EP0101867B1

EP0101867B1 - Plasma ion source

Info

Publication number: EP0101867B1
Application number: EP83106957A
Authority: EP
Inventors: Noriyuki Sakudo; Osami Okada; Susumu Ozasa; Katsumi Tokiguchi; Hidemi Koike; Shunroku Taya; Mitsunori Komatsumoto; Mitsuo Komatsu
Original assignee: Hitachi Ltd
Current assignee: Hitachi Ltd
Priority date: 1982-07-30
Filing date: 1983-07-15
Publication date: 1988-01-13
Also published as: EP0101867A2; JPS5923432A; DE3375347D1; EP0101867A3; US4629930A

Description

Background of the Invention

The present invention relates to improvements in a plasma ions source in which an ion acceleration voltage for extracting ions from within a plasma is high, and more particularly to the structure of extraction lenses in the ion source of this type.
Now, a microwave plasma ion source disclosed in U.S. Patent No. 4,058,748 will be exemplified as one plasma ion source for extracting ions from within a plasma with a high extraction voltage; and the schematic construction and problem thereof will be explained.
Figure 1 shows the sectional structure of the prior-art microwave plasma ion source. Referring to the figure, a microwave 13 generated by a microwave generator such as megnetron (not shown) propogates along a circular or rectangular waveguide 1 and passes through a vacuum sealing dielectric plate 2, to be introduced into a discharge chamber 3 having a pair of confronting ridge electrodes (not shown). On the other hand, a feed gass such as phosphine (PH₃) is introduced into the discharge chamber 3 through a gas inlet pipe 9 by opening a needle valve 10.
The feed gas introduced into the discharge chamber 3 discharges under the synergistic action of a microwave electric field formed across the aforementioned ridge electrodes and a magnetic field formed by a solenoid 11, so that a plasma is generated in the discharge chamber 3.
The discharge chamber 3 is usually held at a positive potential of several tens kV through an insulator 8, along with a flange 7 and an acceleration electrode 4. From the plasma produced, ions are extracted through the slit of the acceleration electrode 4 disposed in adjacency to the discharge chamber 3. The extracted ions advance toward a deceleration electrode 5 adjoining the acceleration electrode 4 and further pass through a grounded electrode 6 adjoining the deceleration electrode 5, to be extracted as an ion beam 14. The deceleration electrode 5 is usually held at a negative potential of several kV.
Such microwave ion source is used in an ion implanter for implanting ions into semiconductor wafers.
When, in the microwave plasma ion source described above, the acceleration voltage to be applied to the acceleration electrode 4 was set at approximately 50 kV in order to increase the energy of the ion beam 14, there occurred the problem that a D.C. discharge of unknown cause began to arise across the deceleration electrode 5 and the grounded electrode 6, so the acceleration voltage 4 could not be supplied with a high voltage of at least 50 kV. This problem makes it impossible to cope with the requirements of ion implanters for increasingly higher acceleration voltages, and any countermeasure is desired. Such problem of discharge in an extraction electrode system arises, not only in the microwave plasma ion source as stated above, but also in other plasma ion sources in common.

Summary of the Invention

It is accordingly an object of the present invention to provide a plasma ions source which is free from the problem described above, that is, which can extract an ion beam of high energy.
In order to accomplish the object, according to the present invention, a plasma ion source is characterized by comprising a discharge chamber in which a plasma is produced by plasma generation means, an acceleration electrode which is disposed in adjacency to said discharge chamber in order to extract ions from the produced plasma, a deceleration electrode which is disposed in adjacency to said acceleration electrode in order to decelerate the extracted ions, a ground electrode which is disposed in adjacency to said deceleration electrode, a container made of an insulator which is disposed so as to surround said discharge chamber and the respective electrodes, and a shield ring electrode of ground potential which is disposed in the vicinity of said deceleration electrode and near to or in contact with the inner wall surface of the insulator container in order to prevent a discharge between said deceleration electrode and said ground electrode.
Owing to such characterizing construction of the present invention, unlike the prior art in which the electric discharge begins to arise across the electrodes at the acceleration voltage of 50 kV, it has become possible to prevent the interelectrode discharge even with an acceleration voltage of 80 kV. As a result, a plasma source capable of extracting an ion beam of high energy can be provided, and an ion implanter of high performance can be realized by employing such plasma ion source.

Brief Description of the Drawings

Figure 1 is a sectional structural view of a prior-art microwave plasma ion source;
Figures 2 and 3 are explanatory views for elucidating the principle of the present invention;
Figure 4 is a sectional structural view of a microwave plasma ion source according to the present invention; and
Figures 5 and 6 are sectional structural views each showing a shield ring electrode in another embodiment of the present invention.

