EP0079282B1 - Verfahren und Vorrichtung zum Schnellmessen der Energie und Anwendung beim Messen der Energie eines Pulslasers - Google Patents

Verfahren und Vorrichtung zum Schnellmessen der Energie und Anwendung beim Messen der Energie eines Pulslasers Download PDF

Info

Publication number
EP0079282B1
EP0079282B1 EP82402039A EP82402039A EP0079282B1 EP 0079282 B1 EP0079282 B1 EP 0079282B1 EP 82402039 A EP82402039 A EP 82402039A EP 82402039 A EP82402039 A EP 82402039A EP 0079282 B1 EP0079282 B1 EP 0079282B1
Authority
EP
European Patent Office
Prior art keywords
energy
measurement
oscillator
process according
particle beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
EP82402039A
Other languages
English (en)
French (fr)
Other versions
EP0079282A1 (de
Inventor
Oleg Anitoff
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of EP0079282A1 publication Critical patent/EP0079282A1/de
Application granted granted Critical
Publication of EP0079282B1 publication Critical patent/EP0079282B1/de
Expired legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K17/00Measuring quantity of heat
    • G01K17/003Measuring quantity of heat for measuring the power of light beams, e.g. laser beams

Definitions

  • the present invention relates to a method and a device for rapid energy measurement.
  • it allows the energy supplied by a pulsed laser to be measured repeatedly, in a very wide spectral range from microwave to ultraviolet.
  • the devices or sensors currently used for measuring the energies provided in particular by a laser beam derive directly from the sensors used in infrared spectrometry, the characteristics of which have been optimized. These optimized sensors, not originally designed for this type of application, do not necessarily represent the best possible choice for this type of application.
  • These sensors are essentially pyroelectric sensors or possibly bolometers comprising three separate parts.
  • These sensors comprise a thin layer of an absorbent material 2, the absorption spectrum of which must be as wide as possible, that is to say that it must absorb the energy of a laser pulse corresponding to a wavelength ranging from more or less distant infrared to ultraviolet.
  • This thin layer of absorbent material 2 converts the energy of the laser pulse into heat.
  • the thin layer of absorbent material 2 must, by its very nature, be physically separated from the second part 4 constituting these sensors. This physical separation results in a first limitation of the response time of the sensor linked to the transfer time T, of the thermal energy supplied by the thin layer of absorbent material 2 to the second part 4 of the sensor.
  • This second part 4 makes it possible to convert the thermal energy into an electrical signal which is proportional to it.
  • This second part is generally, but not exclusively, made up of a pyroelectric ceramic at the terminals of which there appears a potential difference, in open circuit, proportional to its heating. This potential difference is then transmitted to an electrical measuring device.
  • pyroelectric ceramic Since pyroelectric ceramic is a device with very high internal impedance, its output impedance must be lowered by means of an impedance lowering circuit.
  • This lowering impedance circuit generally consists of a MOS transistor 6. to avoid the capture of spurious electrical signals, the MOS transistor must be placed as close as possible to the pyroelectric ceramic and must therefore be integrated into the sensor. This MOS transistor constitutes the third part of the sensor.
  • the resistor R connected to the terminals of the pyroelectric ceramic 4 represents the leakage resistance of the gate 8 of the transistor and the capacitor C d connected to the drain and the gate of the transistor via the resistor R represents the decoupling capacitor of the power source of the transistor.
  • the measurement signal is collected at S.
  • the pyroelectric ceramic 4 is a very high impedance device, this unfortunately has a high parallel capacity.
  • This high capacity shown in FIG. 1 in dotted lines and bearing the reference C, introduces a time constant T 2 much higher than the transfer time T, from the thermal energy of the thin layer of absorbent material 2 to the ceramic. pyroelectric 4.
  • this time constant varies from 10 to 30 ms while the transfer time T varies from 1 ⁇ s to 1 ms. Consequently, the high sensitivity of such a sensor can only be obtained after a considerable time constant, which limits the maximum repetition frequency of the measurements of the energy supplied in particular by a laser beam at 100 Hz. This is clearly insufficient to repeatedly measure the energy supplied by a modern pulse laser reaching a frequency of several kHz.
  • time interval separating two successive measurements has nothing to do with the minimum duration of a laser pulse that the sensor can detect.
  • the latter is equal to the time of conversion of the energy of photons into heat, that is to say of the order of a picosecond.
  • such a sensor has a limited spectral response in the far infrared.
  • the complex structure of this sensor leads to a high cost price.
