EP0342922A2 - Weichmagnetische Legierung auf Eisenbasis und daraus hergestellter Pulverkern - Google Patents

Weichmagnetische Legierung auf Eisenbasis und daraus hergestellter Pulverkern Download PDF

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Publication number
EP0342922A2
EP0342922A2 EP89304926A EP89304926A EP0342922A2 EP 0342922 A2 EP0342922 A2 EP 0342922A2 EP 89304926 A EP89304926 A EP 89304926A EP 89304926 A EP89304926 A EP 89304926A EP 0342922 A2 EP0342922 A2 EP 0342922A2
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European Patent Office
Prior art keywords
atomic
alloy
crystal grains
dust core
amount
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EP89304926A
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English (en)
French (fr)
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EP0342922B1 (de
EP0342922A3 (en
Inventor
Takao C/O Toshiba Corporation Sawa
Masami C/O Toshiba Corporation Okamura
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Toshiba Corp
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Toshiba Corp
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Priority claimed from JP63118335A external-priority patent/JP2713980B2/ja
Priority claimed from JP63300686A external-priority patent/JPH01290206A/ja
Application filed by Toshiba Corp filed Critical Toshiba Corp
Publication of EP0342922A2 publication Critical patent/EP0342922A2/de
Publication of EP0342922A3 publication Critical patent/EP0342922A3/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/032—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
    • H01F1/04—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C45/00—Amorphous alloys
    • C22C45/02—Amorphous alloys with iron as the major constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/147—Alloys characterised by their composition
    • H01F1/153—Amorphous metallic alloys, e.g. glassy metals
    • H01F1/15308—Amorphous metallic alloys, e.g. glassy metals based on Fe/Ni

