EP0305241A1 - Verfahren und Vorrichtung zur Behandlung von Oberflächen unter Verwendung von elektrischem Nachglimmen in strömendem Gas - Google Patents

Verfahren und Vorrichtung zur Behandlung von Oberflächen unter Verwendung von elektrischem Nachglimmen in strömendem Gas Download PDF

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Publication number
EP0305241A1
EP0305241A1 EP88401950A EP88401950A EP0305241A1 EP 0305241 A1 EP0305241 A1 EP 0305241A1 EP 88401950 A EP88401950 A EP 88401950A EP 88401950 A EP88401950 A EP 88401950A EP 0305241 A1 EP0305241 A1 EP 0305241A1
Authority
EP
European Patent Office
Prior art keywords
gas
enclosure
discharge
plasma
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP88401950A
Other languages
English (en)
French (fr)
Inventor
André Ricard
André Pilorget
Henri Michel
Michel Gantois
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Publication of EP0305241A1 publication Critical patent/EP0305241A1/de
Ceased legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
EP88401950A 1987-07-27 1988-07-27 Verfahren und Vorrichtung zur Behandlung von Oberflächen unter Verwendung von elektrischem Nachglimmen in strömendem Gas Ceased EP0305241A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8710638A FR2618796B1 (fr) 1987-07-27 1987-07-27 Procede de traitement de surfaces, utilisant une post-decharge electrique dans un gaz en ecoulement et dispositif pour la mise en oeuvre de ce procede
FR8710638 1987-07-27

Publications (1)

Publication Number Publication Date
EP0305241A1 true EP0305241A1 (de) 1989-03-01

Family

ID=9353608

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88401950A Ceased EP0305241A1 (de) 1987-07-27 1988-07-27 Verfahren und Vorrichtung zur Behandlung von Oberflächen unter Verwendung von elektrischem Nachglimmen in strömendem Gas

Country Status (2)

Country Link
EP (1) EP0305241A1 (de)
FR (1) FR2618796B1 (de)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2652591A1 (fr) * 1989-10-03 1991-04-05 Framatome Sa Procede d'oxydation superficielle d'une piece en metal passivable, et elements d'assemblage combustible en alliage metallique revetus d'une couche d'oxyde protectrice.
DE3935002A1 (de) * 1989-10-20 1991-04-25 Plasonic Oberflaechentechnik G Verfahren und vorrichtung zur kontinuierlichen bearbeitung von substraten
FR2664294A1 (fr) * 1990-07-06 1992-01-10 Plasmametal Procede de metallisation d'une surface.
US5941448A (en) * 1996-06-07 1999-08-24 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Method for dry fluxing of metallic surfaces, before soldering or tinning, using an atmosphere which includes water vapor
GB2336603A (en) * 1998-04-23 1999-10-27 Metaltech Limited A method and apparatus for plasma boronising
US6007637A (en) * 1993-06-11 1999-12-28 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process and apparatus for the dry treatment of metal surfaces
DE10145131A1 (de) * 2001-09-07 2003-03-27 Tepla Ag Vorrichtung zum Erzeugen eines Aktivgasstrahls
EP1174593A3 (de) * 2000-07-18 2003-04-02 Fuji Oozx Inc. Hubventil aus Titanlegierung und Verfahren zu dessen Herstellen

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0016909A1 (de) * 1979-03-01 1980-10-15 International Business Machines Corporation Verfahren zur Plasma-Oxidierung von Halbleitersubstraten und Vorrichtung zur Durchführung dieses Verfahrens

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58185763A (ja) * 1982-04-21 1983-10-29 Toshiba Corp 窒化膜生成装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0016909A1 (de) * 1979-03-01 1980-10-15 International Business Machines Corporation Verfahren zur Plasma-Oxidierung von Halbleitersubstraten und Vorrichtung zur Durchführung dieses Verfahrens

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
ADVANCES IN LOW-TEMPERATURE PLASMA CHEMISTRY, TECHNOLOGY, APPLICATIONS, vol. 1, 1984, pages 53-79, Technomic Publ. Co., Lancaster, US; O. MATSUMOTO: "Metal nitride film formation in plasmas" *
PATENT ABSTRACTS OF JAPAN, vol. 8, no. 19 (C-207) [1456], 26 janvier 1984; & JP-A-58 185 763 (TOKYO SHIBAURA DENKI K.K.) 29.10.1983 *

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0421868A1 (de) * 1989-10-03 1991-04-10 Framatome Verfahren zum Aufbringen einer Oxidschicht auf einem passivierbaren Metall und Brennelemente aus einer beschichteten Legierung mit einer Oxidschutzschicht
US5328524A (en) * 1989-10-03 1994-07-12 Framatome Process for the surface oxidation of a part composed of passivatable metal, and fuel assembly elements composed of metal alloy covered with a protective oxide layer
FR2652591A1 (fr) * 1989-10-03 1991-04-05 Framatome Sa Procede d'oxydation superficielle d'une piece en metal passivable, et elements d'assemblage combustible en alliage metallique revetus d'une couche d'oxyde protectrice.
DE3935002A1 (de) * 1989-10-20 1991-04-25 Plasonic Oberflaechentechnik G Verfahren und vorrichtung zur kontinuierlichen bearbeitung von substraten
FR2664294A1 (fr) * 1990-07-06 1992-01-10 Plasmametal Procede de metallisation d'une surface.
US5236747A (en) * 1990-07-06 1993-08-17 Plasmametal Process for metallizing a surface
US6007637A (en) * 1993-06-11 1999-12-28 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process and apparatus for the dry treatment of metal surfaces
US5941448A (en) * 1996-06-07 1999-08-24 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Method for dry fluxing of metallic surfaces, before soldering or tinning, using an atmosphere which includes water vapor
GB2336603A (en) * 1998-04-23 1999-10-27 Metaltech Limited A method and apparatus for plasma boronising
EP1174593A3 (de) * 2000-07-18 2003-04-02 Fuji Oozx Inc. Hubventil aus Titanlegierung und Verfahren zu dessen Herstellen
DE10145131A1 (de) * 2001-09-07 2003-03-27 Tepla Ag Vorrichtung zum Erzeugen eines Aktivgasstrahls
DE10145131B4 (de) * 2001-09-07 2004-07-08 Pva Tepla Ag Vorrichtung zum Erzeugen eines Aktivgasstrahls
US6943316B2 (en) 2001-09-07 2005-09-13 Tepla Ag Arrangement for generating an active gas jet

Also Published As

Publication number Publication date
FR2618796A1 (fr) 1989-02-03
FR2618796B1 (fr) 1993-02-05

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