EP0270807B1 - Device for the transmission of electrical currents to rotating machine elements - Google Patents
Device for the transmission of electrical currents to rotating machine elements Download PDFInfo
- Publication number
- EP0270807B1 EP0270807B1 EP87115814A EP87115814A EP0270807B1 EP 0270807 B1 EP0270807 B1 EP 0270807B1 EP 87115814 A EP87115814 A EP 87115814A EP 87115814 A EP87115814 A EP 87115814A EP 0270807 B1 EP0270807 B1 EP 0270807B1
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- Prior art keywords
- shaft
- bearing pin
- recess
- conical
- bearing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R39/00—Rotary current collectors, distributors or interrupters
- H01R39/64—Devices for uninterrupted current collection
Definitions
- the invention relates to a device for transmitting electrical currents to rotating parts of machines arranged in vacuum chambers, in particular to rotating substrate carriers in process chambers, and to the use of such devices.
- the invention is accordingly based on the object of reducing the diameter of the contacting path in a contacting arrangement or a current-carrying bearing for rotating shafts, without thereby reducing the current-carrying properties, in particular the current density, in the arrangement.
- the arrangement should have properties which enable it to be used in a vacuum and at elevated temperatures.
- the arrangement according to the invention has the advantage over the devices disclosed in the prior art that the contact surfaces of the bolt and shaft are reduced. Since this reduces the peripheral speed of the rubbing surfaces, the wear of the latter is also reduced and, as a result, the service life of the contacting device is increased.
- the measures listed within the scope of the dependent claims also allow advantageous developments and improvements of the device specified in the independent claim.
- the device acts as a contacting arrangement and as a bearing thanks to the vertical arrangement appears to be particularly advantageous, the weight of the rotor making the electrical contact.
- An electrically insulated version of this contact bearing offers the additional advantage that the connecting lines from the contacting device to the rotor winding can be easily and easily guided within a bore in the shaft, as a result of which they are protected against external influences and damage.
- this shaft can rest loosely and freely rotatably on the bearing pin and make electrical contact with its own weight.
- the vertically arranged shaft can touch the bearing pin from below, wherein the pressure required to establish the electrical contact between the two surfaces can be generated, for example, by a spring force.
- the cone angle of the hollow-conical recess must be selected somewhat larger than that of the conical tip of the counterpart.
- An advantageous combination is, for example, a cone angle of the tip of at most 100 ° and a cone angle of the recess of the counterpart of at least 118 °.
- the tip of the conical section can advantageously be designed as a spherical segment, the surface of which comprises approximately one fifth of the length of the adjoining conical jacket of the tip. This measure can prevent damage to the contact bearing in the first few hours of operation, particularly when there are major differences in the hardness of the bearing pin and shaft materials.
- the contact bearings according to the invention are used in process or vacuum chambers, it will usually not be necessary to insulate them electrically. If they serve, for example, to supply power to rotor windings, the carrier, bearing pin and rotor shaft are insulated and provided with the appropriate electrical cable connections. The connecting line from the contact surface to the rotor winding can easily be routed in an axial bore in the shaft, where it is protected against external influences and damage.
- a cylindrical recess in the rotating part into which a likewise cylindrical shaped piece made of a suitable material is inserted by means of a snap ring, which in turn has a hollow conical recess in its lower section.
- bearings according to the invention allow 300 revolutions of the shaft per minute in continuous operation without difficulty, their preferred field of application is less than 100 revolutions per minute, with only a few revolutions per minute often being achieved when used for substrate carriers in process chambers.
- a particular application of the contact bearing according to the invention is in the range of higher temperatures when the Bearings must also be driven lubricant-free. With the specified materials, use of the contact bearings is guaranteed at temperatures up to 480 ° C in the process chamber in continuous operation.
- a bearing pin (2) is attached to a support (1) of any shape, which has a conical tip.
- the hollow conical recess of a shaft (3) lies loosely on this conical section of the bearing pin.
- the axis of this shaft corresponds to that of the bearing pin (2) and the shaft (3) is freely rotatable about this axis.
- the shaft (3) runs through a corresponding bore in a second support (4), the shape of which can be of any desired design.
- the substrate carrier (5) in the narrower sense is permanently placed on this shaft (3).
- two contact bearings according to the invention are shown in a larger context.
- the two supports (1) and (4) are permanently connected by four spacers. These each consist of a pin (8) provided with corresponding bores, which is fastened to the carrier (1) by a screw connection (9).
- This carrier (1) contains a plurality, for example 8 or 12 bearing bolts (2) of the type shown, on which the shafts (3) are each loosely placed.
- the substrate carriers in the narrower sense (5) contain a further axial bore (7) and are set in rotation in this embodiment in that the projections (6) attached to the periphery of the substrate carriers are rotated past a fixed obstacle and at regular intervals queue.
- the entire device shown in FIG. 2 is live and is used in the course of a coating process using the cathode sputtering method.
- Figure 3 shows a further embodiment of the invention, in which the rotating part (3) is designed in the form of a hollow cylinder.
- the bottom of this hollow cylinder in turn has a cylindrical recess with a circular groove, into which a molded piece (10) made of another material is inserted by means of a snap ring (11).
- This shaped part (10) in turn contains the conical recess, which is loosely placed on the bearing pin (2).
- This embodiment of the invention allows the material of the shaped piece (10) to be selected without regard to the material of the rotor (3) and, moreover, enables this mechanically most stressed part (10) to be replaced without the entire rotor (3 ) would have to be replaced.
- Figure 4 shows an enlarged detail from Figure 3 containing the bearing pin (2) and the fitting (10) inserted in the bottom of the hollow cylinder.
