EP0425671A1 - Device for ultrasonic treatment of articles in a liquid medium - Google Patents
Device for ultrasonic treatment of articles in a liquid medium Download PDFInfo
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- EP0425671A1 EP0425671A1 EP89909455A EP89909455A EP0425671A1 EP 0425671 A1 EP0425671 A1 EP 0425671A1 EP 89909455 A EP89909455 A EP 89909455A EP 89909455 A EP89909455 A EP 89909455A EP 0425671 A1 EP0425671 A1 EP 0425671A1
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- liquid medium
- workpieces
- electroacoustic transducers
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- frequency generator
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- 239000007788 liquid Substances 0.000 title claims abstract description 32
- 238000009210 therapy by ultrasound Methods 0.000 title abstract 2
- 238000002604 ultrasonography Methods 0.000 claims description 23
- 238000003754 machining Methods 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001804 emulsifying effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
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- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/18—Methods or devices for transmitting, conducting or directing sound
- G10K11/26—Sound-focusing or directing, e.g. scanning
- G10K11/34—Sound-focusing or directing, e.g. scanning using electrical steering of transducer arrays, e.g. beam steering
Definitions
- the present invention relates to devices for transmitting mechanical vibrations of the ultrasound frequency in a liquid medium and in particular relates to devices for ultrasound machining of workpieces in a liquid medium.
- a device for ultrasound processing of workpieces in a liquid medium which contains an ultrasound frequency generator which is directly connected to two groups of electroacoustic transducers, which on an elastic element at a distance from the workpieces housed in the liquid medium in the manner to be processed are arranged so that the electroacoustic transducers of one group lie between the electroacoustic transducers of the other group (SU, A, 262529).
- the direct connection of the ultrasonic frequency generator to the two groups of electroacoustic transducers in the above-mentioned device leads to the fact that the ultrasonic processing of the workpieces from maximum and minimum values of the sound pressure on the workpieces in the liquid medium, which arise due to an interference of ultrasonic vibrations in the volume of the liquid Medium generated by the two groups of electroacoustic transducers is affected. As a result, areas with increased sound pressure and standstill zones arise, which leads to uneven machining of the workpieces and consequently to a deterioration in the surface quality of the workpieces.
- a device for ultrasound processing of workpieces in a liquid medium which contains an ultrasound frequency generator and two groups of electroacoustic transducers, one of which is connected directly to the output of the ultrasound frequency generator and the other is electrically connected to the output of the ultrasound frequency generator, while the two Groups arranged on an elastic element filled with a liquid medium at a distance from the workpieces to be processed housed in the liquid medium are that the electroacoustic transducers of one group lie between the electroacoustic transducers of the other group (SU, A, 460074).
- the electrical connection of the ultrasonic frequency generator to one of the groups of electro-acoustic transducers takes place via a phase shifter. This allows a uniform, but only one-sided and only applicable to the given workpiece workpiece processing by adjusting the phase shifter.
- the device mentioned therefore does not ensure a uniform effect of the ultrasonic vibrations on the surface of the entire workpiece and, consequently, no two-sided uniform processing of the total area of workpieces of different shapes, including large workpieces, which leads to a low surface quality of the workpieces.
- the invention has for its object to provide a device for the ultrasonic processing of workpieces in a liquid medium in which the electroacoustic transducers are electrically connected to the ultrasonic frequency generator such that a uniform action, the ultrasonic vibrations on the entire surface of workpieces, including large ones Workpieces is guaranteed.
- the device for ultrasound processing of workpieces in a liquid medium which contains an ultrasound frequency generator and two groups of electroacoustic transducers, one of which is connected directly to the output of the ultrasound frequency generator and the other to the output of the ultrasound frequency generator is electrically connected, while the two groups are arranged on an elastic element filled with a liquid medium at a distance from the workpieces to be processed housed in the liquid medium in such a way that the electroacoustic transducers of one group lie between the electroacoustic transducers of the other group ,
- a series connection of a sawtooth voltage generator and a phase pulse modulator is provided, the electrical connection of one of the groups of electroacoustic transducers to the ultrasonic frequency generator being established via the phase pulse modulator.
- the simultaneous two-sided workpiece machining reduces the machining time by two times.
