EP0215699A1 - Scintillator input screen for an X-ray image intensifier, and method of manufacturing such a scintillator - Google Patents
Scintillator input screen for an X-ray image intensifier, and method of manufacturing such a scintillator Download PDFInfo
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- EP0215699A1 EP0215699A1 EP86401835A EP86401835A EP0215699A1 EP 0215699 A1 EP0215699 A1 EP 0215699A1 EP 86401835 A EP86401835 A EP 86401835A EP 86401835 A EP86401835 A EP 86401835A EP 0215699 A1 EP0215699 A1 EP 0215699A1
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- needles
- scintillator
- cesium iodide
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/12—Manufacture of electrodes or electrode systems of photo-emissive cathodes; of secondary-emission electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
- H01J29/10—Screens on or from which an image or pattern is formed, picked up, converted or stored
- H01J29/36—Photoelectric screens; Charge-storage screens
- H01J29/38—Photoelectric screens; Charge-storage screens not using charge storage, e.g. photo-emissive screen, extended cathode
- H01J29/385—Photocathodes comprising a layer which modified the wave length of impinging radiation
Definitions
- the present invention relates to an input screen scintillator for an X-ray image intensifier tube. It also relates to a method of manufacturing such a scintillator.
- Radiological image intensifier tubes are well known in the prior art. They make it possible to transform a radiological image into a visible image, generally to ensure medical observation.
- These tubes consist of an input screen, an electronic optical system and an observation screen.
- the input screen has a scintillator which converts the incident X photons into visible photons. These visible photons then strike a photocathode, generally constituted by an alkaline antimonide, which, thus excited, generates a flow of electrons.
- the photocathode is not deposited directly on the scintillator but on an electrically conductive sublayer which makes it possible to reconstitute the charges of the photocathode material.
- This sub-layer can for example consist of alumina, indium oxide or a mixture of these two bodies.
- the flow of electrons from the photocathode is then transmitted by the electronic optical system which focuses the electrons and directs them on an observation screen made up of a luminograph which then emits visible light.
- This light can then be processed, for example, by a television, cinema or photography system.
- the scintillator of the entry screen generally consists of cesium iodide deposited by evaporation under vacuum on a substrate. Evaporation can take place on a cold or hot substrate.
- the substrate generally consists of an aluminum cap with a spherical or hyperbolic profile. A thickness of cesium iodide is deposited which is generally between 150 and 500 microns.
- Cesium iodide is naturally deposited in the form of needles 5 to 10 micrometers in diameter. Its refractive index being 1.8, there is a certain optical fiber effect which minimizes the lateral scattering of the light generated within the material.
- FIG 1 there is shown schematically an aluminum substrate 1 carrying a few needles 2 of cesium iodide.
- the aluminum substrate receives a flow of X photons symbolized by vertical arrows.
- the normal paths which bear the reference 3. cause the production of a light signal at l 'end of cesium iodide needles, There is also laterally scattered light carried by cesium iodide needles. as indicated in the figure by reference 4.
- the resolution of the tube depends on the ability of the cesium iodide needles to properly channel the light. It depends on the thickness of the cesium iodide layer. An increase in thickness leads to a deterioration in resolution. But, moreover, the greater the thickness of cesium iodide, the more the X-rays are absorbed. A compromise must therefore be found between the absorption of X-rays and the resolution.
- This heat treatment takes place immediately after the evaporation of the cesium iodide under vacuum. It ensures the luminescence of the screen due to the doping of cesium iodide by sodium or thallium ions for example.
- This heat treatment generally consists in bringing the screen to the temperature of approximately 340 ° C., for approximately one hour, by placing it in an atmosphere of dry air or nitrogen.
- the present invention proposes to solve the problem posed by the heat treatment in the following manner.
- the cesium iodide needles of the scintillator are coated with a refractory material, transparent or reflective, and with an optical index close to or less than that of cesium iodide. Due to this coating, the needles are not coalesced during the heat treatment subsequent to the coating, which ensures the luminescence of the screen.
- the invention also relates to methods of manufacturing such a scintillator.
- FIG. 3 schematically represents a screen scintillator of an X-ray image intensifier tube according to the invention.
- a substrate 1 made of aluminum for example, carrying a few needles of cesium iodide.