Detailed Description

First, the principle of the present invention will be explained. Various experiements and studies were made on the cause of the interelectrode discharge in the prior-art plasma ion source as shown in Figure 1, and it has been conjectured that the electric discharge will be generated by a mechanism to be stated below. Referring to a partial enlarged view of Figure 1 given in Figure 2, the inner wall surface of the insulator container 8 begins to get stained due to the operation of the plasma ion source, and electric charges @ on the inner wall surface come to flow from the side of the flange 7 towards the side of base 15. As a result, the electric potential distribution of the inner wall surface of the insulator container 8 becomes quite different from that at the time at which the inner wall surface of the insulator container 8 is in a clean state. The high potential region of the flange 7 supplied with the high voltage by an acceleration voltage source 16 extends near to the grounded base 15. Then, the base 15 is bombarded with the ions @ by the surface creepage or by the migration of the charges 0 in the vacuum, so that electrons e and ions ⊕ are emitted from the base 15. The emitted charged particles e and ⊕ enter the space between the grounded electrode 6 and the deceleration electrode 5 which is supplied with a negative voltage by a deceleration voltage source 17. Therefore, the discharge takes place across the deceleration electrode 5 and the ground electrode 6 and generates a plasma. It is conjectured that the plasma will trigger the discharge on the acceleration electrode 4 and will make it impossible to apply the high voltage to the acceleration electrode 4.
It is accordingly understood that, in order to prevent the aforementioned discharge across the deceleration electrode 5 and the ground electrode 6, there may be taken the two measures of i) reducing to the utmost the charged particles e and ⊕ which develop due to the surface current flowing on the inner wall surface of the insulator container 8, and ii) preventing the developing charged particles e and Θ from entering the space between the deceleration electrode 12 may be disposed in the vicinity of the deceleration electrode 5 and the ground electrode 6. Concretely, as illustrated in Figure 3, a shield ring electrode 12 may be disposed in the vicinity of the deceleration electrode 5 and along the inner wall surface of the insulator container 8. The shield ring electrode 12 is held in contact with the insulator container 8, or in close proximity to the insulator container 8.
Moreover, the shield ring electrode 12 is grounded. The provision of such shield ring electrode 12 makes it possible to reduce the charged particles e and EÐ attributed to the surface current flowing on the inner wall surface of the insulator container 8, and also to prevent the generated charged particles from entering the space between the deceleration electrode 5 and the ground electrode 6, so that the discharge across the deceleration electrode 5 and the ground electrode 6 can be prefectly prevented. It turns out that a high voltage of or above 50 kV can be applied to the acceleration electrode 4 and that an ion beam of high energy can be extracted.
Next, there will be explained practicable examples of setup of the plasma source according to the present invention.
Figure 4 shows the sectional structure of a microwave plasma ion source according to the present invention. Referring to the figure, a microwave 13 which has been generated by a magnetron (not shown) having an output of 600 W and which has a frequency of 2.45 GHz propagates along a rectangular waveguide 1 made of copper and passes through a vacuum sealing dielectric plate 2 made of alumina ceramic, to be introduced into a discharge chamber 3 which is equipped with a pair of confronting ridge electrodes (not shown) made of copper. On the other hand, phosphine (PH₃) which is a feed gas is introduced into the discharge chamber 3 through a gas inlet pipe 9 by opening a needle valve 10. The PH₃ gas introduced into the discharge chamber 3 discharges under the synergistic action of a microwave electric field formed between the ridge electrodes and a D.C. magnetic field of about 1000 gausses formed by a solenoid 11. Thus, a plasma is formed within the discharge chamber 3. Phosphorus ions (p⁺) are extracted from the produced plasma through the slit of an acceleration electrode 4 of stainless steel which is disposed in adjacency to the discharge chamber 3 and to which an acceleration voltage of +70 kV is applied. The extracted P⁺ ions advance towards a deceleration electrode 5 of stainless steel which is disposed in adjacency to the acceleration electrode 4 and to which a deceleration voltage of -2 kV is applied. Further, they pass through a ground electrode 6 of stainless steel which is disposed in adjacency to the deceleration electrode 5 and which is grounded. Then, they are extracted as a P⁺ ion beam 14. Of course, a shield ring electrode 12 of stainless steel which forms the most important feature of the present invention is disposed in the vicinity of the deceleration electrode 5 and along the inner wall surface of the insulator container 8 in close proximity thereto. Moreover, the shield ring electrode 12 is grounded.
The P⁺ ion beam of high energy could be stably extracted from such microwave plasma ion source over a long time, and the interelectrode discharge as in the prior art did not arise at all. Further, when the extraction of the P^* ion beam was conducted over a long time at an acceleration voltage raised to 80 kV, quite no interelectrode discharge arose as in the case of 70 kV, and a stable P^* ion beam of high energy was obtained.
Another embodiment of the shield ring electrode 12 will now be described.
Figure 5 shows the sectional structure of a shield ring electrode 12' in another plasma ion source according to the present invention. The shield ring electrode 12' is characterized in that the distance between its surface opposing to the insulator container 8 and the inner surface of the insulator container 8 increases gradually toward the acceleration electrode 4. With such construction in which the interval between the shield ring electrode 12' and the insulator container 8 widens gradually toward the acceleration electrode 4, a diffusion space for the charged particles generated by the bombardment of the shield ring electrode 12' with the charges _ED having flowed along the inner wall surface of the insulator container 8 can be limited to a space defined by the insulator container 8 and the shield ring electrode 12', so that the charged particles @ and e generated at this time can be prevented from widely diffusing into the other spaces. As a result, the charged particles @ and e can be more effectively prevented from entering the space between the deceleration electrode 5 and the ground electrode 6.
Figure 6 shows the sectional structure of a shield ring electrode 12" in still another plasma ion source according to the present invention. The shield ring electrode 12" is characterized by having a ring-shaped spring 18 for contacting with the insulator container 8. Usually, the insulator container 8 is difficult to have a high dimensional accuracy because it is a sintered insulator. In consequence, the distance between the shield ring electrode 12" and the insulator container 8 is prone to become uniform depending upon places. For this reason, when the distance between the shield ring electrode 12" and the insulator container 8 is too great by way of example, the energy at which the surface of the shield ring electrode 12" is bombarded with the charges having flowed on the inner wall surface of the insulator container 8 becomes great, and an increased number of charged particles are generated at that time, so that the discharge across the electrode is liable to be triggered. Therefore, the contact state between the shield ring electrode 12" and the insulator container 8 is improved by equipping the shield ring electrode 12" with the ring-shaped spring 18 as in the present embodiment.
In this manner, the functions of the shield ring electrode 12 are i) to reduce the charged particles which are generated when the charges flowing on the surface of the insulator container 8 bump into the base 15, and ii) to prevent the generated charged particles from entering the space between the deceleration electrode 5 and the ground electrode 6.
It is accordingly desirable that the diametrical dimension of the shield ring electrode 12 be larger that the diameters of the deceleration electrode 5 and the ground electrode 6. As the position of installation of the shield ring electrode 12, it is desirable that the top plane of the shield ring electrode 12 lie, at least, above the top plane of the ground electrode 6.
As set forth above, the present invention has made it possible to raise an acceleration voltage to 80 kV from 50 kV in the prior art. As a result, a plasma ion source from which an ion beam of high energy can be extracted can be provided, and an ion implanter of high performance can be realized by employing such plasma ion source.
While all the foregoing embodiments have referred to the microwave plasma ion, it is needless to say that the present invention is not restricted to such plasma ion source but that it is similarly applicable to other plasma sources.