- the structure of the bearing pin (2) from two cylindrical sections (31, 32) and a conical tip (30), which is rounded at the end to form a spherical cap, can be seen from this illustration.
- the shaped piece (10) in turn has a hollow-conical (33) and a hollow-cylindrical section (34), which correspond to the corresponding sections of the bearing pin.
- the circular groove (36) serves to fasten the shaped piece (10) in the bottom of the hollow cylindrical rotor and the turned-off edge section (35) facilitates the assembly of the shaped piece in the cylindrical recess of this bottom.
- the tapered section (30) of the bearing pin (2) has a slightly smaller opening angle than the hollow tapered section (33) of the recess in the shaped piece (10), these angles advantageously being in the range between 100 ° and 120 ° and a difference of about 10 °.
- FIG. 5 shows a combination of a plurality of contact bearings according to the invention in the context of a rotating substrate carrier for process chambers.
- the hollow-cone-shaped recess is anchored in the shaped piece (10) by means of a snap ring (12) in an inner tube (13).
- This tube (13) is in turn fastened by means of an annular bushing (14) in the outer tube (15), which is closed off by the cover (16).
- the two supports (1) and (4) are permanently anchored to this outer tube (15), which in turn have an annular plan.
- a plurality of contact bearings (2) according to the invention are fastened on the carrier (1), onto which the shafts (3) of the substrate carrier are placed in a freely rotatable manner in the narrower sense. According to this embodiment of the invention, the entire arrangement is attached in a current-carrying manner inside a process chamber.
- FIG. 6 shows a longitudinal section through an electrically insulated device according to the invention, as can be used, for example, to supply power to rotor windings in electric motors.
- the current-carrying bearing pin (2) is anchored on a cylindrical support (1).
- This carrier is provided with an annular flange (17) which, shielded by an insulating ring (24) with corresponding seals (18), rests on the base plate (19).
- the section (20) of this cylindrical carrier is passed through a bore in the base plate (19) which is shielded with an insulating sleeve (25) and a further insulating ring (26).
- This section (20) has a thread at its end and is screwed onto the other side of the base plate (19) by means of an underlying screw nut (27, 28). It has an axial bore (21) with a contact lamella (22) for receiving a plug and is closed with a cover (29) of a known type.
Description
Die Erfindung bezieht sich auf eine Vorrichtung zur Uebertragung elektrischer Ströme auf in Vakuumkammern angeordnete rotierende Teile von Maschinen, insbesondere auf rotierende Substratträger in Prozesskammern sowie auf die Verwendung derartiger Vorrichtungen.The invention relates to a device for transmitting electrical currents to rotating parts of machines arranged in vacuum chambers, in particular to rotating substrate carriers in process chambers, and to the use of such devices.
Aus US-A-4,468,069 sind Vorrichtungen bekannt, um elektrischen Strom über eine stationäre Welle auf einen auf dieser drehbar gelagerten Walzenmantel zu übertragen. Diese Vorrichtungen sind mechanisch nicht belastbar und würden sich daher als Lager nicht eignen.From US-A-4,468,069 devices are known for transmitting electrical current via a stationary shaft to a roller shell rotatably mounted thereon. These devices are not mechanically resilient and would therefore not be suitable as bearings.
Aus DE-C-408 576 ist eine Spinnspindel mit Spurzapfenlager bekannt. Die Spindel läuft vollständig im Oelbad und ist im Betrieb wegen der elektrischen Antriebsanordnung vollständig entlastet. Diese Vorrichtung eignet sich somit weder als belastbares Lager (Drucklager), noch als Vorrichtung zur Uebertragung elektrischer Ströme auf rotierende Teile.From DE-C-408 576 a spinning spindle with a journal bearing is known. The spindle runs completely in the oil bath and is completely relieved in operation due to the electrical drive arrangement. This device is therefore not suitable as a resilient bearing (pressure bearing) or as a device for transmitting electrical currents to rotating parts.
Bei den üblichen Kontaktierungsanordnungen für rotierende Wellen ist eine Schleifringanordnung auf der Rotorwelle aufgesetzt. Dadurch sind verhältnismässig grosse Durchmesser der Kontaktierungsbahnen mit einer hohen Umfangsgeschwindigkeit und damit mit einer hohen Abnützung der Kohlebürsten gegeben. Verwendet werden in derartigen Vorrichtungen entweder Trommelschleifringe, die auf der Rotorwelle nebeneinander sind, oder Planschleifringe, die am Ende der Rotorwelle oder nebeneinander auf einer isolierenden Trägerscheibe angeordnet sind. Ein Nachteil dieser Planschleifringe besteht dabei darin, dass infolge des unterschiedlichen Schleifbahndurchmessers die Kohlebürsten auch einem unterschiedlichen Verschleiss unterworfen sind. Diese Nachteile werden noch verstärkt, wenn die Kontaktierungsvorrichtungen schmiermittelfrei gefahren werden müssen, wie das namentlich bei Vorrichtungen in Vakuumprozesskammern oder beim Arbeiten bei erhöhten Temperaturen der Fall ist (vgl. DE-OS 29 26 294 und DE-OS 30 19 118).In the usual contacting arrangements for rotating shafts, a slip ring arrangement is placed on the rotor shaft. This results in relatively large diameters of the contacting tracks with a high peripheral speed and thus with a high wear on the carbon brushes. In such devices either drum slip rings, which are next to one another on the rotor shaft, or face slip rings, which are arranged at the end of the rotor shaft or next to one another on an insulating carrier disk, are used. A disadvantage of these face slip rings is that the carbon brushes are also subject to different wear due to the different grinding track diameter. These disadvantages are exacerbated when the contacting devices have to be operated without lubricant, as is the case especially with devices in vacuum process chambers or when working at elevated temperatures (cf. DE-OS 29 26 294 and DE-OS 30 19 118).
