EP0402706A1 - Ring laser gyroscope - Google Patents

Ring laser gyroscope Download PDF

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Publication number
EP0402706A1
EP0402706A1 EP90110317A EP90110317A EP0402706A1 EP 0402706 A1 EP0402706 A1 EP 0402706A1 EP 90110317 A EP90110317 A EP 90110317A EP 90110317 A EP90110317 A EP 90110317A EP 0402706 A1 EP0402706 A1 EP 0402706A1
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EP
European Patent Office
Prior art keywords
ring laser
bore
block
electrodes
bores
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Granted
Application number
EP90110317A
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German (de)
French (fr)
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EP0402706B1 (en
Inventor
Uwe Dipl.-Phys Esskuchen
Werner Dipl.-Ing. Hansli
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Honeywell Regelsysteme GmbH
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Honeywell Regelsysteme GmbH
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Publication of EP0402706A1 publication Critical patent/EP0402706A1/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/58Turn-sensitive devices without moving masses
    • G01C19/64Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams
    • G01C19/66Ring laser gyrometers
    • G01C19/661Ring laser gyrometers details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/081Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H01S3/083Ring lasers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08Construction or shape of optical resonators or components thereof
    • H01S3/081Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H01S3/083Ring lasers
    • H01S3/0835Gas ring lasers

Definitions

  • the present invention relates to a ring laser gyroscope according to the preamble of claim 1.
  • an ion trap is placed directly behind the electrodes connected to the ignition voltage in the vicinity of the resonator bore, in which no discharge may burn.
  • This ion trap can be made from one applied electrical or magnetic field exist.
  • an isosceles laser block 10 has bores 12, 14 and 16 parallel to its side walls, which are closed off at the corner points by mirrors 18, 20 and 22 and thus form a cavity resonator.
  • two cathodes 24 and 26 and an anode 28 are arranged on the two legs of block 10 symmetrically to the center line of the isosceles triangle.
  • the holes 12, 14 and 16 each open holes 30, 32 and 34 through which the gas volume contained is increased.
  • the actual reinforcement hole is formed by the holes 12 and 14 in the area between the cathodes 24 and 26 and the corner mirrors 18 and 20.
  • slanted holes 36 and 38 are provided which connect the cathodes 24 and 26 to the reinforcing holes 12 and 14, the slope being such that the holes 36 and 38 are one Components in the direction of the reinforcement holes 12 and 14.
  • ion traps 40 and 42 are arranged between the cathodes 24 and 26 and the tip of the triangular laser structure. These are described in more detail below.
  • a circular central recess 44 is provided in the laser block 10 and serves to receive a vibration device known per se in order to set the ring laser gyroscope in a reciprocating torsional vibration.
  • the ion traps 40 and 42 include two coils 46 and 46 ', which are arranged in blind holes 48 and 48', the blind holes 48 and 48 'are attached from the top and bottom of the laser block 10 and the bottom of these blind holes a distance from holes 12 and 14 has.
  • the bore is located symmetrically between the coil arrangement, so that when a current is passed through the coils, a magnetic field is created which, in the event that this part of the bore is traversed by charged particles of the plasma, deflects these particles so that they do not reach the other cathode.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Lasers (AREA)
  • Gyroscopes (AREA)

Abstract

In a ring laser gyroscope, which exhibits two partial discharge paths in which an oppositely directed gas discharge is ignited by means of an electrode arrangement, ion traps (40, 42) are arranged between the electrodes (24, 26), connected to the ignition voltage outside the discharge path, in order to prevent the gas discharge between these electrodes. …<IMAGE>…

Description

Die vorliegende Erfindung bezieht sich auf einen Ringlaser­kreisel nach dem Gattungsbegriff des Patentanspruches 1.The present invention relates to a ring laser gyroscope according to the preamble of claim 1.