- FIG. 1 shows the basic circuit diagram of a device according to the invention for ultrasound machining of workpieces in a liquid medium (the elastic element of the device is shown in a front view);
- Fig. 2 is a view in the direction of arrow A of Fig. 1;
- 3 shows the elastic element of the device according to FIG. 1 (in plan view with an enlargement) and a graphical representation of vibration amplitudes of this elastic element.
- the device according to the invention for ultrasound processing of workpieces in a liquid medium contains an ultrasound frequency generator 1 (FIG. 1) and two groups 2 and 3 of electroacoustic transducers 4.
- the group 2 of the electroacoustic transducers 4 is connected directly to the output of the generator 1.
- the group 3 of the electroacoustic transducers 4 is electrically connected to the output of the generator 1 via a phase pulse modulator 5, which is connected to the output of a sawtooth voltage generator 6.
- the two groups 2 and 3 of the electroacoustic transducer 4 are arranged on an elastic element 7 in the form of a tub at a certain distance from workpieces 9 (FIG. 2) accommodated in a liquid medium 8 filling the tub, in such a way that the electroacoustic transducers 4 of one group 2 lie between the electroacoustic transducers 4 of group 3, as shown in FIG. 1.
- the electroacoustic transducers 4 are arranged in rows in each group 2 and 3 and offset from one another by a distance which is equal to a half-wavelength ⁇ / 2 of the ultrasonic vibrations in the liquid medium 8.
- groups 2 (FIG. 1) and 3 of electroacoustic transducers 4 are arranged opposite one another on the opposite trough walls in such a way that the electroacoustic transducers 4 of group 2 and group 3 as a whole are a checkerboard arrangement with one displacement form, which is equal to a quarter wavelength ⁇ / 4 of the ultrasonic vibrations in the liquid medium 8.
- a sawtooth voltage generator 6 and phase pulse shaper 5 can be used as a sawtooth voltage generator or phase pulse modulator, which is well known to those skilled in the art and suitable for the stated purposes and tasks, as described in "Poluprovodnikovaya skhemotekhnika” (semiconductor circuit technology), 1982 , Publisher “Mir” (Moscow) from Tittse et al are described, used.
- the mode of operation of the device according to the invention for ultrasound machining of workpieces in a liquid medium consists in the following.
- the ultrasonic frequency generator 1 (FIG. 1) generates an electrical voltage which changes according to the sine law at a frequency which is the same as the operating frequency of the electroacoustic transducers 4. This voltage is applied directly to the electroacoustic transducers 4 of group 2, whereby they are excited at the natural frequency, which results in the formation of ultrasonic vibrations in the liquid medium 8.
- the voltage of the ultrasound frequency from the output of the ultrasound frequency generator 1 is also applied to one of the inputs of the phase pulse modulator 5, at the other input of which a sawtooth voltage is supplied from the output of the sawtooth voltage generator 6.
- the phase-modulated voltage of the ultrasound frequency passes from the output of the phase pulse modulator 5 to the group 3 of the electroacoustic transducers 4.
- the amplitude of the displacements of the vibrations of the radiation surface of the elastic element 7 (FIG. 3), which are generated by the group 3 of the electroacoustic transducers 4, changes according to the sinus law with an ultrasound frequency ⁇ and a phase that also changes sinusoidally with a modulation frequency ⁇ changes.
- the distribution of the displacements has a non-stationary character and shifts on the striation surface of the elastic element 7 from the course of a curve 10 to the course of a curve 11 by a value of L and back as shown in FIG. 3.
- the device according to the invention for the ultrasonic processing of workpieces in a liquid medium ensures a high uniformity of the simultaneous processing of the total surface of the workpieces regardless of their configuration without additional adjustment of the ultrasonic frequency generator when changing the liquid medium and changing the configuration of the workpieces to be processed.
- the device for ultrasound processing of workpieces in a liquid medium can be used when cleaning the workpieces, when degreasing, emulsifying, soaking and etching them.
Abstract
Un dispositif de traitement ultrasonique d'articles se trouvant dans un milieu liquide comprend deux groupes (2, 3) de convertisseurs électroacoustiques (4) montés sur un élément élastique (7) rempli d'un milieu liquide, à la manière d'un damier, à une certaine distance des articles à traiter. Lesdits convertisseurs électroacoustiques (4) du groupe (2), sont connectés à la sortie d'un générateur (1) de fréquences ultrasoniques. Les convertisseurs électroacoustiques (4) du groupe (3) sont connectés à la sortie du générateur (1) par l'intermédiaire d'un modulateur (5) d'impulsions de phases, connecté à un générateur (65) de tension en dents de scie.A device for ultrasonic treatment of articles located in a liquid medium comprises two groups (2, 3) of electroacoustic converters (4) mounted on an elastic element (7) filled with a liquid medium, in the manner of a checkerboard , at a certain distance from the articles to be treated. Said electroacoustic converters (4) of group (2) are connected to the output of an ultrasonic frequency generator (1). The electroacoustic converters (4) of the group (3) are connected to the output of the generator (1) via a phase pulse modulator (5), connected to a toothed voltage generator (65). saw.