Der Erfindung liegt dementsprechend die Aufgabe zugrunde, in einer Kontaktierungsanordnung bzw. einem stromführenden Lager für rotierende Wellen den Durchmesser der Kontaktierungsbahn zu vermindern, ohne dadurch die stromführenden Eigenschaften, wie namentlich die Stromdichte, in der Anordnung zu reduzieren. Zusätzlich sollte die Anordnung Eigenschaften aufweisen, welche ihren Einsatz im Vakuum und bei erhöhten Temperaturen ermöglichen.The invention is accordingly based on the object of reducing the diameter of the contacting path in a contacting arrangement or a current-carrying bearing for rotating shafts, without thereby reducing the current-carrying properties, in particular the current density, in the arrangement. In addition, the arrangement should have properties which enable it to be used in a vacuum and at elevated temperatures.
Die Aufgabe wird durch eine Vorrichtung entsprechend dem Gattungsbegriff gelöst, welche die Merkmalskombination gemäss Anspruch 1 aufweist.The object is achieved by a device according to the generic term, which has the combination of features according to
Die erfindungsgemässe Anordnung hat gegenüber dem im Stand der Technik offenbarten Vorrichtungen den Vorteil, die Kontaktierungsflächen von Bolzen und Welle zu verkleinern. Da dadurch die Umfangsgeschwindigkeit der reibenden Flächen vermindert wird, wird der Verschleiss der letzteren ebenfalls vermindert und im Ergebnis die Lebensdauer der Kontaktierungsvorrichtung gesteigert. Durch die im Rahmen der abhängigen Ansprüche aufgeführten Massnahmen sind darüberhinaus vorteilhafte Weiterbildungen und Verbesserungen der im unabhängigen Anspruch angegebenen Vorrichtung möglich.The arrangement according to the invention has the advantage over the devices disclosed in the prior art that the contact surfaces of the bolt and shaft are reduced. Since this reduces the peripheral speed of the rubbing surfaces, the wear of the latter is also reduced and, as a result, the service life of the contacting device is increased. The measures listed within the scope of the dependent claims also allow advantageous developments and improvements of the device specified in the independent claim.
Besonders vorteilhaft erscheint dabei der Umstand, dass die Vorrichtung dank vertikaler Anordnung gleichzeitig als Kontaktierungsanordnung und als Lager wirkt, wobei das Eigengewicht des Rotors den elektrischen Kontakt herstellt. Eine elektrisch isolierte Ausführung dieses Kontaktlagers bietet den zusätzlichen Vorteil, dass sich die Verbindungsleitungen von der Kontaktierungseinrichtung zur Rotorwicklung einfach und problemlos innerhalb einer Bohrung der Welle führen lassen, wodurch diese gegen äussere Einflüsse und Beschädigungen geschützt sind.The fact that the device acts as a contacting arrangement and as a bearing thanks to the vertical arrangement appears to be particularly advantageous, the weight of the rotor making the electrical contact. An electrically insulated version of this contact bearing offers the additional advantage that the connecting lines from the contacting device to the rotor winding can be easily and easily guided within a bore in the shaft, as a result of which they are protected against external influences and damage.
Die kontaktgebenden Flächen der Vorrichtung sind dabei kegel- bzw. hohlkegelförmig auszubilden. Die Rotationsachsen dieser Abschnitte stimmen dabei mit derjenigen der rotierenden Welle überein. Nach einer besonderen Ausführungsform kann das erfindungsgemässe Lager etwa derart ausgeführt werden, dass
- (a) der Lagerbolzen (2) eine axial angeordnete kegelförmige Spitze
- (b) und die Welle (3) eine axial angeordnete hohlkegelförmige Ausnehmung aufweist.
- (c) in welche die Kegelspitze des Lagerbolzens eingreift.
- (a) the bearing pin (2) has an axially arranged conical tip
- (b) and the shaft (3) has an axially arranged hollow-conical recess.
- (c) into which the conical tip of the bearing pin engages.
Eine andere Ausführungsform des erfindungsgemässen Lagers weist demgegenüber folgende Einzelmerkmale auf:
- (a) Der Lagerbolzen (2) weist eine axial angeordnete Ausnehmung
- (b) und die Welle (3) eine axial angeordnete kegelförmige Spitze auf,
- (c) welche in die Ausnehmung des Lagerbolzens (2) eingreift.
- (a) The bearing pin (2) has an axially arranged recess
- (b) and the shaft (3) have an axially arranged conical tip,
- (c) which engages in the recess of the bearing pin (2).
Dank der vertikalen Anordnung der Welle kann dabei diese Welle lose und frei rotierbar auf dem Lagerbolzen aufliegen und mit ihrem Eigengewicht den elektrischen Kontakt herbeiführen. In einer anderen Ausführungsform kann die vertikal angeordnete Welle den Lagerbolzen von unten her berühren, wobei der zur Herstellung des elektrischen Kontakts zwischen den beiden Flächen erforderliche Druck beispielsweise durch eine Federkraft erzeugt werden kann.Thanks to the vertical arrangement of the shaft, this shaft can rest loosely and freely rotatably on the bearing pin and make electrical contact with its own weight. In another embodiment, the vertically arranged shaft can touch the bearing pin from below, wherein the pressure required to establish the electrical contact between the two surfaces can be generated, for example, by a spring force.
