is fed with the aid of a conductor track 43 to a preamplifier 44 arranged inside the cover 16. The amplified signal is led out of the cover 16 via the conductor track 45 which passes through the adhesive point 17 and is supplied to the electronics 22 on the outside of the cover 16, for example.

Figur 5 zeigt ein Ausführungsbeispiel mit einem äußeren Gehäuse 51, das am Flansch 11 befestigt ist. Innerhalb des Gehäuses 51 sind in im einzelnen nicht näher dargestellter Weise Leiterplatten 52, 53, 54 gehaltert. Auf der Leiterplatte 52 befinden sich elektronische Bauteile zur Versorgung der lonenquelle 3. Die Verbindung der von der Leiterplatte 52 ausgehenden Leitungen 55, 56 mit den unmittelbaren Zuführungsleitungen 27, 28 erfolgt über Stecker 57, 58. Die Leitungen 27, 28 sind wieder isoliert durch den Flansch 11 hindurchgeführt und derart stabil ausgebildet, daß sie in der Lage sind, die Ringkathode 7 und die Korbanode 8 zu tragen.Figure 5 shows an embodiment with an outer housing 51 which is attached to the flange 11. Printed circuit boards 52, 53, 54 are held within the housing 51 in a manner not shown in detail. Electronic components for supplying the ion source 3 are located on the printed circuit board 52. The lines 55, 56 emanating from the printed circuit board 52 are connected to the direct supply lines 27, 28 via plugs 57, 58. The lines 27, 28 are again insulated by the Flange 11 passed through and designed so stable that they are able to carry the ring cathode 7 and the basket anode 8.

Die auf der Leiterplatte 53 befindlichen Bauteile dienen der Erzeugung der Versorgungsspannungen für die Elektroden des Trennsystems 2. Über durch die Klebestelle 17 hindurchgeführte Leiterbahnen 61, 62 und über diesen Leiterbahnen anliegende Metallzungen 63, 64 sind die im Trennsystem 2 befindlichen Elektroden mit der Leiterplatte 53 verbunden.The components located on the circuit board 53 are used to generate the supply voltages for the electrodes of the separation system 2 the interconnects 61, 62 passed through the adhesive point 17 and metal tongues 63, 64 abutting these interconnects, the electrodes located in the separation system 2 are connected to the circuit board 53.

Die auf der Leiterplatte 54 befindlichen elektronischen Bauteile dienen der Signalverarbeitung. Über den Stecker 65 ist die Leitung 21 mit der Leiterplatte 54 verbunden.The electronic components located on the printed circuit board 54 are used for signal processing. The line 21 is connected to the printed circuit board 54 via the plug 65.

Die vorliegende Erfindung ermöglicht es in einfacher Weise, das Trennsystem 2 mit einem Vorfilter und/oder mit einem Nachfilter auszurüsten. Ein Vorfilter bewirkt eine erste Trennung der gewünschten und nicht gewünschten Massen und dient damit der besseren Fokussierung der Ionen ins Trennsystem. Ein Nachfilter verbessert die Überleitung der Ionen auf den Detektor. Insgesamt werden bei der Verwendung von Vor- und Nachfilter eine Verbesserung der Auflösung und der Empfindlichkeit erreicht.The present invention makes it possible in a simple manner to equip the separation system 2 with a pre-filter and / or with a post-filter. A pre-filter causes the desired and undesired masses to be separated for the first time and thus serves to better focus the ions into the separation system. A post-filter improves the transfer of the ions to the detector. Overall, the use of pre- and post-filters improves resolution and sensitivity.