- needles 2 are coated with a refractory material 5, transparent and with an optical index close to or less than that of cesium iodide.
- the needles are therefore coated with a material which is inserted into the interstices between the needles and which acts as a mechanical barrier by keeping the needles isolated from each other during the subsequent heat treatment, intended to ensure the luminescence of the screen.
- This material must be refractory, that is to say have a melting point as high as possible so as not to be affected by the heat treatment. It must be transparent or reflective so as not to absorb light. Finally, this material must have an optical index close to or lower than that of cesium iodide so as to maintain an effect of optical fibers.
- the coating material 5 may be an oxide of a metal or of a non-metal, a polymerizable resin of the silicone type, an organometallic compound, etc.
- curves 6 and 7 show, as a function of the spatial frequency, in pairs of lines per centimeter that the modulation transfer function (FTM), in percentage, is higher in the case of the scintillator according to the invention, curve 7, than in the case of a scintillator according to the prior art, curve 6.
- the invention therefore makes it possible to obtain a high resolution and an FTM high.
- C.V.D. chemical vapor deposition
- This method is commonly used in the field of semiconductors for depositing a thin film material on a flat substrate. According to the invention, this method is used to deposit a material in a thin layer on an essentially vertical substrate constituted by each needle of the scintillator. It should be emphasized that the difficulty in achieving the coating of the needles arises from the fact that the interstices between needles have a great length with respect to their diameter, their length being approximately a thousand times greater than their diameter.
- the coating material deposited by this process can be any oxide of a metal or of a non-metal which is refractory, transparent - or reflective, and with an optical index close to or less than that of cesium iodide.
- the coating material used can have one of the following formulas: Si 0, Si 0 2 , Si O x with 1 ⁇ x ⁇ 2, AI 2 O 3 , Sb 2 O 5 ...
- the activation of the CVD process can be carried out by thermal excitation: this is the high temperature CVD. It includes initial vacuuming, followed by atmospheric pressure. Reactive vapor deposition is carried out using a mixture of gases such as silane Si H 4 . oxygen, and nitrogen oxide N 2 O. The molecules of the mixture recombine to form silica Si 0 2 which is deposited on the needles of cesium iodide. It is also possible to deposit silicon nitride Si 3 N 4 by the same type of process.
- the high temperature CVD requires using a temperature above 300 "C.
- the activation of the CVD process can also be carried out by plasma excitation, around 100 "C, or by photonic excitation, around 100 ° C. Also.
- the coating layer can be silicon nitride If 3 N 4.
- Activation of the CVD process can also be achieved by the use of a lower pressure high temperature process (LPCVD technique).
- Another method for producing the screen according to the invention can be the coating by diffusion of a colloidal solution inside the interstices between needles.
- a colloidal solution of Si 0 2 , or of AI 2 0 3 , Sb 2 Os can be used. Sn 0 4 , for example.
- the diffusion coating is followed by a heat treatment which causes the deposition of the coating material, for example Si 0 2 in the case of a colloidal solution of Si 0 2 .
- This heat treatment can be carried out at the same time as the heat treatment intended to cause the luminescence of the cesium iodide needles.
- Another process for producing the screen according to the invention is the vacuum coating with a polymer resin of the silicone type or any polyimide material. Curing of the coating material occurs either at room temperature. either hot.
- a final method consists in carrying out the coating by diffusion of an organo-metallic compound in the interstices between the needles.
- organo-metallic compound An example of such a compound that may be mentioned is tetramethoxy-silane, tetra-ethoxy-silane or silicon tetra-acetate. This organometallic compound must undergo treatment at high temperature or hydrolysis in air.
Abstract
La présente invention concerne un scintillateur d'écran d'entrée de tube intensificateur d'images radiologiques dont, les aiguilles (2) en iodure de césium du scintillateur sont enrobées par un matériau (5) réfractaire, transparent ou réfléchissant et d'indice optique voisin ou inférieur à celui de l'iodure de césium. Divers procédés peuvent être utilisés pour l'enrobage, tels que le dépôt chimique en phase vapeur, activé par excitation thermique, excitation plasma, ou excitation photonique : ou tels que le dépôt par diffusion d'une solution colloïdale ; ou tels que la polymérisation d'une résine polymère. Après l'enrobage. on réalise le traitement thermique qui assure la luminescence de l'écran. The present invention relates to a scintillator for an input screen for a tube for intensifying radiological images, the cesium iodide needles (2) of the scintillator of which are coated with a refractory, transparent or reflecting material (5) close to or less than that of cesium iodide. Various methods can be used for coating, such as chemical vapor deposition, activated by thermal excitation, plasma excitation, or photonic excitation: or such as the diffusion deposit of a colloidal solution; or such as the polymerization of a polymer resin. After coating. the heat treatment is carried out which ensures the luminescence of the screen.