Um die freie Rotierbarkeit der Welle zu gewährleisten und namentlich um ein Kaltverschweissen der Kontaktflächen bei stehender Vorrichtung zu verhindern, muss der Kegelwinkel der hohlkegelförmigen Ausnehmung etwas grösser ausgewählt werden als derjenige der kegelförmigen Spitze des Gegenstücks. Dabei hat es sich als vorteilhaft erwiesen, die Differenz der beiden Kegelwinkel nicht kleiner als 16° zu wählen. Eine vorteilhafte Kombination bildet beispielsweise ein Kegelwinkel der Spitze von höchstens 100° und ein Kegelwinkel der Ausnehmung des Gegenstücks von mindestens 118°. Die Spitze des kegelförmigen Abschnitts kann dabei vorteilhafterweise als Kugelsegment ausgebildet werden, dessen Oberfläche etwa einen Fünftel der Länge des anschliessenden Kegelmantels der Spitze umfasst. Durch diese Massnahme kann namentlich bei grösseren Härteunterschieden der Werkstoffe von Lagerbolzen und Welle eine Beschädigung des Kontaktlagers in den ersten Betriebsstunden verhindert werden.In order to ensure the free rotation of the shaft and in particular to prevent cold welding of the contact surfaces when the device is stationary, the cone angle of the hollow-conical recess must be selected somewhat larger than that of the conical tip of the counterpart. Here it has proven advantageous to choose the difference between the two cone angles not less than 16 °. An advantageous combination is, for example, a cone angle of the tip of at most 100 ° and a cone angle of the recess of the counterpart of at least 118 °. The tip of the conical section can advantageously be designed as a spherical segment, the surface of which comprises approximately one fifth of the length of the adjoining conical jacket of the tip. This measure can prevent damage to the contact bearing in the first few hours of operation, particularly when there are major differences in the hardness of the bearing pin and shaft materials.
Da die erfindungsgemässen Kontaktlager in Prozess- oder Vakuumkammern eingesetzt werden, so wird es meist nicht erforderlich sein, diese elektrisch zu isolieren. Dienen sie dabei beispielsweise zur Stromversorgung von Rotorwicklungen, so werden Träger, Lagerbolzen und Rotorwelle isoliert und mit den entsprechenden elektrischen Leitungsverbindungen versehen. Die Verbindungsleitung von der Kontaktierungsfläche zur Rotorwicklung lässt sich dabei problemlos in einer axialen Bohrung der Welle führen, wo sie gegen äussere Einflüsse und Beschädigungen geschützt ist.Since the contact bearings according to the invention are used in process or vacuum chambers, it will usually not be necessary to insulate them electrically. If they serve, for example, to supply power to rotor windings, the carrier, bearing pin and rotor shaft are insulated and provided with the appropriate electrical cable connections. The connecting line from the contact surface to the rotor winding can easily be routed in an axial bore in the shaft, where it is protected against external influences and damage.
Was die Auswahl der Werkstoffe der kontaktgebenden Oberflächen von Lagerbolzen und Welle betrifft, so ist zu beachten, dass die ausgewählten Werkstoffe nicht zum Kaltverschweissen neigen dürfen. Aus Gründen der mechanischen Stabilität erscheint es darüberhinaus als vorteilhaft, zumindest die kontaktgebende Oberfläche des bei vertikaler Anordnung unten liegenden Teiles (Lagerbolzen oder Welle) aus einem härteren Werkstoff zu fertigen als diejenige des aufliegenden Teils. Als Werkstoff für diese Oberfläche haben sich namentlich Sonderbronzen mit einer Konzentration von mindestens zwei Gewichtsprozenten Beryllium und höchsten 0.5 Gewichtsprozenten Zinn bewährt, welche aushärtbar sind und in ausgehärtetem Zustand Zugfestigkeitswerte bis zu 1400 N/mm² und Brinellhärten (HB 30) über 300 erreichen können. Da derartige Sonderbronzen noch ausreichende elektrische Leitfähigkeiten aufweisen, sind sie auch unter diesem Gesichtspunkt für den Einsatz in den erfindungsgemässen Lagern geeignet. (DIN 1782, 17666, 17672). Die kontaktgebende Oberfläche des bei vertikaler Anordnung aufliegenden Teils kann demgegenüber aus einem weicheren Werkstoff gefertigt werden, wobei sich in dieser Funktion beispielsweise Grauguss bewährt hat.With regard to the choice of materials for the contacting surfaces of the bearing pin and shaft, it should be noted that the selected materials must not tend to cold welding. For reasons of mechanical stability, it also appears to be advantageous to manufacture at least the contacting surface of the part lying below in the vertical arrangement (bearing bolt or shaft) from a harder material than that of the part lying on it. Special bronzes with a concentration of at least two percent by weight of beryllium and a maximum of 0.5 percent by weight of tin, which can be hardened and in the hardened state tensile strength values, have proven themselves as the material for this surface can reach up to 1400 N / mm² and Brinell hardness (HB 30) over 300. Since such special bronzes still have sufficient electrical conductivities, they are also suitable from this point of view for use in the bearings according to the invention. (DIN 1782, 17666, 17672). In contrast, the contacting surface of the part lying in a vertical arrangement can be made of a softer material, with gray cast iron, for example, having proven itself in this function.
Für Sonderzwecke kann es vorteilhaft sein, im rotierenden Teil eine zylindrische Ausnehmung vorzusehen, in welche mittels eines Sprengringes ein ebenfalls zylindrisches Formstück aus einem geeigneten Werkstoff eingesetzt wird, das seinerseits eine in ihrem tieferen Abschnitt hohlkegelförmige Ausnehmung aufweist.For special purposes, it may be advantageous to provide a cylindrical recess in the rotating part, into which a likewise cylindrical shaped piece made of a suitable material is inserted by means of a snap ring, which in turn has a hollow conical recess in its lower section.
