EP0174156B1 - Träger für das zu behandelnde Gut in einem Glimmentladungsofen - Google Patents

Träger für das zu behandelnde Gut in einem Glimmentladungsofen Download PDF

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Publication number
EP0174156B1
EP0174156B1 EP85306099A EP85306099A EP0174156B1 EP 0174156 B1 EP0174156 B1 EP 0174156B1 EP 85306099 A EP85306099 A EP 85306099A EP 85306099 A EP85306099 A EP 85306099A EP 0174156 B1 EP0174156 B1 EP 0174156B1
Authority
EP
European Patent Office
Prior art keywords
support
members
furnace
tubular portion
charge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP85306099A
Other languages
English (en)
French (fr)
Other versions
EP0174156A1 (de
Inventor
Ray Winstanley
Trevor Farrell
Malcolm Booth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electricity Council
Original Assignee
Electricity Council
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electricity Council filed Critical Electricity Council
Priority to AT85306099T priority Critical patent/ATE57812T1/de
Publication of EP0174156A1 publication Critical patent/EP0174156A1/de
Application granted granted Critical
Publication of EP0174156B1 publication Critical patent/EP0174156B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/16—Heating by glow discharge

Definitions

  • This invention relates to a charge-load support for a glow discharge furnace.
  • thermochemical treatment apparatus for example in apparatus for plasma carburising a charge-load or workpieces in a low pressure furnace, the furnace wall usually forms the anode of the electrical supply while the charge-load forms the cathode of the supply.
  • the charge load must therefore be supported within the furnace, electrically isolated from the furnace wall, and having an electrical connection thereto which passes through the furnace wall.
  • a difficulty which arises in such a furnace is that during plasma carburising electrically conductive desposits such as soot or sputter products can build-up within the furnace and provide short- circuit tracking paths for the electrical supply, thereby disturbing the glow discharge or at worst rendering the furnace inoperative.
  • Any build-up of such conductive deposits can affect both the leadthrough electrical supply connection to the charge-load support, and the charge-load support itself.
  • a charge-load support for a glow discharge furnace comprising first and second tubular members of electrically insulating or semiconducting material, the first member being arranged within the second member and being connected thereto at one end of the first and second members such as to provide a space between the first and second members throughout the unconnected length of the second member, the first member extending beyond the second member at the other end of the first and second members, and a cap member closing said other end of the first member and having a rim extending about said other end of the second member and spaced therefrom to provide a re-entrant entry to said space.
  • the cap member serves as a platform for supporting a charge-load, the weight of the load being supported by the first member of the support, which in use would be mounted on a wall of a furnace.
  • the second member of the support serves to protect the outer surface of the first member from the build-up of conductive deposits thereon during use of the support, while the cap member serves to inhibit the entry of conductive deposits into the space between the first and second members, the re-entrant entry to this space assisting in this.
  • the members of the support also serve in use to define a relatively long convoluted path from a charge-load supported by the cap member to a furnace wall on which the first and second members are mounted, this serving to reduce the risk of tracking between the charge-load and the furnace wall.
  • a charge-load support and an assembly including the support, according to this invention, will now be described by way of example with reference to the diagrammatic drawing which is a longitudinal sectional view through the support and assembly.
  • the support and assembly to be described serves to support a charge-load 100 comprising a plurality of workpieces 101 in a conductive container 102, for plasma carburising in a low pressure glow discharge furnace having a wall 200 with a hole 201 therein in which the support assembly is mounted.
  • the support comprises first and second tubular members 1 and 2 made of a refractory material, the first member 1 being arranged withing the second member 2 and being connected thereto at one end (lower end in the drawing) by a refractory cement material 3 such as to provide an annular space 4 between the first and second members 1 and 2 throughout the unconnected length of the second member 2.
  • the first member 1 extends beyond the second member 2 at the other end (upper end in the drawing) of the first and second members 1 and 2, and has mounted thereon a circular cap member 5 of refractory material, which closes the other end of the first member 1 and which has a depending rim 6 which extends about the other end of the second member, spaced therefrom, to provide a re-entrant entry 7 to the space 4 between the first and second members 1 and 2.
  • a third tubular member 8 Arranged within the first member 1 is a third tubular member 8 made of refractory material, the third member 8 being connected to the first member 1 at the one end thereof by refractory cement material 9 such as to provide an annular space 10 between the first and third members 1 and 8 throughout the unconnected length of the third member 8, the other unconnected end of the third member 8 being spaced from the cap member 5.
  • the first member 1 is formed with a port 12 providing communication between the spaces 4 and 10.
  • the support above described is part of an assembly which also includes a metal mounting member 20 having a tubular portion 21 and having a passage 22 extending therethrough.
  • the mounting member 20 has a flange 23 intermediate its ends by which flange 23 the mounting member 20 is secured to the furnace wall 200, as by welding or by means of bolts, in air-tight manner, with the tubular portion 21 extending through the hole 201 in the furnace wall 200.
  • the support is mounted on the end of the tubular portion 21 within the furnace by means of a compliant member 24 capable of absorbing mechanical shocks acting axially of the support, with the passage 22 in the tubular portion 21 axially aligned with and in communication with the inside of the support.
  • the tubular portion 21 of the mounting member 20 is formed with a port 25 providing communication through the wall of the tubular portion 21 at a position outside the furnace.
  • the free end of the mounting member 20 outside the furnace is formed with a flange 26 to which is connected in air-tight manner as by welding or by means of bolts, a leadthrough arrangement 27 by which a charge-load 100 supported on the end cap 5 of the support is connected to one terminal of an electrical supply,
  • the leadthrough arrangement is substantially as described in our European Patent Publication No. 0152307 mentioned above, and will not therefore be described in detail herein.
  • the leadthrough arrangement 27 provides an electrical conductor in the form of a refractory sheathed conducting rod 28 which passes through the passage 22 in the mounting member 20, and with clearance through the holes in the thermal shield members 11 carried by the third member 8 of the support, and finally through the cap member 5 of the support for connection to the container 102 holding the workpieces 101 of the charge-load 100.
  • the leadthrough arrangement 27 incorporates a compliant, bellows-like- member 29 which serves to allow for expansion and contraction in the arrangement during use.
  • the inside of the support and the passage 22 in the mounting member 20 are evacuated through the port 12 when the furnace is evacuated, the port 25 being closed in airtight manner.
  • the furnace wall 200 is connected to the anode of an electrical supply and the conductor 28 of the leadthrough arrangement 27 is connected to the cathode of the supply, and a glow discharge established between the furnace wall 200 and the workpieces 101 supported in the container 102 on the cap member 5 of the support and electrically connected to the conductor 28.
  • the temperature at the cap member 5 can be of the order of 1000°C, and the thermal shield members 11 in the support serve to reduce the heat flow within the support.
  • a reactive or purge gas can be introduced into the assembly through the port 25, such gas passing through the passage 22 in the mounting member 20, and through the spaces 10 and 4 between the first and third members 1 and 8, and first and second members 1 and 2 of the support, passing by way of the port 12, thereby to impede the ingress of deposits into the support, and if reactive reacting with any such deposits to achieve their removal as a gas. For example, if oxygen is used this will react at the furnace temperature with carbon soot deposits to form carbon dioxide.
  • the assembly described above includes an electrical leadthrough arrangement 27 this is not essential if the necessary electrical supply to the furnace is otherwise provided, in which case the mounting member 20 can simply be sealed by a plate secured to the flange 26 thereof. Otherwise the mounting member 20 can be used for the passage of leads of, for example, a thermocouple or a transducer located on the support, into the furnace, by the use of a suitable plate secured to the flange 26 of the mounting member 20.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Furnace Details (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
  • Fats And Perfumes (AREA)
  • Discharge Heating (AREA)
  • Catalysts (AREA)
  • Processing Of Solid Wastes (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Claims (8)