Definitions

  • This invention relates to Fe-based, soft magnetic alloys and a dust core of said alloy.
  • iron cores of crystalline materials such as permalloy or ferrite have been employed in high frequency devices such as switching regulators.
  • the resistivity of permalloy is low, so it is subject to large core loss at high frequency.
  • the core loss of ferrite at high frequencies is small, the magnetic flux density is also small, at best 5,000 G. Consequently, in use at high operating magnetic flux densities, ferrite becomes close to saturation and as a result the core loss is increased.
  • transformers that are used at high frequency such as the power transformers employed in switching regulators, smoothing choke coils, and common mode choke coils.
  • the size is reduced, the operating magnetic flux density must be increased, so the increase in core loss of the ferrite becomes a serious practical problem.
  • amorphous magnetic alloys i.e., alloys without a crystal structure
  • Such amorphous magnetic alloys are typically base alloys of Fe, Co, Ni, etc., and contain metalloids as elements promoting the amorphous state, (P, C, B, Si, Al, and Ge, etc.).
  • Co-based, amorphous alloys also have been used in magnetic components for electronic devices such as saturable reactors, since they have low core loss and high squareness ratio in the high frequency region.
  • the cost of Co-based alloys is comparatively high making such materials uneconomical.
  • Fe-based amorphous alloys constitute cheap soft magnetic materials and have comparatively large magnetostriction, they suffer from various problems when used in the high frequency region and are inferior to Co-based amorphous alloys in respect of both core loss and permeability.
  • Co-based amorphous alloys have excellent magnetic properties, they are not industrially practical due to the high cost of such materials.
  • Fe-based amorphous alloys constitute an inexpensive soft magnetic material, but their magnetostriction is comparatively large, and they are inferior to Co-based amorphous alloys in respect of core loss and permeability, so that there are problems in using these materials in the high frequency region.
  • Co-­based amorphous alloys have excellent magnetic properties, as hereinbefore pointed out, the high price of the raw material makes them commercially disadvantageous. Such materials also suffer disadvantages where used for dust cores since they too have comparatively large core losses, causing problems in their use in power sources of high frequency.
  • the object of this invention is to provide an Fe-based soft magnetic alloy having high saturation magnetic flux density in the high frequency region, with attractive soft magnetic characteristics.
  • Another object of this invention is to provide an Fe-based dust core capable of being produced in various shapes and also having attractive soft magnetic characteristics with high saturation magnetic flux density in the high frequency region.
  • an Fe-based soft magnetic alloy having fine crystal grains and defined by formula (I): Fe 100-a-b-c Cu a M b Y c ; (I) wherein "M” is at least one element from: Groups IVa, Va, VIa of the periodic table, Mn, Co, Ni, Al and the Platinum group; “Y” is at least one element from: Si, B, P, and C; and wherein "a", "b", and "c", expressed in atomic % are 3 ⁇ a ⁇ 8 0.1 ⁇ b ⁇ 8 3.1 ⁇ a+b ⁇ 12 15 ⁇ c ⁇ 28.
  • the invention provides a dust core made from a copper-containing alloy having fine grains and defined by formula (II) Fe 100-a-b-c-d-e Cu a M′ b M ⁇ c Si d B e (II) wherein "M′” is at least one element selected from: Groups IVa, Va, VIa of the periodic table; "M ⁇ ” is at least one element from: Mn, Co, Ni, Al, and the Platinum group; and wherein “a”, “b”, “c”, “d” and “e”, expressed in atomic % are as follows: 3 ⁇ a ⁇ 8 0.1 ⁇ b ⁇ 8 0 ⁇ c ⁇ 15 8 ⁇ d ⁇ 22 3 ⁇ e ⁇ 15 15 ⁇ d+e ⁇ 28.
  • fine crystal grains are present to the extent of at least 30% in terms of the area ratio in the alloy. it is further desirable that at least 80% of the fine crystal grains be of a size in the range of 50 ⁇ to 300 ⁇ .
  • area ratio means the ratio of the surface of the fine grains to the total surface in a plane of the alloy as measured, for example, by photomicrography or by microscopic examination of ground and polished specimens.
  • fine crystal grains should be present to the extent of 30% or more in terms of area ratio in the alloy. It is further desirable that 80% or more of the fine crystal grains be of a size in the range of 50 ⁇ to 300 ⁇ .
  • an alloy powder having fine crystal grains and defined by formula (II) can also possess excellent properties and is especially suitable for manufacture of dust cores: Fe 100-a-b-c-d-e Cu a M′ b M ⁇ c Si d B e (II) where "M′” is at least one element from: Groups IVa, Va, VIa of the periodic table; "M ⁇ ” is at least one element from: Mn, Co, Ni, Al, and the Platinum group; and "a",”b", “c”, “d”, and “e”, expressed in atomic % are as follows 3 ⁇ a ⁇ 8, 0.1 ⁇ b ⁇ 8, 0 ⁇ c ⁇ 15, 8 ⁇ d ⁇ 22, 3 ⁇ e ⁇ 15, 15 ⁇ d + e ⁇ 28.
  • Optimum properties of such alloy powders can also be achieved when the fine crystal grains are present to th extent of at least 30% in terms of area ratio in the alloy and it is further preferable that, of these fine crystal grains, at least 80% should be crystal grains of 50 ⁇ to 300 ⁇ .
  • the alloy components are within the proportions indicated. Copper is especially important because it is effective in increasing corrosion resistance, preventing coarsening of the crystal grains, and improving soft magnetic characteristics such as core loss and permeability. However, if too little Cu is present, the benefit of the addition is not obtained. On the other hand, if too much Cu is present, the magnetic characteristics are adversely affected. A range of more than 3 and less than 8 atomic % is therefore selected. This is particularly desirable in the use of the alloy for dust cores, since the packing ratio is increased by increased amounts of Cu. Preferably, the amount of Cu is more than 3 and less than 5 atomic %.