  • the energy absorption takes place in a very small volume which is that of the layer of absorbent material. Consequently, the energy density supplied by a laser beam is therefore high there, which leads to rapid deterioration of the layer of absorbent material, periodically requiring its regeneration by applying a coating on the surface of the layer of absorbent material. This regeneration of the layer of absorbent material then requires a complete recalibration of the sensor.
  • the laser energy density is very high, it can result in complete destruction of the sensor requiring an expensive replacement thereof.
  • the subject of the invention is a method and a device for rapid measurement of energy making it possible to remedy these drawbacks.
  • it allows repetitive measurements of the energy supplied by a pulsed laser beam at a repetition frequency at least 1000 times greater than that effected with the devices of the prior art and to measure energies at least 10 times greater than those which can be measured by the prior art device.
  • the energy measurements can be carried out in a spectral range ranging from microwave to ultraviolet.
  • the subject of the invention is a method of measuring the energy supplied by a beam of particles and in particular the energy supplied by a pulsed laser beam, consisting in sending this beam of particles onto a material having a high electric dipole moment, this material being capable of absorbing the energy supplied by this particle beam, the interaction of said beam and of the material leading to a rise in temperature of the material, proportional to the energy absorbed, characterized in that the material, having dipoles which can be freely oriented, is placed between the two armatures of a frequency tuning capacitor of an oscillator and in that the variation in the oscillation frequency of this oscillator, this variation of the frequency being proportional to the variation of the dielectric constant of the material during the interaction of the particle beam and the material, the duration of the energy measurement being a microsecond.
  • the material is a fluid, contained in a cell; this fluid is in particular a liquid.
  • the cell regeneration is done by changing the liquid by a simple emptying of the cell and this without it being necessary to carry out a recalibration, which does not was not the case in the prior art.
  • the material is neither polymerizable nor tautomerizable.
  • the material is chosen from the group comprising the non-symmetrical nitrated or halogenated derivatives of alkanes, having at least three carbon atoms, or aromatic hydrocarbons, the non-symmetrical oxygenated heterocyclic compounds or nitrogen, tertiary amines and ketones, the carbons of which are substituted by alkyl radicals.
  • the material is chosen from the group comprising nitrobenzene and pentafluoronitrobenzene.
  • the material is formed from a plurality of substances which do not interact with each other and whose fields of energy absorption are complementary.
  • the use of such a material makes it possible to measure the energy supplied by a laser beam in a very wide spectral range ranging from microwave to ultraviolet, which was not possible in the prior art.
  • the material is placed between the two armatures of the frequency tuning capacitor of an oscillator, in particular a high frequency, and the variation in the oscillation frequency is measured. of this oscillator, this variation of the frequency being proportional to the variation of the dielectric constant of the material.
  • the invention also relates to a device for measuring the energy supplied by a particle beam and in particular supplied by a laser beam, comprising a material having a high dipole moment, this material being capable of absorbing the energy supplied by the particle beam, the interaction of said beam and of the material leading to a rise in temperature of the material, proportional to the energy absorbed, characterized in that it comprises a frequency tuning capacitor of an oscillator comprising two armatures between which the material is placed, the latter having dipoles which can be freely oriented, and means making it possible to measure the variation in the frequency of oscillation of said oscillator which is proportional to the variation in the dielectric constant of the material during the interaction of the particle beam and said material, the duration of an energy measurement being a microsecond.
  • Such a device makes it possible in particular to measure the energy with each laser shot of a laser whose recurrence frequency is several kHz, which was not possible with the sensors of the prior art.
  • a laser 10 emits a beam 12 which is sent, for example by means of a mirror 14, onto a material 16 capable of absorbing the energy supplied by the beam 12.
  • the interaction of the laser beam and the material leads to an increase in temperature within the material which is proportional to the energy absorbed. This rise in temperature causes a variation in the dielectric constant of the material that is to be measured.
  • the temperature within the material can vary from 4 to 300 ° R.
  • the dependence of the dielectric constant of a material on the temperature is essentially linked to the influence of the temperature on the average orientation of the dipoles of this material.