Aus der DE-OS 28 39 066 ist es beispielsweise bekannt, bei einer dreieckförmigen Laserstruktur symmetrisch zur Mittellinie des Dreiecks an den Schenkeln jeweils eine Anode und an der Basis des Dreiecks eine Kathode anzuordnen. Durch Anlegen einer Zündspannung zwischen den Anoden und der Kathode kommt es zur Ionisation des Gases und zur Zündung der Gasentladung, wodurch sich zwei entgegengesetzt umlaufende Laserstrahlen in der dreieckförmigen Resonatorstrecke ergeben. Die Zündspannung der Gasentladung hängt von der Form und der Länge der Entladungsstrecke und vom Gasdruck und der Gaszusammensetzung ab. Wenn die Gasentladung in Gang gekommen ist, so sinkt der innere Widerstand der Entladungsstrecke ab und die Spannung zwischen der Anode und der Kathode geht auf die Brennspannung zurück. Bei Gasentladungen mit zwei Teilentladungsstrecken, wie im Ringlaserkreisel, zünden die beiden Strecken nicht gleichzeitig. Dadurch entsteht eine Situation, bei der sich eine Elektrode noch auf dem Zündspannungspotential befindet, während zwischen den beiden anderen Elektroden nur noch eine Potentialdifferenz in Höhe der Brennspannung besteht. Da die Zündspannung wesentlich höher als die Brennspannung ist, besteht nun die Möglichkeit, daß die Entladung in der Resonatorbohrung zündet, die nicht als Verstärkungsbohrung gedacht ist. Dies muß verhindert werden, und es wurden daher bereits Maßnahmen in der Zündelektronik vorgesehen, die die Entladung wieder ausschalten, falls die Spannungswerte an den Elektroden nach dem Zünden nicht symmetrisch sind, um einen erneuten Zündvorgang danach einzuleiten. Diese Maßnahme löst das Problem im Prinzip nicht, da die Entladung in beiden Strecken grundsätzlich nicht gleichzeitig in Gang gesetzt wird.From DE-OS 28 39 066 it is known, for example, to arrange an anode and a cathode at the base of the triangle in a triangular laser structure symmetrical to the center line of the triangle. By applying an ignition voltage between the anodes and the cathode, the gas is ionized and the gas discharge is ignited, which results in two oppositely rotating laser beams in the triangular resonator path. The ignition voltage of the gas discharge depends on the shape and length of the discharge path and on the gas pressure and gas composition. When the gas discharge has started, the internal resistance of the discharge path drops and the voltage between the anode and the cathode returns to the operating voltage. In the case of gas discharges with two partial discharge sections, such as in a ring laser gyro, the two sections do not ignite at the same time. This creates a situation in which one electrode is still at the ignition voltage potential, while there is only a potential difference in the amount of the operating voltage between the two other electrodes. Because the ignition voltage is essential is higher than the operating voltage, there is now the possibility that the discharge ignites in the resonator bore, which is not intended as a reinforcement bore. This must be prevented, and measures have therefore already been provided in the ignition electronics which switch the discharge off again if the voltage values at the electrodes are not symmetrical after the ignition in order to initiate a new ignition process thereafter. In principle, this measure does not solve the problem, since the unloading is in principle not started simultaneously on both lines.

Es ist daher die Aufgabe der vorliegenden Erfindung, Maßnahmen vorzusehen, die auch bei einer nicht gleichzeitigen Zündung der Teilentladungsstrecken gewährleisten, daß die Gasentladung auf die eigentliche Verstärkungsbohrung beschränkt bleibt.It is therefore the object of the present invention to provide measures which, even when the partial discharge paths are not simultaneously ignited, ensure that the gas discharge remains restricted to the actual reinforcement bore.

Die Lösung dieser Aufgabe gelingt gemäß den kennzeichnenden Merkmalen des Patentanspruches 1. Weitere vorteilhafte Ausgestaltungen der Erfindung sind den Unteransprüchen entnehmbar.This object is achieved according to the characterizing features of claim 1. Further advantageous refinements of the invention can be found in the subclaims.