Description
La présente invention concerne un scintillateur d'écran d'entrée de tube intensificateur d'images radiologiques. Elle concerne également un procédé de fabrication d'un tel scintillateur.The present invention relates to an input screen scintillator for an X-ray image intensifier tube. It also relates to a method of manufacturing such a scintillator.
Les tubes intensificateurs d'images radiologiques sont bien connus de l'art antérieur. Ils permettent de transformer une image radiologique en image visible, généralement pour assurer l'observation médicale.Radiological image intensifier tubes are well known in the prior art. They make it possible to transform a radiological image into a visible image, generally to ensure medical observation.
Ces tubes sont constitués par un écran d'entrée, un système d'optique électronique et un écran d'observation.These tubes consist of an input screen, an electronic optical system and an observation screen.
L'écran d'entrée comporte un scintillateur qui convertit les photons X incidents en photons visibles. Ces photons visibles viennent ensuite frapper une photocathode, généralement constituée par un antimoniure alcalin, qui, ainsi excité, génère un flux d'électrons. La photocathode n'est pas déposée directement sur le scintillateur mais sur une sous-couche conductrice de l'électricité qui permet de reconstituer les charges du matériau de la photocathode. Cette sous-couche peut par exemple être constituée d'alumine, d'oxyde d'indium ou d'un mélange de ces deux corps.The input screen has a scintillator which converts the incident X photons into visible photons. These visible photons then strike a photocathode, generally constituted by an alkaline antimonide, which, thus excited, generates a flow of electrons. The photocathode is not deposited directly on the scintillator but on an electrically conductive sublayer which makes it possible to reconstitute the charges of the photocathode material. This sub-layer can for example consist of alumina, indium oxide or a mixture of these two bodies.
Le flux d'électrons issu de la photocathode est ensuite transmis par le système d'optique électronique qui focalise les électrons et les dirige sur un écran d'observation constitué d'un luminographe qui émet alors une lumière visible. Cette lumière peut ensuite être traitée, par exemple, par un système de télévision, de cinéma ou de photographie.The flow of electrons from the photocathode is then transmitted by the electronic optical system which focuses the electrons and directs them on an observation screen made up of a luminograph which then emits visible light. This light can then be processed, for example, by a television, cinema or photography system.
Le scintillateur de l'écran d'entrée est généralement constitué d'iodure de césium déposé par évaporation sous vide sur un substrat. L'évaporation peut avoir lieu sur un substrat froid ou chaud. Le substrat est généralement constitué par une calotte d'aluminium à profil sphérique ou hyperbolique. On dépose une épaisseur d'iodure de césium qui est généralement comprise entre 150 et 500 micro mètres.The scintillator of the entry screen generally consists of cesium iodide deposited by evaporation under vacuum on a substrate. Evaporation can take place on a cold or hot substrate. The substrate generally consists of an aluminum cap with a spherical or hyperbolic profile. A thickness of cesium iodide is deposited which is generally between 150 and 500 microns.