  • M is at least one element from: Groups IVA, Va, VIA of the periodic table, Mn, Co, Ni, Al and the Platinum group, i.e., Ru, Rh, Pd, Os, Ir and Pt as elements of the Platinum group.
  • These elements are effective in making the crystal grain size uniform, and in improving the soft magnetic properties by reducing magnetostriction and magnetic anisotropy. It is also effective in improving the magnetic properties in respect of temperature change.
  • the amount of "M" is too small, the benefit of addition is not obtained and if the amount is too large, the saturation magnetic flux density is lowered.
  • An amount in the range 0.1 to 8 atomic % is selected.
  • the amount is 1 to 7 atomic %, and even more preferably 1.5 to 5 atomic %.
  • the various elements comprising "M" have the following respective effects: in the case of Group IV elements, increase of the range of heat treatment conditions for obtaining optimum magnetic properties; in the case of Group Va elements, increase in the resistance to embrittlement and in workability such as by cutting; in the case of Group VIa elements, improvement of corrosion resistance and surface morphology; in the case of Al, increased fineness of the crystal grains and reduction of magnetic anisotropy, thereby improving magnetostriction and soft magnetic properties.
  • the elements Nb, Mo, Cr, Mn, Ni and W are desirable to lower core loss, and Co is desirable in particular to increase saturation magnetic flux density.
  • M′ is at least one element from : Groups IVa, Va, VIa of the periodic table. These elements are effective in making the crystal grain size uniform, and in improving the soft magnetic properties by lowering magnetostriction and magnetic anisotropy. They also improve the magnetic properties with respect to change of temperature. However, if too little is used, the benefit of the addition is not obtained. On the other hand, if too much is used, the saturation magnetic flux density is lowered. An amount of 0.1 to 8 atomic % is therefore selected. Preferably the range is 1 to 7 atomic %, and even more preferably 1.5 to 5 atomic %.
  • the additive elements in M′ have, in addition to the aforementioned benefits, the following benefits: in the case of Group IVa elements, an expansion of the range of heat treatment conditions that are available in order to obtain optimum magnetic properties; in the case of the Group Va elements, increase in resistance to embrittlement and increase in workability such as cutting; in the case of the Group VIa elements, increase in corrosion resistance and improvement in surface configuration, resulting in improvement in magnetostriction and soft magnetic properties.
  • the elements Nb, Mo, Ta, W, Zr and Hf are particularly preferable in lowering core loss.
  • M ⁇ is at least one element from: Mn, Co, Ni, Al, and the Platinum group. These elements are effective in improving soft magnetic characteristics. However, it is undesirable to use too much, since this results in lowered saturation magnetic flux density. An amount of less than 15 atomic % is therefore specified. Preferably the amount is less than 10 atomic %.
  • the total amount of Cu, M′ and M ⁇ is 3.1 to 25 atomic %. If the total amount is too small, the benefit of the addition is slight. on the other hand, if it is too large, the saturation magnetic flux density tends to be reduced.
  • Y is at least one element from: Si, B, P and C. These elements are effective in making the alloy amorphous during manufacture, or in directly segregating fine crystals. If the amount is too small, the benefit of superquenching in manufacture is difficult to obtain and the above condition is not obtained but if the amount is too large saturation magnetic flux density becomes low, making the above condition difficult to obtain, with the result that superior magnetic properties are not obtained.
  • An amount in the range 15 to 28 atomic % is therefore selected. Preferably the range is 18 to 26 atomic %.
  • the ratio of (Si,C) / (P,B) is preferably more than 1.
  • the atomic ratio Si:B or C:P is preferably > 1, whichever is present.
  • Si is effective in obtaining the amorphous state of the alloy during manufacture or in directly segregating fine crystals. If the amount of Si used is too small, there is little benefit from superquenching during manufacture and the aforementioned condition is not obtained but if the amount is too large, the saturation magnetic flux density is lowered and the aforesaid condition becomes difficult to obtain, so that superior magnetic properties are not obtained.
  • An amount in the range 8 to 22 atomic % is therefore selected. Preferably the range is 10 to 20 atomic %, and even more preferably 12 to 18 atomic %.
  • Boron like silicon, is an element that is effective in obtaining the amorphous condition of the alloy, or in directly segregating fine crystals.
  • the amount in the range 3 to 15 atomic % is therefore selected.
  • the range is 5 to 10 atomic %. If the total of Si and B is too small, the benefit of their addition is not obtained. On the other hand, if the total amount is too large, the benefit is likewise difficult to obtain, and there is a lowering of saturation magnetic flux density. A total amount in the range 15 to 28 at. % is therefore preferable.
  • Fe-based soft magnetic alloys and alloy powders of this invention may be obtained by the following method.
  • An amorphous alloy thin strip is obtained by liquid quenching.
  • a quenched powder is obtained by grinding, or by an atomizing method or by mechanical alloying method, etc..
  • the alloy is heat treated for from one minute to 10 hours preferably 10 minutes to 5 hours at a temperature of from 50C o below the crystallization temperature to 120C o above the crystallization temperature preferably 30C o to 100C o above the crystalization temperature of the amorphous alloy, to segregate the fine crystal grains.
  • segregation of the fine crystals may be obtained by controlling the quenching speed in the quenching method.
  • the fine crystal grains in the alloy of this invention should be present to the extent of at least 30% in terms of area ratio.