Die Verwendung des erfindungsgemässen stromführenden Lagers in elektrischen Apparaturen hat gezeigt, dass bei einer Fertigung der kontaktgebenden Formteile aus den erwähnten Werkstoffen Stromdichten beim Uebergang zwischen Bolzen und Welle von bis zu 200 A/cm² (= 2 x 10⁶ A/m²) erreicht werden können. Dies bedeutet, eine enorme Steigerung der Stromdichte der erfindungsgemässen Lager, liegt doch die zulässige Strombelastung herkömmlicher Bürsten von Schleifringen elektrischer Maschinen zwischen 4 A/cm² bei harten Kohlen und 25 bis 30 A/cm² bei Bronzekohlen (vgl. beispielsweise H.J.SCHRADER, in: Lexikon der Physik, Bd. 1, 3.A. Stuttgart 1969, S. 202.The use of the current-carrying bearing according to the invention in electrical apparatus has shown that current densities in the transition between the bolt and the shaft of up to 200 A / cm² (= 2 x 10⁶ A / m²) can be achieved when manufacturing the contact-making molded parts from the materials mentioned. This means an enormous increase in the current density of the bearings according to the invention, since the permissible current load of conventional brushes of slip rings of electrical machines is between 4 A / cm² in the case of hard coals and 25 to 30 A / cm² in the case of bronze coals (see, for example, HJSCHRADER, in: Lexicon der Physik, vol. 1, 3.A. Stuttgart 1969, p. 202.
Obschon die erfindungsgemässen Lager ohne Schwierigkeiten 300 Umdrehungen der Welle pro Minute im Dauerbetrieb zulassen, liegt ihr bevorzugter Anwendungsbereich unter 100 Umdrehungen pro Minute, wobei beim Einsatz für Substratträger in Prozesskammern häufig nur wenige Umdrehungen pro Minute erreicht werden. Ein besonderes Anwendungsgebiet der erfindungsgemässen Kontaktlager liegt im Bereich höherer Temperaturen, wenn die Lager zusätzlich noch schmiermittelfrei gefahren werden müssen. Mit den angegebenen Werkstoffen ist eine Verwendung der Kontaktlager bei Temperaturen bis zu 480° C in der Prozesskammer im Dauerbetrieb gewährleistet.Although the bearings according to the invention allow 300 revolutions of the shaft per minute in continuous operation without difficulty, their preferred field of application is less than 100 revolutions per minute, with only a few revolutions per minute often being achieved when used for substrate carriers in process chambers. A particular application of the contact bearing according to the invention is in the range of higher temperatures when the Bearings must also be driven lubricant-free. With the specified materials, use of the contact bearings is guaranteed at temperatures up to 480 ° C in the process chamber in continuous operation.
Ausführungsbeispiele der Erfindung sind in den Zeichnungen dargestellt und werden in der nachfolgenden Beschreibung näher erläutert. Dabei zeigen
Figur 1- einen Ausschnitt eines Längsschnitts durch einen stromführenden Drehteller für eine Prozesskammer;
Figur 2- einen Querschnitt durch eine andere Ausführungsform eines stromführenden Drehtellers aus einer Prozesskammer;
Figur 3- einen Ausschnitt aus dem Querschnitt einer weiteren Ausführungsform eines stromführenden Drehtellers aus einer Prozesskammer;
Figur 4- eine vergrösserte Einzelheit aus Figur 3;
Figur 5- einen Ausschnitt eines Längsschnittes durch ein stromführendes Drehgestell in einer Prozesskammer;
Figur 6- einen Längsschnitt durch eine elektrisch isolierte Ausführungsform eines erfindungsgemässen Kontaklagers.
- Figure 1
- a section of a longitudinal section through a current-carrying turntable for a process chamber;
- Figure 2
- a cross section through another embodiment of a current-carrying turntable from a process chamber;
- Figure 3
- a section of the cross section of a further embodiment of a current-carrying turntable from a process chamber;
- Figure 4
- an enlarged detail of Figure 3;
- Figure 5
- a detail of a longitudinal section through a live bogie in a process chamber;
- Figure 6
- a longitudinal section through an electrically insulated embodiment of a contact bearing according to the invention.
In der in Figur 1 dargestellten Ausführungsform ist auf einem Träger (1) von an sich beliebiger Form ein Lagerbolzen (2) befestigt, der eine kegelförmige Spitze aufweist. Auf diesem kegelförmigen Abschnitt des Lagerbolzens liegt die in ihrem tieferen Abschnitt hohlkegelförmige Ausnehmung einer Welle (3) lose auf. Die Achse dieser Welle entspricht dabei derjenigen des Lagerbolzens (2) und die Welle (3) ist um diese Achse frei rotierbar. In ihrem oberen Teil verläuft die Welle (3) durch eine entsprechende Bohrung eines zweiten Trägers (4), dessen Form an sich beliebig ausgestaltet sein kann. Der Substratträger (5) im engeren Sinn ist auf diese Welle (3) dauerhaft aufgesetzt.In the embodiment shown in Figure 1, a bearing pin (2) is attached to a support (1) of any shape, which has a conical tip. The hollow conical recess of a shaft (3) lies loosely on this conical section of the bearing pin. The axis of this shaft corresponds to that of the bearing pin (2) and the shaft (3) is freely rotatable about this axis. In its upper part, the shaft (3) runs through a corresponding bore in a second support (4), the shape of which can be of any desired design. The substrate carrier (5) in the narrower sense is permanently placed on this shaft (3).
