EP0235428A3 - Mounting preparation for optical membrane - Google Patents

Mounting preparation for optical membrane Download PDF

Info

Publication number
EP0235428A3
EP0235428A3 EP86305226A EP86305226A EP0235428A3 EP 0235428 A3 EP0235428 A3 EP 0235428A3 EP 86305226 A EP86305226 A EP 86305226A EP 86305226 A EP86305226 A EP 86305226A EP 0235428 A3 EP0235428 A3 EP 0235428A3
Authority
EP
European Patent Office
Prior art keywords
layer structure
membrane
optical membrane
mounting preparation
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP86305226A
Other versions
EP0235428A2 (en
EP0235428B1 (en
Inventor
Yung-Tsai Yen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to AT86305226T priority Critical patent/ATE89935T1/en
Publication of EP0235428A2 publication Critical patent/EP0235428A2/en
Publication of EP0235428A3 publication Critical patent/EP0235428A3/en
Application granted granted Critical
Publication of EP0235428B1 publication Critical patent/EP0235428B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Prostheses (AREA)
  • Optical Communication System (AREA)
  • Eyeglasses (AREA)
  • Magnetic Heads (AREA)

Abstract

A method of preparing a plural-layer optical membrane for adhesion mounting on a support frame, such as a ring. The method is employed with such a membrane whose mounting side is formed with a first layer structure and an underlying layer structure. The method involves the selective removal, in the pattern of the ring on which the membrane is intended to be mounted, of a substantially matching shape in the first-mentioned layer structure, thus to expose a portion of the higher-adhesion-affinity underlying layer structure.
EP86305226A 1986-03-05 1986-07-07 Mounting preparation for optical membrane Expired - Lifetime EP0235428B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT86305226T ATE89935T1 (en) 1986-03-05 1986-07-07 MOUNTING SYSTEM FOR OPTICAL MEMBRANES.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US83649086A 1986-03-05 1986-03-05
US836490 1986-03-05

Publications (3)

Publication Number Publication Date
EP0235428A2 EP0235428A2 (en) 1987-09-09
EP0235428A3 true EP0235428A3 (en) 1989-11-15
EP0235428B1 EP0235428B1 (en) 1993-05-26

Family

ID=25272062

Family Applications (1)

Application Number Title Priority Date Filing Date
EP86305226A Expired - Lifetime EP0235428B1 (en) 1986-03-05 1986-07-07 Mounting preparation for optical membrane

Country Status (5)

Country Link
EP (1) EP0235428B1 (en)
JP (1) JPH0695210B2 (en)
AT (1) ATE89935T1 (en)
CA (1) CA1273783A (en)
DE (1) DE3688504T2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3704238A1 (en) * 1987-02-11 1988-08-25 Siemens Ag IRONIC, MAGNETIC MATERIAL

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
No relevant documents have been disclosed. *

Also Published As

Publication number Publication date
JPH0695210B2 (en) 1994-11-24
CA1273783A (en) 1990-09-11
EP0235428A2 (en) 1987-09-09
DE3688504D1 (en) 1993-07-01
ATE89935T1 (en) 1993-06-15
DE3688504T2 (en) 1993-09-09
JPS62206551A (en) 1987-09-11
EP0235428B1 (en) 1993-05-26

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