EP0375402B1 - Lampenquarzkolben mit Molybdanfolie mit Oxydationsbeständiger Fläche, gebildet durch Ionenimplantation - Google Patents

Lampenquarzkolben mit Molybdanfolie mit Oxydationsbeständiger Fläche, gebildet durch Ionenimplantation Download PDF

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Publication number
EP0375402B1
EP0375402B1 EP19890313370 EP89313370A EP0375402B1 EP 0375402 B1 EP0375402 B1 EP 0375402B1 EP 19890313370 EP19890313370 EP 19890313370 EP 89313370 A EP89313370 A EP 89313370A EP 0375402 B1 EP0375402 B1 EP 0375402B1
Authority
EP
European Patent Office
Prior art keywords
oxidation
molybdenum
inhibiting
molybdenum foil
lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP19890313370
Other languages
English (en)
French (fr)
Other versions
EP0375402A3 (de
EP0375402A2 (de
Inventor
Sandra Lee Madden
Mark D. Beschle
Roy C. Martin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Osram Sylvania Inc
Original Assignee
GTE Products Corp
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Filing date
Publication date
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Publication of EP0375402A2 publication Critical patent/EP0375402A2/de
Publication of EP0375402A3 publication Critical patent/EP0375402A3/de
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Publication of EP0375402B1 publication Critical patent/EP0375402B1/de
Anticipated expiration legal-status Critical
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/36—Seals between parts of vessels; Seals for leading-in conductors; Leading-in conductors
    • H01J61/366—Seals for leading-in conductors
    • H01J61/368—Pinched seals or analogous seals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/32—Seals for leading-in conductors
    • H01J5/38—Pinched-stem or analogous seals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/46—Leading-in conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/28—Manufacture of leading-in conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/32—Sealing leading-in conductors
    • H01J9/323—Sealing leading-in conductors into a discharge lamp or a gas-filled discharge device
    • H01J9/326—Sealing leading-in conductors into a discharge lamp or a gas-filled discharge device making pinched-stem or analogous seals