In dem in Figur 2 dargestellten Schnitt durch den Substratträger einer Prozesskammer sind zwei erfindungsgemässe Kontaktlager in einem grösseren Sachzusammenhang dargestellt. Die beiden Träger (1) und (4) mit jeweils kreisringförmigem Grundriss sind in dieser Ausführungsform durch vier Distanzhalter dauerhaft verbunden. Diese bestehen jeweils aus einem mit entsprechenden Bohrungen versehenen Stift (8), welcher durch eine Schraubverbindung (9) an dem Träger (1) befestigt ist. Dieser Träger (1) enthält eine Mehrzahl, beispielsweise 8 oder 12 Lagerbolzen (2) der dargestellten Art, auf welche die Wellen (3) jeweils lose aufgesetzt sind. Die Substratträger im engeren Sinn (5) enthalten eine weitere axiale Bohrung (7) und werden in dieser Ausführungsform dadurch in Rotation versetzt, dass die an der Peripherie der Substratträger angebrachten Vorsprünge (6) in regelmässigen Intervallen an einem fixen Hindernis vorbeigedreht werden und an diesem anstehen. Die gesamte in Figur 2 dargestellte Vorrichtung ist stromführend und wird im Rahmen eines Beschichtungsvorganges nach dem Verfahren der Kathodenzerstäubung eingesetzt.In the section through the substrate carrier of a process chamber shown in FIG. 2, two contact bearings according to the invention are shown in a larger context. In this embodiment, the two supports (1) and (4), each with an annular outline, are permanently connected by four spacers. These each consist of a pin (8) provided with corresponding bores, which is fastened to the carrier (1) by a screw connection (9). This carrier (1) contains a plurality, for example 8 or 12 bearing bolts (2) of the type shown, on which the shafts (3) are each loosely placed. The substrate carriers in the narrower sense (5) contain a further axial bore (7) and are set in rotation in this embodiment in that the projections (6) attached to the periphery of the substrate carriers are rotated past a fixed obstacle and at regular intervals queue. The entire device shown in FIG. 2 is live and is used in the course of a coating process using the cathode sputtering method.
Figur 3 zeigt eine weitere Ausführungsform der Erfindung, bei der der rotierende Teil (3) in der Form eines Hohlzylinders ausgebildet ist. Der Boden dieses Hohlzylinders weist seinerseits eine zylindrische Ausnehmung mit einer Kreisnut auf, in die mittels eines Sprengringes (11) ein Formstück (10) aus einem anderen Werkstoff eingesetzt wird. Dieses Formstück (10) enthält seinerseits die kegelförmige Ausnehmung, welche auf den Lagerbolzen (2) lose aufgesetzt wird. Diese Ausführungsform der Erfindung gestattet es, den Werkstoff des Formstückes (10) ohne Rücksicht auf den Werkstoff des Rotors (3) auszuwählen und ermöglicht darüberhinaus ein Auswechseln dieses mechanisch am stärksten beanspruchten Teiles (10), ohne dass dabei jedesmal auch der gesamte Rotor (3) ausgewechselt werden müsste.Figure 3 shows a further embodiment of the invention, in which the rotating part (3) is designed in the form of a hollow cylinder. The bottom of this hollow cylinder in turn has a cylindrical recess with a circular groove, into which a molded piece (10) made of another material is inserted by means of a snap ring (11). This shaped part (10) in turn contains the conical recess, which is loosely placed on the bearing pin (2). This embodiment of the invention allows the material of the shaped piece (10) to be selected without regard to the material of the rotor (3) and, moreover, enables this mechanically most stressed part (10) to be replaced without the entire rotor (3 ) would have to be replaced.
Figur 4 zeigt eine vergrösserte Einzelheit aus Figur 3 enthaltend den Lagerbolzen (2) und das in dem Boden des Hohlzylinders eingesetzte Formstück (10). Der Aufbau des Lagerbolzens (2) aus zwei zylindrischen Abschnitten (31, 32) und einer kegelförmigen Spitze (30), welche an ihrem Ende zur Kugelkalotte gerundet ist, wird aus dieser Darstellung ersichtlich. Das Formstück (10) weist seinerseits einen hohlkegelförmigen (33) und einen hohlzylinderförmigen Abschnitt (34) auf, welche den entsprechenden Abschnitten des Lagerbolzens entsprechen. Die Kreisnut (36) dient zum Befestigen des Formstückes (10) im Boden des hohlzylinderförmigen Rotors und der abgedrehte Randabschnitt (35) erleichtert die Montage des Formstücks in der zylindrischen Ausnehmung dieses Bodens. In dieser Ausführungsform weist der kegelförmige Abschnitt (30) des Lagerbolzens (2) einen etwas geringeren Oeffnungswinkel auf als der hohlkegelförmige Abschnitt (33) der Ausnehmung des Formstückes (10) wobei diese Winkel zweckmässigerweise im Bereich zwischen 100° und 120° liegen und eine Differenz von etwa 10° aufweisen.Figure 4 shows an enlarged detail from Figure 3 containing the bearing pin (2) and the fitting (10) inserted in the bottom of the hollow cylinder. The structure of the bearing pin (2) from two cylindrical sections (31, 32) and a conical tip (30), which is rounded at the end to form a spherical cap, can be seen from this illustration. The shaped piece (10) in turn has a hollow-conical (33) and a hollow-cylindrical section (34), which correspond to the corresponding sections of the bearing pin. The circular groove (36) serves to fasten the shaped piece (10) in the bottom of the hollow cylindrical rotor and the turned-off edge section (35) facilitates the assembly of the shaped piece in the cylindrical recess of this bottom. In this embodiment, the tapered section (30) of the bearing pin (2) has a slightly smaller opening angle than the hollow tapered section (33) of the recess in the shaped piece (10), these angles advantageously being in the range between 100 ° and 120 ° and a difference of about 10 °.