  • the variation of the dielectric constant s as a function of the temperature T is governed by the equation in which ⁇ represents the dipole moment of the material, k represents the Boltzman constant and N the Avogadro number.
  • This formula therefore implies that the material, to be a good thermoelectric converter, must have a high dipole moment y, and that its dipoles can orient themselves freely.
  • This material can therefore be for example a fluid and in particular a liquid, but this is not compulsory.
  • certain solids have a phase in a certain temperature zone in which certain dipoles retain partial freedom. In the case of the use of a fluid material, the latter should be placed for example in a sealed cell 18, as shown in FIG. 2.
  • the temperature coefficient of the dielectric constant of the material that is to say in fact of the dipole moment u, must be as stable as possible.
  • this temperature coefficient for certain materials, in particular liquids, evolves in a complex way due to the possibility of polymerization or tautomerization on the part of these materials.
  • the material should be chosen so that it is neither polymerizable nor tautomerizable and in particular so that it cannot form hydrogen bonds.
  • the absorbent materials meeting the various criteria of the invention are generally nitrated or halogenated derivatives of aromatic hydrocarbons or alkanes, having at least three carbon atoms, the lighter compounds being too volatile.
  • Examples which may be mentioned are nitrobenzenes, chlorobenzenes, bromobenzenes, iodobenzenes, nitrotoluenes, chlorotoluenes, bromotoluenes, iodotoluenes, nitroxylenes, chloroxylenes, bromoxylenes, iodoxylenes, etc., and nitropropanes , chloropropanes, bromopropanes, iodopropanes etc ...
  • these different compounds must not be symmetrical in order to prevent the dipoles of these compounds from compensating for each other.
  • Compounds exhibiting internal compensation by symmetry such as, for example, trinito 1, 3, 5 benzene, tribromo mesitylene, dinitro 1, 3 propane are not suitable.
  • the material must be capable of absorbing the wavelengths of the laser beam whose energy is to be measured.
  • Materials, especially liquids have three spectral ranges of photon absorption.
  • the first domain called the rotational domain, is related to the rotation of the dipoles of the different molecules making it up and is located in the microwave domain, which is inaccessible to conventional sensors due to the thinness of their absorbent layer (a few microns).
  • the second domain is a vibrational domain located in the infrared and the third domain is an electronic domain located in the visible or the ultra-violet.
  • the absorption area of the material used does not cover the desired area, it is always possible to change the material. In the case of a liquid material, this change is made by emptying the cell 18.
  • the change of material has the advantage of being done simply and of not requiring any recalibration of the device.
  • These substances, which taken in isolation may be solid or liquid, must be chosen so that they do not react with each other or with the material to which they are added, either by chemical reaction or by the formation of tautomeric compounds or polymers which would be harmful to the reliability of the device as well as its response time. Examples of substances that may be mentioned include cyanines or porphyrins.
  • the material When the material is made up of a main material to which one or more substances have been added, this material must be homogeneous.
  • the main liquid In the case of a liquid material, the main liquid must be a polar liquid, not very viscous, aprotic, that is to say not capable of exchanging a proton with the substances which are associated with it, and not associated.
  • the auxiliary substances must be able to be dissolved in the main liquid, possibly after modifications of some of their characteristics in order to make this dissolution possible.
  • the measurement of the variation of the dielectric constant as a function of the temperature rise of said material, resulting from the interaction of the particle beam and of the material can be made by introducing said material between the plates of the capacitor. frequency tuning 20 of a conventional oscillator 22.
  • the oscillation frequency of this oscillator is then a simple function of the dielectric constant of the material and, for small variations of the dielectric constant, the variation of the oscillation frequency is proportional to the variation of the dielectric constant.
  • the proportionality coefficient is generally between 0.1 and 0.5. Consequently, the measurement of the energy supplied in particular by a pulsed laser beam is carried out by measuring the variations in the oscillation frequency of this oscillator.
  • the oscillation frequency of this oscillator 22 can be measured by means of a frequency meter 24 which counts the number of periods of the signal emitted by the oscillator during a time determined by an internal clock.
  • a fast photo-diode 26 can be provided. .
  • the temperature coefficient of the dielectric constant had to be as stable as possible. In general, this temperature coefficient is proportional to 1 / T 2. In the case where it is not very stable, it is always possible to introduce a temperature correction during the electronic processing by means of a temperature sensor making it possible to calculate the corrective time 1 / Tz.