L'iodure de césium se dépose naturellement sous forme d'aiguilles de 5 à 10 micromètres de diamètre. Son indice de réfraction étant de 1,8, on bénéficie d'un certain effet de fibre optique qui minimise la diffusion latérale de la lumière générée au sein du matériau.Cesium iodide is naturally deposited in the form of
Sur la figure 1, on a représenté de façon schématique un substrat en aluminium 1 portant quelques aiguilles 2 en iodure de césium. Le substrat en aluminium reçoit un flux de photons X symbolisés par des flèches verticales. On a représenté en pointillés sur la figure des exemples de trajets suivis dans les aiguilles d'iodure de césium par le rayonnement visible correspondant aux photons X incidents Les trajets normaux, qui portent la référence 3. entraînent la production d'un signal lumineux à l'extrémité des aiguilles en iodure de césium, Il y a également diffusion latéralement de la lumière véhiculée par les aiguilles d'iodure de césium. comme cela est indiqué sur la figure par la référence 4.In Figure 1, there is shown schematically an
La résolution du tube dépend de la capacité des aiguilles d'iodure de césium à bien canaliser la lumière. Elle dépend de l'épaisseur de la couche d'iodure de césium. Une augmentation d'épaisseur entraîne une détérioration de la résolution. Mais, par ailleurs, plus l'épaisseur d'iodure de césium est importante, plus les rayons X sont absorbés. Il faut donc trouver un compromis entre l'absorption des rayons X et la résolution.The resolution of the tube depends on the ability of the cesium iodide needles to properly channel the light. It depends on the thickness of the cesium iodide layer. An increase in thickness leads to a deterioration in resolution. But, moreover, the greater the thickness of cesium iodide, the more the X-rays are absorbed. A compromise must therefore be found between the absorption of X-rays and the resolution.
Un autre facteur qui joue sur la résolution du tube est le traitement thermique que doit subir l'écran d'entrée lors de sa fabrication. Ce traitement a lieu immédiatement après l'évaporation sous vide de l'iodure de césium. Il assure la luminescence de l'écran du fait du dopage de l'iodure de césium par des ions de sodium ou de thallium par exemple. Ce traitement thermique consiste généralement à porter l'écran à la température d'environ 340°C, pendant une heure environ, en le plaçant dans une atmosphère d'air sec ou d'azote.Another factor that plays on the resolution of the tube is the heat treatment that the input screen must undergo during its manufacture. This treatment takes place immediately after the evaporation of the cesium iodide under vacuum. It ensures the luminescence of the screen due to the doping of cesium iodide by sodium or thallium ions for example. This heat treatment generally consists in bringing the screen to the temperature of approximately 340 ° C., for approximately one hour, by placing it in an atmosphere of dry air or nitrogen.
Le problème qui se pose est, qu'au cours de ce traitement thermique absolument obligatoire, les aiguilles du scintillateur subissent une certaine coalescence et s'agglomèrent entre elles, comme cela a été représenté schématiquement sur la figure 2. Cette coalescence entraîne une diffusion latérale de la lumière plus importante, voir les flèches en pointillés portant le repère 4, et la résolution se trouve détériorée.The problem which arises is, that during this absolutely compulsory heat treatment, the needles of the scintillator undergo a certain coalescence and agglomerate between them, as has been represented diagrammatically in FIG. 2. This coalescence causes a lateral diffusion more important light, see the dotted arrows marked 4, and the resolution is deteriorated.
Pour supprimer la coalescence qui se produit lors du traitement thermique, on a proposé, dans l'art antérieur, de réaliser le scintillateur de l'écran d'entrée en évaporant alternativement de l'iodure de césium pur et de l'iodure de césium dopé avec un matériau réfractaire. On espérait que des aiguilles ainsi constituées par des couches alternées d'iodure de césium pur et d'iodure de césium dopé avec un matériau réfractaire n'entreraient pas en contact lors du traitement thermique. Cette solution n'a pas donné les résultats souhaités.To eliminate the coalescence which occurs during heat treatment, it has been proposed, in the prior art, to produce the scintillator of the input screen by evaporating alternately pure cesium iodide and cesium iodide doped with refractory material. It was hoped that needles thus formed by alternating layers of pure cesium iodide and cesium iodide doped with a refractory material would not come into contact during the heat treatment. This solution did not give the desired results.
La présente invention propose de résoudre le problème posé par le traitement thermique de la façon suivante. Selon l'invention, les aiguilles d'iodure de césium du scintillateur sont enrobées par un matériau réfractaire, transparent ou réféchis- sant, et d'indice optique voisin ou inférieur à celui de l'iodure de césium. Du fait de cet enrobage, on n'observe pas de coalescence des aiguilles lors du traitement thermique ultérieur à l'enrobage, qui assure la luminescence de l'écran.The present invention proposes to solve the problem posed by the heat treatment in the following manner. According to the invention, the cesium iodide needles of the scintillator are coated with a refractory material, transparent or reflective, and with an optical index close to or less than that of cesium iodide. Due to this coating, the needles are not coalesced during the heat treatment subsequent to the coating, which ensures the luminescence of the screen.