Definitions

  • This invention relates to electric lamps that utilize quartz lamp envelopes and, more particularly, to quartz lamp envelopes that utilize molybdenum components which are treated to inhibit oxidation.
  • Quartz is commonly used as a lamp envelope material in metal halide lamps and tungsten halogen incandescent lamps.
  • the quartz envelope defines a sealed lamp interior containing a filament or discharge electrodes and a suitable chemical fill. Electrical energy is supplied to the filament or to the electrodes by means of electrical feedthroughs which pass through the lamp envelope and are hermetically sealed to the quartz. It is critical to lamp operation that the seal remains intact throughout the life of the lamp.
  • quartz lamp envelopes It has been customary in quartz lamp envelopes to utilize a feedthrough configuration including a molybdenum ribbon, or foil, which passes through a press or pinch seal region of the quartz envelope.
  • the molybdenum foil is sufficiently wide to conduct the required lamp current and is extremely thin. Since the molybdenum foil is very thin, its thermal expansion is extremely small. Thus, the probability of seal failure due to differential thermal expansion is small.
  • the quartz is press sealed to the molybdenum foil, and a molybdenum electrical lead is welded to the external end of the foil.
  • the molybdenum foil and the molybdenum electrical lead have a tendency to oxidize to form MoO 2 and MoO 3 molybdenum oxides.
  • the molybdenum oxides initially form on the external electrical leads.
  • the oxidation then progresses to the molybdenum foil and causes a significant amount of stress on the press seal.
  • the stress is evident from Newton rings which appear at the point at which the leads are welded to the molybdenum foil.
  • the quartz press seal cracks, thereby causing the lamp to fail.
  • chromium is deposited on the molybdenum in a very high temperature pack cementation process. This is a very dangerous and inconvenient process. Pure hydrogen is passed through a tube furnace at 1200°C to initiate a reaction. The yield is very low, and devices are often damaged.
  • FR-A-2 449 968 It is known from FR-A-2 449 968 to provide a method of making a lamp assembly comprising the steps of: providing a molybdenum foil strip having an oxidation inhibiting layer; and sealing the molybdenum foil strip into a press seal of a quartz lamp envelope to form an electrical feed-through to a sealed lamp interior.
  • the method of the present invention is characterised in that the oxidation-inhibiting layer is formed by embedding oxidation-inhibiting material into a surface layer within the bulk of the molybdenum foil strip prior to sealing the molybdenum foil strip into the press seal.
  • the oxidation-inhibiting material is applied to the molybdenum foil feedthrough by ion implantation.
  • the oxidation-inhibiting material can be selected from the group consisting of chromium, aluminum, silicon, titanium, tantalum, palladium and combinations of these elements. Preferred materials include chromium and aluminum.
  • the thickness of the surface layer is typically in the range of 2 to 10 nm (20 to 100 angstroms).
  • the lamp assembly typically includes an external molybdenum electrical lead connected to the molybdenum foil.
  • the electrical lead has an oxidation-inhibiting coating thereon.
  • the oxidation-inhibiting coating may be formed by plasma-enhanced chemical vapour deposition.
  • Preferred materials include silicon carbide, silicon nitride and combinations thereof. Since the molybdenum electrical lead does not extend into the press seal, the added thickness is not detrimental to seal integrity.
  • the method of the present invention preferably includes the additional steps of forming an oxidation-inhibiting coating on an external electrical lead by plasma-enhanced chemical vapour deposition and attaching the coated electrical lead to the molybdenum foil strip.
  • the electrical lead may have an oxidation-inhibiting material embedded into a surface layer thereof.
  • the surface layer can be formed by ion implantation of the materials identified above in connection with the treatment of the molybdenum foil feedthrough.
  • a lamp assembly 10 includes a quartz lamp envelope 12 which encloses a sealed lamp interior 14.
  • An incandescent filament 16 is mounted within the lamp interior 14 and is connected to electrical feedthroughs 18 and 20 which extend through a press seal region 22 of the lamp envelope 12 for connection to an external source of electrical energy.
  • the feedthrough 18 includes a molybdenum ribbon, or foil, 24 and a molybdenum electrical lead 26.
  • the feedthrough 18 includes a molybdenum foil 30 and a molybdenum electrical lead 32.
  • the electrical leads 26 and 32 are typically welded to molybdenum foils 24 and 30, respectively.
  • Opposite ends of filament 16 are electrically connected to foils 24 and 30.
  • the quartz of the lamp envelope 12 is sealed to foils 24 and 30 using a conventional press seal process so that the lamp interior 14 is isolated from the external environment.
  • a metal halide discharge lamp utilizing a quartz lamp envelope is shown in FIG. 2.
  • a generally cylindrical quartz lamp envelope 40 includes press seals 42 and 44 at opposite ends thereof.
  • Discharge electrodes 46 and 48 are coupled by electrode rods 50 and 52 to molybdenum foils 54 and 56, respectively.
  • Molybdenum electrical leads 58 and 60 which are coupled to molybdenum foils 54 and 56, respectively, provide means for connection of the electrodes to an external electrical source.
  • the molybdenum foils 54 and 56 are located in press seals 42 and 44, respectively.
  • quartz lamp assemblies can have various sizes, shapes and electrode or filament configurations.
  • a common feature is a press or pinch seal with a molybdenum foil which acts as an electrical feedthrough.
  • the width of the molybdenum foil is selected to carry the lamp operating current; and the thickness of the molybdenum foil is typically about 330 ⁇ m (0.013 inch).
  • An oxidation-inhibiting material is embedded in a surface layer of molybdenum foils 24, 30, 54, 56.
  • the oxidation-inhibiting material is embedded in the surface of the molydenum rather than forming a separate coating or surface layer. Therefore, the oxidation-ihibiting material does not increase the thickness of the molybdenum foils. As noted hereinabove, an increase in thickness is detrimental to seal integrity since it increases the probability of cracking caused by differential thermal expansion.
  • the oxidation-inhibiting material is embedded in the surface layer of the molybdenum foils by ion implantation.
  • Ion implantation is a well-known technique for introducing impurities into a bulk material such as a semiconductor or a metal.
  • a beam of ions is generated in a source and is directed with varying degrees of acceleration toward the target.
  • the momentum of the ions causes them to be embedded in the material of the target.
  • the depth of penetration depends on the energy of the ions.
  • An important advantage of ion implantation is that the ions of the oxidation-inhibiting material penetrate into the bulk of the molybdenum and do not increase its thickness.
  • Suitable oxidation-inhibiting materials include chromium, aluminum, silicon, titanium, tantalum, palladium and combinations of those metals. Preferred materials include chromium, aluminum and combinations thereof.
  • the surface layer in which the oxidation-inhibiting material is embedded has a thickness in the range of 2 to 10 nm (20 to 100 angstroms). The ion energy during implantation is selected to achieve the desired surface layer thickness. In an example of the ion implantation procedure, chromium ions are embedded into the molybdenum foil at an energy of 50 keV and a dose of 1 x 10 21 /m 2 .
  • Quartz press seals with molybdenum ribbons treated with chromium and aluminum have remained unchanged for over 100 hours at 650°C, while untreated control foils failed at an average of 5 to 10 hours.
  • a press seal is considered to have failed when a crack forms through the seal.
  • the molybdenum electrical leads 26, 32, 58, 60 that are attached to the external ends of the molybdenum foils can be provided with an oxidation-inhibiting surface layer using ion implantation in the same manner described hereinabove in connection with the molybdenum foils. It is important to provide oxidation-resistant surfaces on the electrical leads 26, 32, 58 and 60 even though the leads are outside the press seal, since oxidation progresses along the leads to the press seal, thereby causing seal failure.
  • an oxidation-inhibiting coating is applied to the molybdenum electrical leads by plasma-enhanced chemical vapour deposition (PECVD).
  • PECVD is a known process in which a coating is deposited on the surface of a substrate by means of a plasma. The thickness of the coating is determined by the deposition time, and the composition is determined by the plasma composition.
  • One advantage of the PECVD process is that the coating is uniformly applied to the surface of the electrical leads.
  • Suitable materials for PECVD coating of molybdenum electrical leads include silicon carbide and silicon nitride.
  • the oxidation-inhibiting coating has a thickness in the range of about 5 to 100 nm (50 to 1000 angstroms).
  • the preferred coating is silicon carbide.
  • Silicon carbide coating of components by PECVD can be obtained from Spire Corporation of Bedford, Massachusetts. Molybdenum samples coated with silicon carbide have withstood temperatures up to 700°C in air for over 150 hours without any change, while untreated control samples of molybdenum last for only one hour under the same conditions before oxidizing.
  • the quartz lamp envelope is fabricated with molybdenum foils that are ion implanted with chromium, aluminum or combinations thereof to a depth of 2 to 10 nm (20 to 100 angstroms).
  • the molybdenum electrical leads have a coating of silicon carbide deposited by PECVD. This combination provides very high resistance to oxidation and does not require changes in the lamp production process.
  • the oxidation-inhibiting materials are applied to the foils and to the electrical leads prior to the lamp assembly process. Oxidation of the molybdenum lamp components is significantly reduced, thereby allowing the lamp to have a much longer life with considerably fewer failures caused by molybdenum oxidation.
  • the present invention as claimed provides an improved method of making quartz lamp assemblies; having reliable, long-life press seals; furthermore, having feedthrough components with oxidation-resistant surfaces; in particular having oxidation-resistant molybdenum feedthrough foils; and further having external molybdenum electrical leads with oxidation-resistant surfaces.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Vessels And Coating Films For Discharge Lamps (AREA)
  • Semiconductor Lasers (AREA)
  • Physical Vapour Deposition (AREA)