  • the device and method of the invention allow a much faster measurement of the energy supplied in particular by a laser beam.
  • the response time of the sensor depends first of all on the absorption time of the photons which is almost instantaneous, that is to say less than the picosecond, then on the time of conversion of the photonic excitation into heat.
  • This conversion time is of the order of a picosecond if the absorption is rotational or vibrational, that is to say located in the domain of hyper-frequencies or infrared; between a fraction of a nanosecond and a few microseconds if the absorption is electronic, that is to say located in the visible or the ultra-violet.
  • This upper limit of a few microseconds will be reached only if the molecules of the absorbent material have a triplet state of long life, which can be avoided by a correct choice of material.
  • the response time of the sensor depends on the time of diffusion of this heat to the entire sensor. This time is shorter than for the devices of the prior art, since the photo-thermal converter and the thermo-electric converter, formed by the absorbent material, are intimately mixed instead of being physically separated; the photo-thermal converter and the thermo-electric converter of the prior art were respectively the layer of absorbent material and the pyroelectric ceramic.
  • a temperature gradient is inevitable due to the application of the Beer-Lambert law.
  • Beer-Lambert's law is governed by the equation 1 being the intensity of the beam transmitted by the absorbent material, s and d1 respectively the absorption coefficient and, the irradiated thickness of said material. Calculations show that there is a heating gradient proportional to e - ⁇ .1. The heating of the absorbent material therefore becomes uniform after a time t equal to L m . 6, L m being the average dimension of the material (for example, radius of the sphere of the same volume) and 6 the speed of sound in the material (of the order of 1000 m / s for a liquid).
  • the response time of the sensor depends on the time necessary for the rise in temperature of the material to influence the average orientation of the dipoles thereof. This time is in particular proportional to the volume of the polar molecule constituting the material and to the viscosity of the liquid. This therefore requires choosing a low-viscosity liquid made up of small molecules. For a material meeting these criteria (see below), this time is a few tens of picoseconds.
  • the response time of the absorbent material, in particular liquid results from the convolution of these different times.
  • this time can be of the order of a few tens of nanoseconds.
  • This global time represents the time necessary for the initial event (absorption of photons) to be converted into a usable physical signal (measurement of the oscillation frequency of the oscillator). As for the acquisition time of the initial event, this can be less than the picosecond.
  • Nitrobenzene has a dielectric constant at low frequencies of 35.74 at 20 ° C, exhibiting a variation of / e. dT equal to 0.00225 at 20 ° C. Furthermore, nitrobenzene has absorption bands in the ultraviolet, in the infrared and a microwave absorption linked to its rotational relaxation time which is 47 ps, c that is to say at a frequency of the order of 3 GHz. The latter type of absorption band is very wide.
  • a solution can be produced at any wavelength having an optical density at least equal to 1, that is to say absorbing at least 90% of the incident energy, taking into account the optical path of the laser beam in the sensor liquid.
  • the cyanines, the porphyrimes are soluble in the solvents considered without annoying interaction, and can be chosen to absorb in the entire ultraviolet-visible domain chosen.
  • the cell contains a mass m of 0.3 g of nitrobenzene whose specific heat C v is of the order of 2 J / g. ° K.
  • the device of the invention is therefore characterized by a merit factor equal to the sensitivity obtained in energy for a given measurement time.
  • the sensitivity of the device of the invention is 10 thousand times greater than that of the devices of the prior art and that consequently the merit factor of the device is 10 thousand times greater than that of the devices of the invention. prior art.
  • pentafluoronitrobenzene As other material corresponding to the criteria given above, mention may be made of pentafluoronitrobenzene.
  • This compound having characteristics similar to those of nitrobenzene makes it possible in particular to increase the power tolerable by the device.
  • This tolerable power is a function of the ionization of the material under the effect of the electric field of the laser.
  • the ionization threshold is much higher than that of nitrobenzene.
  • the non-symmetrical nitrated or halogenated derivatives of alkanes having at least three carbon atoms, or aromatic hydrocarbons as well as the non-symmetrical oxygenated and nitrogenous heterocycles, tertiary amines and ketones, including carbons in a are substituted by alkyl radicals, can be used.