Gemäß der vorliegenden Erfindung wird eine Ionenfalle unmittelbar hinter den an Zündspannung liegenden Elektroden in der Nähe der Resonatorbohrung angebracht, in der keine Entladung brennen darf. Diese Ionenfalle kann aus einem angelegten elektrischen oder magnetischen Feld bestehen.According to the present invention, an ion trap is placed directly behind the electrodes connected to the ignition voltage in the vicinity of the resonator bore, in which no discharge may burn. This ion trap can be made from one applied electrical or magnetic field exist.

Anhand der Figuren der beiliegenden Zeichnung sei im folgenden die Erfindung näher beschrieben. Es zeigen:

  • Figur 1 eine aufgeschnittene Draufsicht auf einen Ringlaserkreisel;
  • Figur 1a eine Schnittansicht gemäß Linie A-A in Figur 1 für ein erstes Ausführungsbeispiel der Erfindung; und
  • Figur 1b eine Schnittansicht gemäß Linie A-A in Figur 1 für ein zweites Ausführungsbeispiel der Erfindung.
The invention will be described in more detail below with reference to the figures in the accompanying drawing. Show it:
  • Figure 1 is a cut plan view of a ring laser gyroscope;
  • Figure 1a is a sectional view taken along line AA in Figure 1 for a first embodiment of the invention; and
  • 1b shows a sectional view along line AA in FIG. 1 for a second exemplary embodiment of the invention.

Gemäß Figur 1 weist ein gleichschenkliger Laserblock 10 parallel zu seinen Seitenwänden Bohrungen 12, 14 und 16 auf, die in den Eckpunkten durch Spiegel 18, 20 und 22 abgeschlossen sind und somit einen Hohlraumresonator bilden. Um eine Gasentladung in Gang zu bringen und zwei gegenläufige Laserstrahlen zu erzeugen, sind symmetrisch zur Mittellinie des gleichschenkligen Dreiecks auf den beiden Schenkeln des Blockes 10 zwei Kathoden 24 und 26 und auf der Grundlinie des Blockes 10 eine Anode 28 angeordnet.According to FIG. 1, an isosceles laser block 10 has bores 12, 14 and 16 parallel to its side walls, which are closed off at the corner points by mirrors 18, 20 and 22 and thus form a cavity resonator. In order to initiate a gas discharge and to generate two counter-rotating laser beams, two cathodes 24 and 26 and an anode 28 are arranged on the two legs of block 10 symmetrically to the center line of the isosceles triangle.

In den Eckpunkten des Laserblockes 10 münden die Bohrungen 12, 14 und 16 jeweils in Freibohrungen 30, 32 und 34, durch die das enthaltene Gasvolumen vergrößert wird.At the corner points of the laser block 10, the holes 12, 14 and 16 each open holes 30, 32 and 34 through which the gas volume contained is increased.

Die eigentliche Verstärkungsbohrung wird durch die Bohrungen 12 und 14 in dem Bereich zwischen den Kathoden 24 und 26 und den Eckspiegeln 18 und 20 gebildet. Um das Zünden der Teilentladungsstrecken auf diesen Bereich der Bohrungen zu beschränken, sind schräg angesetzte Bohrungen 36 und 38 vorgesehen, die die Kathoden 24 und 26 mit den Verstärkungsbohrungen 12 und 14 verbinden, wobei die Schräge so getroffen ist, daß die Bohrungen 36 und 38 eine Komponente in Richtung auf die Verstärkungsbohrungen 12 und 14 aufweisen. Durch diese Maßnahmen wird bereits ein Zünden in der falschen Richtung erschwert.The actual reinforcement hole is formed by the holes 12 and 14 in the area between the cathodes 24 and 26 and the corner mirrors 18 and 20. In order to limit the ignition of the partial discharge paths to this area of the holes, slanted holes 36 and 38 are provided which connect the cathodes 24 and 26 to the reinforcing holes 12 and 14, the slope being such that the holes 36 and 38 are one Components in the direction of the reinforcement holes 12 and 14. These measures make it difficult to ignite in the wrong direction.