L'invention a aussi pour objet des procédés de fabrication d'un tel scintillateur.The invention also relates to methods of manufacturing such a scintillator.
La description suivante est illustrée par :
- - les figures 1 et 2, deux schémas montrant un scintillateur d'écran d'entrée de tube intensificateur d'images radiologiques, selon l'art antérieur ;
- - la figure 3, un schéma montrant un scintillateur d'écran d'entrée de tube intensificateur d'images radiologiques, selon l'invention
- - la figure 4, deux courbes montrant l'amélioration de la fonction de transfert de modulation (F.T.M.), apportée par l'invention.
- - Figures 1 and 2, two diagrams showing an input screen scintillator of radiological image intensifier tube, according to the prior art;
- - Figure 3, a diagram showing a scintillator of input screen of tube intensifier of radiological images, according to the invention
- - Figure 4, two curves showing the improvement of the modulation transfer function (FTM), provided by the invention.
Les figures 1 et 2 ont été décrites dans l'introduction et la description.Figures 1 and 2 have been described in the introduction and description.
La figure 3 représente de façon schématique un scintillateur d'écran d'entrée de tube intensificateur d'images radiologiques selon l'invention. Comme sur les figures 1 et 2, on a représenté un substrat 1, en aluminium par exemple, portant quelques aiguilles en iodure de césium. Selon l'invention, des aiguilles 2 sont enrobées par un matériau réfractaire 5, transparent et d'indice optique voisin ou inférieur à celui de l'iodure de césium.FIG. 3 schematically represents a screen scintillator of an X-ray image intensifier tube according to the invention. As in Figures 1 and 2, there is shown a
Les aiguilles sont donc enrobées par un matériau qui vient s'insérer dans les interstices entre les aiguilles et qui agit comme une barrière mécanique en conservant les aiguilles isolées les unes des autres lors du traitement thermique ultérieur, destiné à assurer la luminescence de l'écran. Ce matériau doit être réfractaire, c'est-à-dire avoir un point de fusion aussi élevé que possible pour ne pas être affecté par le traitement thermique. Il doit être transparent ou réfléchissant pour ne pas absorber la lumière. Enfin, ce matériau doit avoir un indice optique voisin ou inférieur à celui de l'iodure de césium de façon à conserver un effet de fibres optiques.The needles are therefore coated with a material which is inserted into the interstices between the needles and which acts as a mechanical barrier by keeping the needles isolated from each other during the subsequent heat treatment, intended to ensure the luminescence of the screen. . This material must be refractory, that is to say have a melting point as high as possible so as not to be affected by the heat treatment. It must be transparent or reflective so as not to absorb light. Finally, this material must have an optical index close to or lower than that of cesium iodide so as to maintain an effect of optical fibers.
Le procédé utilisé pour réaliser cet enrobage détermine la nature du matériau utilisé comme on va le voir dans la suite de la description. Ainsi, le matériau d'enrobage 5 peut être un oxyde d'un métal ou d'un non-métal, une résine polymérisable du type silicone, un composé organo-métallique, etc...The process used to carry out this coating determines the nature of the material used as will be seen in the following description. Thus, the
Sur la figure 4, les courbes 6 et 7 montrent, en fonction de la fréquence spatiale, en paires de lignes par centimètre que la fonction de transfert de modulation (F.T.M.), en pourcentage, est plus élevée dans le cas du scintillateur selon l'invention, courbe 7, que dans le cas d'un scintillateur selon l'art antérieur, courbe 6. L'invention permet donc d'obtenir une haute résolution et une F.T.M. élevée.In FIG. 4,
Divers procédés peuvent être utilisés pour réaliser l'écran selon l'invention. L'un de ces procédés est un dépôt chimique en phase vapeur, couramment appelé C.V.D. pour "chemical vapour deposi- tion". Ce procédé est couramment utilisé dans le domaine des semi-conducteurs pour déposer un matériau en couche mince sur un substrat plan. Selon l'invention, on utilise ce procédé pour déposer un matériau en couche mince sur un substrat essentiellement vertical constitué par chaque aiguille du scintillateur. Il faut souligner que la difficulté de réalisation de l'enrobage des aiguilles provient du fait que les interstices entre aiguilles ont une grande longueur par rapport à leur diamètre, leur longueur étant approximativement mille fois plus grande que leur diamètre.Various methods can be used to make the screen according to the invention. One such process is chemical vapor deposition, commonly known as C.V.D. for "chemical vapor deposition". This method is commonly used in the field of semiconductors for depositing a thin film material on a flat substrate. According to the invention, this method is used to deposit a material in a thin layer on an essentially vertical substrate constituted by each needle of the scintillator. It should be emphasized that the difficulty in achieving the coating of the needles arises from the fact that the interstices between needles have a great length with respect to their diameter, their length being approximately a thousand times greater than their diameter.