Beim Ausführungsbeispiel nach Figur 6 sind dem Trennsystem 2 der Vorfilter 71 und der Nachfilter 72 zugeordnet. Sie sind ebenfalls als Quadrupol-Systeme ausgebildet und über die Klebestellen 73, 74 mit dem Trennsystem 2 verbunden. Die Elektronik für die Spannungsversorgung ist im einzelnen nicht dargestellt. Die Spannungsversorgung kann wieder über Leiterbahnen erfolgen, die durch die Klebestellen 73, 74 hindurchgeführt sind. Werden der Vor- und Nachfilter 71, 72 nur mit Wechselspannung betrieben, und zwar mit der Wechselspannung des Trennsystems 2, dann besteht die Möglichkeit, die Klebestellen 73, 74 als Kondensatoren auszubilden und über diese Kondensatoren, die an den Wechselspannungselektroden des Trennsystems 2 anliegende Spannung auf die Elektroden des Vor- und Nachfilters 71, 72 zu übertragen. Gegenüber dem Gleichspannungspotential des Trennsystems 2 sind dann Vor- und Nachfilter isoliert.6, the pre-filter 71 and the post-filter 72 are assigned to the separation system 2. They are also designed as quadrupole systems and connected to the separation system 2 via the adhesive points 73, 74. The electronics for the voltage supply is not shown in detail. The voltage supply can again take place via conductor tracks which are led through the adhesive points 73, 74. If the pre-filter and after-filter 71, 72 are operated only with AC voltage, specifically with the AC voltage of the separation system 2, there is the possibility of designing the adhesive points 73, 74 as capacitors and, via these capacitors, the voltage applied to the AC voltage electrodes of the separation system 2 to be transferred to the electrodes of the pre- and post-filter 71, 72. Pre- and post-filters are then isolated from the DC potential of the separation system 2.

Die Kondensatoren werden zweckmäßig gebildet von metallisierten, auf den jeweiligen Stirnseiten befindlichen Flächenabschnitten 75 bis 78. Die Kapazität der jeweiligen Kondensatoren hängt von der Größe und vom Abstand dieser Flächen sowie von der Art des verwendeten Klebers ab, also von den Größen, die das Dielektrikum der Kondensatoren bilden. Die Größe und Anordnung insbesondere der metallisierten Abschnitte 76, 77 ist so zu wählen, daß die Zuführung von Gleichspannungen zu den Elektroden des Trennsystems 2 über die Klebestellen 73, 74 durchsetzende Leiterbahnen möglich bleiben.The capacitors are expediently formed by metallized surface sections 75 to 78 located on the respective end faces. The capacitance of the respective capacitors depends on the size and spacing of these surfaces and on the type of adhesive used, that is to say on the sizes that the dielectric of the Form capacitors. The size and arrangement, in particular of the metallized sections 76, 77 is to be selected so that the supply of direct voltages to the electrodes of the separation system 2 via the interconnects 73, 74 penetrating through conductor tracks remains possible.

Für die verschiedenen Klebestellen 14, 17, 73, 74 müssen die jeweils geeigneten Kleber (Metall-Keramik- oder Keramik-Keramik-Kleber) verwendet werden.For the various gluing points 14, 17, 73, 74, the appropriate glue (metal-ceramic or ceramic-ceramic glue) must be used.

Auch die Verwendung von Glaslot und Aktivlot oder Hartlot für die Metall-Keramik-Verbindungen ist möglich.It is also possible to use glass solder and active solder or hard solder for the metal-ceramic connections.

Claims (14)