Figur 5 zeigt eine Kombination mehrerer erfindungsgemässer Kontaktlager im Rahmen eines rotierenden Substratträgers für Prozesskammern. Beim zentralen Kontaktlager ist die hohlkegelförmige Ausnehmung in dem Formstück (10) mittels eine Sprengringes (12) in einem inneren Rohr (13) verankert. Dieses Rohr (13) ist seinerseits mittels einer Ringbuchse (14) in dem äusseren Rohr (15) befestigt, welches durch den Deckel (16) abgeschlossen wird. An diesem äusseren Rohr (15) sind die beiden Träger (1) und (4) dauerhaft verankert, welche wiederum kreisringförmigen Grundriss aufweisen. Auf dem Träger (1) ist eine Mehrzahl erfindungsgemässer Kontaktlager (2) befestigt, auf die die Wellen (3) der Substratträger im engeren Sinn frei rotierbar aufgesetzt werden. Die gesamte Anordnung ist nach dieser Ausführungsform der Erfindung stromführend im Innern einer Prozesskammer angebracht.FIG. 5 shows a combination of a plurality of contact bearings according to the invention in the context of a rotating substrate carrier for process chambers. In the case of the central contact bearing, the hollow-cone-shaped recess is anchored in the shaped piece (10) by means of a snap ring (12) in an inner tube (13). This tube (13) is in turn fastened by means of an annular bushing (14) in the outer tube (15), which is closed off by the cover (16). The two supports (1) and (4) are permanently anchored to this outer tube (15), which in turn have an annular plan. A plurality of contact bearings (2) according to the invention are fastened on the carrier (1), onto which the shafts (3) of the substrate carrier are placed in a freely rotatable manner in the narrower sense. According to this embodiment of the invention, the entire arrangement is attached in a current-carrying manner inside a process chamber.
Figur 6 zeigt einen Längsschnitt durch eine elektrisch isolierte erfindungsgemässe Vorrichtung, wie sie beispielsweise zur Stromversorgung von Rotorwicklungen in Elektromotoren verwendet werden kann. Bei dieser Ausführungsform der Erfindung ist der stromführende Lagerbolzen (2) auf einem zylindrischen Träger (1) verankert. Dieser Träger ist mit einem kreisringförmigen Flansch (17) versehen, der durch einen Isolierring (24) mit entsprechenden Dichtungen (18) abgeschirmt auf der Grundplatte (19) aufliegt. Der Abschnitt (20) dieses zylindrischen Trägers wird durch eine Bohrung der Grundplatte (19) geführt, welche mit einer Isolierhülse (25) und einem weiteren Isolierring (26) abgeschirmt ist. Dieser Abschnitt (20) weist an seinem Ende ein Gewinde auf und wird auf der anderen Seite der Grundplatte (19) mittels einer unterlegten Schraubenmutter (27, 28) festgeschraubt. Er weist im übringen eine axiale Bohrung (21) mit Kontaktlamelle (22) zur Aufnahme eines Steckers auf und wird mit einem Deckel (29) bekannter Bauart abgeschlossen.FIG. 6 shows a longitudinal section through an electrically insulated device according to the invention, as can be used, for example, to supply power to rotor windings in electric motors. In this embodiment of the invention, the current-carrying bearing pin (2) is anchored on a cylindrical support (1). This carrier is provided with an annular flange (17) which, shielded by an insulating ring (24) with corresponding seals (18), rests on the base plate (19). The section (20) of this cylindrical carrier is passed through a bore in the base plate (19) which is shielded with an insulating sleeve (25) and a further insulating ring (26). This section (20) has a thread at its end and is screwed onto the other side of the base plate (19) by means of an underlying screw nut (27, 28). It has an axial bore (21) with a contact lamella (22) for receiving a plug and is closed with a cover (29) of a known type.
Claims (17)
- A device for the transmission of electric currents to rotating parts (5) of machines, which are arranged in vacuum chambers in particular rotating substrate carriers (5) in process chambers, which transmission device is formed as a bearing in the form of interengaging conical and hollow-conical surfaces (2') and (3') respectively of two hearing elements, namely a vertically arranged bearing pin (2) and a vertically arranged shaft (3) connected to the rotation part (5) for rotation therewith, in order to produce electrical contact between the bearing pin (2) and the shaft (3) due to the weight of the shaft (3), wherein the main axes (A) of the bearing pin and the shaft coincide with that of the rotating part (5) and the hollow-conical recess (3') of the one bearing element has a larger cone angle than the conical tip (2') of the other bearing element.
- A device according to claim 1 characterised in that(a) the bearing pin (2) has an axially arranged conical tip (2')(b) and the shaft (3) has an axially arranged hollow-conical recess (3')(c) into which the conical tip (2') of the bearing pin (2) engages.
- A device according to claim 1 characterised in that(a) the bearing pin (2) has an axially arranged recess(b) and the shaft (3) has an axially arranged conical tip(c) which engages into the recess in the bearing pin (2).