Description
Die vorliegende Erfindung bezieht sich auf Einrichtungen zur Übertragung von mechsnischen Schwingungen der Ultraschallfrequenz in ein flüssiges Medium und betrifft insbesondere Einrichtungen zur Ultraschallbearbeitung von Werkstücken in einem flüssigen Medium.The present invention relates to devices for transmitting mechanical vibrations of the ultrasound frequency in a liquid medium and in particular relates to devices for ultrasound machining of workpieces in a liquid medium.
Es ist eine Einrichtung zur Ultraschallbearbeitung von Werkstücken in einem flüssigen Medium bekannt, die einen Ultraschallfrequenzgenerator enthält, der an zwei Gruppen von elektroakustischen Wandlern direkt angeschlossen ist, die auf einem elastischen Element in einigem Abstand von den im flüssigen Medium untergebrachten zu bearbeitenden Werkstücken in der Weise angeordnet sind, daß die elektroakustischen Wandler der einen Gruppe zwischen den elektroakustischen Wandlern der anderen Gruppe liegen (SU, A, 262529).A device for ultrasound processing of workpieces in a liquid medium is known, which contains an ultrasound frequency generator which is directly connected to two groups of electroacoustic transducers, which on an elastic element at a distance from the workpieces housed in the liquid medium in the manner to be processed are arranged so that the electroacoustic transducers of one group lie between the electroacoustic transducers of the other group (SU, A, 262529).
Der direkte Anschluß des Ultraschallfrequenzgenerators an die beiden Gruppen der elektroakustischen Wandler führt in der genannten Einrichtung dazu, daß die Ultraschallbearbeitung der Werkstücke von Maximal- und Minimalwerten des Schalldrucks auf die Werkstücke im flüssigen Medium, die wegen einer Interferenz von Ultraschallschwingungen entstehen die im Volumen des flüssigen Mediums durch die beiden Gruppen der elektroakustischen Wandler erzeugt werden, beeinflußt wird. Infolgedessen entstehen Bereiche mit einem erhöhten Schalldruck und Stillstandszonen, was zu einer ungleichmäßigen Bearbeitung der Werkstücke und folglich zu einer Verschlechterung der Oberflächengüte der Werkstücke führt.The direct connection of the ultrasonic frequency generator to the two groups of electroacoustic transducers in the above-mentioned device leads to the fact that the ultrasonic processing of the workpieces from maximum and minimum values of the sound pressure on the workpieces in the liquid medium, which arise due to an interference of ultrasonic vibrations in the volume of the liquid Medium generated by the two groups of electroacoustic transducers is affected. As a result, areas with increased sound pressure and standstill zones arise, which leads to uneven machining of the workpieces and consequently to a deterioration in the surface quality of the workpieces.
Es ist eine Einrichtung zur Ultraschallbearbeitung von Werkstücken in einem flüssigen Medium bekannt, die einen Ultraschallfrequenzgenerator und zwei Gruppen von elektroakustischen Wandlern enthält, von denen eine an den Ausgang des Ultraschallfrequenzgenerators direkt angeschlossen und die andere mit dem Ausgang des Ultraschallfrequenzgenerators elektrisch verbunden ist, während die beiden Gruppen auf einem mit einem flüssigen Medium gefüllten elastischen Element in einigem Abstand von den im flüssigen Medium untergebrachten zu bearbeitenden Werkstücken in der Weise angeordnet sind, daß die elektroakustischen Wandler der einen Gruppe zwischen den elektroakustischen Wandlern der anderen Gruppe liegen (SU, A, 460074).A device for ultrasound processing of workpieces in a liquid medium is known which contains an ultrasound frequency generator and two groups of electroacoustic transducers, one of which is connected directly to the output of the ultrasound frequency generator and the other is electrically connected to the output of the ultrasound frequency generator, while the two Groups arranged on an elastic element filled with a liquid medium at a distance from the workpieces to be processed housed in the liquid medium are that the electroacoustic transducers of one group lie between the electroacoustic transducers of the other group (SU, A, 460074).
