EP0332218A3 - Process of forming superconducting film - Google Patents
Process of forming superconducting film Download PDFInfo
- Publication number
- EP0332218A3 EP0332218A3 EP19890104323 EP89104323A EP0332218A3 EP 0332218 A3 EP0332218 A3 EP 0332218A3 EP 19890104323 EP19890104323 EP 19890104323 EP 89104323 A EP89104323 A EP 89104323A EP 0332218 A3 EP0332218 A3 EP 0332218A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- superconducting film
- forming superconducting
- film
- forming
- surface film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0661—After-treatment, e.g. patterning
- H10N60/0688—Etching
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63056809A JPH01230275A (ja) | 1988-03-10 | 1988-03-10 | 超電導薄膜の形成法 |
JP56809/88 | 1988-03-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0332218A2 EP0332218A2 (en) | 1989-09-13 |
EP0332218A3 true EP0332218A3 (en) | 1990-10-03 |
Family
ID=13037713
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19890104323 Withdrawn EP0332218A3 (en) | 1988-03-10 | 1989-03-10 | Process of forming superconducting film |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0332218A3 (ja) |
JP (1) | JPH01230275A (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5055999A (en) | 1987-12-22 | 1991-10-08 | Kendall Square Research Corporation | Multiprocessor digital data processing system |
DE69216138T2 (de) * | 1991-04-09 | 1997-06-19 | Sumitomo Electric Industries | Verfahren zum Strukturieren mehrlagiger Dünnschichten mit einer supraleitenden Lage |
US5688383A (en) * | 1996-02-22 | 1997-11-18 | E. I. Du Pont De Nemours And Company | Method for improving the performance of high temperature superconducting thin film wafers |
AUPR515301A0 (en) * | 2001-05-22 | 2001-06-14 | Commonwealth Scientific And Industrial Research Organisation | Process and apparatus for producing crystalline thin film buffer layers and structures having biaxial texture |
AU2002302168B2 (en) * | 2001-05-22 | 2007-11-08 | Commonwealth Scientific And Industrial Research Organisation | Process and apparatus for producing crystalline thin film buffer layers and structures having biaxial texture |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4456506A (en) * | 1982-01-28 | 1984-06-26 | Sperry Corporation | Superconducting circuit fabrication |
-
1988
- 1988-03-10 JP JP63056809A patent/JPH01230275A/ja active Pending
-
1989
- 1989-03-10 EP EP19890104323 patent/EP0332218A3/en not_active Withdrawn
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4456506A (en) * | 1982-01-28 | 1984-06-26 | Sperry Corporation | Superconducting circuit fabrication |
Non-Patent Citations (2)
Title |
---|
APPLIED PHYSICS LETTERS. vol. 52, no. 1, 4 January 1988, pages 69-71, New York, US; S. MATSUI et al.: "Reactive ion beam etching of Y-Ba-Cu-O superconductors". * |
JOURNAL OF SUPERCONDUCTIVITY. vol. 1, no. 1, March 1988, pages 21-34, Bristol, GB; H.W. ZANDBERGEN et al.: "Sample preparation of ZBa2Cu307-delta for high-resolution electron microscopy". * |
Also Published As
Publication number | Publication date |
---|---|
EP0332218A2 (en) | 1989-09-13 |
JPH01230275A (ja) | 1989-09-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): DE FR GB |
|
PUAL | Search report despatched |
Free format text: ORIGINAL CODE: 0009013 |
|
AK | Designated contracting states |
Kind code of ref document: A3 Designated state(s): DE FR GB |
|
17P | Request for examination filed |
Effective date: 19910328 |
|
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: MITSUBISHI MATERIALS CORPORATION |
|
17Q | First examination report despatched |
Effective date: 19930609 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION HAS BEEN WITHDRAWN |
|
18W | Application withdrawn |
Withdrawal date: 19931209 |