Le matériau d'enrobage déposé par ce procédé peut être tout oxyde d'un métal ou d'un non-métal qui soit réfractaire, transparent - ou réfléchissant, et d'indice optique voisin ou inférieur à celui de l'iodure de césium. Le matériau d'enrobage utilisé peut avoir l'une des formules suivantes : Si 0, Si 02 , Si Ox avec 1 < x <2,AI2O3, Sb2O5...The coating material deposited by this process can be any oxide of a metal or of a non-metal which is refractory, transparent - or reflective, and with an optical index close to or less than that of cesium iodide. The coating material used can have one of the following formulas:
Diverses variantes du procédé C.V.D. peuvent être utilisées. Selon ces variantes, l'activation du procédé C.V.D. est réalisée de différentes façons.Various variants of the C.V.D. can be used. According to these variants, the activation of the C.V.D. is done in different ways.
Ainsi, l'activation du procédé C.V.D. peut être réalisée par excitation thermique : c'est le C.V.D. haute température. Il comporte une mise sous vide initiale, suivie par une mise à la pression atmosphérique. On réalise un dépôt réactif en phase vapeur en utilisant un mélange de gaz tels que du silane Si H4 . de l'oxygène, et de l'oxyde d'azote N2 O. Les molécules du mélange se recombinent pour former de la silice Si 02 qui se dépose sur les aiguilles d'iodure de césium. Il est également possible de déposer du nitrure de silicium Si3 N4 par le même type de procédé. Le C.V.D. haute température impose d'utiliser une température supérieure à 300" C.Thus, the activation of the CVD process can be carried out by thermal excitation: this is the high temperature CVD. It includes initial vacuuming, followed by atmospheric pressure. Reactive vapor deposition is carried out using a mixture of gases such as silane Si H 4 . oxygen, and nitrogen oxide N 2 O. The molecules of the mixture recombine to form
L'activation du procédé C.V.D. peut aussi être réalisée par excitation plasma, vers 100"C, ou par excitation photonique, vers 100° C aussi. Dans le cas de l'excitation photonique, la couche d'enrobage peut être du nitrure de silicium Si3 N4 . L'activation du procédé C.V.D. peut aussi être réalisée par l'utilisation d'un procédé haute température plus basse pression (Technique LPCVD).The activation of the CVD process can also be carried out by plasma excitation, around 100 "C, or by photonic excitation, around 100 ° C. Also. In the case of photonic excitation, the coating layer can be silicon nitride If 3 N 4. Activation of the CVD process can also be achieved by the use of a lower pressure high temperature process (LPCVD technique).
Un autre procédé pour réaliser l'écran selon l'invention peut être l'enrobage par diffusion d'une solution colloïdale à l'intérieur des interstices entre aiguilles. On peut utiliser une solution colloïdale de Si 02 , ou d'AI2 03 , Sb2 Os . Sn 04 , par exemple .Another method for producing the screen according to the invention can be the coating by diffusion of a colloidal solution inside the interstices between needles. A colloidal solution of
L'enrobage par diffusion est suivi d'un traitement thermique qui provoque le dépôt du matériau d'enrobage, par exemple Si 02 dans le cas d'une solution colloïdale de Si 02 . Ce traitement thermique peut être réalisé en même temps que le traitement thermique destiné à provoquer la luminescence des aiguilles d'iodure de césium.The diffusion coating is followed by a heat treatment which causes the deposition of the coating material, for
Un autre procédé pour réaliser l'écran selon l'invention est l'enrobage sous vide par une résine polymère du type silicone ou tout matériau polyimide. Le durcissement du matériau d'enrobage se produit soit à la température ambiante. soit à chaud.Another process for producing the screen according to the invention is the vacuum coating with a polymer resin of the silicone type or any polyimide material. Curing of the coating material occurs either at room temperature. either hot.