Für den Fall, daß diese Geometrievariationen nicht bereits den gewünschten Effekt erbringen, sind Ionenfallen 40 und 42 zwischen den Kathoden 24 und 26 und der Spitze der dreieckförmigen Laserstruktur angeordnet. Diese werden nachfolgend noch näher beschrieben.In the event that these geometry variations do not already produce the desired effect, ion traps 40 and 42 are arranged between the cathodes 24 and 26 and the tip of the triangular laser structure. These are described in more detail below.

Eine kreisförmige zentrale Aussparung 44 ist in dem Laserblock 10 vorgesehen und dient der Aufnahme einer an sich bekannten Vibrationseinrichtung, um den Ringlaserkreisel in eine hin- und hergehende Drehschwingung zu versetzen.A circular central recess 44 is provided in the laser block 10 and serves to receive a vibration device known per se in order to set the ring laser gyroscope in a reciprocating torsional vibration.

Gemäß Figur 1a umfassen die Ionenfallen 40 und 42 zwei Spulen 46 und 46′, die in Sackbohrungen 48 und 48′ angeordnet sind, wobei die Sackbohrungen 48 und 48′ von der Oberseite und Unterseite des Laserblockes 10 angebracht sind und der Grund dieser Sackbohrungen einen Abstand von den Bohrungen 12 und 14 aufweist. Die Bohrung befindet sich hierbei symmetrisch zwischen der Spulenanordnung, so daß beim Durchschicken eines Stromes durch die Spulen ein magnetisches Feld entsteht, das für den Fall, daß dieser Teil der Bohrung von geladenen Teilchen des Plasmas durchwandert wird, diese Teilchen ablenkt, so daß sie die jeweils andere Kathode nicht erreichen. Zur Erzeugung des Magnetfeldes zur Ionenablenkung werden hohe Ströme benötigt, da die Spulen keine weichmagnetischen Kerne zur Feldbündelung aufweisen dürfen, da im Betrieb des Ringlaserkreisels der verbleibende Restmagnetismus die Qualität des Ringlaserkreisels negativ beeinflussen würde.According to Figure 1a, the ion traps 40 and 42 include two coils 46 and 46 ', which are arranged in blind holes 48 and 48', the blind holes 48 and 48 'are attached from the top and bottom of the laser block 10 and the bottom of these blind holes a distance from holes 12 and 14 has. The bore is located symmetrically between the coil arrangement, so that when a current is passed through the coils, a magnetic field is created which, in the event that this part of the bore is traversed by charged particles of the plasma, deflects these particles so that they do not reach the other cathode. High currents are required to generate the magnetic field for ion deflection, since the coils must not have soft magnetic cores for field bundling, since the residual magnetism which would remain in operation during operation of the ring laser gyroscope would have a negative effect on the quality of the ring laser gyroscope.

Eine diesbezüglich bessere Lösung stellt die Anordnung gemäß Figur 1b dar, bei der auf dem Grund der Sackbohrungen 48 und 48′ zwei Kondensatorplatten 50 und 50′ angeordnet sind, die einen Plattenkondensator bilden, der die Bohrung 14 zwischen sich einschließt und an den während des Zündvorganges eine hohe Spannung angelegt wird. Zur Erzeugung des elektrischen Feldes ist eine hohe Spannung erforderlich, die möglichst von der Zündspannung galvanisch getrennt sein sollte und bereits vor Anlegen der Zündspannung am Kondensatorplattenpaar anliegen sollte. Nach erfolgtem Zünden wird diese Steuerspannung abgeschaltet und das Plattenpaar kurzgeschlossen, um das elektrische Feld mit Sicherheit zu beseitigen. Auf diese Weise erfährt die Qualität des Ringlaserkreisels keinerlei Minderung.A better solution in this regard is the arrangement according to Figure 1b, in which on the bottom of the blind bores 48 and 48 'two capacitor plates 50 and 50' are arranged, which form a plate capacitor, which includes the bore 14 between them and to the during the ignition process a high voltage is applied. A high voltage is required to generate the electrical field, which should be electrically isolated from the ignition voltage as far as possible and should already be present on the pair of capacitor plates before the ignition voltage is applied. After ignition, this control voltage is switched off and the pair of plates short-circuited in order to safely remove the electrical field. In this way, the quality of the ring laser gyroscope is not reduced in any way.