In der genannten Einrichtung kommt die elektrische Verbindung des Ultraschallfrequenzgenerators mit einer der Gruppen der elektroekustischen Wandler über einen Phasenschieber zustande. Dies gestattet es, eine gleichmaßige, jedoch nur einseitige und nur für das gegebene Werkstück zutreffende Werkstückbearbeitung durch Nachstellung des Phasenschiebers zu ermöglichen.In the device mentioned, the electrical connection of the ultrasonic frequency generator to one of the groups of electro-acoustic transducers takes place via a phase shifter. This allows a uniform, but only one-sided and only applicable to the given workpiece workpiece processing by adjusting the phase shifter.
Bei der Bearbeitung von flachen großen Werkstücken, beispielsweise von gedruckten Leiterplatten oder Magnetspeicherplatten, wird allerdings eine qualitätsgerechte zweiseitige Werkstückbearbeitung verlangt. Durch die besagte Einrichtung wird das nicht gesichert.When processing flat, large workpieces, such as printed circuit boards or magnetic storage disks, however, high-quality, two-sided workpiece machining is required. This is not ensured by said facility.
Darüber hinaus wird bei einer Formänderung von zu bearbeitenden Werkstücken in jedem konkreten Fall eine zusätzliche Nachstellung des Phasenschiebers erforderlich.In addition, if the shape of workpieces to be machined changes in each specific case, an additional adjustment of the phase shifter is required.
Die genannte Einrichtung gewährleistet also keine gleichmäßige Einwirkung der Ultraschallschwingungen auf die Oberfläche des gesamten Werkstücks und folglich auch keine zweiseitige gleichmäßige Bearbeitung der Gesamtfläche von Werkstücken verschiedener Form, darunter auch von großen Werkstücken, was zu einer niedrigen Oberflächengüte der Werkstücke führt.The device mentioned therefore does not ensure a uniform effect of the ultrasonic vibrations on the surface of the entire workpiece and, consequently, no two-sided uniform processing of the total area of workpieces of different shapes, including large workpieces, which leads to a low surface quality of the workpieces.
Der Erfindung liegt die Aufgabe zugrunde, eine Einrichtung zur Ultraschallbearbeitung von Werkstücken in einem flüssigen Medium zu schaffen, in der die elektroakustischen Wandler mit dem Ultraschallfrequenzgenerator derart elektrisch verbunden sind, daß eine gleichmäßige Einwirkung, der Ultraschallschwingungen auf die Gesamtfläche von Werkstücken, darunter auch von großen Werkstücken, gewährleistet ist.The invention has for its object to provide a device for the ultrasonic processing of workpieces in a liquid medium in which the electroacoustic transducers are electrically connected to the ultrasonic frequency generator such that a uniform action, the ultrasonic vibrations on the entire surface of workpieces, including large ones Workpieces is guaranteed.
Dies wird dadurch erreicht, daß in der Einrichtung zur Ultraschallbearbeitung von Werkstücken in einem flüssigen Medium, die einen Ultraschallfrequenzgenerator und zwei Gruppen von elektroakustischen Wandlers enthält, von denen eine an den Ausgang des Ultraschallfrequenzgenerators direkt angeschlossen und die andere mit dem Ausgang des Ultraschallfrequenzgenerators elektrisch verbunden ist, während die beiden Gruppen auf einem mit einem flüssigen Medium gefüllten elastischen Element in einigem Abstand von den im flüssigen Medium untergebrachten zu bearbeitenden Werkstücken in der Weise angeordnet sind, daß die elektroakustischen Wandler der einen Gruppe zwischen den elektroakustischen Wandlern der anderen Gruppe liegen, gemäß der Erfindung eine Reihenschältung von einem Sägezahnspannungsgenerator und einem Phasenimpulsmodulator vorgesehen ist, wobei die elektrische Verbindung der einen der Gruppen der elektroakustischen Wandler mit dem Ultraschallfrequenzgenerator über den Phasenimpulsmodulator zustande kommt.This is achieved in that in the device for ultrasound processing of workpieces in a liquid medium, which contains an ultrasound frequency generator and two groups of electroacoustic transducers, one of which is connected directly to the output of the ultrasound frequency generator and the other to the output of the ultrasound frequency generator is electrically connected, while the two groups are arranged on an elastic element filled with a liquid medium at a distance from the workpieces to be processed housed in the liquid medium in such a way that the electroacoustic transducers of one group lie between the electroacoustic transducers of the other group , According to the invention, a series connection of a sawtooth voltage generator and a phase pulse modulator is provided, the electrical connection of one of the groups of electroacoustic transducers to the ultrasonic frequency generator being established via the phase pulse modulator.