Un dernier procédé consiste à réaliser l'enrobage par diffusion d'un composé organo-métallique dans les interstices entre les aiguilles. On peut citer comme exemple d'un tel composé le tétraméthoxy- silane, le tétra-éthoxy-silane ou le silicium tétra-acétate. Ce composé organo-métallique doit subir un traitement à haute température ou une hydrolyse à l'air.A final method consists in carrying out the coating by diffusion of an organo-metallic compound in the interstices between the needles. An example of such a compound that may be mentioned is tetramethoxy-silane, tetra-ethoxy-silane or silicon tetra-acetate. This organometallic compound must undergo treatment at high temperature or hydrolysis in air.
Claims (12)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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FR8512688 | 1985-08-23 | ||
FR8512688A FR2586508B1 (en) | 1985-08-23 | 1985-08-23 | RADIOLOGICAL IMAGE ENHANCER TUBE ENTRY SCREEN SCINTILLER AND METHOD FOR MANUFACTURING SUCH A SCINTILLATOR |
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Publication Number | Publication Date |
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EP0215699A1 true EP0215699A1 (en) | 1987-03-25 |
EP0215699B1 EP0215699B1 (en) | 1989-06-21 |
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Application Number | Title | Priority Date | Filing Date |
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EP86401835A Expired EP0215699B1 (en) | 1985-08-23 | 1986-08-19 | Scintillator input screen for an x-ray image intensifier, and method of manufacturing such a scintillator |
Country Status (5)
Country | Link |
---|---|
US (1) | US4803366A (en) |
EP (1) | EP0215699B1 (en) |
JP (1) | JP2571771B2 (en) |
DE (1) | DE3664079D1 (en) |
FR (1) | FR2586508B1 (en) |
Cited By (5)
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FR2625838A1 (en) * | 1988-01-13 | 1989-07-13 | Thomson Csf | INTENSIFIER RADIOLOGICAL IMAGE INTENSIFIER TUBE ENTRY SCINTILLATOR AND METHOD FOR MANUFACTURING SUCH A SCINTILLATOR |
EP0352152A1 (en) * | 1988-07-22 | 1990-01-24 | Thomson-Csf | Method of manufacturing a scintillator, and scintillator so obtained |
EP0372395A2 (en) * | 1988-12-02 | 1990-06-13 | Kabushiki Kaisha Toshiba | X-ray image intensifier and method of manufacturing the same |
EP0413482A2 (en) * | 1989-08-18 | 1991-02-20 | Galileo Electro-Optics Corp. | Thin-film continuous dynodes |
DE10116803A1 (en) * | 2001-04-04 | 2002-10-17 | Siemens Ag | Radiation converter and method of manufacturing the same |
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US4069355A (en) * | 1975-04-28 | 1978-01-17 | General Electric Company | Process of making structured x-ray phosphor screen |
FR2360989A1 (en) * | 1976-08-03 | 1978-03-03 | Thomson Csf | RADIOLOGICAL IMAGE INTENSIFIER, AND ITS MANUFACTURING PROCESS |
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EP0042149A1 (en) * | 1980-06-16 | 1981-12-23 | Kabushiki Kaisha Toshiba | Radiation excited phosphor screen and method for manufacturing the same |
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JPS52109858A (en) * | 1976-03-11 | 1977-09-14 | Toshiba Corp | X-ray image intensifier |
JPS5346631A (en) * | 1976-10-07 | 1978-04-26 | Matsushita Electric Ind Co Ltd | Manufacturing method of flyback transformer |
US4100455A (en) * | 1976-10-14 | 1978-07-11 | Wagner Electric Corporation | Vacuum fluorescent display device with circular polarizer |
US4101781A (en) * | 1977-06-27 | 1978-07-18 | Hewlett-Packard Company | Stable fiber optic scintillative x-ray screen and method of production |
JPS5440071A (en) * | 1977-09-05 | 1979-03-28 | Sharp Corp | Electronic timer device |