Claims (8)

1. Ringlaserkreisel mit einer symmetrischen Elektroden­anordnung zur Erzeugung einer Gasentladung in zwei Teilentladungsstrecken und zur Erzeugung zweier entgegengesetzt umlaufender Laserstrahlen in einem durch Bohrungen in einem Block gebildeten Hohlraumresonator, gekennzeichnet durch wenigstens eine Ionenfalle (40, 42) außerhalb der Entladungsstrecke.1. Ring laser gyroscope with a symmetrical electrode arrangement for generating a gas discharge in two partial discharge sections and for generating two oppositely rotating laser beams in a cavity resonator formed by bores in a block, characterized by at least one ion trap (40, 42) outside the discharge section. 2. Ringlaserkreisel nach Anspruch 1, gekenn­zeichnet durch zwei symmetrisch angeordnete Ionenfallen (40, 42).2. Ring laser gyro according to claim 1, characterized by two symmetrically arranged ion traps (40, 42). 3. Ringlaserkreisel nach Anspruch 2, gekenn­zeichnet durch die Anordnung von an einer Spannung liegenden Kondensatorplatten (50, 50′) quer zu der Bohrung (12, 14).3. Ring laser gyro according to claim 2, characterized by the arrangement of voltage plates capacitor plates (50, 50 ') transverse to the bore (12, 14). 4. Ringlaserkreisel nach Anspruch 2, gekenn­zeichnet durch die Anordnung von stromdurchflossenen Spulen (46, 46′) quer zu der Bohrung (12, 14).4. Ring laser gyro according to claim 2, characterized by the arrangement of current-carrying coils (46, 46 ') transversely to the bore (12, 14). 5. Ringlaserkreisel nach Anspruch 3 oder 4, dadurch gekennzeichnet, daß die Kondensatorplatten (50, 50′) bzw. Spulen (46, 46′) in Sackbohrungen (48, 48′) in dem Block (10) angeordnet sind, wobei die Sackbohrungen in der Ober- und Unterseite des Blockes (10) angeordnet sind und der Grund der Sackbohrung einen Abstand von der jeweiligen Resonatorbohrung (12, 14) aufweist.5. Ring laser gyro according to claim 3 or 4, characterized in that the capacitor plates (50, 50 ') or coils (46, 46') are arranged in blind bores (48, 48 ') in the block (10), the blind bores are arranged in the top and bottom of the block (10) and the bottom of the blind bore one Has distance from the respective resonator bore (12, 14). 6. Ringlaserkreisel nach Anspruch 1, dadurch ge­kennzeichnet, daß die zwei mit der dritten Elektrode zusammenwirkenden Elektroden (24, 26) über schräg angesetzte Bohrungen (36, 38) mit der jeweiligen Resonatorbohrung (12, 14) verbunden sind.6. Ring laser gyroscope according to claim 1, characterized in that the two electrodes (24, 26) interacting with the third electrode are connected to the respective resonator bore (12, 14) via obliquely positioned bores (36, 38). 7. Ringlaserkreisel nach Anspruch 2 mit einem dreieckförmigen Block, in dem die den Resonator bildenden Bohrungen angeordnet sind, wobei zwei an Zündspannung liegende Elektroden an den Schenkeln des dreieckförmigen Blockes angeordnet sind und eine an Bezugspotential liegende Elektrode an der Basis der dreieckförmigen Blocks angeordnet ist, dadurch ge­kennzeichnet, daß die Ionenfallen (40, 42) zwischen den an Zündspannung liegenden Elektroden (24, 26) und der Spitze des dreieckförmigen Blocks (10) angeordnet sind.7. ring laser gyroscope according to claim 2 with a triangular block in which the bores forming the resonator are arranged, two electrodes connected to ignition voltage being arranged on the legs of the triangular block and one electrode lying at reference potential being arranged at the base of the triangular blocks, characterized in that the ion traps (40, 42) are arranged between the electrodes (24, 26) connected to the ignition voltage and the tip of the triangular block (10). 8. Ringlaserkreisel nach Anspruch 7, dadurch ge­kennzeichnet, daß die Elektroden an den Schenkeln des dreieckförmigen Blockes durch Kathoden (24, 26) vorgegeben sind und die Elektrode an der Basis des dreieckförmigen Blockes durch eine Anode (28) vorgegeben ist.8. Ring laser gyroscope according to claim 7, characterized in that the electrodes on the legs of the triangular block by cathodes (24, 26) are predetermined and the electrode at the base of the triangular block by an anode (28) is predetermined.
EP90110317A 1989-06-02 1990-05-30 Ring laser gyroscope Expired - Lifetime EP0402706B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3918050 1989-06-02
DE3918050A DE3918050A1 (en) 1989-06-02 1989-06-02 RING LASER CIRCUIT