1. Träger für das zu behandelnde Gut in einem Glimmentladungsofen umfassend ein erstes und ein zweites röhrenförmiges Glied (1, 2) aus elektrisch isolierendem oder halbleitendem Material, wobei das erste Glied (1) innerhalb des zweiten Glieds (2) angeordnet und mit diesem an einem Ende (3) des ersten und zweiten Glieds (1, 2) verbunden ist, derart daß zwischen dem ersten und zweiten Glied (1, 2) über die gesamte unverbundene Länge des zweiten Glieds (2) ein Raum (4) vorgesehen ist, und wobei sich das erste Glied (1) am anderen Ende des ersten und zweiten Glieds (1, 2) über das zweite Glied (2) hinaus erstreckt, und ein das andere Ende des ersten Glieds (1) schließendes Kappen-Glied (5), das einen Rand (6) ausweist, der sich um das andere Ende des zweiten Glieds (2) erstreckt und davon beabstandet ist, um eine Wiedereintrittsöffnung (7) zu dem Raum (4) vorzusehen.
2. Träger nach Anspruch 1 ein drittes röhrenförmiges Glied (8) aus elektrisch isolierendem oder halbleitendem Material einschließend, das innerhalb des ersten Glieds (1) angeordnet und mit diesem an dem einen Ende (3) des ersten Glieds (1) verbunden ist, so daß über die gesamte unverbundene Länge des dritten Glieds (8) ein Raum (10) zwischen dem ersten und dritten Glied (1, 8) vorgesehen ist, wobei das andere unverbundene Ende des dritten Glieds (8) vom Kappen-Glied (5) beabstandet ist.
3. Träger nach Anspruch 2, in welchem das dritte Glied (8) einen oder mehrere Wärmeschild-Glieder (11) trägt, die sich in das dritte Glied (8) erstrecken, es aber nicht schließen.
4. Träger nach irgendeinem der vorgehenden Ansprüche, in welchem das erste Glied (1) mit einer Öffnung (12) ausgebildet ist, die eine Verbindung zwischen dem Raum (4) zwischen dem ersten und zweiten Glied (1, 2) und dem Innenraum des ersten Glieds (1) vorsieht.
5. Trägeranordnung für das zu behandelnde Gut in einem Glimmentladungsofen umfassend einen Träger nach irgendeinem der vorgehenden Ansprüche und ein Halterungsglied (20), das zur Befestigung an einer Wand (200) eines Ofens über einem Loch (201) in der Wand ausgebildet ist, mit einem röhrenförmigen Teilstück (21) des Halterungsglieds (20), das einen sich durch das Loch (201) erstreckenden Durchgang bildet, wobei der Träger (20) auf dem Ende des röhrenförmigen Teilstücks angebracht ist, welches sich im Gebrauch innerhalb des Ofens befindet, und wobei der von dem röhrenförmigen Teilstück (21) gebildete Durchgang mit dem Innenraum des ersten Glieds (1) des Trägers in Verbindung steht.
6. Aufbau nach Anspruch 5, in welchem der Träger auf dem Halterungsglied (20) mittels eines nachgiebigen, zur Absorption mechanischer, axial auf den Träger wirkender Stöße ausgelegten Glieds (24) montiert ist.
7. Aufbau nach den Ansprüchen 6 oder 7 eine Durchführungsanordnung (27) einschließend, welche auf dem sich im Gebrauch außerhalb des Ofens befindenden Ende des röhrenförmigen Teilstücks (21) montiert ist, wobei die Durchführungsanordnung (27) einen isolierten elektrischen Leiter (28) vorsieht, der sich vom freien Ende der Anordnung (27) durch den Durchgang in das röhrenförmige Teilstück (21) des Halterungsglieds (20) und durch das erste Glied (1) des Trägers erstreckt und der sich zur Verbindung im Gebrauch mit dem von dem Kappen-Glied (5) des Trägers getragenen, zu behandelnden Gut durch das Kappen-Glied (5) des Trägers zieht.
8. Aufbau nach irgendeinem der Ansprüche 5 bis 7, in welchem das röhrenförmige Teilstück (21) des Halterungsglieds (20) mit einer Öffnung (25) ausgebildet ist, die eine Verbindung durch die Wand des röhrenförmigen Teilstücks (21) an einer im Gebrauch außerhalb des Ofens gelegenen Stelle bildet.
EP85306099A 1984-08-29 1985-08-28 Träger für das zu behandelnde Gut in einem Glimmentladungsofen Expired - Lifetime EP0174156B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AT85306099T ATE57812T1 (de) 1984-08-29 1985-08-28 Traeger fuer das zu behandelnde gut in einem glimmentladungsofen.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB08421789A GB2163897B (en) 1984-08-29 1984-08-29 Charge-load support for a glow discharge furnace
GB8421789 1984-08-29