Die Einführung des Sägezahnspannungsgenerators und des Phasenmodulators in die zu patentierende Einrichtung zur Ultraschallbearbeitung von Werkstücken in einem flüssigen Medium, deren elektrische Reihenschaltung und die Realisierung der elektrischen Verbindung einer der Gruppen der elektroakustischen Wandler mit dem Ultraschallfrequenzgenerator über den Phasenimpulsmodulator gestatten es, die stationäre Art der Verteilung der Maxima und Minima von Biegeschwingungen auf der Strahlungsfläche des elastischen Elements auszuschließen und dadurch die Gleichmäßigkeit der Einwirkung der Ultraschallschwingungen auf die Gesamtfläche der zu bearbeitenden Werkstücke zu erhöhen, während die gleichmaßigere Einwirkung der Ultraschallschwingungen eine Zerstörung von Werkstückabschnitten und unbearbeitete Abschnitte dieser Werkstücke ausschließt und für eine Verbesserung der Oberflächengüte der Werkstücke bei deren Bearbeitung im flüssigen Medium sorgt.The introduction of the sawtooth voltage generator and the phase modulator into the patented device for the ultrasonic processing of workpieces in a liquid medium, their electrical series connection and the realization of the electrical connection of one of the groups of electroacoustic transducers with the ultrasonic frequency generator via the phase pulse modulator allow the stationary type of distribution to exclude the maxima and minima of bending vibrations on the radiation surface of the elastic element and thereby increase the uniformity of the action of the ultrasonic vibrations on the total area of the workpieces to be machined, while the more uniform action of the ultrasonic vibrations excludes the destruction of workpiece sections and unprocessed sections of these workpieces and for one Improves the surface quality of the workpieces when they are processed in the liquid medium.
Die gleichzeitige zweiseitige Werkstückbearbeitung reduziert die Bearbeitungszeit um das Zweifache.The simultaneous two-sided workpiece machining reduces the machining time by two times.
Die Erfindung wird nachfolgend durch Beschreibung eines konkreten Ausführungsbeispiels anhand von beiliegenden Zeichnungen erläutert. Es zeigt:
Fig. 1 das Prinzipschaltbild einer erfindungsgemäßen Einrichtung zur Ultraschallbearbeitung von Werkstücken in einem flüssigen Medium (das elastische Element der Einrichtung ist in Frontansicht dargestellt);
Fig. 2 eine Ansicht in Pfeilrichtung A von Fig. 1;
Fig. 3 das elastische Element der Einrichtung nach Fig.1 (in Draufsicht mit einer Vergrößerung) und eine grafische Darstellung von Schwingungsamplituden dieses elastischen Elements.The invention is explained below by describing a specific embodiment with reference to the accompanying drawings. It shows:
1 shows the basic circuit diagram of a device according to the invention for ultrasound machining of workpieces in a liquid medium (the elastic element of the device is shown in a front view);
Fig. 2 is a view in the direction of arrow A of Fig. 1;
3 shows the elastic element of the device according to FIG. 1 (in plan view with an enlargement) and a graphical representation of vibration amplitudes of this elastic element.