1. Meßkopf (1) für ein Quadrupolmassenspektrometer mit einer lonenquelle (3), einem einstükkigen Quadrupol-Trennsystem (2), einem Detektor (4), einem Flansch (11) zur Befestigung des Meßkopfes (1) an einem Rezipienten (12) und Tragmitteln für diese Bauteile, dadurch gekennzeichnet, daß das einstückige Quadrupol-Trennsystem (2) selbst der Träger der lonenquelle (3), des Detektors (4) und/oder des Befestigungsflansches (11) ist.1. Measuring head (1) for a quadrupole mass spectrometer with an ion source (3), a one-piece quadrupole separation system (2), a detector (4), a flange (11) for fastening the measuring head (1) to a recipient (12) and Support means for these components, characterized in that the one-piece quadrupole separation system (2) itself is the carrier of the ion source (3), the detector (4) and / or the fastening flange (11). 2. Meßkopf nach Anspruch 1, dadurch gekennzeichnet, daß der Detektor (4) Bestandteil eines Deckels (16) ist, mit dem die lonenaustrittsöffnung des Trennsystems (2) vakuumdicht verschlossen ist.2. Measuring head according to claim 1, characterized in that the detector (4) is part of a cover (16) with which the ion outlet opening of the separation system (2) is closed in a vacuum-tight manner. 3. Meßkopf nach Anspruch 2, dadurch gekennzeichnet, daß der Deckel (16) Träger von elektronischen Bauteilen (22) ist.3. Measuring head according to claim 2, characterized in that the cover (16) is a carrier of electronic components (22). 4. Meßkopf nach Anspruch 1, 2 oder 3, dadurch gekennzeichnet, daß die Verbindungen zwischen dem Trennsystem (2) und den Bauteilen (3, 11, 16) Klebe- oder Lotverbindungen sind.4. Measuring head according to claim 1, 2 or 3, characterized in that the connections between the separation system (2) and the components (3, 11, 16) are adhesive or solder connections. 5. Meßkopf nach Anspruch 4, dadurch gekennzeichnet, daß aus Glaslot, Hartlot, Aktivlot o. dgl. bestehende Verbindungen vorgesehen sind.5. Measuring head according to claim 4, characterized in that made of glass solder, hard solder, active solder or the like. Existing connections are provided. 6. Meßkopf nach Anspruch 4 oder 5, dadurch gekennzeichnet, daß der verwendete Kleber oder das verwendete Lot elektrisch isolierende Eigenschaften hat und daß spannungs-und/oder stromführende Verbindungsleitungen in Form von Leiterbahnen (35, 36, 37, 45, 61, 62) durch die Klebe- bzw. Lotstellen (14, 17, 73, 74) hindurchgeführt sind.6. Measuring head according to claim 4 or 5, characterized in that the adhesive or solder used has electrically insulating properties and that voltage and / or current-carrying connecting lines in the form of conductor tracks (35, 36, 37, 45, 61, 62) through the adhesive or solder points (14, 17, 73, 74) are passed. 7. Meßkopf nach Anspruch 6, dadurch gekennzeichnet, daß zur Verbindung der Leiterbahnen (35, 36, 37, 45, 61, 62) mit elektronischen Versorgungs- und/oder Signalverarbeitungsbauteilen Metallzungen (63, 64) vorgesehen sind.7. Measuring head according to claim 6, characterized in that metal tongues (63, 64) are provided for connecting the conductor tracks (35, 36, 37, 45, 61, 62) with electronic supply and / or signal processing components. 8. Meßkopf nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß der Flansch (11) in der Nähe der lonenquelle (3) angeordnet ist.8. Measuring head according to one of the preceding claims, characterized in that the flange (11) is arranged in the vicinity of the ion source (3). 9. Meßkopf nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß das Trennsystem (2) zusätzlich Träger von elektronischen Bauteilen (22) ist.9. Measuring head according to one of the preceding An Sayings, characterized in that the separation system (2) is also a carrier of electronic components (22). 10. Meßkopf nach einem der vorgehenden Ansprüche, dadurch gekennzeichnet, daß ein äußeres, das Trennsystem (2) einschließendes Gehäuse (51) vorgesehen und am Flansch (11) lösbar befestigt ist.10. Measuring head according to one of the preceding claims, characterized in that an outer, the separation system (2) enclosing housing (51) is provided and is releasably attached to the flange (11). 11. Meßkopf nach Anspruch 10, dadurch gekennzeichnet, daß im Gehäuse (51) elektronische Versorgungs- und Signalverarbeitungsbauteile angeordnet sind und daß zur Verbindung dieser Bauteile mit den zugehörigen Elementen Stecksysteme (57, 58, 65) und/oder Metallzungen (63, 64) vorgesehen sind.11. Measuring head according to claim 10, characterized in that in the housing (51) electronic supply and signal processing components are arranged and that for connecting these components with the associated elements plug systems (57, 58, 65) and / or metal tongues (63, 64) are provided. 12. Meßkopf nach einem der vorgehenden Ansprüche, dadurch gekennzeichnet, daß das Trennsystem (2) mit einem Vor- und/oder Nachfilter (71, 72) ausgerüstet ist.12. Measuring head according to one of the preceding claims, characterized in that the separation system (2) is equipped with a pre-filter and / or post-filter (71, 72). 13. Meßkopf nach Anspruch 12, dadurch gekennzeichnet, daß Vor- und/oder Nachfilter (71 bzw. 72) ebenfalls als Quadrupolsystem ausgebildet sind und mit dem Trennsystem (2) über Klebestellen (70, 74) verbunden sind.13. Measuring head according to claim 12, characterized in that pre- and / or post-filter (71 or 72) are also designed as a quadrupole system and are connected to the separation system (2) via adhesive points (70, 74). 14. Meßkopf nach Anspruch 13, dadurch gekennzeichnet, daß die Klebestellen (73, 74) als Kondensatoren ausgebildet sind und der Übertragung von Wechselspannungen vom Trennsystem (2) auf den Vor- und/oder Nachfilter (71 bzw. 72) dienen.14. Measuring head according to claim 13, characterized in that the adhesive points (73, 74) are designed as capacitors and serve to transmit alternating voltages from the separation system (2) to the pre-filter and / or post-filter (71 or 72).
EP90110681A 1990-06-06 1990-06-06 Measuring head for a quadrupole mass spectrometer Expired - Lifetime EP0460255B1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
AT90110681T ATE118925T1 (en) 1990-06-06 1990-06-06 MEASURING HEAD FOR A QUADRUPOLE MASS SPECTROMETER.
DE59008540T DE59008540D1 (en) 1990-06-06 1990-06-06 Measuring head for a quadrupole mass spectrometer.
EP90110681A EP0460255B1 (en) 1990-06-06 1990-06-06 Measuring head for a quadrupole mass spectrometer
US07/707,575 US5132536A (en) 1990-06-06 1991-05-30 Gauge head for a quadrupole mass spectrometer
JP13390091A JP3179130B2 (en) 1990-06-06 1991-06-05 Measurement head for quadrupole mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP90110681A EP0460255B1 (en) 1990-06-06 1990-06-06 Measuring head for a quadrupole mass spectrometer