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Claims (12)

1. Verfahren zum Messen der Energie, die in einem Partikelstrahl enthalten ist, enthaltend: Senden des Partikelstrahls (12) auf ein Material (16), das ein erhöhtes elektrisches Dipolmoment aufweist, wobei dieses Material (16) in der Lage ist, die von dem Partikelstrahl (12) gelieferte Energie zu absorbieren, wobei die Wechselwirkung des Strahls und des Materials zu einer Temperaturerhöhung des Materials rührt, die proportional zur absorbierten Energie, ist dadurch gekennzeichnet, daß man das Material (16), das Dipole aufweist, die sich frei orientieren können, zwischen den zwei Platten eines Frequenzabstimmkondensators (20) eines Oszillators (22) anbringt und daß man die Frequenzänderung der Schwingung dieses Oszillatots mißt, Hobei diese Frequenzänderup6 proportional der Änderung der Dielektrizitätskonstante des Materials aufgrund der Wechselwirkung des Partikelstrahls und des Materials ist, wobei die Dauer einer Energiemessung eine Mikrosekunde ist.
2. Meßverfahren nach Angpruch 1, dadurch gekennzeichnet, daß das Material (16) ein Material ist, dessen Temperatur zwischen 4 und 300° K variieren kann.
3. Meßverrahren nach einem der Ansprüche 1 und 2, dadurch gekennzeichnet, daß das Material (16) ein Fluid ist, wobei das genannte Fluid in einer Zelle (18) enthalten ist.
4. Meßverfahren nach Anspruch 3, dadurch gekennzeichnet, daß das Fluid eine Flüssigkeit ist.
5. Meßverfahren nach Anspruch 4, dadurch gekennzeichnet, daß die Flüssigkeit weder polymerisierbar noch tautomerisierbar ist.
6. Meßverfahren nach Anspruch 5, daßurch gekennzeichnet, daß die Flüssißkeit nicht dazu geeignet ist Wasserstoffbindungen zu bilden.
7. Meßverfahren nach den Ansprüchen 5 und 6, dadurch gekennzeichnet, daß das Material aus der Gruppe ausgewählt ist, enthaltend: die unsymmetrischen, nitrierten oder halogenierten Derivate der Alkane, die wenigstens drei Rohlenstoffatome haben, oder der aromatischen Kohlenwasserstoffe, die unsymmetrischen, sauerstoffhaltigen oder stickstoffhaltigen Verbindungen, die tertiären Amine und die Ketone, deren a-Kohlenstoffatome durch Alkylradikale substituiert sind.
8. Meßverfahren nach einem der Ansprüche 1 bis 7, dadurch gekennzeichnet, daß das Material aus der Gruppe gewählt ist, die Nitrobenzen und Pentafluornitrobenzen enthält.
9. Meßverrahren nach einem der Ansprüche 1 bis 8, dadurch gekennzeichnet, daß das Material (16) aus einer Mehrzahl von Substanzen gebildet ist, die untereinander nicht reagieren und deren Energieabsorptionsbereiche komplementär sind.
10. Vorrichtung zum Messen der Energie, die von einem Partikelstrahl Belierert wird, enthaltend ein Material (16), das ein erhöhtes Dipolmoment aufweist, wobei dieses Material in der Lage ist, die von dem Partikelstrahl (12) gelieferte Energie zu absorbieren, wobei die Wechselwirkung zwischen dem Strahl und dem Material zu einer Temperaturerhöhung des Materials führt, die proportional der absorbierten Energie ist, dadurch gekennzeichnet, daß sie einen Frequenzeinstellkondensator (20) eines Oszillators (22) enthält, der zwei Platten aufweist, zwischen welchen das Material (16) angeordnet ist, das Dipole aufweist, die sich frei orientieren können, und daß Einrichtungen (24) vorgesehen sind, die die Messung der Frequenzänderung der Schwingung des Oszillators erlauben, die proportional der Anderung der Dielektrizitätskonstante des Materials (16) aufgrund der Wechselwirkung des Partikelstrahls und des Materials ist, wobei die Dauer einer Energiemessung eine Mikrosekunde ist.
11. Meßvorrichtung nach Anspruch 10, dadurch gekennzeichnet, daß der Oszillator ein Hochfrequenzoszillator ist.
12. Meßvorrichtung nach Anspruch 10 oder 11 zur wiederholten Messung der von einem Impulslaser gelieferten Energie, dadurch gekennzeichnet, daß sie Einrichtungen (26) enthält, um die Laserimpulse mit der Messung der in diesen Impulsen enthaltenen Energie zu synchronisieren.
EP82402039A 1981-11-10 1982-11-05 Verfahren und Vorrichtung zum Schnellmessen der Energie und Anwendung beim Messen der Energie eines Pulslasers Expired EP0079282B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8121024A FR2516248A1 (fr) 1981-11-10 1981-11-10 Procede et dispositif de mesure rapide d'energie et application a la mesure de l'energie fournie par un laser impulsionnel
FR8121024 1981-11-10