Publications (2)

Publication Number Publication Date
EP0174156A1 EP0174156A1 (de) 1986-03-12
EP0174156B1 true EP0174156B1 (de) 1990-10-24

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP85306099A Expired - Lifetime EP0174156B1 (de) 1984-08-29 1985-08-28 Träger für das zu behandelnde Gut in einem Glimmentladungsofen

Country Status (5)

Country Link
US (1) US4663763A (de)
EP (1) EP0174156B1 (de)
AT (1) ATE57812T1 (de)
DE (1) DE3580223D1 (de)
GB (1) GB2163897B (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020096097A (ko) * 2001-06-16 2002-12-31 주식회사 실트론 실리콘 잉곳 성장 장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2266735A (en) * 1939-03-11 1941-12-23 Berghaus Glow discharge oven
US3407281A (en) * 1967-09-20 1968-10-22 Cabot Corp Plasma producing apparatus
GB2154379A (en) * 1984-02-15 1985-09-04 Electricity Council Leadthrough arrangement

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
SOVIET INVENTIONS ILLUSTRATED section R,week C13,07.05.80. Derwent Publications Ltd.,London,R 41. *
SOVIET INVENTIONS ILLUSTRATED,section EL week 38/34,05.10.83. Derwent Publications Ltd.,London X 12 *
SOVIET INVENTIONS ILLUSTRATED,section EL,week C40,12.11.80. Derwent Publications Ltd,London X12 *
SOVIET INVENTIONS ILLUSTRATED,Section R,week B32, 21.09.79. Derwent Publications Ltd.,London R 59 *

Also Published As

Publication number Publication date
ATE57812T1 (de) 1990-11-15
US4663763A (en) 1987-05-05
GB2163897B (en) 1988-03-02
GB8421789D0 (en) 1984-10-03
GB2163897A (en) 1986-03-05
EP0174156A1 (de) 1986-03-12
DE3580223D1 (de) 1990-11-29

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