  • crystal grain size in the aforementioned fine crystal grains is too small, maximum improvement in magnetic properties is not obtained. On the other hand, if too large, the magnetic properties are adversely affected. It is therefore preferable that, in the fine crystal grains, crystals of grain size 50 ⁇ to 300 ⁇ should be present to the extent of that least 80%.
  • Fe-based soft magnetic alloys according to this invention can have exellent soft magnetic properties at high frequency. They are useful as alloys for magnetic materials for magnetic components such as for example magnetic heads, thin film heads, radio frequency transformers including transformers for high power use, saturable reactors, common mode choke coils, normal mode choke coils, high voltage pulse noise filters, and magnetic switches used in laser and other power sources, magnetic cores, etc. used at high frequency, and for sensors of various types, such as power source sensors, direction sensors, and security sensors, etc.
  • magnetic components such as for example magnetic heads, thin film heads, radio frequency transformers including transformers for high power use, saturable reactors, common mode choke coils, normal mode choke coils, high voltage pulse noise filters, and magnetic switches used in laser and other power sources, magnetic cores, etc. used at high frequency, and for sensors of various types, such as power source sensors, direction sensors, and security sensors, etc.
  • alloys according to the second aspect of the invention are also particularly useful for dust cores.
  • the size of the particles is too small, the packing ratio is lowered.
  • the particle size is too large, losses become considerable, making the core unfit for high frequency use.
  • a particle size 1 to 100 ⁇ m is therefore preferable.
  • the shape of the particles is not prescribed, which could be, for example, spherical or flat. These shapes depend on the method of manufacture. For example, in the case of the atomizing method, spherical powder is obtained, but if this is subjected to rolling treatment, flat powder is obtained.
  • the alloy powders can be subjected to ordinary press forming and sintering is advantageously carried out while performing heat treatment for 10 minutes to 10 hours at 450°C to 650°C.
  • an inorganic insulating material such as a metallic alkoxide, water glass, or low melting point glass is used as a binder.
  • the corrosion resistance of the thin strip that was obtained was measured as the loss in initial weight on immersion for 100 hours in 1N HCl. The results are described in Fig. 1.
  • the amorphous alloy strip was then wound to form a toroidal magnetic core of external diameter 18 mm, internal diameter 12 mm, and height 4.5 mm, which was then subjected to heat treatment in the same way as above.
  • the corrosion resistance is greatly improved by the Cu addition; the value falling to below 0.5% when the Cu addition exceeds 3 atomic%. Also, if the Cu addition exceeds 8 atomic%, the saturation magnetization becomes 7.5 KG, which is a value equal to that of Co-based amorphous alloy. To satisfy corrosion resistance and saturation magnetization, the value of the Cu content should therefore be more than 3 atomic % and less than 8 atomic %.
  • Thin alloy strips of the above alloy compositions Fe 71.5 Cu 3.5 Nd13Si13B9 were wound to form a toroidal core of external diameter 18 mm, internal diameter 12 mm, and height 4.5 mm, which was then subjected to heat treatment under the conditions shown in Table 1.
  • a core was manufactured by performing heat treatment at about 430°C for about 80 min. It was found by TEM observation that fine crystal grains had not segregated in the magnetic core that was obtained.
  • the alloy of this invention in comparison with the magnetic cores consisting of amorphous alloy thin strip of the same composition, the alloy of this invention, owing to the presence of fine crystal grains, shows excellent soft magnetic properties at high frequencies, has high permeability with low core loss, in particular, after resin moulding, and low magnetostriction.
  • an Fe-based soft magnetic alloy can be provided having excellent soft magnetic properties, owing to the presence of fine crystal grains in the desired alloy composition and high saturated magnetic flux density in the high frequency region.
  • the various alloy powders shown in Table II were manufactured by the atomizing method.
  • the powders obtained were spherical powders, of powder size 10 to 50 ⁇ m.
  • the powders were pressure formed into toroidal cores of 38 X 19 X 12.5 mm, using water glass as binder.
  • the cores were subjected to heat treatment at 540°C for 60 minutes in the case of samples 1 to 6, and used for carrying out the measurements.
  • a sample 7 was manufactured in the same way and an Fe79Si10B11 amorphous thin strip. Evaluations were performed also for an iron powder dust core of the same shape, and for a toroidal core sample 8 which was wound to the same shape, and subjected to heat treatment, resin impregnation and gap forming.
  • Alloy powder of the composition Fe79-xCuxNb2Si13B6 was manufactured by the atomization method.
  • the powder obtained was a spherical powder of particle size 10 to 50 ⁇ m.
  • This powder was pressure formed into toroidal cores of 38 X 19 X 12.5 mm, using water glass as binder, and measurement samples were prepared by carrying out heat treatment at 500°C for 90 mintes.
  • this invention makes it possible to provide an Fe-based dust core that has a high saturation magnetic flux density, excellent soft magnetic characteristics at high frequency and that is capable of being made in various shapes.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Dispersion Chemistry (AREA)
  • Soft Magnetic Materials (AREA)
EP89304926A 1988-05-17 1989-05-16 Weichmagnetische Legierung auf Eisenbasis und daraus hergestellter Pulverkern Expired - Lifetime EP0342922B1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP63118335A JP2713980B2 (ja) 1988-05-17 1988-05-17 Ｆｅ基軟磁性合金
JP118335/88 1988-05-17
JP63300686A JPH01290206A (ja) 1988-11-30 1988-11-30 Ｆｅ基圧粉磁心
JP300686/88 1988-11-30