Publications (2)

Publication Number Publication Date
EP0402706A1 true EP0402706A1 (en) 1990-12-19
EP0402706B1 EP0402706B1 (en) 1992-06-03

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US (1) US4993039A (en)
EP (1) EP0402706B1 (en)
JP (1) JPH0395980A (en)
DE (2) DE3918050A1 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2488773C2 (en) * 2011-11-01 2013-07-27 Федеральное государственное военное образовательное учреждение высшего профессионального образования "Военный авиационный инженерный университет" (г. Воронеж) Министерства обороны Российской Федерации Laser gyroscope
FR3004803B1 (en) * 2013-04-19 2016-01-01 Thales Sa GYROLASER WITH OPTIMIZED PRIMING
US9551578B1 (en) 2015-09-03 2017-01-24 Honeywell International Inc. Systems and methods for a ring laser gyroscope with electrically isolated dither motor
CN113654545B (en) * 2021-07-22 2024-08-20 广州中国科学院工业技术研究院 Gyroscope based on ion trap chip and rotation measurement method thereof

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FR2030688A5 (en) * 1969-02-05 1970-11-13 Honeywell Inc
US3562664A (en) * 1968-03-01 1971-02-09 Jameson D Ridgen Gas laser with means for maintaining power output
US4720832A (en) * 1985-09-21 1988-01-19 Ushio Denki Gas laser including means for magnetic deflection of ions

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US4848909A (en) * 1986-01-31 1989-07-18 Honeywell Inc. Ion beam sputtered mirrors for ring laser gyros
US4926437A (en) * 1988-12-21 1990-05-15 Ford Carol M Ceramic cathode for ring lasers

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3562664A (en) * 1968-03-01 1971-02-09 Jameson D Ridgen Gas laser with means for maintaining power output
FR2030688A5 (en) * 1969-02-05 1970-11-13 Honeywell Inc
US4720832A (en) * 1985-09-21 1988-01-19 Ushio Denki Gas laser including means for magnetic deflection of ions

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DE3918050A1 (en) 1990-12-13
JPH0395980A (en) 1991-04-22
DE59000144D1 (en) 1992-07-09
EP0402706B1 (en) 1992-06-03
US4993039A (en) 1991-02-12

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