Publications (2)

Publication Number Publication Date
EP0079282A1 EP0079282A1 (de) 1983-05-18
EP0079282B1 true EP0079282B1 (de) 1986-08-13

Family

ID=9263865

Family Applications (1)

Application Number Title Priority Date Filing Date
EP82402039A Expired EP0079282B1 (de) 1981-11-10 1982-11-05 Verfahren und Vorrichtung zum Schnellmessen der Energie und Anwendung beim Messen der Energie eines Pulslasers

Country Status (6)

Country Link
US (1) US4606651A (de)
EP (1) EP0079282B1 (de)
JP (1) JPS5887435A (de)
CA (1) CA1197993A (de)
DE (1) DE3272608D1 (de)
FR (1) FR2516248A1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0145457B1 (de) * 1983-12-09 1989-05-31 Kureha Kagaku Kogyo Kabushiki Kaisha (also called: Kureha Chemical Industry Co. Ltd.) Infrarotsensor
US4797555A (en) * 1987-05-28 1989-01-10 The United States Of America As Represented By The Secretary Of The Air Force High energy laser target plate
US5030012A (en) * 1989-02-02 1991-07-09 The United States Of America As Represented By The Department Of Health And Human Services Pyroelectric calorimeter
IL100528A0 (en) * 1991-12-26 1992-09-06 Ephraim Secemski Laser power meter
US8659753B1 (en) * 2011-09-21 2014-02-25 The United States Of America As Represented By The Secretary Of The Army Apparatus and method for measuring energy in a laser beam

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3769096A (en) * 1971-03-12 1973-10-30 Bell Telephone Labor Inc Pyroelectric devices
US3670570A (en) * 1971-04-30 1972-06-20 Trw Inc Light intensity calorimeter
US3783685A (en) * 1972-08-23 1974-01-08 Avco Corp High power laser energy measuring device
US3939706A (en) * 1974-04-10 1976-02-24 The Boeing Company High energy sensor
US4084101A (en) * 1975-11-13 1978-04-11 Arden Sher Apparatus for converting radiant energy to electric energy
US4094608A (en) * 1976-10-14 1978-06-13 Xonics, Inc. Spectrometer of the electro-opto-acoustic type with capacitor-type detection
US4208624A (en) * 1978-08-09 1980-06-17 Bell Telephone Laboratories, Incorporated Method and apparatus for investigating dielectric semiconductor materials
SU785659A1 (ru) * 1979-04-18 1980-12-07 Опытное Производство При Институте Физики Ан Украинской Сср Многоэлементный пироэлектрический приемник излучени
US4381148A (en) * 1981-03-23 1983-04-26 The United States Of America As Represented By The Secretary Of The Navy Power meter for high energy lasers