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EP0342922A2 true EP0342922A2 (de) 1989-11-23
EP0342922A3 EP0342922A3 (en) 1990-01-31
EP0342922B1 EP0342922B1 (de) 1995-02-08

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996032518A1 (en) * 1995-04-13 1996-10-17 Alliedsignal Inc. Metallic glass alloys for mechanically resonant marker surveillance systems
US5622768A (en) * 1992-01-13 1997-04-22 Kabushiki Kaishi Toshiba Magnetic core
US6093261A (en) * 1995-04-13 2000-07-25 Alliedsignals Inc. Metallic glass alloys for mechanically resonant marker surveillance systems
US6187112B1 (en) 1995-04-13 2001-02-13 Ryusuke Hasegawa Metallic glass alloys for mechanically resonant marker surveillance systems
EP1850334A1 (de) * 2006-04-27 2007-10-31 Heraeus, Inc. Weichmagnetische Unterschicht in magnetischen Mitteln und Sputtertarget mit weichmagnetischer Legierung

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6419760B1 (en) * 2000-08-25 2002-07-16 Daido Tokushuko Kabushiki Kaisha Powder magnetic core
KR20180024682A (ko) * 2016-08-31 2018-03-08 한양대학교 에리카산학협력단 Fe계 연자성 합금 및 이를 통한 자성부품

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH443505A (de) * 1960-10-31 1967-09-15 Du Pont Ferromagnetischer Werkstoff
DE2005371B2 (de) * 1970-02-06 1974-01-17 Fried. Krupp Gmbh, 4300 Essen Verfahren zur Herstellung weichmagnetischer Eisen-Nickel-Legierungen
EP0271657A2 (de) * 1986-12-15 1988-06-22 Hitachi Metals, Ltd. Weichmagnetische Legierung auf Eisenbasis und Herstellungsverfahren
EP0302355A1 (de) * 1987-07-23 1989-02-08 Hitachi Metals, Ltd. Weichmagnetisches Pulver aus einer auf Eisen basierenden Legierung, Magnetkern daraus und Herstellungsverfahren
JPH05273120A (ja) * 1992-03-27 1993-10-22 Hoya Corp 偏光解析装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4992600A (de) * 1973-01-09 1974-09-04
JPS5449936A (en) * 1977-09-29 1979-04-19 Pioneer Electronic Corp High permiable* soft magnetic material and method of making same

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH443505A (de) * 1960-10-31 1967-09-15 Du Pont Ferromagnetischer Werkstoff
DE2005371B2 (de) * 1970-02-06 1974-01-17 Fried. Krupp Gmbh, 4300 Essen Verfahren zur Herstellung weichmagnetischer Eisen-Nickel-Legierungen
EP0271657A2 (de) * 1986-12-15 1988-06-22 Hitachi Metals, Ltd. Weichmagnetische Legierung auf Eisenbasis und Herstellungsverfahren
EP0302355A1 (de) * 1987-07-23 1989-02-08 Hitachi Metals, Ltd. Weichmagnetisches Pulver aus einer auf Eisen basierenden Legierung, Magnetkern daraus und Herstellungsverfahren
JPH05273120A (ja) * 1992-03-27 1993-10-22 Hoya Corp 偏光解析装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5622768A (en) * 1992-01-13 1997-04-22 Kabushiki Kaishi Toshiba Magnetic core
US5804282A (en) * 1992-01-13 1998-09-08 Kabushiki Kaisha Toshiba Magnetic core
WO1996032518A1 (en) * 1995-04-13 1996-10-17 Alliedsignal Inc. Metallic glass alloys for mechanically resonant marker surveillance systems
US5628840A (en) * 1995-04-13 1997-05-13 Alliedsignal Inc. Metallic glass alloys for mechanically resonant marker surveillance systems
US6093261A (en) * 1995-04-13 2000-07-25 Alliedsignals Inc. Metallic glass alloys for mechanically resonant marker surveillance systems
US6187112B1 (en) 1995-04-13 2001-02-13 Ryusuke Hasegawa Metallic glass alloys for mechanically resonant marker surveillance systems
EP1850334A1 (de) * 2006-04-27 2007-10-31 Heraeus, Inc. Weichmagnetische Unterschicht in magnetischen Mitteln und Sputtertarget mit weichmagnetischer Legierung

Also Published As

Publication number Publication date
EP0342922B1 (de) 1995-02-08
EP0342922A3 (en) 1990-01-31
KR930011234B1 (ko) 1993-11-29
KR900019068A (ko) 1990-12-24
DE68921021T2 (de) 1995-06-01
DE68921021D1 (de) 1995-03-23

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