Claims (11)

  1. Verfahren zur Herstellung eines Lampenaufbaus, bestehend aus den folgenden Schritten:
    Herstellen eines Molybdänfolienstreifens (24, 30; 54, 56) mit einer oxidationshemmenden Schicht;
    Einsiegeln des Molybdänfolienstreifens in die Quetschdichtung (22; 42, 44) einer Quarzlampenhülle (12; 40), um eine elektrische Durchführung zu einem abgedichteten Lampeninnern zu schaffen, dadurch gekennzeichnet, daß die oxidationshemmende Schicht durch Einbettung oxidationshemmenden Materials in eine Oberflächenschicht innerhalb des Volumens des Molybdänfolienstreifens vor dem Einsiegeln des Molybdänfolienstreifens in die Quetschdichtung gebildet wird.
  2. Verfahren nach Anspruch 1, bei welchem das oxidationshemmende Material aus der aus Chrom, Aluminium, Silizium, Titan, Tantal und Palladium bestehenden Gruppe ausgewählt wird.
  3. Verfahren nach Anspruch 2, bei welchem das oxidationshemmende Material aus zwei oder mehreren der aus Chrom, Aluminium, Silizium, Titan, Tantal und Palladium bestehenden Gruppe ausgewählt wird.
  4. Verfahren nach irgendeinem der Ansprüche 1, 2 oder 3, bei welchem die Oberflächenschicht, in welche das oxidationshemmende Material eingebettet ist, eine Dicke im Bereich von 2 bis 10 nm (20 bis 100 Angström) besitzt.
  5. Verfahren nach irgendeinem der vorhergehenden Ansprüche, bei welchem das oxidationshemmende Material durch den Ionenimplantationsprozeß eingebettet wird.
  6. Verfahren nach Anspruch 5, bei welchem Chromionen bei einer Energie von 50 keV und einer Dosis von 1 x 1021/m2 in den Molybdänfolienstreifen (24, 30; 54, 56) eingebettet werden.
  7. Verfahren nach irgendeinem der vorhergehenden Ansprüche, bei welchem eine oxidationshemmende Beschichtung auf einer äußeren elektrischen Leitung (26, 32; 58, 60) gebildet wird, welche vor dem Einsiegeln des Streifens in die Quetschdichtung (22; 42, 44) an dem Molybdänfolienstreifen (24, 30; 54, 56) befestigt wird.
  8. Verfahren nach Anspruch 7, bei welchem das zur Bildung der oxidationshemmenden Schicht verwendete Material Silikonkarbid und/oder Silikonnitrid ist.
  9. Verfahren nach Anspruch 7 oder 8, bei welchem die oxidationshemmende Schicht durch plasmaverstärkte chemische Dampfablagerung gebildet wird.
  10. Verfahren nach Anspruch 9, bei welchem die oxidationshemmende Schicht eine Dicke im Bereich von 5 bis 100 nm (50 bis 1000 Angström) besitzt.
  11. Verfahren nach irgendeinem der Ansprüche 1 bis 6, bei welchem das oxidationshemmende Material in eine äußere elektrische Zuleitung (26, 32; 58, 60) eingebettet wird, die vor dem Einsiegeln des Streifens in die Quetschdichtung (22; 42, 44) an dem Molybdänfolienstreifen (24, 30; 54, 56) befestigt wird.
EP19890313370 1988-12-21 1989-12-20 Lampenquarzkolben mit Molybdanfolie mit Oxydationsbeständiger Fläche, gebildet durch Ionenimplantation Expired - Lifetime EP0375402B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US28775588A 1988-12-21 1988-12-21
US287755 1988-12-21