Die erfindungsgemäße Einrichtung zur Ultraschallbearbeitung von Werkstücken in einem flüssigen Medium enthält einen Ultraschallfrequenzgenerator 1 (Fig. 1) und zwei Gruppen 2 und 3 von elektroakustischen Wandlern 4. Die Gruppe 2 der elektroakustischen Wandler 4 ist an den Ausgang des Generators 1 direkt angeschlossen. Die Gruppe 3 der elektroakustischen Wandler 4 ist mit dem Ausgang des Generators 1 über einen Phasenimpulsmodulator 5 elektrisch verbunden, der mit dem Ausgang eines Sägezahnspannungsgenerators 6 in Verbindung steht.The device according to the invention for ultrasound processing of workpieces in a liquid medium contains an ultrasound frequency generator 1 (FIG. 1) and two
Die beiden Gruppen 2 und 3 der elektroakustischen Wandler 4 sind auf einem in Form einer Wanne ausgeführten elastischen Element 7 in einigem Abstand von in einem die Wanne ausfüllenden flüssigen Medium 8 untergebrachten zu bearbeitenden Werkstücken 9 (Fig. 2) in der Weise angeordnet, daß die elektroakustischen Wandler 4 der einen Gruppe 2 zwischen den elektroakustischen Wandlern 4 der Gruppe 3, wie in Fig. 1 gezeigt, liegen.The two
In der hier beschriebenen Ausführungsform der erfindungsgemäßen Einrichtung werden als elektroakustische Wandler 4 Magnetostriktions- oder Piezokeramik-Ultraschallwandler eingesetzt.In the embodiment of the device according to the invention described here, 4 magnetostriction or piezoceramic ultrasound transducers are used as electroacoustic transducers.
Die elektroakustischen Wandler 4 (Fig. 1 und 2) sind in jeder Gruppe 2 und 3 in Reihen angeordnet und gegeneinander um einen Abstand versetzt, der einer Halbwellenlänge λ /2 der Ultraschallschwingungen im flüssigen Medium 8 gleich ist.The electroacoustic transducers 4 (FIGS. 1 and 2) are arranged in rows in each
In der erfindungsgemaßen Einrichtung sind die Gruppen 2 (Fig. 1) und 3 der electroakustischen Wandler 4 einander gegenüber an den entgegengesetzten Wannenwänden in der Weise angeordnet, daß die elektroakustischen Wandler 4 der Gruppe 2 und der Gruppe 3 in der Gesamtheit eine Schachbrettanordnung mit einer Verschiebung bilden, die einer Viertelwellenlänge λ /4 der Ultraschallschwingungen im flüssigen Medium 8 gleich ist.In the device according to the invention, groups 2 (FIG. 1) and 3 of
In Fig. 1 sind die elektroakustischen Wandler 4 der Gruppe 2 zur anschaulichen Darlegung und zum Verständnis des Erfindungswesens gestrichelt angedeutet.In Fig. 1, the
In der hier beschriebenen Ausführungsform der erfindungsgemäßen Einrichtung können als Sägezahnspannungsgenerator 6 und Phasenimpulsformer 5 ein den auf dem betreffenden Gebiet tätigen Fachleuten weit bekannter und für die genannten Ziele und Aufgaben geeigneter Sägezahnspannungsgenerator bzw. Phasenimpulsmodulator, wie sie in "Poluprovodnikovaya skhemotekhnika" (Halbleiterschaltungstechnik), 1982, Verlag "Mir" (Moskau) von Tittse u.a. geschildert sind, benutzt werden.In the embodiment of the device according to the invention described here, a
Die Wirkungsweise der erfindungsgemäßen Einrichtung zur Ultraschallbearbeitung von Werkstücken in einem flüssigen Medium besteht in folgendem.The mode of operation of the device according to the invention for ultrasound machining of workpieces in a liquid medium consists in the following.
Der Ultraschallfrequenzgenerator 1 (Fig. 1) erzeugt eine elektrische Spannung, die sich nach dem Sinusgesetz mit einer Frequenz ändert, die der Betriebsfrequenz der elektroakustischen Wandler 4 gleich ist. Diese Spannung wird auf die elektroakustischen Wandler 4 der Gruppe 2 direkt gegeben, wodurch diese auf der Eigenfrequenz erregt werden, was die Entstehung von Ultraschallschwingungen im flüssigen Medium 8 zur Folge hat.The ultrasonic frequency generator 1 (FIG. 1) generates an electrical voltage which changes according to the sine law at a frequency which is the same as the operating frequency of the
Zugleich wird die Spannung der Ultraschallfrequenz vom Ausgang des Ultraschallfrequenzgenerators 1 auch an einen der Eingänge des Phasenimpulsmodulators 5 angelegt, an dessen anderen Eingang eine Sägezahnspannung vom Ausgang des Sägezahnspannungsgenerators 6 geliefert wird. Die phasenmodulierte Spannung der Ultraschallfrequenz gelangt vom Ausgang des Phasenimpulsmodulators 5 auf die Gruppe 3 der elektroakustischen Wandler 4.At the same time, the voltage of the ultrasound frequency from the output of the
