EP0114496A3 - Liquid metal ion source - Google Patents

Liquid metal ion source Download PDF

Info

Publication number
EP0114496A3
EP0114496A3 EP83307759A EP83307759A EP0114496A3 EP 0114496 A3 EP0114496 A3 EP 0114496A3 EP 83307759 A EP83307759 A EP 83307759A EP 83307759 A EP83307759 A EP 83307759A EP 0114496 A3 EP0114496 A3 EP 0114496A3
Authority
EP
European Patent Office
Prior art keywords
anode
ion source
carrier strip
liquid metal
metal ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP83307759A
Other languages
German (de)
French (fr)
Other versions
EP0114496A2 (en
Inventor
Tohru Ishitani
Hifumi Tamura
Kaoru Umemura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of EP0114496A2 publication Critical patent/EP0114496A2/en
Publication of EP0114496A3 publication Critical patent/EP0114496A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Abstract

A liquid metal ion source has a carrier strip 3 which melts and holds a substance 5 being ionized, a needle anode 1 located so that its pointed tip projects the ions of the molten substance supplied by the carrier strip, and a draw-out electrode 7 to apply a strong electric field between itself and the anode, thereby drawing out the ions from the pointed tip of the anode. The ion source has a thermal stress-absorbing element 10 installed between the needle anode and its support 2, or a plurality of such members between the carrier strip and its supports, to take up the thermal stresses that would result from the difference in thermal expansion coefficients between the needle anode and the carrier strip when both are secured to their supports, and which would damage the connected components.
EP83307759A 1982-12-27 1983-12-20 Liquid metal ion source Withdrawn EP0114496A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP23053982A JPS59119660A (en) 1982-12-27 1982-12-27 Liquid metal ion source
JP230539/82 1982-12-27

Publications (2)

Publication Number Publication Date
EP0114496A2 EP0114496A2 (en) 1984-08-01
EP0114496A3 true EP0114496A3 (en) 1985-05-15

Family

ID=16909333

Family Applications (1)

Application Number Title Priority Date Filing Date
EP83307759A Withdrawn EP0114496A3 (en) 1982-12-27 1983-12-20 Liquid metal ion source

Country Status (2)

Country Link
EP (1) EP0114496A3 (en)
JP (1) JPS59119660A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4617203A (en) * 1985-04-08 1986-10-14 Hughes Aircraft Company Preparation of liquid metal source structures for use in ion beam evaporation of boron-containing alloys
EP0317620A1 (en) * 1987-05-22 1989-05-31 Oregon Graduate Institute of Science and Technology Enhanced-wetting, boron-based liquid-metal ion source and method
US5120612A (en) * 1990-09-04 1992-06-09 Olin Corporation Incorporation of ceramic particles into a copper base matrix to form a composite material
JP6112930B2 (en) 2013-03-26 2017-04-12 株式会社日立ハイテクサイエンス Gas ion source and focused ion beam apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2146365A (en) * 1934-12-13 1939-02-07 John C Batchelor Electron emitter
US4318030A (en) * 1980-05-12 1982-03-02 Hughes Aircraft Company Liquid metal ion source

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2146365A (en) * 1934-12-13 1939-02-07 John C Batchelor Electron emitter
US4318030A (en) * 1980-05-12 1982-03-02 Hughes Aircraft Company Liquid metal ion source

Also Published As

Publication number Publication date
JPS59119660A (en) 1984-07-10
EP0114496A2 (en) 1984-08-01

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Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 19840209

AK Designated contracting states

Designated state(s): DE FR GB

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Designated state(s): DE FR GB

17Q First examination report despatched

Effective date: 19870127

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 19870607

RIN1 Information on inventor provided before grant (corrected)

Inventor name: ISHITANI, TOHRU

Inventor name: TAMURA, HIFUMI

Inventor name: UMEMURA, KAORU