Publications (3)

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EP0375402A2 EP0375402A2 (de) 1990-06-27
EP0375402A3 EP0375402A3 (de) 1991-03-27
EP0375402B1 true EP0375402B1 (de) 1998-03-18

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EP19890313370 Expired - Lifetime EP0375402B1 (de) 1988-12-21 1989-12-20 Lampenquarzkolben mit Molybdanfolie mit Oxydationsbeständiger Fläche, gebildet durch Ionenimplantation

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EP (1) EP0375402B1 (de)
JP (1) JPH02267850A (de)
CA (1) CA2006129C (de)
DE (1) DE68928611T2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7764019B2 (en) 2005-07-26 2010-07-27 Koninklijke Philips Electronics N.V. Lamp and method of manufacturing a lamp

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5542867A (en) * 1993-12-08 1996-08-06 Ushiodenki Kabushiki Kaisha Process for connection of a molybdenum foil to a molybdenum lead portion and method of producing a hermetically enclosed part of a lamp using the process
DE69927574T2 (de) * 1998-08-13 2006-07-06 Koninklijke Philips Electronics N.V. Elektrische lampe mit einem beschichteten aussenstromleiter
EP2086002A3 (de) * 2004-09-30 2009-10-28 Koninklijke Philips Electronics N.V. Elektrische Lampe mit Dichtungsfolie
DE102007059340B4 (de) 2006-12-19 2019-10-24 Osram Gmbh Stromzuführungssystem

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7501272A (nl) * 1975-02-04 1976-08-06 Philips Nv Electrische lamp.
JPS5544786A (en) * 1978-09-27 1980-03-29 Hitachi Ltd Pressure sensor
NL183794B (nl) * 1979-02-26 Philips Nv Hogedrukkwikontladingslamp.
JPS60194043A (ja) * 1984-03-14 1985-10-02 Toshiba Corp 管球ウエルズ
GB8429740D0 (en) * 1984-11-24 1985-01-03 Emi Plc Thorn Lead wires in pinch seals
JPH02500684A (ja) * 1986-09-20 1990-03-08 フラウンホッファー‐ゲゼルシャフト　ツァ　フェルダールング　デァ　アンゲヴァンテン　フォアシュンク　エー．ファオ． ラインまたはマトリックスカメラの解像度拡大の方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7764019B2 (en) 2005-07-26 2010-07-27 Koninklijke Philips Electronics N.V. Lamp and method of manufacturing a lamp

Also Published As

Publication number Publication date
CA2006129A1 (en) 1990-06-21
EP0375402A3 (de) 1991-03-27
JPH02267850A (ja) 1990-11-01
DE68928611D1 (de) 1998-04-23
CA2006129C (en) 1994-03-08
DE68928611T2 (de) 1998-11-12
EP0375402A2 (de) 1990-06-27

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