Also Published As

Publication number Publication date
EP0079282A1 (de) 1983-05-18
JPS5887435A (ja) 1983-05-25
FR2516248B1 (de) 1983-12-23
FR2516248A1 (fr) 1983-05-13
US4606651A (en) 1986-08-19
CA1197993A (en) 1985-12-17
DE3272608D1 (en) 1986-09-18

Similar Documents

Publication Publication Date Title
EP2135050B1 (de) Radiometrisches thermometer
Turner et al. Silicon nitride micromesh bolometer array for submillimeter astrophysics
Coufal et al. Pyroelectric calorimeter for photothermal studies of thin films and adsorbates
EP2700922B1 (de) Bolometrischer Detektor einer elektromagnetischen Strahlung im Terahertzbereich, und Vorrichtung zur Matrixerkennung, die mit solchen Detektoren ausgestattet ist
FR2884608A1 (fr) Detecteur bolometrique, dispositif de detection d'ondes electromagnetiques submillimetriques et millimetriques mettant en oeuvre un tel detecteur
EP0231695B1 (de) Fast-adiabatischer Kalorienmesser für das Messen der Energie, transportiert durch eine Strahlung
Coufal et al. Thermal diffusivity measurements of thin films with a pyroelectric calorimeter
EP2898318A1 (de) Wärmeflusssensor, gassensor mit mindestens einem solchen sensor und pirani-vakuummeter mit mindestens einem solchen sensor
EP2840370A1 (de) Bolometrischer Detektor mit Kompensationsbolometer mit verstärkter Thermalisierung
EP0079282B1 (de) Verfahren und Vorrichtung zum Schnellmessen der Energie und Anwendung beim Messen der Energie eines Pulslasers
EP0125177B1 (de) Temperaturkompensierter Quartzschwingkreis
US4551425A (en) Pyroelectric gas sensor
EP0540111B1 (de) Hochfrequenz akustisches Rheometer, und dieses Rheometer verwendende Vorrichtung zur Messung der Viskosität eines Fluides
EP0794415A1 (de) Kontaktloses Temperaturmessgerät
EP2209305B1 (de) Vorrichtung zur Erkennung von elektromagnetischer Strahlung
Christofides Thermal wave photopyroelectric characterization of advanced materials: state of the art
Ding-Quan et al. Measurement applications based on pyroelectric properties of ferroelectric polymers
US20060104319A1 (en) Device for reflecting and detecting electromagnetic radiation
EP1944595B1 (de) Mikrosystem für die Druckmessung eines Gases
Bao et al. A heat transfer analysis for quartz microresonator IR sensors
US3531989A (en) Transient heat transfer gauge
Pelah et al. Differential calorimeter for measurement of absorbed energy in laser‐produced plasmas
Norkus et al. A 256-pixel pyroelectric linear array with new black coating
EP0463938A1 (de) Vorrichtung zur fotothermalen Untersuchung dünner Materialien
Edwards et al. A wide-range monitor system for laser beam profiles

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Designated state(s): BE DE GB NL

17P Request for examination filed

Effective date: 19831005

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): BE DE GB NL

REF Corresponds to:

Ref document number: 3272608

Country of ref document: DE

Date of ref document: 19860918

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed
PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: BE

Payment date: 19891024

Year of fee payment: 8

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 19891028

Year of fee payment: 8

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: NL

Payment date: 19891130

Year of fee payment: 8

Ref country code: GB

Payment date: 19891130

Year of fee payment: 8

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Effective date: 19901105

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Effective date: 19901130

BERE Be: lapsed

Owner name: COMMISSARIAT A L'ENERGIE ATOMIQUE ETABLISSEMENT D

Effective date: 19901130

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Effective date: 19910601

GBPC Gb: european patent ceased through non-payment of renewal fee
NLV4 Nl: lapsed or anulled due to non-payment of the annual fee
PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Effective date: 19910801