- A device according to claims 1 to 3 characterised in that
the shaft (3) lies loosely and freely rotatably on the bearing pin (2). - A device according to claims 1 to 3 characterised in that
the shaft (3) is in contact with the bearing pin (2) from below. - A device according to claims 1 to 5 characterised in that
the difference between the cone angle of the recess and that of the cone tip is at least 16°. - A device according to claims 1 to 6 characterised in that
the cone angle of the recess is at least 118° and that of the cone tip is at most 100°. - A device according to claims 1 to 7 characterised in that
the contact-forming conical tip is in the form of a segment of a sphere. - A device according to claims 1 to 8 characterised in that
the carrier (1), the bearing pin (2) and the shaft (3) are of electrically insulated nature. - A device according to claim 4 characterised in that
the contact-forming surface of the bearing pin (2) is of a harder material than that of the shaft (3). - A device according to claim 5 characterised in that
the contact-forming surface of the shaft (3) is made from a harder material than that of the bearing pin. - A device according to claims 10 and 11 characterised in that
the harder material of the downwardly disposed shaped piece comprises a special bronze with a concentration of at least 2 percent by weight of beryllium and at most 0.5 percent by weight of tin. - A device according to claims 10 and 11 characterised in that
the softer material of the upper shaped piece comprises cast iron. - A device according to claims 1 to 13 characterised in that
the shaft (3) has a cylindrical recess into which a cylindrical shaped piece (10) is inserted by means of a circlip (11), the cylindrical shaped piece in turn having a recess which is of a hollow-conical configuration in its lower portion. - Use of a device according to claims 1 to 14 characterised in that
the current density in the transmission of current between the bearing pin (2) and the shaft (3) is less than 200 A/cm². - Use of a device according to claim 15 characterised in that
the shaft (3) rotates at less than 300 revolutions per minute, preferably at one to 100 revolutions per minute. - Use of a device according to claim 15 or claim 16 characterised in that
the temperature in the process chamber does not exceed 480°C.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH467486 | 1986-11-21 | ||
| CH4674/86 | 1986-11-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP0270807A1 EP0270807A1 (en) | 1988-06-15 |
| EP0270807B1 true EP0270807B1 (en) | 1993-04-28 |
Family
ID=4280498
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP87115814A Expired - Lifetime EP0270807B1 (en) | 1986-11-21 | 1987-10-28 | Device for the transmission of electrical currents to rotating machine elements |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4889494A (en) |
| EP (1) | EP0270807B1 (en) |
| DE (1) | DE3785647D1 (en) |
| ES (1) | ES2040233T3 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE8910413U1 (en) * | 1989-08-31 | 1989-11-02 | Metzka Gmbh, 8501 Schwanstetten, De | |
| WO1995016526A1 (en) * | 1993-12-16 | 1995-06-22 | Servi-Tech, Inc. | Stabilizing of cam in automated beverage filling machinery |
| US6685357B1 (en) * | 2002-08-22 | 2004-02-03 | Newcera Technology Co., Ltd. | Transmission shaft set |
| US7001184B2 (en) * | 2002-12-20 | 2006-02-21 | Unit Industries | Slip ring with connector pins |
| US7344760B1 (en) * | 2003-09-12 | 2008-03-18 | The United States Of America As Represented By The Secretary Of The Navy | Wear-resistant electrically conductive body |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE408576C (en) * | 1923-10-28 | 1925-01-20 | Friedrich Muenz | Spinning spindle |
| US1832488A (en) * | 1928-01-12 | 1931-11-17 | George E Larrabee | Lining for bearings |
| US2545939A (en) * | 1947-04-01 | 1951-03-20 | Francis N Bard | Electrically conductive revolving joint |
| US2997979A (en) * | 1958-09-15 | 1961-08-29 | Tassara Luigi | Apparatus for applying metallic film to electrical components and the like |
| DE1970579U (en) * | 1964-12-04 | 1967-10-19 | Philips Nv | HIGH FREQUENCY POWER TRANSMISSION LINK. |
| US3408982A (en) * | 1966-08-25 | 1968-11-05 | Emil R. Capita | Vapor plating apparatus including rotatable substrate support |
| NL6805443A (en) * | 1968-04-18 | 1969-10-21 | ||
| US4336974A (en) * | 1978-11-13 | 1982-06-29 | Microwave Development Labs. Inc. | Coaxial rotary joint |
| DE2926294A1 (en) * | 1979-06-29 | 1981-01-08 | Bosch Gmbh Robert | Slip-ring assembly for AC motor vehicle generator - comprises two radial face rings arranged axially in line |
| DE3019118A1 (en) * | 1980-05-20 | 1981-11-26 | Robert Bosch Gmbh, 7000 Stuttgart | ROTOR SYSTEM FOR AN ELECTRICAL MACHINE |
| US4356073A (en) * | 1981-02-12 | 1982-10-26 | Shatterproof Glass Corporation | Magnetron cathode sputtering apparatus |
| US4525264A (en) * | 1981-12-07 | 1985-06-25 | Ford Motor Company | Cylindrical post magnetron sputtering system |
| US4468069A (en) * | 1982-05-26 | 1984-08-28 | At&T Technologies, Inc. | Contactor for impressing electrical potential from a shaft to a roller mounted thereon |
-
1987
- 1987-10-28 DE DE8787115814T patent/DE3785647D1/en not_active Expired - Fee Related
- 1987-10-28 ES ES198787115814T patent/ES2040233T3/en not_active Expired - Lifetime
- 1987-10-28 EP EP87115814A patent/EP0270807B1/en not_active Expired - Lifetime
- 1987-11-17 US US07/122,117 patent/US4889494A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE3785647D1 (en) | 1993-06-03 |
| EP0270807A1 (en) | 1988-06-15 |
| US4889494A (en) | 1989-12-26 |
| ES2040233T3 (en) | 1993-10-16 |
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