Claims

1. A plasma ion source comprising a discharge chamber (3) in which a plasma is produced by plasma generation means, an acceleration electrode (4) which is disposed in adjacency to said discharge chamber in order to extract ions from the produced plasma, a deceleration electrode (5) which is disposed in adjacency to said acceleration electrode in order to decelerate the extracted ions, a ground electrode (6) which is disposed in adjacency to said deceleration electrode, a container (8) made of an insulator which is disposed so as to surround said sischarge chamber and the respective electrodes, and a shield ring electrode (12) of ground potential which is disposed in the vicinity of said deceleration electrode and near to or in contact with the inner wall surface of the insulator container in order to prevent a discharge between said deceleration electrode and said ground electrode.

2. A plasma ion source according to Claim 1, wherein said plasma generation means is constructed of means for producing the plasma by exerting a microwave electric field and a magnetic field on a feed gas introduced into said discharge chamber (3).

3. A plasma ion source according to Claim 1 or 2, wherein said shield ring electrode (12") has a spring (18) for contacting with said inner wall surface of said insulator container (8).

4. A plasma ion source according to any of Claims 1 to 3, wherein said shield ring electrode (12') is so constructed that the distance between the surface thereof opposing to said insulator container (8) and the inner surface of said insulator container increases gradually toward said acceleration electrode (4).