Die Amplitude der Verschiebungen der Schwingungen der Strahlungsfläche des elastischen Elements 7 (Fig. 3), die durch die Gruppe 3 der elektroakustischen Wandler 4 erzeugt werden, ändert sich nach dem sinusgesetz mit einer Ultraschallfrequenz ω und einer Phase, die sich auch sinusoidal mit einer Modulationsfrequenz Ω andert. Hierbei hat die Verteilung der Verschiebungen einen nichtstationären Charakter und verschiebt sich auf der Stranlungsfläche des elastischen Elements 7 vom Verlauf einer Kurve 10 bis zum Verlauf einer Kurve 11 um einen Wert von L und zurück, wie dies in Fig. 3 gezeigt ist.The amplitude of the displacements of the vibrations of the radiation surface of the elastic element 7 (FIG. 3), which are generated by the
Infolge der Summation von durch die Gruppen 2 und 3 der elektroakustischen Wandler 4 erzeugten Schwingungen entsteht im flüssigen Medium 8 keine Interferenz, weil die Schwingungen unterschiedliche Phasen aufweisen. Auf der Oberfläche der zu bearbeitenden Werkstücke 9 sind also keine Stillstandszonen zu verzeichnen, was eine Ernöhung der Gleichmäßigkeit der Bearbeitung des Gesamtfläche der beidseitig zu bearbeitenden Werkstücke nach sich zieht.As a result of the summation of vibrations generated by the
Die erfindungsgemäße Einrichtung zur Ultraschallbearbeitung von Werkstücken in einem flüssigen Medium gewährleistet eine hohe Gleichmäßigkeit der gleichzeitigen Bearbeitung der Gesamtfläche der Werkstücke unabhängig von deren Konfiguration ohne zusätzliche Nachstellung des Ultraschallfrequenzgenerators bei einem Wechsel des flüssigen Mediums und einer Änderung der Konfiguration der zu bearbeitenden Werkstücke.The device according to the invention for the ultrasonic processing of workpieces in a liquid medium ensures a high uniformity of the simultaneous processing of the total surface of the workpieces regardless of their configuration without additional adjustment of the ultrasonic frequency generator when changing the liquid medium and changing the configuration of the workpieces to be processed.
Die Einrichtung zur Ultraschallbearbeitung von Werkstücken in einem flüssigen Medium kann bei der Durchführung des Putzens der Werkstücke, beim Entfetten, Emulgieren, Durchtränken und Ätzen derselben eingesetzt werden.The device for ultrasound processing of workpieces in a liquid medium can be used when cleaning the workpieces, when degreasing, emulsifying, soaking and etching them.
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/SU1989/000121 WO1990014175A1 (en) | 1989-05-17 | 1989-05-17 | Device for ultrasonic treatment of articles in a liquid medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP0425671A1 true EP0425671A1 (en) | 1991-05-08 |
Family
ID=21617463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP89909455A Withdrawn EP0425671A1 (en) | 1989-05-17 | 1989-05-17 | Device for ultrasonic treatment of articles in a liquid medium |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US5133376A (en) |
| EP (1) | EP0425671A1 (en) |
| JP (1) | JPH04500033A (en) |
| WO (1) | WO1990014175A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007019492A1 (en) * | 2007-04-25 | 2008-10-30 | Heinrich Kuttruff | Ultrasound cleaning device, has ultrasonic emitters producing ultrasounds and operated with same frequency and different phases to form irregular pattern and phase differences consist of different signs of emitter oscillations |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2696017B2 (en) * | 1991-10-09 | 1998-01-14 | 三菱電機株式会社 | Cleaning device and cleaning method |
| US5383484A (en) * | 1993-07-16 | 1995-01-24 | Cfmt, Inc. | Static megasonic cleaning system for cleaning objects |
| JPH0810731A (en) * | 1994-06-27 | 1996-01-16 | Yoshihide Shibano | Ultrasonic washing device |
| DE4424874C1 (en) * | 1994-07-14 | 1996-01-11 | Dmt Gmbh | Method and device for the sprinkling of templates and filling gas extraction of a coke oven battery |
| US5711327A (en) * | 1995-10-10 | 1998-01-27 | Fields; John T. | System for vibration cleaning of articles including radiators |