Publications (2)

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EP0460255A1 true EP0460255A1 (en) 1991-12-11
EP0460255B1 EP0460255B1 (en) 1995-02-22

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EP90110681A Expired - Lifetime EP0460255B1 (en) 1990-06-06 1990-06-06 Measuring head for a quadrupole mass spectrometer

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US (1) US5132536A (en)
EP (1) EP0460255B1 (en)
JP (1) JP3179130B2 (en)
AT (1) ATE118925T1 (en)
DE (1) DE59008540D1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4494105T1 (en) * 1993-06-14 1996-05-09 Ferran Scient Miniature quadrupole arrangement

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3075076A (en) * 1958-12-12 1963-01-22 Siemens Ag Gas-analyzing method and apparatus
US3560734A (en) * 1968-06-26 1971-02-02 Edward F Barnett Quadrupole mass filter with fringing-field penetrating structure
GB1379515A (en) * 1970-10-30 1975-01-02 Ball G W Mass spectrometers
WO1984003994A1 (en) * 1983-03-28 1984-10-11 Prutec Ltd Mass spectrometer

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3105899A (en) * 1960-03-25 1963-10-01 Siemens Ag Electric mass filter
US3350559A (en) * 1965-01-26 1967-10-31 Gen Electric Monopole mass spectrometer having one ceramic electrode coated with metal to within a short distance of each end
US3457404A (en) * 1965-09-13 1969-07-22 Electronic Associates Quadrupole mass analyzer
US3937954A (en) * 1973-03-30 1976-02-10 Extranuclear Laboratories, Inc. Methods and apparatus for spatial separation of AC and DC electric fields, with application to fringe fields in quadrupole mass filters
CN85102774B (en) * 1985-04-01 1987-11-04 复旦大学 Method and structure of causing electrostatic 4-porlarity field by using closed boundary
US4885500A (en) * 1986-11-19 1989-12-05 Hewlett-Packard Company Quartz quadrupole for mass filter

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3075076A (en) * 1958-12-12 1963-01-22 Siemens Ag Gas-analyzing method and apparatus
US3560734A (en) * 1968-06-26 1971-02-02 Edward F Barnett Quadrupole mass filter with fringing-field penetrating structure
GB1379515A (en) * 1970-10-30 1975-01-02 Ball G W Mass spectrometers
WO1984003994A1 (en) * 1983-03-28 1984-10-11 Prutec Ltd Mass spectrometer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4494105T1 (en) * 1993-06-14 1996-05-09 Ferran Scient Miniature quadrupole arrangement

Also Published As

Publication number Publication date
EP0460255B1 (en) 1995-02-22
DE59008540D1 (en) 1995-03-30
JP3179130B2 (en) 2001-06-25
US5132536A (en) 1992-07-21
ATE118925T1 (en) 1995-03-15
JPH04229544A (en) 1992-08-19

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