JPS5632649A (en) * | 1979-08-23 | 1981-04-02 | Shimadzu Corp | Input screen of image tube |
JPS5719859U (en) * | 1980-07-08 | 1982-02-02 | ||
JPS58131644A (en) * | 1981-12-26 | 1983-08-05 | Toshiba Corp | Input screen of radiation image multiplier tube and its manufacture |
-
1985
- 1985-08-23 FR FR8512688A patent/FR2586508B1/en not_active Expired
-
1986
- 1986-08-19 US US06/897,938 patent/US4803366A/en not_active Expired - Lifetime
- 1986-08-19 DE DE8686401835T patent/DE3664079D1/en not_active Expired
- 1986-08-19 EP EP86401835A patent/EP0215699B1/en not_active Expired
- 1986-08-21 JP JP61196460A patent/JP2571771B2/en not_active Expired - Lifetime
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US3838273A (en) * | 1972-05-30 | 1974-09-24 | Gen Electric | X-ray image intensifier input |
US4069355A (en) * | 1975-04-28 | 1978-01-17 | General Electric Company | Process of making structured x-ray phosphor screen |
US4100445A (en) * | 1976-03-15 | 1978-07-11 | The Machlett Laboratories, Inc. | Image output screen comprising juxtaposed doped alkali-halide crystalline rods |
FR2360989A1 (en) * | 1976-08-03 | 1978-03-03 | Thomson Csf | RADIOLOGICAL IMAGE INTENSIFIER, AND ITS MANUFACTURING PROCESS |
EP0042149A1 (en) * | 1980-06-16 | 1981-12-23 | Kabushiki Kaisha Toshiba | Radiation excited phosphor screen and method for manufacturing the same |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4980561A (en) * | 1988-01-13 | 1990-12-25 | Thomson-Csf | Input screen scintillator for an X-ray image intensifier tube and manufacturing process of this scintillator |
EP0325500A1 (en) * | 1988-01-13 | 1989-07-26 | Thomson-Csf | Input screen scintillator for a radiological image intensifier tube and its manufacturing method |
US5298294A (en) * | 1988-01-13 | 1994-03-29 | Thomson-Csf | Input screen scintillator for an X-ray image intensifier tube and manufacturing process of this scintillator |
FR2625838A1 (en) * | 1988-01-13 | 1989-07-13 | Thomson Csf | INTENSIFIER RADIOLOGICAL IMAGE INTENSIFIER TUBE ENTRY SCINTILLATOR AND METHOD FOR MANUFACTURING SUCH A SCINTILLATOR |
FR2634562A1 (en) * | 1988-07-22 | 1990-01-26 | Thomson Csf | METHOD FOR MANUFACTURING A SCINTILLATOR AND SCINTILLATOR THUS OBTAINED |
US4985633A (en) * | 1988-07-22 | 1991-01-15 | Thomson-Csf | Scintillator with alveolate structured substrate |
EP0352152A1 (en) * | 1988-07-22 | 1990-01-24 | Thomson-Csf | Method of manufacturing a scintillator, and scintillator so obtained |
EP0372395A3 (en) * | 1988-12-02 | 1990-10-31 | Kabushiki Kaisha Toshiba | X-ray image intensifier and method of manufacturing the same |
EP0372395A2 (en) * | 1988-12-02 | 1990-06-13 | Kabushiki Kaisha Toshiba | X-ray image intensifier and method of manufacturing the same |
US5083017A (en) * | 1988-12-02 | 1992-01-21 | Kabushiki Kaisha Toshiba | X-ray image intensifier with unitary plate input phosphor screen |
EP0413482A2 (en) * | 1989-08-18 | 1991-02-20 | Galileo Electro-Optics Corp. | Thin-film continuous dynodes |
EP0413482A3 (en) * | 1989-08-18 | 1991-07-10 | Galileo Electro-Optics Corp. | Thin-film continuous dynodes |
DE10116803A1 (en) * | 2001-04-04 | 2002-10-17 | Siemens Ag | Radiation converter and method of manufacturing the same |
DE10116803C2 (en) * | 2001-04-04 | 2003-10-02 | Siemens Ag | Radiation converter and method of making the same |
Also Published As
Publication number | Publication date |
---|---|
US4803366A (en) | 1989-02-07 |
JPS6273538A (en) | 1987-04-04 |
EP0215699B1 (en) | 1989-06-21 |
FR2586508A1 (en) | 1987-02-27 |
DE3664079D1 (en) | 1989-07-27 |
FR2586508B1 (en) | 1988-08-26 |
JP2571771B2 (en) | 1997-01-16 |
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