| US6240938B1 (en) * | 1996-05-29 | 2001-06-05 | Steag Microtech Gmbh | Device for treating substrates in a fluid container |
| US5752302A (en) * | 1997-04-23 | 1998-05-19 | The United States Of America As Represented By The United States Department Of Energy | Method and apparatus for sizing and separating warp yarns using acoustical energy |
| JPH10323635A (en) * | 1997-05-26 | 1998-12-08 | Sony Corp | Ultrasonic cleaning device |
| DE19758267A1 (en) * | 1997-12-31 | 1999-07-08 | Steag Micro Tech Gmbh | Method and device for treating substrates |
| US6021789A (en) * | 1998-11-10 | 2000-02-08 | International Business Machines Corporation | Wafer cleaning system with progressive megasonic wave |
| US6148833A (en) * | 1998-11-11 | 2000-11-21 | Applied Materials, Inc. | Continuous cleaning megasonic tank with reduced duty cycle transducers |
| KR101004073B1 (en) * | 2003-11-05 | 2010-12-27 | 더 크레스트 그룹, 인코포레이티드 | Ultrasonic processing method and apparatus with multiple frequency transducers |
| TWI393595B (en) * | 2006-03-17 | 2013-04-21 | Michale Goodson J | Megasonic processing apparatus with frequencey sweeping of thickness mode transducers |
| GB2506939B (en) | 2012-10-15 | 2017-04-05 | Alphasonics (Ultrasonic Cleaning Systems) Ltd | Improvements in and relating to ultrasonic cleaning |
| CN103028572B (en) * | 2013-01-10 | 2015-09-09 | 张家港市超声电气有限公司 | Full-automatic through type ultrasonic cleaning equipment |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2904981A (en) * | 1957-05-09 | 1959-09-22 | Patex Corp | Means for treating web materials |
| US3185446A (en) * | 1961-11-07 | 1965-05-25 | Sirius Luxembourg | Laminated structures adapted to generate sound-waves and/or ultrasonic vibration, notably for producing vibratory effects along surfaces |
| US3371233A (en) * | 1965-06-28 | 1968-02-27 | Edward G. Cook | Multifrequency ultrasonic cleaning equipment |
| US3640295A (en) * | 1970-04-21 | 1972-02-08 | Wendell C Peterson | Ultrasonic cleaner and surgical instrument case |
| SU460074A1 (en) * | 1972-09-11 | 1975-02-15 | Предприятие А-3602 | Ultrasonic installation for sounding liquid media |
| SU558722A1 (en) * | 1976-04-02 | 1977-05-25 | Московский институт стали и сплавов | Ultrasonic device for cleaning products |
| SU925437A1 (en) * | 1979-10-15 | 1982-05-07 | Предприятие П/Я М-5120 | Apparatus for ultrasonic treatment of articles in liquid medium |
| US4311157A (en) * | 1980-02-26 | 1982-01-19 | Rock Oil Corporation | Sonic treating apparatus |
| FI61735C (en) * | 1981-03-16 | 1982-09-10 | Valmet Oy | FOERFARANDE I SAMBAND MED PAPPERSTILLVERKNING |
| DE3638140A1 (en) * | 1986-11-08 | 1988-05-19 | Kleinewefers Ramisch Gmbh | Apparatus for the treatment of fabric webs guided in a spread-out manner |
-
1989
- 1989-05-17 US US07/635,556 patent/US5133376A/en not_active Expired - Fee Related
- 1989-05-17 JP JP1508749A patent/JPH04500033A/en active Pending
- 1989-05-17 EP EP89909455A patent/EP0425671A1/en not_active Withdrawn
- 1989-05-17 WO PCT/SU1989/000121 patent/WO1990014175A1/en not_active Application Discontinuation
Non-Patent Citations (1)
| Title |
|---|
| See references of WO9014175A1 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007019492A1 (en) * | 2007-04-25 | 2008-10-30 | Heinrich Kuttruff | Ultrasound cleaning device, has ultrasonic emitters producing ultrasounds and operated with same frequency and different phases to form irregular pattern and phase differences consist of different signs of emitter oscillations |
Also Published As
| Publication number | Publication date |
|---|---|
| US5133376A (en) | 1992-07-28 |
| JPH04500033A (en) | 1992-01-09 |
| WO1990014175A1 (en) | 1990-11-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
| 17P | Request for examination filed |
Effective date: 19910116 |
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| AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): CH DE FR GB IT LI SE |
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| 18W | Application withdrawn |
Withdrawal date: 19911129 |
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| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN |
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| R18W | Application withdrawn (corrected) |
Effective date: 19911129 |